Deposition of ultrathin AlN films for high frequency electroacoustic devices (Englisch)
- Neue Suche nach: Felmetsger, Valery V.
- Neue Suche nach: Laptev, Pavel N.
- Neue Suche nach: Graham, Roger J.
- Neue Suche nach: Felmetsger, Valery V.
- Neue Suche nach: Laptev, Pavel N.
- Neue Suche nach: Graham, Roger J.
In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
;
29
, 2
;
7
;
2011
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Deposition of ultrathin AlN films for high frequency electroacoustic devices
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Weitere Titelangaben:Deposition of ultrathin AIN films
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Beteiligte:
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Erschienen in:
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Verlag:
- Neue Suche nach: American Vacuum Society
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Erscheinungsdatum:01.03.2011
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Format / Umfang:7 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 29, Ausgabe 2
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