FBAR Resonators with Sufficient High Q for RF Filter Implementation (Englisch)
- Neue Suche nach: Khine, L.
- Neue Suche nach: Wong, L.Y.L.
- Neue Suche nach: Soon, J.B.W.
- Neue Suche nach: Tsai, M.L.J.
- Neue Suche nach: Khine, L.
- Neue Suche nach: Wong, L.Y.L.
- Neue Suche nach: Soon, J.B.W.
- Neue Suche nach: Tsai, M.L.J.
- Neue Suche nach: Khine, L.
- Neue Suche nach: Tsai, J.M.
In:
NEMS/MEMS and micro TAS; NEMS/MEMS technology and devices; Materials for advanced technologies (ICMAT 2011)
;
70-73
;
2011
-
ISBN:
-
ISSN:
- Aufsatz (Konferenz) / Print
-
Titel:FBAR Resonators with Sufficient High Q for RF Filter Implementation
-
Beteiligte:Khine, L. ( Autor:in ) / Wong, L.Y.L. ( Autor:in ) / Soon, J.B.W. ( Autor:in ) / Tsai, M.L.J. ( Autor:in ) / Khine, L. / Tsai, J.M.
-
Kongress:Symposium, NEMS/MEMS and micro TAS; NEMS/MEMS technology and devices; Materials for advanced technologies (ICMAT 2011) ; 2011 ; Singapore
-
Erschienen in:ADVANCED MATERIALS RESEARCH -ZUG- ; 254 ; 70-73
-
Verlag:
- Neue Suche nach: Trans Tech
-
Erscheinungsort:Durnten-Zurich
-
Erscheinungsdatum:01.01.2011
-
Format / Umfang:4 pages
-
Anmerkungen:Includes bibliographical references and indexes
-
ISBN:
-
ISSN:
-
Medientyp:Aufsatz (Konferenz)
-
Format:Print
-
Sprache:Englisch
-
Schlagwörter:
-
Datenquelle:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
-
Challenges and Solutions for Fabricating Isolation Trenches for High Aspect Ratio SensorsAgarwal, R. / Xie, J. / Lau, K.H. / Sampath, P.K. / Ranganathan, N. / Singh, J. / Tsai, M.L.J. et al. | 2011
- 5
-
Thick-Film Deposition of High-Viscous Liquid PhotopolymerAlvankarian, J. / Damghanian, M. / Majlis, B.Y. et al. | 2011
- 9
-
Design and Modeling of Platinum Thin Film Microheater for High Temperature Microtensile Test ApplicationAng, W.C. / Lei, M.I. / Tsai, J.M.L. / Leong, K.C. / Tan, C.S. et al. | 2011
- 13
-
Optimization of On-Chip Interface Circuit for MEMS Sensor Based on Micro-CantileverBais, B. / Loh, L.W. / Rahim, R.A. / Majlis, B.Y. et al. | 2011
- 17
-
Microfabrication of a Planar Helix with Straight-Edge Connections Slow-Wave StructureChua, C.S. / Tsai, M.L.J. / Tang, M. / Aditya, S. / Shen, Z.X. et al. | 2011
- 21
-
Separation Gap Estimation in Dynamic Systems Actuated by Casimir ForceCui, S. / Soh, Y.C. et al. | 2011
- 25
-
A Static Micromixer Inspired from Fractal-Like Natural Flow SystemsBahadorimehr, A.R. / Damghanian, M. / Majlis, B.Y. et al. | 2011
- 29
-
AlN Actuator for Tunable RFMEMS CapacitorFernando, S. / Min, T. / Khine, L. / Agarwal, R. / Lau, K.H. / Soon, J.B.W. / Tsai, M.L.J. et al. | 2011
- 34
-
GEMS: A MEMS-Based Way for the Innervation of MaterialsMacQueen, M.O. / Mueller, J. / Fu, D.C. / Gebeshuber, I.C. et al. | 2011
- 38
-
On the Way to the Bionic Man: A Novel Approach to MEMS Based on Biological Sensory SystemsKarman, S.B. / MacQueen, M.O. / Matin, T.R. / Diah, S.Z.M. / Mueller, J. / Yunas, J. / Makaruk, T. / Gebeshuber, I.C. et al. | 2011
- 42
-
Design Consideration of Membrane Structure for Thermal Actuated MicropumpHamid, N.A. / Yunas, J. / Bahadorimehr, A.R. / Majlis, B.Y. et al. | 2011
