Modeling of a slit-scan-type aerial image measurement sensor used for optical lithography (Englisch)
- Neue Suche nach: Unno, Y.
- Neue Suche nach: Unno, Y.
In:
APPLIED OPTICS
;
50
, 3
;
271
;
2011
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ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Modeling of a slit-scan-type aerial image measurement sensor used for optical lithography
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Beteiligte:Unno, Y. ( Autor:in )
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Erschienen in:APPLIED OPTICS ; 50, 3 ; 271
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Verlag:
- Neue Suche nach: OSA OPTICAL SOCIETY OF AMERICA
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Erscheinungsdatum:01.01.2011
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Format / Umfang:271 pages
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ISSN:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 535.05 / 530
- Weitere Informationen zu Dewey Decimal Classification
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Klassifikation:
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