Carrier Gas Dependence at Initial Processes for a-Plane AlN Growth on r-Plane Sapphire Substrates by Hydride Vapor Phase Epitaxy (5 pages) (Französisch)
- Neue Suche nach: Tajima, J.
- Neue Suche nach: Echizen, C.
- Neue Suche nach: Togashi, R.
- Neue Suche nach: Murakami, H.
- Neue Suche nach: Kumagai, Y.
- Neue Suche nach: Takada, K.
- Neue Suche nach: Koukitu, A.
- Neue Suche nach: Tajima, J.
- Neue Suche nach: Echizen, C.
- Neue Suche nach: Togashi, R.
- Neue Suche nach: Murakami, H.
- Neue Suche nach: Kumagai, Y.
- Neue Suche nach: Takada, K.
- Neue Suche nach: Koukitu, A.
In:
JAPANESE JOURNAL OF APPLIED PHYSICS -NEW SERIES-
;
50
, 5
;
055501
;
2011
-
ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Carrier Gas Dependence at Initial Processes for a-Plane AlN Growth on r-Plane Sapphire Substrates by Hydride Vapor Phase Epitaxy (5 pages)
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Beteiligte:Tajima, J. ( Autor:in ) / Echizen, C. ( Autor:in ) / Togashi, R. ( Autor:in ) / Murakami, H. ( Autor:in ) / Kumagai, Y. ( Autor:in ) / Takada, K. ( Autor:in ) / Koukitu, A. ( Autor:in )
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Erschienen in:JAPANESE JOURNAL OF APPLIED PHYSICS -NEW SERIES- ; 50, 5 ; 055501
-
Verlag:
- Neue Suche nach: JAPAN SOCIETY OF APPLIED PHYSICS
-
Erscheinungsdatum:01.01.2011
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Format / Umfang:55501 pages
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ISSN:
-
Medientyp:Aufsatz (Zeitschrift)
-
Format:Print
-
Sprache:Französisch
- Neue Suche nach: 621
- Weitere Informationen zu Dewey Decimal Classification
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Klassifikation:
DDC: 621 -
Datenquelle:
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Effect of ``CdCl~2 Treatment'' on Properties of CdTe-Based Solar Cells Prepared by Physical Vapor Deposition and Close-Spaced Sublimation Methods (2 pages)Hajimammadov, R. / Fathi, N. / Bayramov, A. / Khrypunov, G. / Klochko, N. / Li, T. et al. | 2011
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Tribological Effects of Brush Scrubbing in Post Chemical Mechanical Planarization Cleaning on Electrical Characteristics in Novel Non-porous Low-k Dielectric Fluorocarbon on Cu Interconnects (6 pages)Gu, X. / Nemoto, T. / Tomita, Y. / Teramoto, A. / Sugawa, S. / Ohmi, T. et al. | 2011
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Mechanism of ``Controlled Atomic Defects'': Extension to the Ternary Systems (7 pages)Rogacheva, E. et al. | 2011
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Growth of IrO~x-SnO~x Films Deposited by Reactive Sputtering (2 pages)Harada, S. / Yoshino, K. / Fukudome, S. / Kawano, Y. / Sei, F. et al. | 2011
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Peculiar Linear Dispersive Bands Observed in Angle-Resolved Photoemission Spectra of TI-Based Ternary Chalcogenide TIGaTe~2 (4 pages)Mimura, K. / Ishizu, T. / Motonami, S. / Wakita, K. / Arita, M. / Hamidov, S. / Chahangirli, Z. / Taguchi, Y. / Namatame, H. / Taniguchi, M. et al. | 2011
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Ab initio Lattice Dynamics and Gruneisen Parameters of TIGaSe~2 (2 pages)Huseinova, D.A. / Hashimzade, F.M. / Orudzhev, G.S. / Nizametdinova, M.A. / Allakhverdiev, K.R. et al. | 2011
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Luminescence Properties of Barium Thio- and Selenogallates Doped with Eu, Ce, and Eu+Ce (2 pages)Yablonskii, G.P. / Zubialevich, V.Z. / Lutsenko, E.V. / Pashaev, A.M. / Tagiev, B.G. / Tagiev, O.B. / Abushov, S.A. et al. | 2011
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Influence of the UV Cure on Advanced Plasma Enhanced Chemical Vapour Deposition Low-k Materials (5 pages)Verdonck, P. / Van Besien, E. / Vanstreels, K. / Trompoukis, C. / Urbanowicz, A. / De Roest, D. / Baklanov, M.R. et al. | 2011
