Stochastic Effect of Acid Catalytic Chain Reaction in Chemically Amplified Extreme Ultraviolet Resists (5 pages) (Englisch)
- Neue Suche nach: Kozawa, T.
- Neue Suche nach: Kozawa, T.
In:
JAPANESE JOURNAL OF APPLIED PHYSICS -NEW SERIES-
;
51
, 11
;
116503
;
2012
-
ISSN:
- Aufsatz (Zeitschrift) / Print
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Titel:Stochastic Effect of Acid Catalytic Chain Reaction in Chemically Amplified Extreme Ultraviolet Resists (5 pages)
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Beteiligte:Kozawa, T. ( Autor:in )
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Erschienen in:JAPANESE JOURNAL OF APPLIED PHYSICS -NEW SERIES- ; 51, 11 ; 116503
-
Verlag:
- Neue Suche nach: JAPAN SOCIETY OF APPLIED PHYSICS
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Erscheinungsdatum:01.01.2012
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Format / Umfang:116503 pages
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ISSN:
-
Medientyp:Aufsatz (Zeitschrift)
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Format:Print
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Sprache:Englisch
- Neue Suche nach: 621
- Weitere Informationen zu Dewey Decimal Classification
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Klassifikation:
DDC: 621 -
Datenquelle:
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Improving Crystallinity of Thin Si Film for Low-Energy-Loss Micro-/Nano-Electromechanical Systems Devices by Metal-Induced Lateral Crystallization Using Biomineralized Ni Nanoparticles (5 pages)Kumagai, S. / Murase, H. / Miyachi, S. / Kojima, N. / Ohshita, Y. / Yamaguchi, M. / Yamashita, I. / Uraoka, Y. / Sasaki, M. et al. | 2012
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Two Isomeric Didecyl-dinaphtho[2,3-b:2',3'-f]thieno[3,2-b]thiophenes: Impact of Alkylation Positions on Packing Structures and Organic Field Effect Transistor Characteristics (5 pages)Kang, M.J. / Miyazaki, E. / Osaka, I. / Takimiya, K. et al. | 2012
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Solution-Processed C~6~0 Single-Crystal Field-Effect Transistors (4 pages)Kang, W. / Kitamura, M. / Itoh, T. / Arakawa, Y. et al. | 2012
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Porous to Nonporous Transition in the Morphology of Metal Assisted Etched Silicon Nanowires (5 pages)Lotty, O. / Petkov, N. / Georgiev, Y.M. / Holmes, J.D. et al. | 2012
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Mechanism of Growth of Cr~2O~3 Thin Films on (1102), (1120), and (0001) Surfaces of Sapphire Substrates by Direct Current-Radio Frequency Magnetron Sputtering (9 pages)Iwata, N. / Kuroda, T. / Yamamoto, H. et al. | 2012
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Vacuum Annealing Formation of Graphene on Diamond C(111) Surfaces Studied by Real-Time Photoelectron Spectroscopy (7 pages)Ogawa, S. / Yamada, T. / Ishizduka, S. / Yoshigoe, A. / Hasegawa, M. / Teraoka, Y. / Takakuwa, Y. et al. | 2012
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Amine-Rich Organic Thin Films for Cell Culture: Possible Electrostatic Effects in Cell-Surface Interactions (5 pages)Wertheimer, M.R. / St-Georges-Robillard, A. / Lerouge, S. / Mwale, F. / Elkin, B. / Oehr, C. / Wirges, W. / Gerhard, R. et al. | 2012