Internal stress and internal friction in thin‐layer microelectronic materials (Englisch)
Nationallizenz
- Neue Suche nach: Berry, B. S.
- Neue Suche nach: Pritchet, W. C.
- Neue Suche nach: Berry, B. S.
- Neue Suche nach: Pritchet, W. C.
In:
Journal of Applied Physics
;
67
, 8
;
3661-3668
;
1990
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Internal stress and internal friction in thin‐layer microelectronic materials
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Beteiligte:Berry, B. S. ( Autor:in ) / Pritchet, W. C. ( Autor:in )
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Erschienen in:Journal of Applied Physics ; 67, 8 ; 3661-3668
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Verlag:
- Neue Suche nach: American Institute of Physics
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Erscheinungsdatum:15.04.1990
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ISSN:
-
DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis – Band 67, Ausgabe 8
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