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Tribological, Thermal, and Kinetic Characterization of 300-mm Copper Chemical Mechanical Planarization Process (6 pages)Jiao, Y. / Sampurno, Y.A. / Zhuang, Y. / Wei, X. / Meled, A. / Philipossian, A. et al. | 2011
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Characterization of Local Strain around Through-Silicon Via Interconnects by Using X-ray Microdiffraction (4 pages)Nakatsuka, O. / Kitada, H. / Kim, Y. / Mizushima, Y. / Nakamura, T. / Ohba, T. / Zaima, S. et al. | 2011
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Dielectric Anomaly and Conductivity at Ferroelectric Phase Transition in TIInS~2 Doped with Different Impurities (2 pages)Alekperov, O. / Nadjafov, A. et al. | 2011
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Structural, Optical, and Electrical Properties of Semiconductor Compounds Studied by Means of Inelastic Light Scattering from Phonon, Electron, and Coupled Electron-Phonon Excitations: From Bulk to Nanoscale Structures (4 pages)Bayramov, F.H. / Irmer, G. / Toporov, V.V. / Bairamov, B.H. et al. | 2011
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Sulfurization Growth of SnS Thin Films and Experimental Determination of Valence Band Discontinuity for SnS-Related Solar Cells (3 pages)Sugiyama, M. / Murata, Y. / Shimizu, T. / Ramya, K. / Venkataiah, C. / Sato, T. / Reddy, K.T.R. et al. | 2011
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Evaluation of a New Advanced Low-k Material (5 pages)Smirnov, E.A. / Vanstreels, K. / Verdonck, P. / Ciofi, I. / Shamiryan, D. / Baklanov, M.R. / Phillips, M. et al. | 2011
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Electrical Characteristics of Novel Non-porous Low-k Dielectric Fluorocarbon on Cu Interconnects for 22 nm Generation and Beyond (5 pages)Gu, X. / Nemoto, T. / Tomita, Y. / Shirotori, A. / Miyatani, K. / Saito, A. / Kobayashi, Y. / Teramoto, A. / Kuroki, S.-I. / Nozawa, T. et al. | 2011
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Formation and Evaluation of Electroless-Plated Barrier Films for High-Aspect-Ratio Through-Si Vias (5 pages)Miyake, H. / Inoue, F. / Yokoyama, T. / Shimizu, T. / Tanaka, S. / Terui, T. / Shingubara, S. et al. | 2011
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Evaluation of Composition Reproducibility of HgCdTe Epitaxial Layers Grown in Novel Liquid Phase Epitaxy Apparatus (2 pages)Huseynov, E. / Eminov, S. / Rajabli, A. / Ibragimov, T. et al. | 2011
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Synchrotron Radiation Diffraction Study of YbInCu~4 (2 pages)Utsumi, Y. / Sato, H. / Moriyoshi, C. / Kuroiwa, Y. / Namatame, H. / Taniguchi, M. / Hiraoka, K. / Kojima, K. / Sugimoto, K. et al. | 2011
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Switching of Multiples Solitons in Arrays of Coupled Cavities (2 pages)Aghdami, K.M. / Kheradmand, R. / Karimi, R. et al. | 2011
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New Copper Alloy, Cu(SnN~x), Films Suitable for More Thermally Stable, Electrically Reliable Interconnects and Lower-Leakage Current Capacitors (5 pages)Lin, C.-H. et al. | 2011
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Formation of Palladium Silicide Thin Layers on Si(110) Substrates (5 pages)Suryana, R. / Nakatsuka, O. / Zaima, S. et al. | 2011
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Effects of Postetching Treatment on Molecular-Pore-Stacking/Cu Interconnects for 28 nm Node and Beyond (6 pages)Oshida, D. / Kume, I. / Katsuyama, H. / Taiji, T. / Maruyama, T. / Ueki, M. / Inoue, N. / Iguchi, M. / Fujii, K. / Oda, N. et al. | 2011
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Slurry Supplying Method for Large Quartz Glass Substrate Polishing (2 pages)Khajornrungruang, P. / Kimura, K. / Yui, R. / Wada, N. / Suzuki, K. et al. | 2011
