Poly-Silicon Wet Removal for Replacement Gate Integration Scheme: Impact of Process Parameters on the Removal Rate (Englisch)
- Neue Suche nach: Sebaai, F.
- Neue Suche nach: Veloso, A.
- Neue Suche nach: Claes, M.
- Neue Suche nach: Devriendt, K.
- Neue Suche nach: Brus, S.
- Neue Suche nach: Absil, P.
- Neue Suche nach: Mertens, P.W.
- Neue Suche nach: de Gendt, S.
- Neue Suche nach: Sebaai, F.
- Neue Suche nach: Veloso, A.
- Neue Suche nach: Claes, M.
- Neue Suche nach: Devriendt, K.
- Neue Suche nach: Brus, S.
- Neue Suche nach: Absil, P.
- Neue Suche nach: Mertens, P.W.
- Neue Suche nach: de Gendt, S.
- Neue Suche nach: Mertens, P.
- Neue Suche nach: Meuris, M.
- Neue Suche nach: Heyns, M.
In:
Ultra clean processing of semiconductor surfaces; (UCPSS)
;
53-56
;
2012
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ISBN:
-
ISSN:
- Aufsatz (Konferenz) / Print
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Titel:Poly-Silicon Wet Removal for Replacement Gate Integration Scheme: Impact of Process Parameters on the Removal Rate
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Beteiligte:Sebaai, F. ( Autor:in ) / Veloso, A. ( Autor:in ) / Claes, M. ( Autor:in ) / Devriendt, K. ( Autor:in ) / Brus, S. ( Autor:in ) / Absil, P. ( Autor:in ) / Mertens, P.W. ( Autor:in ) / de Gendt, S. ( Autor:in ) / Mertens, P. / Meuris, M.
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Kongress:International Symposium; 10th, Ultra clean processing of semiconductor surfaces; (UCPSS) ; 2010 ; Ostende, Belgium
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Erschienen in:DIFFUSION AND DEFECT DATA PART B SOLID STATE PHENOMENA ; 187 ; 53-56
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Verlag:
- Neue Suche nach: Trans Tech
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Erscheinungsort:Durnten-Zurich
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Erscheinungsdatum:01.01.2012
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Format / Umfang:4 pages
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ISBN:
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ISSN:
-
Medientyp:Aufsatz (Konferenz)
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Format:Print
-
Sprache:Englisch
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Schlagwörter:
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Datenquelle:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
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Quality Control of Composite Material Pipes by Infrared ThermographyMihai, A. / Stefanescu, F. / Neagu, G. / Mihai, C.P. et al. | 2012
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Order Estimation of Physical Processes in Dynamics of Steam-Water Mixed Spray Cleaning TechniqueWatanabe, M. / Sanada, T. / Mashiko, T. / Hayashida, A. et al. | 2012
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Characterization of the Microstructure and Rheological Behavior of Al-4wt%Si-2.5wt%Cu Alloy Produced by Direct Chill Casting and Electromagnetic StirringTorres, L.V. / Zoqui, E.J. et al. | 2013
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Thermo-Mechanical Modelling of Jointing Process by Friction Stir Welding of Aluminium-Based Composite MaterialsPop-Calimanu, M. / Fleser, T. et al. | 2012
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Thermomechanical Resist Removal-Cleaning System Using Cryogenic Micro-Slush JetIshimoto, J. / Tan, D. / Ohtake, H. / Samukawa, S. et al. | 2012
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Triangulation 3D Scanning Method in Biomedical ReconstructionComsa, A. / Maniu, I. / Lovasz, E.C. et al. | 2010
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Modeling of Shape Memory Alloy Actuators Using Matlab and dSpace PlatformCosma, I.A. / Maties, V. / Lapusan, C. / Mindru, R.C. et al. | 2010
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Experimental Investigation on 7075 Aluminium Response during ThixoextrusionNeag, A. / Favier, V. / Pop, M. / Bigot, R. et al. | 2013
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Uniformity of Particle Removal by Aerosol SprayXu, X.M. / Pacco, A. / Wada, M. / Leunissen, L. / Struyf, H. / Mertens, P.W. et al. | 2012
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Drilling-Induced Damage in CFRP Laminates: Experimental and Numerical AnalysisPhadnis, V. / Makhdum, F. / Roy, A. / Silberschmidt, V.V. et al. | 2012
- 153
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Development of a Novel Advanced Spray Technology Based on Investigation of Droplet Energy and Pattern DamageTanaka, T. / Sato, M. / Kobayashi, M. / Shirakawa, H. et al. | 2012
- 155
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The Heat Treatment of Rheo-High Pressure Die Cast Al-Zn-Mg Alloy 7017Moller, H. / Govender, G. et al. | 2013
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Workspace Analysis of the 6 Degrees of Freedom PARTNER Parallel RobotCsiszar, A. / Brisan, C. et al. | 2010
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Experimental Investigation and Numerical Modeling Fracture Processes under Mode II in Concrete Composites Containing Fly-Ash Additive at early AgeGolewski, G.L. / Sadowski, T. et al. | 2012
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Comparison of Gold Particle Removal from Fused Silica and Thermal Oxide Surfaces in Dilute Ammonium Hydroxide SolutionsPandit, V. / Keswani, M. / Siddiqui, S. / Raghavan, S. et al. | 2012
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Fusion Welding of Rheocast Semi-Solid Metal (SSM) Processed Aluminium Alloy 7017Toit, M.d. / Letsoalo, P. / Moller, H. et al. | 2013
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Path Following System for Cooperative Mobile RobotsDinulescu, I. / Popescu, D. / Nitulescu, M. / Predescu, A. et al. | 2010
