Directed self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns (Englisch)
- Neue Suche nach: Wan, Ling-Shu
- Neue Suche nach: Rincon Delgadillo, Paulina A.
- Neue Suche nach: Gronheid, Roel
- Neue Suche nach: Nealey, Paul F.
- Neue Suche nach: Wan, Ling-Shu
- Neue Suche nach: Rincon Delgadillo, Paulina A.
- Neue Suche nach: Gronheid, Roel
- Neue Suche nach: Nealey, Paul F.
In:
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
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31
, 6
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6
;
2013
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Directed self-assembly of ternary blends of block copolymer and homopolymers on chemical patterns
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Weitere Titelangaben:DSA of ternary blends
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Beteiligte:Wan, Ling-Shu ( Autor:in ) / Rincon Delgadillo, Paulina A. ( Autor:in ) / Gronheid, Roel ( Autor:in ) / Nealey, Paul F. ( Autor:in )
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Erschienen in:
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Verlag:
- Neue Suche nach: American Vacuum Society
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Erscheinungsdatum:01.11.2013
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Format / Umfang:6 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 31, Ausgabe 6
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