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Development of Original End Point Detection System Utilizing Eddy Current Variation Due to Skin Effect in Chemical Mechanical Polishing (6 pages)Fujita, T. / Kitade, K. / Yokoyama, T. et al. | 2011
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Improvement in Electrical Properties of Carbon Nanotube Via Interconnects (4 pages)Katagiri, M. / Yamazaki, Y. / Wada, M. / Kitamura, M. / Sakuma, N. / Suzuki, M. / Sato, S. / Nihei, M. / Kajita, A. / Sakai, T. et al. | 2011
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Photoluminescence of Cu(In,Ga)Se~2 in the Solar Cell Preparation Process (4 pages)Shirakata, S. / Yudate, S. / Honda, J. / Iwado, N. et al. | 2011
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Optical and Structural Properties of Zn-Cd-Mn-Se Double Quantum Well Systems (4 pages)Matsumoto, T. / Ohmori, K. / Kodama, K. / Hishikawa, M. / Fukasawa, S. / Iwasaki, F. / Muranaka, T. / Nabetani, Y. et al. | 2011
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Analysis of the Enhancing Effect of Rare Earth Ion Co-Doping on the Red Emission of CaGa~2S~4:Mn^2^+ in View of Its Decay Time (2 pages)Suzuki, A. / Hidaka, C. / Takizawa, T. / Nomura, S. et al. | 2011
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Switching On/Off of Cavity Solitons in Semiconductor Microresonators via Carrier Injection above Laser Threshold (2 pages)Kheradmand, R. / Eslami, M. et al. | 2011
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Control of Self-Focusing and Self-Defocusing in the Waveguides Array (2 pages)Aghdami, K.M. / Gharaati, A. / Mokhtari, F. et al. | 2011
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Reflectance Profile of BaTiO~3 on Multilayer Antireflection Coating Systems (2 pages)Karaomerlioglu, F. et al. | 2011
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Comparison of Process Options for Improving Backend-of-Line Reliability in 28 nm Node Technologies and Beyond (6 pages)Aubel, O. / Hennesthal, C. / Hauschildt, M. / Poppe, J. / Hahn, J. / Boemmels, J. / Nopper, M. / Seidel, R. et al. | 2011
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Atomic Layer Deposition of Thin VN~x Film from Tetrakis(diethylamido)vanadium Precursor (2 pages)Takeyama, M.B. / Sato, M. / Sudoh, H. / Machida, H. / Ito, S. / Aoyagi, E. / Noya, A. et al. | 2011
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Effectiveness of Dimethyl Carbonate and Dipivaloyl Methane Chemicals for Internal Repair of Plasma-Damaged Low-k Films (5 pages)Nagano, S. / Sakoda, K. / Hasaka, S. / Kobayashi, K. et al. | 2011
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Analysis of A Novel Slurry Injection System in Chemical Mechanical Planarization (5 pages)Meled, A. / Zhuang, Y. / Sampurno, Y.A. / Theng, S. / Jiao, Y. / Borucki, L. / Philipossian, A. et al. | 2011
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Electrochemical Reactions During Ru Chemical Mechanical Planarization and Safety Considerations (2 pages)Shima, S. / Wada, Y. / Tokushige, K. / Fukunaga, A. / Tsujimura, M. et al. | 2011
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Study of Cu-Inhibitor State for Post-Chemical Mechanical Polishing Cleaning (4 pages)Harada, K. / Ito, A. / Kawase, Y. / Suzuki, T. / Hara, M. / Sakae, R. / Kimura, C. / Aoki, H. et al. | 2011
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Photoinduced Current Transient Spectroscopy of TIInS~2 Layered Crystals Doped with Er, B, and Tb Impurities (2 pages)Seyidov, M.Y. / Suleymanov, R.A. / Odrinsky, A.P. / Nadjafov, A.I. / Mammadov, T.G. / Samadli, E.G. et al. | 2011
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Ab initio Calculations of Elastic Constants of Superalloys (4 pages)Isaev, E.I. / Ponomareva, A.V. / Bleskov, I.D. / Vekilov, Y.K. et al. | 2011
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Ru/WN~x Bilayers as Diffusion Barriers for Cu Interconnects (4 pages)Sari, W. / Eom, T.-K. / Choi, S.-H. / Kim, S.-H. et al. | 2011
