Crystallographic orientation dependence of SEM contrast revealed by SiC polytypes (Englisch)
- Neue Suche nach: Ashida, Koji
- Neue Suche nach: Kajino, Tomonori
- Neue Suche nach: Kutsuma, Yasunori
- Neue Suche nach: Ohtani, Noboru
- Neue Suche nach: Kaneko, Tadaaki
- Neue Suche nach: Ashida, Koji
- Neue Suche nach: Kajino, Tomonori
- Neue Suche nach: Kutsuma, Yasunori
- Neue Suche nach: Ohtani, Noboru
- Neue Suche nach: Kaneko, Tadaaki
In:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
;
33
, 4
;
6
;
2015
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Crystallographic orientation dependence of SEM contrast revealed by SiC polytypes
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Weitere Titelangaben:Crystallographic orientation dependence of SEM contrast revealed
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Beteiligte:Ashida, Koji ( Autor:in ) / Kajino, Tomonori ( Autor:in ) / Kutsuma, Yasunori ( Autor:in ) / Ohtani, Noboru ( Autor:in ) / Kaneko, Tadaaki ( Autor:in )
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Erschienen in:
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Verlag:
- Neue Suche nach: American Vacuum Society
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Erscheinungsdatum:01.07.2015
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Format / Umfang:6 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 33, Ausgabe 4
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