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The Influence of the Angle of Incidence in Megasonic CleaningBrems, S. / Hauptmann, M. / Camerotto, E. / Xu, X.M. / de Gendt, S. / Heyns, M.M. / Mertens, P.W. et al. | 2012
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Numerical Modelling of Thermally Bonded Nonwovens: Continuous and Discontinuous ApproachesDemirci, E. / Hou, X.N. / Acar, M. / Pourdeyhimi, B. / Silberschmidt, V.V. et al. | 2012
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Property and Quality Optimization of Laser Welded Rheo-Cast F357 Aluminum AlloyTheron, M. / Burger, H. / Ivanchev, L. / van Rooyen, C. et al. | 2013
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The Design Approach of Human Prostheses and Intelligent Robot End Effectors Based on Mechatronic PhilosophyDolga, V. / Dolga, L. et al. | 2010
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Simultaneous Removal of Particles from Front and Back Sides by a Single Wafer Backside Megasonic SystemPark, C.G. / Sohn, H.S. et al. | 2012
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Ultrasonically Assisted Drilling of Carbon Fibre Reinforced PlasticsMakhdum, F. / Norddin, D.N.P. / Roy, A. / Silberschmidt, V.V. et al. | 2012
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The Importance of Cavitation Hysteresis in Megasonic CleaningCamerotto, E. / de Gendt, S. / Hauptmann, M. / Shamiryan, D. / Heyns, M.M. / Mertens, P.W. / Brems, S. et al. | 2012
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Design, Modeling and Control of an Omni-Directional Mobile RobotDoroftei, I. / Stirbu, B. et al. | 2010
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The Heat Treatment of Rheo-High Pressure Die Cast Al-Cu-Mg-Ag Alloy 2139Moller, H. / Govender, G. et al. | 2013
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Thermoactivated Pinning - A Novel Joining Technique for Thermoplastic CompositesHufenbach, W.A. / Kupfer, R. / Hornig, A. et al. | 2012
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Control of Sonoluminescence in Carbon Dioxide Containing Di Water at near Neutral pH ConditionsKumari, S. / Keswani, M. / Singh, S.K. / Beck, M. / Leibscher, E. / Deymier, P. / Raghavan, S. et al. | 2012
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Intelligent Robot with Microcontroller for Obstacles AvoidingDragomir, F. / Patic, P.C. / Dragomir, O.E. et al. | 2010
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Globule-Globule Interactions during Deformation in Semi-Solid Al-Cu Using Time-Resolved X-Ray TomographyKareh, K.M. / Lee, P.D. / Gourlay, C.M. et al. | 2013
- 181
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Development of a Megasonic System for Cleaning Flat Panel DisplayKim, H.S. / Lee, Y.L. / Lim, E.S. / Elimelech, M. et al. | 2012
- 185
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Designing of Virtual Reality Environments for Mobile Robots ProgrammingDuguleana, M. / Barbuceanu, F.G. et al. | 2010
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Stroboscopic Schlieren Study of Bubble Formation during Megasonic AgitationHauptmann, M. / Brems, S. / Camerotto, E. / Mertens, P.W. / Heyns, M.M. / de Gendt, S. / Glorieux, C. / Lauriks, W. et al. | 2012
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In Situ Study of the Altering Globule Packing-Density during Semisolid Alloy DeformationGourlay, C.M. / Nagira, T. / Uesugi, K. / Yasuda, H. et al. | 2013
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Considerations on Outliers in Medical Sciences and Materials CharacterizationCucuruz, L.R. / Nicoara, M. / Raduta, A. / Locovei, C. / Cucuruz, M. / Tatu, F. et al. | 2012
- 191
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Determination of Quantity and Localization of Liquid in the Semi-Solid State Using both 3D X-Ray Microtomography and 2D Techniques for Steel ThixoformingGu, G.C. / Pesci, R. / Becker, E. / Langlois, L. / Bigot, R. et al. | 2013
- 191
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Fuzzy Reasoning in Mobile Robots ControlDumitriu, A. et al. | 2010
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Low-k Integration Using Metallic Hard MasksJoubert, O. / Posseme, N. / Chevolleau, T. / David, T. / Darnon, M. et al. | 2012
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Estimation of the Constitutive Law by Dual Small Punch Test and Instrumented IndentationGuillemot, G. / van Gorp, A. / Coorevits, T. / Iost, A. et al. | 2012
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Properties of Thixocast Spring Steel RatchetsBunck, M. / Buhrig-Polaczek, A. et al. | 2013
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Mobility and Direct Kinematics of Parallel Manipulators RSS Type - 3 ActuatorsFilip, V. / Antonescu, O. et al. | 2010
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Characterization of Low-k Dielectric Etch Residue on the Sidewall by Chemical Force MicroscopeKim, T.G. / Le, Q.T. / Suhard, S. / Lux, M. / Vereecke, G. / Claes, M. / Struyf, H. / de Gendt, S. / Mertens, P.W. / Heyns, M.M. et al. | 2012
- 199
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Topography Imaging of Material Surfaces Using Atomic Force MicroscopeFlorea, C. / Berdich, K. / Dreucean, M. et al. | 2012
- 201
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Optimized Wetting Behavior of Water-Based Cleaning Solutions for Plasma Etch Residue Removal by Application of SurfactantsAhner, N. / Zimmermann, S. / Schaller, M. / Schulz, S.E. et al. | 2012
- 203
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The Analysis of the Weaving Wire' Mechanism Using CosmosMotion under SolidWorksFilip, V. / Negrea, A. / Dobra, G. et al. | 2010