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Disappearance of Barrier Metal during Cu Chemical Mechanical Planarization Processing and Its Mechanism (2 pages)Asano, H. / Yasui, A. / Hirano, T. / Tamai, K. / Morinaga, H. et al. | 2011
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Application of Novel Ultrasonic Cleaning Equipment That Uses the Waveguide Mode for the Single-Wafer Cleaning Process (5 pages)Suzuki, K. / Imazeki, Y. / Han, K. / Okano, S. / Soejima, J. / Koike, Y. et al. | 2011
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Growth of Cu(In,Al)(S,Se)~2 Thin Films by Selenization and Sulfurization for a Wide Bandgap Absorber (4 pages)Fujiwara, C. / Sato, T. / Kawasaki, Y. / Sugiyama, M. / Chichibu, S.F. et al. | 2011
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High-Pressure Studies for Iron-Based Superconductors (3 pages)Takahashi, H. / Tomita, T. / Okada, H. / Mizuguchi, Y. / Takano, Y. / Matsuishi, S. / Hirano, M. / Hosono, H. et al. | 2011
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Metal-Insulator Transition Induced by Temperature in Bi~2Te~3~-~xCl~x Layered Compound (2 pages)Abdullayev, N.A. / Abdullayev, N.M. / Aliguliyeva, X.V. / Gahramanov, S.S. / Kerimova, T.G. / Mustafayeva, K.M. / Nemov, S.A. / Zverev, V.N. et al. | 2011
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The Phonon Percolation Scheme for Alloys: Extension to the Entire Lattice Dynamics and Pressure Dependence (4 pages)Pradhan, G.K. / Narayana, C. / Rao, M.N. / D Astuto, M. / Chaplot, S.L. / Pages, O. / Breidi, A. / Souhabi, J. / Postnikov, A. / Deb, S.K. et al. | 2011
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Controlling and Stabilizing of Thermally Travelling Optical Structures in Semiconductor Microresonators (2 pages)Kheradmand, R. / Montazeri, N. et al. | 2011
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Comparison of the Valence Band Structure Peculiarities in the Bi~0~.~8~4-Sb~0~.~1~6-Sn~0~.~1 and Pure Semiconducting Bi~1~-~xSb~x Alloys (2 pages)Tairov, B. / Yuzbashov, E. et al. | 2011
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Mechanism Verification of Electrochemical Migration of Fine Cu Wiring (2 pages)Komatsu, D. / Takahashi, N. / Furutani, T. / Bhandari, R.K. / Sato, K. / Jinbo, N. / Kariya, T. et al. | 2011
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Development of High-Speed Copper Chemical Mechanical Polishing Slurry for Through Silicon Via Application Based on Friction Analysis Using Atomic Force Microscope (4 pages)Amanokura, J. / Ono, H. / Hombo, K. et al. | 2011
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A Study of Digitally Controllable Radio Frequency Micro Electro Mechanical Systems Inductor (3 pages)Shirane, A. / Mizuochi, Y. / Amakawa, S. / Ishihara, N. / Masu, K. et al. | 2011
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Characteristics of Chemical Bonds in CuInSe~2 and Its Thin-Film Deposition Processes Used to Fabricate Solar Cells (4 pages)Wada, T. / Maeda, T. et al. | 2011
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Effect of H~2S Annealing on Ag-Rich Ag-In-S Thin Films Prepared by Vacuum Evaporation (2 pages)Akaki, Y. / Yamashita, K. / Yoshitake, T. / Nakamura, S. / Tokuda, T. / Yoshino, K. et al. | 2011
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Annealing Effect of Ce-Doped CaGa~2S~4 Synthesized by Mechanochemical Solid-State Reaction (2 pages)Ohta, T. / Tanaka, K. / Uchiki, H. et al. | 2011
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gamma -Radiation Stimulated Structural Transition of Monoclinic TIInS~2 to Hexagonal Phase (4 pages)Alekperov, O. / Mamedov, N. / Safarov, N. / Gasumov, V. / Nadjafov, A. et al. | 2011
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Effect of Ho Co-Doping on the Long Lasting Emission of CaGa~2S~4:Eu (3 pages)Hidaka, C. / Takizawa, T. et al. | 2011