Oxygen Precipitation in Heavily Phosphorus-doped Czochralski Silicon (Englisch)
- Neue Suche nach: Zeng, Y.
- Neue Suche nach: Yang, D.
- Neue Suche nach: Ma, X.
- Neue Suche nach: Zhang, X.
- Neue Suche nach: Lin, L.
- Neue Suche nach: Que, D.
- Neue Suche nach: Zeng, Y.
- Neue Suche nach: Yang, D.
- Neue Suche nach: Ma, X.
- Neue Suche nach: Zhang, X.
- Neue Suche nach: Lin, L.
- Neue Suche nach: Que, D.
In:
International Semiconductor Technology Conference; ISTC/CSTIC 2009
1
;
1001-1012
;
2009
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ISBN:
- Aufsatz (Konferenz) / Print
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Titel:Oxygen Precipitation in Heavily Phosphorus-doped Czochralski Silicon
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Beteiligte:
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Kongress:International Semiconductor Technology Conference; ISTC/CSTIC 2009 ; 2009
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Erschienen in:ECS TRANSACTIONS ; 18, 1 ; 1001-1012
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Verlag:
- Neue Suche nach: Curran
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Erscheinungsort:Red Hook
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Erscheinungsdatum:01.01.2009
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Format / Umfang:12 pages
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Anmerkungen:Includes bibliographical references
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ISBN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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Microdot Epoxy Stamping Process Qualification for Substrate-Based Optocoupler BGA PackagingLivelo, E.I. / Rojas, R.V. et al. | 2009
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Cu2 Process Development For Cost Effective SOT PackageSoh, Y. / Lim, T. et al. | 2009
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Enabling Technology in Thin Wafer DicingVan Borkulo, J. / Evertsen, R. / Hendriks, R. et al. | 2009
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Growth and Electrical Characterization of Horizontally Aligned CNTsSantini, C. / Cott, D.J. / Negreira, A.R. / Sanseverino, S.R. / De Gendt, S. / Vereecken, P.M. et al. | 2009
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Fine Pitch Transfer and Join (T&J) From MCM to 3DIYu, R.R. et al. | 2009
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Exploratory NEMS-CMOS Hybrid Devices for Post CMOS EraLee, B. et al. | 2009
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Evaluation of InAs QWFET for Low Power Logic ApplicationsChang, E. / Kuo, C. / Hsu, H. / Miyamoto, Y. / Chang, C. / Wu, C. et al. | 2009
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Translucent Polymer Solar CellsNg, G. / Vijila, C. / Goh, W. / Zhu, F. et al. | 2009
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PV Efficiency Improved Large-area Dye-sensitized Solar CellsYin, H. / Zhang, T. / Wang, X. / Liu, L. / Wang, Y. / Liu, X. / Kang, J. et al. | 2009
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Influence of Sulfurization Temperature on Structure and Semiconducting Properties of SnxSy Thin FilmsCheng, S. / Peng, S. / Yang, Y. et al. | 2009
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Thin Film InP Epitaxy on Si (001) Using Selective Aspect Ratio TrappingLi, J. / Bai, J. / Hydrick, J.M. / Fiorenza, J.G. / Major, C. / Carroll, M. / Shellenbarger, Z. / Lochtefeld, A. et al. | 2009
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Sub-micrometer Organic Field Effect TransistorsShang, L. / Liu, M. / Ji, Z. / Liu, G. / Liu, X. / Liu, J. / Wang, H. et al. | 2009
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Resistive Switching Characteristics of MnOx-based ReRAMZhang, S. / Long, S. / Liu, Q. / Wang, Q. / Liu, M. et al. | 2009
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FEA Based Design Optimization of Exciting Sensitivity for Micromachined Beam Ultrasonic TransducerHan, Y. / Cai, C. / Liu, Y. / Salo, A. / Xu, L. / Xie, J. et al. | 2009
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Polysilicon Production: Reaction Engineering and Scaleup IssuesRamachandran, P.A. et al. | 2009
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Heat and Impurity Transfer Mechanisms of Czochralski and Directional Solidification ProcessesKakimoto, K. / Chen, X. / Liu, L.J. / Miyazawa, H. / Matsuo, H. / Nakano, S. / Hisamatsu, S. / Kangawa, Y. et al. | 2009
