Review Article: Stress in thin films and coatings: Current status, challenges, and prospects (Englisch)
Freier Zugriff
- Neue Suche nach: Abadias, Grégory
- Neue Suche nach: Chason, Eric
- Neue Suche nach: Keckes, Jozef
- Neue Suche nach: Sebastiani, Marco
- Neue Suche nach: Thompson, Gregory B.
- Neue Suche nach: Barthel, Etienne
- Neue Suche nach: Doll, Gary L.
- Neue Suche nach: Murray, Conal E.
- Neue Suche nach: Stoessel, Chris H.
- Neue Suche nach: Martinu, Ludvik
- Neue Suche nach: Abadias, Grégory
- Neue Suche nach: Chason, Eric
- Neue Suche nach: Keckes, Jozef
- Neue Suche nach: Sebastiani, Marco
- Neue Suche nach: Thompson, Gregory B.
- Neue Suche nach: Barthel, Etienne
- Neue Suche nach: Doll, Gary L.
- Neue Suche nach: Murray, Conal E.
- Neue Suche nach: Stoessel, Chris H.
- Neue Suche nach: Martinu, Ludvik
In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
;
36
, 2
;
48
;
2018
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Review Article: Stress in thin films and coatings: Current status, challenges, and prospects
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Weitere Titelangaben:Stress in thin films and coatings
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Beteiligte:Abadias, Grégory ( Autor:in ) / Chason, Eric ( Autor:in ) / Keckes, Jozef ( Autor:in ) / Sebastiani, Marco ( Autor:in ) / Thompson, Gregory B. ( Autor:in ) / Barthel, Etienne ( Autor:in ) / Doll, Gary L. ( Autor:in ) / Murray, Conal E. ( Autor:in ) / Stoessel, Chris H. ( Autor:in ) / Martinu, Ludvik ( Autor:in )
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Erschienen in:
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Verlag:
- Neue Suche nach: American Vacuum Society
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Erscheinungsdatum:01.03.2018
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Format / Umfang:48 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 36, Ausgabe 2
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