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The Influence of Reheating Profile on the Final Microstructure of the Semi-Solid S600 and K100 Tool SteelsPouyafar, V. / Sadough, S.A. / Hosseini, F. / Jabbari, A. et al. | 2013
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Size Effect on Fracture Toughness of Rigid Polyurethane FoamsLinul, E. / Marsavina, L. / Sadowski, T. / Knec, M. et al. | 2012
- 207
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Modification of Post-Etch Residues by UV for Wet RemovalLe, Q.T. / Drieskens, F. / Conard, T. / Lux, M. / de Marneffe, J.F. / Struyf, H. / Vereecke, G. et al. | 2012
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Dynamical Analysis of the 2-Dimensional Tentacle RobotFlorescu, M. / Petrisor, A. / Coman, D. et al. | 2010
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Effect of Recrystallization and Partial Melting Method on Microstructural Evolution of SKD61 Tool Steel in Semi-Solid StateYi, M. / Sugiyama, S. / Yanagimoto, J. et al. | 2013
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``Damage Free'' Cleaning for Advanced BEOL InterconnectionsBroussous, L. / Courouble, K. / Richard, E. / Pernel, C. / Loup, V. / Levy, D. et al. | 2012
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Viscoelastic Properties of Semi-Crystalline Thermoplastic Polymers: Dynamic Analysis and CreepSerban, D.A. / Hanson, H. / Marsavina, L. / Silberschmidt, V.V. et al. | 2012
- 215
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A Descum Review for Cleaning Surfaces in Polymer Embedded Process FlowsJamieson, G. / Gerets, C. / Duval, F.C. / Pham, N.P. / Iker, F. / Funaya, T. / Boullart, W. et al. | 2012
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Trajectory Planning for Mobile Car-Like Robot Navigation in an Extra-Road EnvironmentGall, R. / Troster, F. / Mogan, G. / Luca, R. et al. | 2010
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Micro-Compression Test of Thixoformed AusteniteMasek, B. / Aisman, D. / Jirkova, H. / Wurster, S. et al. | 2013
- 219
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Microstructure of Thixoformable Hypoeutectic Cast IronZoqui, E.J. / Roca, A.S. / Fals, H.D.C. et al. | 2013
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Influence of Photoresist and BARC Selection on the Efficiency of a Post-Etch Wet Strip in BEOL ApplicationsKesters, E. / Lux, M. / Pittevils, J. / Baeyens, J. / Vereecke, G. / Baerts, C. / Shamiryan, D. / Struyf, H. et al. | 2012
- 219
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Indentation in F.C.C. Single CrystalsZahedi, A. / Demiral, M. / Roy, A. / Babitsky, V.I. / Silberschmidt, V.V. et al. | 2012
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A Fuzzy Model for Establishing Two Main Parameters of GTAW ProcessGorghiu, G. / Patic, P.C. / Carstoiu, D. et al. | 2010
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ESH Friendly Solvent for Stripping Positive and Negative Photoresists in 3D-Wafer Level Packaging and 3D-Stacked IC ApplicationsSuhard, S. / Claes, M. / Civale, Y. / Nolmans, P. / Tezcan, D.S. / Travaly, Y. et al. | 2012
- 225
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R-HPDC of Magnesium AlloysCurle, U.A. / Wilkins, J.D. / Govender, G. et al. | 2013
- 226
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Experimental Study of Bimaterial Shear Strength and Strain Concentrations by Iosipescu Based Test Using Digital Image Correlation SystemSadowski, T. / Knec, M. et al. | 2012
- 227
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Tungsten Oxidation Kinetic after Wet Cleaning: XPS and ToF-SIMS CharacterizationPipia, F. / Votta, A. / Ravizza, E. / Spadoni, S. / Grasso, S. / Borsari, S. / Lazzari, C. / Alessandri, M. et al. | 2012
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Kinematic-Dimensional Analysis of Parallel Robot Used for OrientationItul, T.P. / Pisla, D.L. et al. | 2010
- 231
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A Comparison between BTA and Amidoximes and their Interactions with Copper SurfacesJethwa, S. / Tee, D.W. / Francis, S.M. / Grillo, F. / Richardson, N.V. / Reid, C. / McGhee, L. / Lee, W.M. et al. | 2012
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Corrosion Behaviour of High Pressure Die-Cast and Semi-Solid Cast AZ91, AM60 and AM50 AlloysMariani, S.U. / da Forno, A. / Bestetti, M. et al. | 2013
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Modeling and Prediction of Mechanical Behavior of Plastic Gears in Simulated Wear SituationKoffi, D. / Kassegne, K.A. / Wotodzo, K.F. / Bedja, K. et al. | 2012
- 235
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Electrochemical, Physical, and Electrical Characterization of Two Clean Solutions for Cu PCMP CleanLi, Y.L. / Heylen, N. / Daviot, J. / Reid, C. / Leunissen, L. et al. | 2012
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Specialized Positioners and Manipulators for Robotic WeldingJoni, N. / Dobra, A. et al. | 2010
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Microstructural Evolution of AZ91D-1.5%Er during Semi-Solid Isothermal TreatmentXu, H.Y. / Ji, Z.S. / Wang, Z.Y. et al. | 2013
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Test Vehicle for Studying Thermal Conductivity of Die Attach Adhesives for High Temperature ElectronicsSlater, C. / Vecchio, F. / Maeder, T. / Ryser, P. et al. | 2012
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TiN Metal Hardmask Etch Residue Removal on Advanced Porous Low-k and Cu Device with Corner Rounding SchemeCui, H. / Claes, M. / Suhard, S. et al. | 2012
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Automation of Logistics Processes by Using a Universal ControlKirchheim, A. / Echelmeyer, W. et al. | 2010