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Global Simulation of CZ and FZ Bulk Crystal Growth: From Quasi-Dynamic and Dynamic Modelling to Process Control and Crystal Quality OptimizationDupret, F. / Rolinsky, R. / Wu, L. / Loix, F. / De Potter, A. / Van den Bogaert, N. / Regnier, V. et al. | 2009
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Agglomeration of Vacancies into Voids and Oxide Particles in Silicon CrystalsVoronkov, V.V. et al. | 2009
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Atomistic-to-Continuum Modeling of Defect-Related Phenomena in Silicon CrystalsSinno, T. / Kapur, S.S. et al. | 2009
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Challenges in Wafering Processes for Semiconductor and Solar WafersErk, H. et al. | 2009
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Prediction of Melt-Crystal Interface Shape and Melt Convection in a Largescale CZ-Si Growth System Using RANS and LES Methods in Global SimulationLiu, X. / Liu, L. / Li, Z. / Wang, Y. / Kakimoto, K. et al. | 2009
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Calibration of the Enthalpy-Porosity Based Method for CZ Silicon GrowthDai, B. / Devulapalli, B. / Gunjalb, P. / Kulkarni, M. et al. | 2009
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Advances in the Understanding of Oxide Precipitate Nucleation in SiliconKissinger, G. / Kot, D. / Akhmetov, V. / Sattler, A. / Mueller, T. / Von Ammon, W. et al. | 2009
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Oxygen Precipitation in Heavily Phosphorus-doped Czochralski SiliconZeng, Y. / Yang, D. / Ma, X. / Zhang, X. / Lin, L. / Que, D. et al. | 2009
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Interactions of Cu and Ni Impurities with Vacancy-related Point Defects in Czochralski-grown Si CrystalsMarkevich, V. / Peaker, A.R. / Medvedeva, I.F. / Gusakov, V.E. / Murin, L.I. / Svensson, B.G. et al. | 2009
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Effect of Oxygen Precipitates in Annealed Electron Irradiated Czochralski SiliconChen, G. / Ma, X. / Bai, Y. / Cai, L. / Li, Y. et al. | 2009
- 1023
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Modeling Multi-Crystalline Silicon Growth in Directional Solidification SystemsDevulapalli, B. / Kulkarni, M. et al. | 2009
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Simulation Analysis of Point Defects in Silicon Ingot during Unidirectional Solidification Process for Solar CellsChen, X. / Nakano, S. / Liu, L. / Kakimoto, K. et al. | 2009
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Distributions of Light Elements and Their Precipitations Grown by Unidirectional Solidification Method in Multicrystalline Silicon for Solar CellsMatsuo, H. / Hisamatsu, S. / Kangawa, Y. / Kakimoto, K. et al. | 2009
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Numerical Simulation of Thermal Distribution during the Directional Solidification of Polycrystalline Silicon IngotWu, D. / Sun, W. / Hao, Q. / Zhao, J. / Liu, C. et al. | 2009
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Performance Limitations of mc-Si Solar Cells Caused by Defect ClustersSopori, B. / Rupnowski, P. / Mehta, V. / Budhraja, V. / Johnston, S. / Call, N. / Mountinho, H. / Al-Jassim, M. / Shaikh, A. / Seacrist, M. et al. | 2009
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Cluster Ion Implantation System: Claris for Beyond 45nm Device Fabrication (Ii)Tanjyo, M. / Hamamoto, N. / Nagayama, T. / Umisedo, S. / Koga, Y. / Maehara, N. / Une, H. / Matsumoto, T. / Nagai, N. / Borland, J.O. et al. | 2009
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Silicon Etching Technology Using Inductively Coupled Plasma Suitable for Fabrication of Silicon Nanowires and Ring ResonatorsZhou, J. / Shen, H. / Zhang, H. / Liu, X. et al. | 2009
- 1071
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The Synthesization of Si Nanocrystals Embedded in HfO2 Matrix by Electron Beam co-Evaporation TechniqueLi, W. / Jia, R. / Chen, C. / Liu, M. / Li, H.F. / Zhu, C.X. / Long, S. et al. | 2009
- 1075
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New Structure Improves Copper Phthalocyanine (CuPc) Order and Decrease the Device ResistanceLiu, G. / Liu, M. / Shang, L. / Ji, Z. / Liu, X. / Wang, H. / Liu, J. et al. | 2009
- 1081
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Investigating the Effects of Different Gate Biasing Voltages and Temperatures on RadFETsTang, H. / Liu, Y. / Wang, Y. / Wang, J. / Jin, Y. et al. | 2009