Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3–Ar–H2 plasma treatment for capacitor electrodes (Englisch)
- Neue Suche nach: Lee, Y. J.
- Neue Suche nach: Lee, Y. J.
In:
MATERIALS LETTERS
;
59
, 6
;
615-617
;
2005
-
ISSN:
- Aufsatz (Zeitschrift) / Print
-
Titel:Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3–Ar–H2 plasma treatment for capacitor electrodes
-
Beteiligte:Lee, Y. J. ( Autor:in )
-
Erschienen in:MATERIALS LETTERS ; 59, 6 ; 615-617
-
Verlag:
- Neue Suche nach: Elsevier Science B.V., Amsterdam.
-
Erscheinungsdatum:01.01.2005
-
Format / Umfang:3 pages
-
ISSN:
-
Medientyp:Aufsatz (Zeitschrift)
-
Format:Print
-
Sprache:Englisch
- Neue Suche nach: 620.1105 / 530
- Weitere Informationen zu Dewey Decimal Classification
-
Klassifikation:
-
Datenquelle:
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Inhaltsverzeichnis – Band 59, Ausgabe 6
Zeige alle Jahrgänge und Ausgaben
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 607
-
Microstructural and microhardness characteristics of gas tungsten are synthesized Fe–Cr–C coating on AISI 4340Buytoz, Soner / Yildirim, M. Mustafa / Eren, Hulya et al. | 2004
- 607
-
Microstructural and microhardness characteristics of gas tungsten are synthesized Fe#8211Cr#8211C coating on AISI 4340Buytoz, Soner et al. | 2005
- 615
-
Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3–Ar–H2 plasma treatment for capacitor electrodesLee, Yong Ju et al. | 2004
- 615
-
Low-impurity, highly conformal atomic layer deposition of titanium nitride using NH3#8211Ar#8211H2 plasma treatment for capacitor electrodesLee, Yong Ju et al. | 2005
- 618
-
Characterization of sputter deposited W–Si–N coatings based on α-W structureFu, T. / Zhou, Z.F. / Li, K.Y. / Shen, Y.G. et al. | 2004
- 618
-
Characterization of sputter deposited W#8211Si#8211N coatings based on #945-W structureFu, T. et al. | 2005
- 624
-
Effect of new Al#8211P#8211Ti#8211TiC#8211Y modifier on primary silicon in hypereutectic Al#8211Si alloysJiang, Q.C. et al. | 2005
- 624
-
Effect of new Al–P–Ti–TiC–Y modifier on primary silicon in hypereutectic Al–Si alloysJiang, Q.C. / Xu, C.L. / Lu, M. / Wang, H.Y. et al. | 2004
- 629
-
Precipitation behavior of an Al–Cu alloy during isothermal aging at low temperaturesSon, S.K. / Takeda, M. / Mitome, M. / Bando, Y. / Endo, T. et al. | 2004
- 629
-
Precipitation behavior of an Al#8211Cu alloy during isothermal aging at low temperaturesSon, S.K. et al. | 2005
- 633
-
Cure characteristics and mechanical properties of styrene#8211butadiene rubber-acrylonitrile butadiene rubberHabeeb Rahiman, K. et al. | 2005
- 633
-
Cure characteristics and mechanical properties of styrene–butadiene rubber/acrylonitrile butadiene rubberHabeeb Rahiman, K. / Unnikrishnan, G. / Sujith, A. / Radhakrishnan, C.K. et al. | 2004
- 640
-
Elastic, dielectric, and piezoelectric characterization of 0.70Pb(Mg1-3Nb2-3)O3#82110.30PbTiO3 single crystalsPeng, Jue et al. | 2005
- 640
-
Elastic, dielectric, and piezoelectric characterization of 0.70Pb(Mg1/3Nb2/3)O3–0.30PbTiO3 single crystalsPeng, Jue / Luo, Haosu / He, Tianhou / Xu, Haiqing / Lin, Di et al. | 2004
- 644
-
Optical-limiting effect of C60 bonded poly(N-vinylcarbazole) initiated with C60Cln/CuCl/Bpy catalyst systemHua, Jing / Yang, Weihai / Zhu, Yunji / Guo, Zhixin / Yang, Haiqiang / Xu, Ling / Chen, Dianbao et al. | 2004
- 648
-
The influence of irradiation on morphology evolution and flammability properties of maleated polyethylene/clay nanocompositeLu, Hongdian / Hu, Yuan / Xiao, Junfeng / Kong, Qinghong / Chen, Zuyao / Fan, Weicheng et al. | 2004
- 652
-