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Effects of Thermal Losses on the Heating of a Multifunctional LTCC Module for Atomic Clock PackagingVecchio, F. / Maeder, T. / Slater, C. / Ryser, P. et al. | 2012
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Improved Cleaning Process for Etch Residue Removal in an Advanced Copper/Low-k Device without the Use of DMAC (Dimethylacetamide)Jung, C.K. / Joo, S.W. / Ryu, S.W. / Naghshineeh, S. / Lee, Y. / Han, J.W. et al. | 2012
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Study on Microstructural Evolution of Deformed Magnesium Alloy during Partial RemeltingChen, Q. / Zhao, G.Z. / Shu, D.Y. et al. | 2013
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Rapid Control Prototyping in Design Process of Mechatronic SystemsLapusan, C. / Maties, V. / Balan, R. / Hancu, O. et al. | 2010
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Aqueous Fluoride Residue Removers for 32 nm and beyond Copper Ultra Low- kappa TechnologiesWestwood, G. / Pigliucci, A. / Oszinda, T. / Leppack, S. / Schaller, M. et al. | 2012
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Finite-Element Analysis of Forces in Drilling of Ti-Alloys at Elevated TemperatureMuhammad, R. / Ahmed, N. / Shariff, Y.M. / Silberschmidt, V.V. et al. | 2012
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Investigation of Correlations between Shear History and Microstructure of Semi-Solid AlloysModigell, M. / Pola, A. / Suery, M. / Zang, C. et al. | 2013
- 253
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Development of Riding Robot System for Entertainment and Healthcare ServiceLim, M.S. / Park, H.B. / Lim, J.H. et al. | 2010
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Wet Clean Induce Pattern Collapse Mechanism StudyYang, C.C. / Ko, C.C. / Yang, H.O. / Chen, K.F. / Peng, Y.Y. / Liou, J.W. / Chou, C.C. / Tsai, H.Y. / Lin, K.C. / Jeng, S.M. et al. | 2012
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Durability Study of a Machine Shaft Based on the Material Behavior of 41Cr4 Steel Subjected to Rotating BendingKun, L. / Nes, C.S. / Dumitru, I. / Faur, N. et al. | 2012
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Microstructure and Mechanical Properties of Squeeze Cast Semi-Solid MaterialsGuo, H.M. / Yang, X.J. / Zhang, S.G. / Luo, L. et al. | 2013
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Self-Balanced Conco-Balancer Manipulator with Band MechanismLovasz, E.C. / Perju, D. / Dehelean, N. / Dehelean, L.M. / Maniu, I. / Moldovan, C. et al. | 2010
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Ultra-Fast In-Line Inspection for 3D SIC TSV Line - Bonding & ThinningGuittet, P.Y. / Markwort, L. / Savage, G. / Halder, S. / Jourdain, A. et al. | 2012
- 262
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Stress Evaluation by Neutron and Synchrotron RadiationLodini, A. / Benmarouane, A. et al. | 2012
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Squeeze Flow of Semi-Solid SlurriesAlexandrou, A.N. / Florides, G.C. / Georgiou, G.C. et al. | 2013
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Cleaning Requirement in the Thinning Module for 3D-Stacked IC (3D-SIC) IntegrationWostyn, K. / Zhao, M. / Cui, H.S. / Laermans, P. / Jourdain, A. / Verbinnen, G. / Struyf, H. / de Strycker, S. / Claes, M. / Travaly, Y. et al. | 2012
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Feature Based Mapping Procedure with Application on Simultaneous Localization and Mapping (SLAM)Luca, R. / Troster, F. / Gall, R. / Simion, C. et al. | 2010
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Morphology and Dielectric Properties of some LDPE/PA Blends in Presence of CompatibilizersAradoaei, S.T. / Darie, R.N. / Vasile, C. / Mosneagu, M. / Olariu, M.A. et al. | 2012
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A Thermomechanical Model Dedicated to Thixoforming. Application to Semi-Solid FormingKoeune, R. / Ponthot, J.P. et al. | 2013
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High Efficiency Single Wafer Cleaning for Wafer Bonding-Based 3D Integration ApplicationsDussault, D. / Fournel, F. / Dragoi, V. et al. | 2012
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Extended Mobility Carried Out with a Double Hexapod RobotMargaritescu, M. / Ivan, A.M.E. / Vaduva, V. / Brisan, C. et al. | 2010
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Indirect Ultra-Pure Water Metals Analysis by Extended Ion Exchange on a Silica SurfaceShive, L.W. / Liang, H.H. / Grabbe, A. / Kweskin, S. et al. | 2012
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A Boubaker Polynomials Expansion Scheme for Solving the Flow of Nonlinear Power-Law Fluid in Semi-Solid StateWang, K.K. / Fu, J.L. / Si, X.H. et al. | 2013
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Turning of Advanced Alloys with Vibrating Cutting ToolMuhammad, R. / Ahmed, N. / Roy, A. / Silberschmidt, V.V. et al. | 2012
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Development of a Tactile Sensor ArrayMarian, N. / Drimus, A. / Bilberg, A. et al. | 2010
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Production of High Purity Functional Water at Point-of-Use for Advanced Mask Cleaning ProcessesXia, A.Y. et al. | 2012
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Experimental and Simulation Study of Microstructure of the Aluminium Alloy 319s in Induction Reheating ProcessSong, N.N. / Zhang, F. / He, Y.F. / Zhu, Q. et al. | 2013
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Gettering Behavior of Transition Metals in Low Energy, High Dose Ion Implanted SiliconSaga, K. et al. | 2012
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Study on Continuous Casting of Steel by SizesArdelean, E. / Ardelean, M. / Dragoi, F. / Popa, E. et al. | 2012