- 46
-
Developing High Sensitivity Biomass Sensor Using Lame Mode Square ResonatorHeidari, A. / Yoon, Y.J. / Park, W.T. / Tsai, M.L.J. et al. | 2011
- 50
-
Fabrication of a Peltier Device Based on InSb and SbTe Thin FilmsIshii, T. / Homma, H. / Yamaguchi, S. et al. | 2011
- 54
-
Gapfill Study of Polyimides for MEMS ApplicationsJang, S.L.H. / Tan, W.M. / Mao, Y.J. / Murthy, R. / Ranganathan, N. et al. | 2011
- 58
-
A Simple Method for Quantification of Beta-Amyloid Using the Photo-Sensitive Thin Film TransistorKim, K.S. / Ju, J.I. / Cho, J.M. / Sung, H.K. / Song, K.B. et al. | 2011
- 62
-
Wireless Imaging Module Assembly and Integration for Capsule Endoscopic ApplicationsKatayan, R. / Win, S.S. / Lim, R.Q. / Vaidyanathan, K. et al. | 2011
- 66
-
Low Cost and High Resolution X-Ray Lithography for Fabrication of MicroactuatorKerdlapee, P. / Wisitsoraat, A. / Leksakul, K. / Phokharatkul, D. / Phatthanakun, R. / Tuantranont, A. et al. | 2011
- 70
-
FBAR Resonators with Sufficient High Q for RF Filter ImplementationKhine, L. / Wong, L.Y.L. / Soon, J.B.W. / Tsai, M.L.J. et al. | 2011
- 74
-
Evaluation of Piezoelectric Properties of AlN Using MEMS ResonatorsKhine, L. / Wong, L.Y.L. / Soon, J.B.W. / Tsai, M.L.J. et al. | 2011
- 78
-
Discrete 3D T-Shaped Electrode Arrays for Moving Liquid by AC Electro-OsmosisGuo, X. / Lai, Y.J. / Xie, K.Y. / Campbell, R.J. et al. | 2011
- 82
-
Silicon Probes for Cochlear Auditory Nerve Stimulation and MeasurementLawand, N.S. / French, P.J. / Briaire, J.J. / Frijns, J.H.M. et al. | 2011
- 86
-
Focused Ion Beam Fabricated Polystyrene-Platinum Thermal MicroactuatorLee, C.C. / Alici, G. / Spinks, G. / Proust, G. / Cairney, J.M. et al. | 2011
- 90
-
Lead-Free BSZT/Epoxy 1-3 Composites for Ultrasonic Transducer ApplicationsLee, S.T.F. / Lam, K.H. / Zhang, X.M. / Chan, H.L.W. et al. | 2011
- 94
-
Design, Fabrication and Characterization of Ultra Miniature Piezoresistive Pressure Sensors for Medical ImplantsLim, L.S. / Park, W.T. / Lou, L. / Feng, H.H. / Singh, P. et al. | 2011
- 99
-
Tagging for Capsule Endoscopy LocalizationLim, R.Q. / Katayan, R. / Win, S.S. / Vaidyanathan, K. et al. | 2011
- 103
-
The Negative π/2 Phase Shift of Total Reflect LightLiu, B. / Chen, L.X. / Sun, X. / Dong, R.C. / Jie, X.G. / Zhu, S.M. et al. | 2011
- 107
-
High Topography Polyimide CMP ProcessMao, Y.J. / Chen, G.G. / Murthy, R. / Tan, S.K.E. et al. | 2011
- 111
-
Hydridosilane Modification of Metals: An Exploratory StudyMatisons, J. / Arkles, B. / Kin, Y.M. / Pon, Y.L. / Eisenbraun, E. / Kaloyeros, A. et al. | 2011
- 115
-
Multi Degree-of-Freedom Micromotor Utilizing an Electrothermal Actuator Array and a Spherical RotorMu, X.J. / Sun, W. / Feng, H.H. / Zhou, G.Y. / Chau, F.S. et al. | 2011
- 120
-
Area-Selective Polymer Deposition on Micro-Area Framed by Trenches with Falling Liquid FilmMurakami, S. / Ikehara, T. / Konno, M. / Maeda, R. / Mihara, T. et al. | 2011
- 124
-
