Quantum chemical investigations for excitation dissociations of C~5F~8 and C~5HF~7 etching gases (Englisch)
- Neue Suche nach: Hayashi, T.
- Neue Suche nach: Ishikawa, K.
- Neue Suche nach: Sekine, M.
- Neue Suche nach: Hori, M.
- Neue Suche nach: Hayashi, T.
- Neue Suche nach: Ishikawa, K.
- Neue Suche nach: Sekine, M.
- Neue Suche nach: Hori, M.
In:
Dry process
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59
;
2013
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ISBN:
- Aufsatz (Konferenz) / Print
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Titel:Quantum chemical investigations for excitation dissociations of C~5F~8 and C~5HF~7 etching gases
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Beteiligte:Hayashi, T. ( Autor:in ) / Ishikawa, K. ( Autor:in ) / Sekine, M. ( Autor:in ) / Hori, M. ( Autor:in )
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Kongress:International symposium; 35th, Dry process ; 2013 ; Korea
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Erschienen in:Dry process ; 59
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Verlag:
- Neue Suche nach: Japan Society of Applied Physics
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Erscheinungsort:[Japan]
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Erscheinungsdatum:01.01.2013
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Format / Umfang:59 pages
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Anmerkungen:Also known as DPS 2013. Includes bibliographical references and index.
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ISBN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
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Inhaltsverzeichnis Konferenzband
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