Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H2 and H2-N2 plasmas (Englisch)
- Neue Suche nach: Cunge, G.
- Neue Suche nach: Ferrah, D.
- Neue Suche nach: Petit-Etienne, C.
- Neue Suche nach: Davydova, A.
- Neue Suche nach: Okuno, H.
- Neue Suche nach: Kalita, D.
- Neue Suche nach: Bouchiat, V.
- Neue Suche nach: Renault, O.
- Neue Suche nach: Cunge, G.
- Neue Suche nach: Ferrah, D.
- Neue Suche nach: Petit-Etienne, C.
- Neue Suche nach: Davydova, A.
- Neue Suche nach: Okuno, H.
- Neue Suche nach: Kalita, D.
- Neue Suche nach: Bouchiat, V.
- Neue Suche nach: Renault, O.
In:
Journal of Applied Physics
;
118
, 12
;
10
;
2015
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Dry efficient cleaning of poly-methyl-methacrylate residues from graphene with high-density H2 and H2-N2 plasmas
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Beteiligte:Cunge, G. ( Autor:in ) / Ferrah, D. ( Autor:in ) / Petit-Etienne, C. ( Autor:in ) / Davydova, A. ( Autor:in ) / Okuno, H. ( Autor:in ) / Kalita, D. ( Autor:in ) / Bouchiat, V. ( Autor:in ) / Renault, O. ( Autor:in )
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Erschienen in:Journal of Applied Physics ; 118, 12 ; 10
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Verlag:
- Neue Suche nach: AIP Publishing LLC
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Erscheinungsdatum:28.09.2015
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Format / Umfang:10 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 118, Ausgabe 12
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