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The Palletization of Car Batteries Produced by S.C. ROMBAT S.A, Bistrita, Romania, Using the Serial Robot TRTR1Mic, L.C. / Ispas, V. / Horvat, A.C. et al. | 2010
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Yield Impact of Backside Metal-Ion ContaminationCarey, S. / Knotter, D.M. / Ooms, E. / Boersma, J. / van der Sar, E. / Cop, R. / Gerritzen, W. / van Zadelhoff, H. / Bouma, H. et al. | 2012
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Numerical Simulation on Rheo-Diecasting of Magnesium Matrix CompositesYan, H. / Zhu, J.B. / Shan, P. et al. | 2013
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Aspects Regarding Pneumatic System Simulated ControlMindru, R.C. / Maties, V. / Lapusan, C. / Cosma, I.A. et al. | 2010
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Reliable Quantification of Inorganic Contamination by TXRFMuller, M. / Nutsch, A. / Altmann, R. / Borionetti, G. / Holz, T. / Mantler, C. / Honicke, P. / Kolbe, M. / Beckhoff, B. et al. | 2012
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Research on the Use of Synthetic Slags to Steel Elaborated in Duplex System EBT-LFPutan, A. / Heput, T. / Putan, V. / Vilceanu, L. et al. | 2012
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Numerical Simulation on the Filling Process of Rheological Die Casting and Forming Defects AnalysisZhang, F. / Song, N.N. / Zhang, J. / Kang, Y.L. / Zhu, Q. et al. | 2013
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Reference Samples for Ultra Trace Analysis of Organic Compounds on Substrate SurfacesNutsch, A. / Beckhoff, B. / Borionetti, G. / Codegoni, D. / Grasso, S. / Honicke, P. / Leibold, A. / Muller, M. / Otto, M. / Pfitzner, L. et al. | 2012
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Analysis of Jansen Walking Mechanism Using CADMoldovan, F. / Dolga, V. et al. | 2010
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Investigate on Flexible Thixo-Extrusion of Complex PartLv, X.L. / Wang, K.K. / Zhou, L. et al. | 2013
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Assessment of a FOUP Conditioning Equipment for Advanced Semiconductor ApplicationOtto, M. / Rioufrays, S. / Favre, A. / Leibold, A. / Altmann, R. / Gennaro, S. / Dell Anna, R. / Canteri, R. / Pfitzner, L. et al. | 2012
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Research on Welded Thin NiTi Wires and Orthodontic BandsSzuhanek, C. / Fleser, T. et al. | 2012
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Dynamics of Hybrid Robot Structures Using Variational PrinciplesNegrean, I. / Vuscan, I. / Schonstein, C. / Kacso, K. / Duca, A. / Negrean, C. et al. | 2010
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Concentration of Three Organic Compounds Influencing each other on Silicon SurfaceHabuka, H. / Naito, T. / Kawahara, N. et al. | 2012
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Friction Welding of Thixocast A356 Aluminium AlloySingh, S.K. / Chattopadhyay, K. / Dutta, P. et al. | 2013
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The Influence of the Mechanical Vibrations upon 1.7035 - 41Cr4 Steel during Hardening ProcessLuca, M.A. / Machedon, T.P. / Gadea, F.C. et al. | 2012
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Environmentally Benign In-Line Cleaning Solutions for Immersion Lithography ToolsChen, T.N. / Korzenski, M.B. / Bilodeau, S. / Zhang, P. / Hogan, T. / van Berkel, K. / Mirth, G. / Mih, R. / Hoekerd, K. / Jansen, B. et al. | 2012
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Formulations about Dynamics of Mobile RobotsNegrean, I. / Schonstein, C. / Kacso, K. / Negrean, C. / Duca, A. et al. | 2010
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Flow Behaviour of M2 Steel Alloy during Semi Solid Isothermal Rapid CompressionYekta, F.H. / Sadough, S.A. / Pouyafar, V. / Jabbari, A. et al. | 2013
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Photovoltaics: The Renewable Energy Revolution Leading the Semiconductor IndustryVerlinden, P.J. et al. | 2012
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Controlled Temperature Distribution and Heat Transfer Process in the Unidirectional Solidification of Aluminium AlloysStefanescu, F. / Neagu, G. / Mihai, A. / Stan, I. et al. | 2012
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Socially Assistive Robots and AutismNikolopoulos, C. / Kuester, D. / Sheehan, M. / Dhanya, S. / Herring, W. / Becker, A. / Bogart, L. et al. | 2010
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The Rheological Behavior of HS6-5-2 Tool Steel for Non-Isothermal ProcessingYekta, F.H. / Sadough, S.A. / Pouyafar, V. / Jabbari, A. et al. | 2013
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Structure Characteristics of Ce-Inoculated, Low Sulphur Grey Cast IronsAnton, I. / Riposan, I. et al. | 2012
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Ozone Based Chemical Oxide Growth for Crystalline Solar Cell ProductionWolke, K. / Gottschalk, C. / Rentsch, J. / Angermann, H. et al. | 2012
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Research Concerning the Ramp and Sinusoidal Command Signals of the Piezoelectric MiniactuatorsNoveanu, S. / Mandru, D. / Ivan, A. / Csibi, V. et al. | 2010
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Rheological Properties and Microstructure of Hypereutectic Semi-Solid Al-Si-Mg Alloys Using Rheocasting RouteTebib, M. / Ajersch, F. / Chen, X.G. et al. | 2013
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Chill (Carbide) Control in Low Sulphur Electric Melt Grey Cast IronsAlbu, C.B. / Riposan, I. et al. | 2012
