2D and 3D microfabrication of thermoset polymer PDMS using laser-induced bubble (microFLIB) (Englisch)
- Neue Suche nach: Toba, Yoichi
- Neue Suche nach: Hanada, Yasutaka
- Neue Suche nach: Toba, Yoichi
- Neue Suche nach: Hanada, Yasutaka
In:
Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII
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124080D-124080D-2
;
2023
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Print
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Titel:2D and 3D microfabrication of thermoset polymer PDMS using laser-induced bubble (microFLIB)
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Beteiligte:Toba, Yoichi ( Autor:in ) / Hanada, Yasutaka ( Autor:in )
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Kongress:Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII
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Erschienen in:Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVIII ; 124080D-124080D-2Proceedings of SPIE, the International Society for Optical Engineering ; 12408 ; 124080D-124080D-2
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Verlag:
- Neue Suche nach: SPIE
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Erscheinungsdatum:01.01.2023
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Format / Umfang:124080D-124080D-2
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ISBN:
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ISSN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Datenquelle:
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Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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2D and 3D microfabrication of thermoset polymer PDMS using laser-induced bubble (microFLIB)Toba, Yoichi / Hanada, Yasutaka et al. | 2023
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