A sensor-based analytic approach for predictions of nanomachined surface profile variations via capturing temporal-spectral Acoustic Emission (AE) features for vibration-assisted Atomic Force Microscopic (AFM) based nanopatterning (Englisch)
- Neue Suche nach: Wang, Zimo
- Neue Suche nach: Wang, Xinchen
- Neue Suche nach: Zhou, Huimin
- Neue Suche nach: Deng, Jia
- Neue Suche nach: Wang, Zimo
- Neue Suche nach: Wang, Xinchen
- Neue Suche nach: Zhou, Huimin
- Neue Suche nach: Deng, Jia
In:
Surface Engineering and Forensics
;
1249006-1249006-5
;
2023
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Print
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Titel:A sensor-based analytic approach for predictions of nanomachined surface profile variations via capturing temporal-spectral Acoustic Emission (AE) features for vibration-assisted Atomic Force Microscopic (AFM) based nanopatterning
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Beteiligte:Wang, Zimo ( Autor:in ) / Wang, Xinchen ( Autor:in ) / Zhou, Huimin ( Autor:in ) / Deng, Jia ( Autor:in )
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Kongress:Surface Engineering and Forensics
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Erschienen in:Surface Engineering and Forensics ; 1249006-1249006-5Proceedings of SPIE, the International Society for Optical Engineering ; 12490 ; 1249006-1249006-5
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Verlag:
- Neue Suche nach: SPIE
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Erscheinungsdatum:01.01.2023
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Format / Umfang:1 pages
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ISBN:
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ISSN:
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Medientyp:Aufsatz (Konferenz)
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Format:Print
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Sprache:Englisch
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Datenquelle:
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