Tin-oxo nanoclusters for extreme ultraviolet photoresists: Effects of ligands, counterions, and doping (Englisch)
- Neue Suche nach: Du, Tingli
- Neue Suche nach: Yang, Xiaowei
- Neue Suche nach: Zhao, Yanyan
- Neue Suche nach: Han, Pingping
- Neue Suche nach: Zhao, Jijun
- Neue Suche nach: Zhou, Si
- Neue Suche nach: Du, Tingli
- Neue Suche nach: Yang, Xiaowei
- Neue Suche nach: Zhao, Yanyan
- Neue Suche nach: Han, Pingping
- Neue Suche nach: Zhao, Jijun
- Neue Suche nach: Zhou, Si
In:
The Journal of Chemical Physics
;
160
, 15
;
9
;
2024
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Tin-oxo nanoclusters for extreme ultraviolet photoresists: Effects of ligands, counterions, and doping
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Weitere Titelangaben:Du et al.
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Beteiligte:Du, Tingli ( Autor:in ) / Yang, Xiaowei ( Autor:in ) / Zhao, Yanyan ( Autor:in ) / Han, Pingping ( Autor:in ) / Zhao, Jijun ( Autor:in ) / Zhou, Si ( Autor:in )
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Erschienen in:The Journal of Chemical Physics ; 160, 15 ; 9
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Verlag:
- Neue Suche nach: AIP Publishing LLC
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Erscheinungsdatum:21.04.2024
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Format / Umfang:9 pages
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ISSN:
-
DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 160, Ausgabe 15
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