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Simple Wet-Chemical Cleanings for High-Efficiency Silicon Solar Cell ApplicationsBreitenstein, L. / Sevenig, F. / Pysch, D. / Gottschalk, C. / Hermle, M. / Warta, W. et al. | 2012
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Aspects Regarding the Configuration of a Functional Node in a Distributed Data Acquisition System, Based on PC/104 Compatible ModulesPurcaru, I. / Purcaru, D. et al. | 2010
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Novel Texture Etch Chemistry for Transparent Conducting Oxides Used in Photovoltaic CellsVerhaverbeke, S. / Gouk, R. / Leschkies, K. / Visser, R. et al. | 2012
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Rheological Characterization of Semi-Solid A356 Aluminium AlloyDas, P. / Samanta, S.K. / Chattopadhyay, H. / Dutta, P. / Barman, N. et al. | 2013
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Analysis of Machinability of Ti- and Ni-Based AlloysMaurotto, A. / Roy, A. / Babitsky, V.I. / Silberschmidt, V.V. et al. | 2012
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Advanced Texturization of Mc-Si Solar CellsBraun, S. / Mathijssen, S. / Michel, M. / Schmidt, M. / Shen, M.M.C. / Lin, W.C.W. / Klipp, A. et al. | 2012
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Kinematics Investigation, Workspace Analysis and Actuators Design for a 2-DOF Redundant Parallel RobotRad, C.R. / Rusu, C. / Balan, R. et al. | 2010
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Study on Thixotropic Property of A356 Alloy in Semi-Solid StateSimlandi, S. / Barman, N. / Chattopadhyay, H. et al. | 2013
- 337
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Surface Contamination of Silicon Wafer after Acidic TexturisationOltersdorf, A. / Moldovan, A. / Bayer, M. / Zimmer, M. / Rentsch, J. et al. | 2012
- 339
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Modeling of the Control Algorithms in Case of a Self Reconfiguring Mobile Robotic SystemRaducu, M.G. / Nitulescu, M. et al. | 2010
- 339
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Increase the Ingots Quality Cast in VacuumMincu, V. / Negru, M. / Constantin, N. et al. | 2012
- 341
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Studies on Rheocasting Using Cooling SlopeDas, P. / Samanta, S.K. / Chattopadhyay, H. / Dutta, P. et al. | 2013
- 341
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Optimization of Post-Texturization Cleans for Heterojunction Solar CellsBearda, T. / Yoshikawa, K. / van Assche, E. / O Sullivan, B. / Gordon, I. / Yamamoto, K. / Baert, K. / Poortmans, J. et al. | 2012
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HF Last Passivation for High Efficiency a-Si/c-Si Heterojunction Solar CellsDanel, A. / Souche, F. / Nolan, T. / Le Tiec, Y. / Ribeyron, P.J. et al. | 2012
- 345
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Comparative Dynamic Analysis of Two Parallel RobotsRat, N.R. / Neagoe, M. / Stan, S.D. et al. | 2010
- 346
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Complex Characterization of a New Low Ni Maraging Steel with Enhance Service StabilityBranzei, M. / Nedelcu, I. / Miculescu, M. et al. | 2012
- 347
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On the Filling of Semi-Solid during ThixocastingVakili, S.V.S. / Nili-Ahmadabadi, M. et al. | 2013
- 349
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Wet-Chemical Preparation of Textured Silicon Solar Cell Substrates: Surface Conditioning and Electronic Interface PropertiesAngermann, H. / Laades, A. / Sturzebecher, U. / Conrad, E. / Klimm, C. / Schulze, T.F. / Jacob, K. / Lawerenz, A. / Korte, L. et al. | 2012
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Researches on the Influence of Chemical Composition Regarding the Physical-Mechanical Characteristics of Steel for the Manufacture of Monobloc WheelsAndronache, C. / Socalici, A. / Vilceanu, L. / Heput, T. et al. | 2012
- 353
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Two-In-One Texturing and Polishing in One SolutionPrajapati, V. / John, J. / Poortmans, J. / Mertens, R.P. et al. | 2012
- 353
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Wall Slip Effect in Couette RheometersHarboe, S. / Modigell, M. / Pola, A. et al. | 2013
- 357
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A Novel Method for Automated Tool Path Optimisation for CNC Machining OperationsShojaeipour, S. et al. | 2010
- 357
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Surface Passivation for Si Solar Cells: A Combination of Advanced Surface Cleaning and Thermal Atomic Layer Deposition of Al~2O~3Vermang, B. / Rothschild, A. / Kenis, K. / Wostyn, K. / Bearda, T. / Racz, A. / Loozen, X. / John, J. / Mertens, P.W. / Poortmans, J. et al. | 2012
- 359
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A High-Precision Rotational Rheometer for Temperatures up to 1700 ^oCModigell, M. / Volkmann, T. / Zang, C. et al. | 2013
- 361
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Physical Properties of Magnetorheological Fluid DampersLita, M. / Buzdugan, D. et al. | 2012
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A Novel Method for Rural Road Construction Planning Using Quad-Tree Decomposition on the Satellite ImageShojaeipour, S. / Nejad, A.T. / Masoomi, M.S. / Mokhtarian, H.R. / Jahanshahi, A. et al. | 2010
- 365
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High Temperature Flow Behaviour of Semi-Solid Steel AlloysPouyafar, V. / Sadough, S.A. / Hosseini, F. / Jabbari, A. et al. | 2013
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Researches Regarding Elaboration of Barium Hexaferrite from Microwave HeatingStefan, I. / Savu, S. / Ghermec, O. / Nicolicescu, C. / Trotea, M. et al. | 2012
