High-Volume Single-Wafer Reactors for Silicon Epitaxy (Unbekannt)
Nationallizenz
- Neue Suche nach: Kommu, Srikanth
- Neue Suche nach: Khomami, Bamin
- Neue Suche nach: Kommu, Srikanth
- Neue Suche nach: Khomami, Bamin
In:
Industrial & Engineering Chemistry Research
;
41
, 4
;
732-743
;
2002
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:High-Volume Single-Wafer Reactors for Silicon Epitaxy
-
Weitere Titelangaben:Ind. Eng. Chem. Res.
-
Beteiligte:Kommu, Srikanth ( Autor:in ) / Khomami, Bamin ( Autor:in )
-
Erschienen in:Industrial & Engineering Chemistry Research ; 41, 4 ; 732-743
-
Verlag:
- Neue Suche nach: American Chemical Society
-
Erscheinungsdatum:20.02.2002
-
ISSN:
-
Coden:
-
DOI:
-
Medientyp:Aufsatz (Zeitschrift)
-
Format:Elektronische Ressource
-
Sprache:Unbekannt
-
Datenquelle:
Inhaltsverzeichnis – Band 41, Ausgabe 4
Zeige alle Jahrgänge und Ausgaben
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 657
-
Thermal Degradation of Polystyrene by Lewis Acids in SolutionKarmore, Vishal / Madras, Giridhar et al. | 2002
- 661
-
Saccharification of Cellulose Using a Hot-Compressed Water-Flow ReactorSakaki, Tsuyoshi / Shibata, Masao / Sumi, Toshihisa / Yasuda, Seiji et al. | 2002
- 666
-
Supported Transition-Metal Oxide Catalysts for Catalytic Reduction of SO2 with CO as a Reducing AgentWang, Ching-Huei / Lin, Shiow-Shyung / Hwang, Wei-Uie / Weng, Hung-Shan et al. | 2002
- 672
-
A Role of Sodium Hydroxide in the Process of Hydrogen Sulfide Adsorption/Oxidation on Caustic-Impregnated Activated CarbonsBagreev, Andrey / Bandosz, Teresa J. et al. | 2002
- 680
-
Kinetics of the Total Oxidation of Methane over a La0.9Ce0.1CoO3 Perovskite CatalystAuer, Róbert / Thyrion, Fernand C. et al. | 2002
- 691
-
Kinetics of Aqueous-Phase Hydrogenation of Lactic Acid to Propylene GlycolZhang, Zhigang / Jackson, James E. / Miller, Dennis J. et al. | 2002
- 697
-
Kinetics, Gas−Liquid Mass Transfer, and Modeling of the Soybean Oil Hydrogenation ProcessFillion, Benoit / Morsi, Badie I. / Heier, Kevin R. / Machado, Reinaldo M. et al. | 2002
- 710
-
Silver-Catalyzed Oxidation of Ethylene to Ethylene Oxide in a Microreaction SystemKestenbaum, Harry / Lange de Oliveira, Armin / Schmidt, Wolfgang / Schüth, Ferdi / Ehrfeld, Wolfgang / Gebauer, Klaus / Löwe, Holger / Richter, Thomas / Lebiedz, Dirk / Untiedt, Ingo et al. | 2002
- 720
-
Phase Relations and Heat-Induced Chemical Processes in Sludges of Hot-Dip GalvanizationKazinczy, Béla / Kótai, László / Sajó, István E. / Holly, Sándor / Lázár, Károly / Jakab, Emma / Gács, István / Szentmihályi, Klára et al. | 2002
- 726
-
Development of Photocatalytic Coating Agents with Indicator DyesZhi, J. F. / Wang, H. B. / Fujishima, A. et al. | 2002
- 732
-
High-Volume Single-Wafer Reactors for Silicon EpitaxyKommu, Srikanth / Khomami, Bamin et al. | 2002
- 744
-
Experimental Application of Partitioned Model-Based Control to pH Neutralization †Maksumov, Alisher / Mulder, Dennis J. / Harris, Kenneth R. / Palazoglu, Ahmet et al. | 2002
- 751
-
A Fast and Efficient Algorithm for Training Radial Basis Function Neural Networks Based on a Fuzzy Partition of the Input SpaceSarimveis, Haralambos / Alexandridis, Alex / Tsekouras, George / Bafas, George et al. | 2002
- 760
-
A Case Study in Simultaneous Design and Control Using Rigorous, Mixed-Integer Dynamic Optimization ModelsBansal, Vikrant / Perkins, John D. / Pistikopoulos, Efstratios N. et al. | 2002
- 779
-
Scheduling Parallel Production Lines with Resource Constraints. 1. Model FormulationLamba, Nitin / Karimi, I. A. et al. | 2002
- 790
-
Scheduling Parallel Production Lines with Resource Constraints. 2. Decomposition AlgorithmLamba, Nitin / Karimi, I. A. et al. | 2002
- 801
-
Model Predictive Control of Interconnected Linear and Nonlinear ProcessesZhu, Guang-Yan / Henson, Michael A. et al. | 2002
- 817
-
Proposal To Speed Up the Implementation of an Abnormal Situation Management in the Chemical Process IndustryRuiz, Diego / Benqlilou, Chouaib / Nougués, José M. / Puigjaner, Luis / Ruiz, Carlos et al. | 2002
- 825
-
Combine Molecular Modeling with Optimization to Stretch Refinery OperationHu, Shanying / Towler, G. / Zhu, (Frank) X. X. et al. | 2002
- 842
-
Estimation of the Dynamic Matrix and Noise Model for Model Predictive Control Using Closed-Loop DataKadali, Ramesh / Huang, Biao et al. | 2002
- 853
-
Kinetic Modeling of Simultaneous Recovery of Metallic Cations and Anions with a Mixture of Extractants in Hollow-Fiber ModulesLin, Su-Hsia / Juang, Ruey-Shin et al. | 2002
- 862
-
Modeling Comblike Polymer Solutions Using an Equation of State: Application to Vapor−Liquid EquilibriaPeng, Changjun / Liu, Honglai / Hu, Ying et al. | 2002
- 871
-
Mixing Molar Volume of Liquid n- and i-Alkanes Based on the Law of Corresponding States with Potential between Functional GroupsTada, Yutaka / Hiraoka, Setsuro / Nishida, Naoki / Tanuma, Naoya / Lee, Young-Sei et al. | 2002
- 882
-
Heat- and Mass-Transfer Analogy in a Bubble ColumnVerma, Ashok K. et al. | 2002