Measurement of Strains at Si‐SiO2 Interface (Englisch)
Nationallizenz
- Neue Suche nach: Jaccodine, R. J.
- Neue Suche nach: Schlegel, W. A.
- Neue Suche nach: Jaccodine, R. J.
- Neue Suche nach: Schlegel, W. A.
In:
Journal of Applied Physics
;
37
, 6
;
2429-2434
;
1966
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Measurement of Strains at Si‐SiO2 Interface
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Beteiligte:Jaccodine, R. J. ( Autor:in ) / Schlegel, W. A. ( Autor:in )
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Erschienen in:Journal of Applied Physics ; 37, 6 ; 2429-2434
-
Verlag:
- Neue Suche nach: American Institute of Physics
-
Erscheinungsdatum:01.05.1966
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ISSN:
-
DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis – Band 37, Ausgabe 6
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