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Path Planning for Two-Link Navigation in an Unknown Environment Using WebcamShojaeipour, S. / Sedigh, A.K. / Shojaeipour, A. / Weng, E.N.G. / Hadavi, N. et al. | 2010
- 373
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New Developments with the SEED TechnologyCote, P. / Larouche, M.E. / Chen, X.G. et al. | 2013
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Optimum Design of Industrial Robot GrippersSimionescu, I. / Ion, I. / Vladareanu, L. et al. | 2010
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Empirical Determination of the Diffusion Coefficient of Carbon in Austenite in Carburizing Phase of the Gas-Carburizing-Sintering ProcessTrotea, M. / Mangra, M. / Ghercioiu, J. / Stefan, I. et al. | 2012
- 379
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Investigation of Semi-Solid Slurries Prepared by Helical Curve DuctWang, M. / Yang, X.J. / Guo, H.M. et al. | 2013
- 382
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Research of the Milling Time Influence on Ag-Cu Powder Particles Size Processed by Mechanical Alloying RouteGingu, O. / Nicolicescu, C. / Sima, G. et al. | 2012
- 383
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Main Aspects Regarding the Mechanism of the Prosthesis for Human Hand - Synthesis, Analysis, Design and Functional SimulationStaretu, I. et al. | 2010
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Microstructure of Al Alloy Semi-Solid Slurry Made in Metallic Vessel Using Vibrating PlateHirata, N. / Zulaida, Y.M. / Itamura, M. / Anzai, K. et al. | 2013
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Studies and Researches on the Obtaining of Sintered Gradual Porous Structures by Irregular Nickel Powders SedimentationMoldovan, V. / Vida-Simiti, I. / Jumate, N. / Thalmaier, G. / Sechel, N. / Petrescu, V. et al. | 2012
- 389
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Motion Identification of the Human Agent's Arm in Case of Grabbing a Cylindrical Object and Transposing these in Control Rules for an Industrial RobotStoica, M. / Calangiu, G.A. / Sisak, F. et al. | 2010
- 392
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Effect of Superheat on Melting Rate of EEM of Al Alloys during Stirring Using the RheoMetal ProcessPayandeh, M. / Jarfors, A.E.W. / Wessen, M. et al. | 2013
- 395
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On the Control of Tendon Based Parallel ManipulatorsSturm, C. / Schramm, D. et al. | 2010
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Researches Regarding the Properties of Sintered Electrical Contacts Obtained From Mechanically Alloyed W-Cu PowdersPredescu, C. / Nicolicescu, C. / Gavrila, M. et al. | 2012
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Preparation of AlSi9Mg Alloy Semi-Solid Slurry by Electromagnetic Stirring Combined with Mechanical VibrationDao, V.L. / Zhao, S.D. / Lin, W.J. / Zhang, C.Y. et al. | 2013
- 400
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Influence of the Energy Density on the Porosity of Polyamide Parts in SLS ProcessToth-Tascau, M. / Raduta, A. / Stoia, D.I. / Locovei, C. et al. | 2012
- 403
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Modular Robotic System for Moving Inside of Pipelines - Part 1Tatar, M.O. / Alutei, A. / Cirebea, C. et al. | 2010
- 404
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Preparation and Rheo-Die Casting of Semi-Solid A356 Aluminum Alloy Slurry through a Serpentine Pouring ChannelMao, W.M. / Chen, Z.Z. / Liu, H.W. / Li, Y.G. et al. | 2013
- 406
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Scanning Strategies for Aluminium and Plastic PartsCioana, C. / Tulcan, A. / Grozav, I. / Cosma, C. et al. | 2012
- 409
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Modular Robotic System for Moving Inside of Pipelines - Part 2Alutei, A. / Tatar, M.O. / Cirebea, C. et al. | 2010
- 410
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Experimental Study on Semi-Solid Indirect Squeeze CastingBao, P.W. / Xing, S.M. et al. | 2013
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Co-Cr Material Selection in Prosthetic Restoration: Laser Sintering TechnologyReclaru, L. / Ardelean, L. / Rusu, L. / Sinescu, C. et al. | 2012
- 415
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Effect of the Parameters in Inverted Cone-Shaped Pouring Channel Process on the Microstructure of Semi-Solid 7075 Aluminum Alloy SlurryYang, B. / Mao, W.M. / Zeng, J.N. / Song, X.J. et al. | 2013
- 415
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Structural and Constructive Modelling of One-Loop Linkages Applied in RoboticsTempea, I. / Livadariu, A. et al. | 2010
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Wear Resistance of Internal WC-CoCr Coatings Produced by High Velocity Oxy-Fuel SprayingSecosan, I.F. / Utu, I.D. / Serban, V.A. / Brandl, W. et al. | 2012
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Non-Overshooting Force Control of Series Elastic ActuatorsTokatli, O. / Patoglu, V. et al. | 2010
- 422
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Comparison of Structure and Wear Properties of Fine-Structured WC-CoCr Coatings Deposited by HVOF and HVAF Spraying ProcessesHulka, I. / Serban, V.A. / Niemi, K. / Vuoristo, P. / Wolf, J. et al. | 2012
- 422
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Forced Convection Rheomoulding Process for Semisolid Slurry Preparation and Microstructure Evolution of 7075 Aluminum AlloyZhou, B. / Kang, Y.L. / Zhang, J. / Gao, J.Z. / Zhang, F. et al. | 2013
- 427
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Aspects Concerning Voice Cognitive Control Systems for Mobile RobotsTopoleanu, T.S. / Mogan, G. et al. | 2010
- 428
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Research about Wearing Resistance of Metal Coating LayersOlah, A. / Tierean, M.H. et al. | 2012
