Whiskerlike structure growth on silicon exposed to ArF excimer laser irradiation (Englisch)
Nationallizenz
- Neue Suche nach: Sa´nchez, F.
- Neue Suche nach: Morenza, J. L.
- Neue Suche nach: Aguiar, R.
- Neue Suche nach: Delgado, J. C.
- Neue Suche nach: Varela, M.
- Neue Suche nach: Sa´nchez, F.
- Neue Suche nach: Morenza, J. L.
- Neue Suche nach: Aguiar, R.
- Neue Suche nach: Delgado, J. C.
- Neue Suche nach: Varela, M.
In:
Applied Physics Letters
;
69
, 5
;
620-622
;
1996
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Whiskerlike structure growth on silicon exposed to ArF excimer laser irradiation
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Beteiligte:Sa´nchez, F. ( Autor:in ) / Morenza, J. L. ( Autor:in ) / Aguiar, R. ( Autor:in ) / Delgado, J. C. ( Autor:in ) / Varela, M. ( Autor:in )
-
Erschienen in:Applied Physics Letters ; 69, 5 ; 620-622
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Verlag:
- Neue Suche nach: American Institute of Physics
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Erscheinungsdatum:29.07.1996
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis – Band 69, Ausgabe 5
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CUMULATIVE AUTHOR INDEX| 1996