Synthetic NaMnPO4 microtubulesShi, Fanian / Rocha, João / Trindade, Tito et al. | 2004
- 656
-
Effect of the excess of bismuth on the morphology and properties of the BaBi2Ta2O9 ceramicsSimões, A.Z. / da Costa, G.C.C. / Ramírez, M.A. / Varela, J.A. / Longo, E. et al. | 2004
- 662
-
Thermal behavior during the synthesis of spin-ladder compound Sr14#8722xCaxCu24O41Zeng, Yi et al. | 2005
- 662
-
Thermal behavior during the synthesis of spin-ladder compound Sr14−xCaxCu24O41Zeng, Yi / Shi, Jing / Yu, Zuxing / Pan, Fusu et al. | 2004
- 667
-
Electroless copper coating on nickel foils in super-gravity fieldGong, Yingpeng / Guo, Zhancheng / Lu, Weichang et al. | 2004
- 671
-
Microstructure and properties of AZ91D alloy with Ca additionsLi, Peijie / Tang, Bin / Kandalova, E.G. et al. | 2004
- 676
-
Simulation studies on structural evolution of gold clusters during solidificationChen, Ying / Zhang, Jingxiang / Wang, Li et al. | 2004
- 682
-
Solvothermal synthesis and thermoelectric properties of lanthanum contained Bi–Te and Bi–Se–Te alloysJi, X.H. / Zhao, X.B. / Zhang, Y.H. / Lu, B.H. / Ni, H.L. et al. | 2004
- 682
-
Solvothermal synthesis and thermoelectric properties of lanthanum contained Bi#8211Te and Bi#8211Se#8211Te alloysJi, X.H. et al. | 2005
- 686
-
Synthesis and characterization of PbS/modified hyperbranched polyester nanocomposite hollow spheres at room temperatureZhao, Yongbin / Zou, Jianhua / Shi, Wenfang et al. | 2004
- 690
-
Chemical effects in chemical mechanical planarization of TaN: investigation of surface reactions in a peroxide-based alkaline slurry using Fourier transform impedance spectroscopyGorantla, V.R.K. / Emery, S.B. / Pandija, S. / Babu, S.V. / Roy, D. et al. | 2004
- 694
-
Effects of solvent on fabrication of polymeric light emitting devicesXiao, Steven / Qiu, Cindy / Jin, Eugene / Chen, Yi / Louis, Pierre / Qiu, Steven / Zhu, Wen-Wei / Nguyen, My / Shih, Ishiang et al. | 2004
- 697
-
Evolution of deformation near the triple point of grain junctions in Sn-based solders during in situ tensile testDing, Ying / Wang, Chunqing / Li, Mingyu / Bang, Han-Sur et al. | 2004
- 701
-
Hydrogen-induced phase decomposition of Ca8Al3 intermetallic compoundZhang, Q.A. / Hou, Q.Y. / Wu, H.Y. et al. | 2004
- 705
-
Effects of heat treatment and ECAE process on transformation behaviors of TiNi shape memory alloyLi, Zhenhua / Cheng, Xianhua / ShangGuan, Qianqian et al. | 2004
- 710
-
The effect of cordierite additives on microwave magnetic properties of LiZn ferritesCho, Yong S. / Lee, Jung W. / Amarakoon, Vasantha R.W. et al. | 2004
- 714
-
Incorporation of barium in titanium oxide and lanthanum oxideGhelamallah, Madani / Kacimi, Soufi / Fertout, Radia Imane et al. | 2004
- 719
-
Surface modification of low alloy steel by laser meltingQureshi, K.A. / Hussain, N. / Akhter, J.I. / Khan, N. / Hussain, A. et al. | 2004
- 723
-
Grain refining performance of Al–Ti master alloys with different microstructuresLi, Peijie / Kandalova, E.G. / Nikitin, V.I. et al. | 2004
- 723
-
Grain refining performance of Al#8211Ti master alloys with different microstructuresLi, Peijie et al. | 2005
- 728
-
Ferromagnetic resonance studies of nanocrystalline La0.6Pb0.4MnO3 thin filmsAswal, D.K. / Singh, Ajay / Kadam, R.M. / Bhide, M.K. / Page, A.G. / Bhattacharya, Shovit / Gupta, S.K. / Yakhmi, J.V. / Sahni, V.C. et al. | 2004
- 734
-
Transformation of amorphous iron oxide films pre-deposited by spray pyrolysis into FeS2-pyrite filmsOuertani, B. / Ouerfelli, J. / Saadoun, M. / Bessaïs, B. / Hajji, M. / Kanzari, M. / Ezzaouia, H. / Hamdadou, N. / Bernède, J.C. et al. | 2004
- CO2
-
Editorial Board| 2004