A New Peltier Device with a Coaxial ThermocoupleMurayama, Y. / Homma, H. / Yamaguchi, S. et al. | 2011
- 128
-
A Portable Thermal Cycler Using a PN Sandwich-Structure Peltier DeviceOkuwaki, Y. / Yamaguchi, S. et al. | 2011
- 132
-
Direct Writing of Channels for Microfluidics in Silica by MeV Ion Beam LithographyPuttaraksa, N. / Napari, M. / Chienthavorn, O. / Norarat, R. / Sajavaara, T. / Laitinen, M. / Singkarat, S. / Whitlow, H.J. et al. | 2011
- 136
-
Studies on Quasi-Static Au-to-Au Ohmic Contact for MEMS SwitchesQiu, H.D. / Wang, H. et al. | 2011
- 140
-
Double-Step Plasma Etching for SiO~2 Microcantilever ReleaseRahim, R.A. / Bais, B. / Majlis, B.Y. et al. | 2011
- 144
-
Design, Fabrication and Characterization of ZnO Based Thin Film Bulk Acoustic ResonatorsRathod, S. / Singh, A.V. / Chandra, S. / Koul, S.K. et al. | 2011
- 148
-
Development of Multiple-Step SOI DRIE Process for Superior Notch Reduction at Buried OxideSampath, P.K. / Safari, M.K.B. / Ng, L.K. / Nagarajan, R. et al. | 2011
- 152
-
Study of Dry and Wet Oxide Etching for MOSFET-Based MEMS DevicesSharma, V. / Khanna, V.K. / Karbelkar, S.N. et al. | 2011
- 155
-
Oscillating Micromixers on a Compact DiscShih, C.H. / Yen, D. et al. | 2011
- 159
-
Robust Sequential Flow Controls on the Centrifugal PlatformShih, C.H. / Wu, H.J. / Chen, W.H. et al. | 2011
- 163
-
Fabrication of Micro-Cantilevers Using RF Magnetron Sputtered Silicon Carbide FilmsSingh, A.V. / Chandra, S. / Bose, G. et al. | 2011
- 167
-
Effect of Temperature on the Electrical and Gas Sensing Properties of Polyaniline and Multiwall Carbon Nanotube Doped Polyaniline Composite Thin FilmsSrivastava, S. / Kumar, S. / Jain, V.K. / Vijay, Y.K. et al. | 2011
- 171
-
Fabrication of MEMS Based Microspeaker Using Bulk Micromachining TechniqueSugandi, G. / Majlis, B.Y. et al. | 2011
- 175
-
Simulation Study of Side-by-Side Spiral Coil Design for MicromagnetometerSulaiman, N. / Majlis, B.Y. et al. | 2011
- 179
-
Fabrication and Performance Characterization of a Disposable Micropump Actuated by Piezoelectric-DiscSun, L.L. / Wang, S.Z. / Li, L.N. / Guo, J.L. / Roseli, S.F.B. et al. | 2011
- 183
-
Proposal and Fabrication of a Temperature-Field Stage with an NN-Type Peltier DeviceSuzuki, N. / Homma, H. / Yamaguchi, S. et al. | 2011
- 187
-
Effect of Substrate Temperature on Properties of Silicon Nitride Films Deposited by RF Magnetron SputteringTiwari, R. / Chandra, S. et al. | 2011
- 191
-
On-Chip Trapping and Characterization of Cryptosporidium Using Surface Coated ITO-PDMS Bonded ChipsUnni, H.N. / Hartono, D. / Lim, K.M. et al. | 2011
- 195
-
A Novel Micromechanical Resonator Using Two-Dimensional Phononic Crystal SlabWang, N. / Hsiao, F.L. / Palaniapan, M. / Tsai, M.L.J. / Soon, J.B.W. / Kwong, D.L. / Lee, C.K. et al. | 2011
- 199
-
A New Robust Four Degree-of-Freedom Gyroscope DesignKang, K.L. / Xie, J. / Tsai, M.L.J. et al. | 2011
- 203
-
Three-Axis Capacitive SOI Accelerometer Using Combination of In-Plane and Vertical Comb ElectrodesXie, J. / Agarwal, R. / Lau, K.H. / Liu, Y.H. / Tsai, M.L.J. et al. | 2011