Modeling of vacancy flux due to stress-induced migration (Englisch)
- Neue Suche nach: Aoyagi, Minoru
- Neue Suche nach: Aoyagi, Minoru
In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
;
21
, 4
;
1314-1317
;
2003
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Modeling of vacancy flux due to stress-induced migration
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Beteiligte:Aoyagi, Minoru ( Autor:in )
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Erschienen in:
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Verlag:
- Neue Suche nach: American Vacuum Society
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Erscheinungsdatum:01.07.2003
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Format / Umfang:4 pages
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ISSN:
-
DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 21, Ausgabe 4
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Growth of cubic SiC thin films on Si(001) by high vacuum chemical vapor deposition using 1,3-disilabutane and an investigation of the effect of deposition pressureBoo, J.-H. / Lim, D.-C. / Lee, S.-B / Lee, K.-W. / Sung, M. M. / Kim, Y. / Yu, K.-S. et al. | 2003
- 1876
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High resolution synchrotron radiation-based x-ray photoemission spectroscopy study of the Si-rich β-SiC(100) surface oxidationDunham, D. / Mehlberg, S. / Chamberlin, S. / Soukiassian, P. / Denlinger, J. D. / Rotenberg, E. / Tonner, B. P. / Hurych, Z. D. et al. | 2003
- 1881
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Silicon carbide surface structure investigated by synchrotron radiation-based x-ray diffractionEnriquez, H. / D’angelo, M. / Aristov, V. Yu. / Derycke, V. / Soukiassian, P. / Renaud, G. / Barbier, A. / Chiang, S. / Semond, F. et al. | 2003
- 1886
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Synthesis of a material for semiconductor applications: Boron oxynitride prepared by low frequency rf plasma-assisted metalorganic chemical vapor depositionChen, G. C. / Lim, D.-C. / Lee, S.-B. / Boo, J.-H. / Kim, Y. J. / Hong, B. Y. et al. | 2003
- 1891
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Generalized interfacesFerry, D. K. / Akis, R. A. / Bird, J. P. / Elhassan, M. / Knezevic, I. / Prasad, C. / Shailos, A. et al. | 2003
- 1896
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Theory of optical properties of 6.1 Å III–V superlattices: The role of the interfacesMagri, Rita / Zunger, Alex et al. | 2003
- 1903
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Green’s function approach for transport calculation in a modulation-doped heterostructureVasileska, D. / Prasad, C. / Wieder, H. H. / Ferry, D. K. et al. | 2003
- 1908
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Comparison of density functional theory methods as applied to compound semiconductor-oxide interfaces: Slab versus cluster modelsSexton, J. Z. / Kummel, A. C. et al. | 2003
- 1915
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Surface and interface barriers of binary and ternary alloysWieder, H. H. et al. | 2003
- 1920
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Mechanisms of lateral ordering of InAs/GaAs quantum dot superlatticesChen, W. / Shin, B. / Goldman, R. S. / Stiff, A. / Bhattacharya, P. K. et al. | 2003
- 1924
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Semiconductor waveguide inversion in disordered narrow band-gap materialsGilbert, M. J. / Akis, R. / Ferry, D. K. et al. | 2003
- 1928
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Nature of electrical contacts in a metal–molecule–semiconductor systemHsu, J. W. P. / Loo, Y. L. / Lang, D. V. / Rogers, J. A. et al. | 2003
- 1936
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Electron heating measurements in an heterostructure systemPrasad, C. / Ferry, D. K. / Vasileska, D. / Wieder, H. H. et al. | 2003
- 1940
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Study of InGaAsP/InP multiple quantum wells grown by solid source molecular beam epitaxySun, L. / Zhang, D. H. et al. | 2003
- 1945
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Effects of Si deposition on the properties of Ga-rich (4×6) GaAs (001) surfacesNegoro, Noboru / Anantathanasarn, Sanguan / Hasegawa, Hideki et al. | 2003
- 1953
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Optimization and characterization of III–V surface cleaningLiu, Zhi / Sun, Yun / Machuca, Francisco / Pianetta, Piero / Spicer, William E. / Pease, R. F. W. et al. | 2003
- 1959
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Low temperature treatment of the (001) ZnTe substrate surface with the assist of atomic hydrogenTsutsumi, K. / Terakado, H. / Enami, M. / Kobayashi, M. et al. | 2003
- L1
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Large blueshift in InGaAs/InGaAsP laser structure using inductively coupled argon plasma-enhanced quantum well intermixingDjie, H. S. / Arokiaraj, J. / Mei, T. / Tang, X. H. / Ang, L. K. / Leong, D. et al. | 2003
- L5
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High-resolution pattern generation using the epoxy novolak SU-8 2000 resist by electron beam lithographyAktary, Mirwais / Jensen, Martin O. / Westra, Kenneth L. / Brett, Michael J. / Freeman, Mark R. et al. | 2003