Etching of submicron holes in and (Englisch)
- Neue Suche nach: Boucher, R.
- Neue Suche nach: Morgenroth, W.
- Neue Suche nach: Roth, H.
- Neue Suche nach: Meyer, H. G.
- Neue Suche nach: Liguda, C.
- Neue Suche nach: Eich, M.
- Neue Suche nach: Boucher, R.
- Neue Suche nach: Morgenroth, W.
- Neue Suche nach: Roth, H.
- Neue Suche nach: Meyer, H. G.
- Neue Suche nach: Liguda, C.
- Neue Suche nach: Eich, M.
In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
;
22
, 2
;
519-522
;
2004
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Etching of submicron holes in and
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Beteiligte:Boucher, R. ( Autor:in ) / Morgenroth, W. ( Autor:in ) / Roth, H. ( Autor:in ) / Meyer, H. G. ( Autor:in ) / Liguda, C. ( Autor:in ) / Eich, M. ( Autor:in )
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Erschienen in:
-
Verlag:
- Neue Suche nach: American Vacuum Society
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Erscheinungsdatum:01.03.2004
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Format / Umfang:4 pages
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ISSN:
-
DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 22, Ausgabe 2
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