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Effect of Ultrasounds during the Solidification Process of the A357 Aluminium AlloyForn, A. / da Silva, M. / Baile, M.T. / Picas, J.A. / Fauria, A. et al. | 2013
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Simulating the Control of a Scara Robot by Means of a 3D Hand Position Sensing SystemTarca, R. / Moldovan, O. / Szabolcs, C.L. et al. | 2010
- 433
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On Non-Dendritic Microstructure Formation during Sand Casting of A356 AlloyKaskani, M. / Niroumand, B. et al. | 2013
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Aspects Regarding 3D Road Modeling in Virtual Reality Scenarios for Driving SimulatorsVasiu, R.V. / Brisan, C. et al. | 2010
- 441
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Development of Generation Technology of High Quality Semi-Solid Slurry by Double-Axis-Electromagnetic Stirrer Combined with Properly Designed CupItamura, M. / Anzai, K. / Hirata, N. / Shimaski, S. / Maeda, T. et al. | 2013
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Java Simulator for Quadruped Walking RobotVatau, S. / Ciupe, V. / Maniu, I. et al. | 2010
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Development of Aluminum Die Casting Products with High Accuracy as Well as Superior Die-to-Casting Transcriptional Capability by Using Semi-Solid MethodItamura, M. / Anzai, K. / Hirata, N. / Akahoshi, N. / Maeda, T. / Tanazawa, H. / Furuya, Y. / Fukuoka, S. / Yamamoto, N. et al. | 2013
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Calculation of Forces and Reactions from Kinematical Joints of Double Harmonic Transmission with Wave Generator Dephased with π/2 Used in Industrial Robots StructureVela, D.G. / Madaras, L. / Miclosina, C.O. / Vela, I. et al. | 2010
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A357 Aluminium Cast Alloys for Extrusion ProcessesCampillo, M. / Baile, M.T. / Menargues, S. / Martin, E. / Forn, A. et al. | 2013
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Modelling and Simulation of a Isoglide T3R1 Parallel RobotVerdes, D. / Balan, R. / Koppany, M. et al. | 2010
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Study on the Semi-Solid Thixo-Diecasting Process of Aluminum Alloys and Die DesignShang, S.Z. / Wang, J.J. / Lu, G.M. / Tang, X.L. et al. | 2013
- 466
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Application Research on Annular Electromagnetic Stirring Casting Process of Al-Zn-Mg-Cu AlloyXu, J. / Gao, Z.H. / Zhang, Z.F. / Tang, M.G. / Yu, W.D. et al. | 2013
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Rheo-Extrusion of AZ91DXia, M.X. / Huang, Y. / Cassinath, Z. / Fan, Z.Y. et al. | 2013
- 476
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Experimental Study on Rheoforming of Quality Magnesium AlloysLiu, G.J. / Xu, J. / Yang, L.Q. et al. | 2013
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Microstructure Characteristics and Semi-Solid Slurry Formation in Binary Mg-Al Alloys Produced by the RheoMetal ProcessOstklint, M. / Wessen, M. et al. | 2013
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Improvement of Free Solidified Surface of Strip Cast Using a Single Roll Caster by Scribing Semisolid LayerHaga, T. / Akitsu, K. et al. | 2013
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Refining and Recycling of Metal Scraps by Semisolid ProcessingSugiyama, S. / Yi, M. / Yanagimoto, J. et al. | 2013
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Mini-Thixoforming of a Steel Produced by Powder MetallurgyJirkova, H. / Aisman, D. / Sen, I. / Wagner, M.F.X. / Behulova, M. / Kusy, M. / Masek, B. et al. | 2013
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Casting Wear-Resistant Functionally Gradient Ferrous Alloys via Partial Solidification ProcessingMidson, S.P. / Browne, D.J. et al. | 2013
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Production of Titanium Alloy Components by Semi-Solid FormingKertesz, L. / Liewald, M. et al. | 2013
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Some Approaches on Industrial Installation of Steel Thixoforged ProcessesBigot, R. / Becker, E. / Langlois, L. et al. | 2013
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Tooling Materials and Solutions for Thixoforming of SteelRassili, A. / Falzone, S. / Lecomte-Beckers, J. et al. | 2013
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Industrial Heat Treatment of R-HPDC A356 Automotive Brake CallipersChauke, L. / Moller, H. / Curle, U.A. / Govender, G. et al. | 2013
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On the Rheocasting of High Integrity Hollow Shape Components for Automotive Applications Using 357 Aluminum AlloySamuel, E. / Zheng, C.Q. / Cote, P. et al. | 2013
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Extremely Light Weight Rheocast Components for Automotive Space FrameRosso, M. / Ildiko, P. / Chiarmetta, G. / Gattelli, I. et al. | 2013
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Semisolid Forging of Hypereutectic Al-Si Alloy for Automobile AC Compressor ComponentsZhang, Z.F. / Xu, J. / Bai, Y.L. / Wang, Y.B. et al. | 2013
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Casting and Heat Treatment of Turbocharger Impellers Thixocast from Alloy 201Zhu, Q. / Midson, S.P. / Ming, C.W. / Atkinson, H.V. et al. | 2013
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Semisolid Processing of Al-Sn-Cu Alloys for Bearing ApplicationsPola, A. / Montesano, L. / Gelfi, M. / Roberti, R. et al. | 2013
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Semi-Solid Preparation and Performance of Magnesium Based Thermoelectric MaterialsSong, R.B. / Kang, Y.L. / Sun, J.L. et al. | 2013