Blazed grating formation in a hollow cathode etcher (Englisch)
- Neue Suche nach: Gross, M.
- Neue Suche nach: Wu, Y.
- Neue Suche nach: Horwitz, C. M.
- Neue Suche nach: Gross, M.
- Neue Suche nach: Wu, Y.
- Neue Suche nach: Horwitz, C. M.
In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
;
7
, 6
;
3213-3216
;
1989
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Blazed grating formation in a hollow cathode etcher
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Weitere Titelangaben:Blazed grating formation in a hollow cathode etcher
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Beteiligte:
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Erschienen in:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films ; 7, 6 ; 3213-3216
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Verlag:
- Neue Suche nach: American Vacuum Society
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Erscheinungsdatum:01.11.1989
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Format / Umfang:4 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 7, Ausgabe 6
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