Focused ion beam induced deposition of tungsten on vertical sidewalls (Englisch)
- Neue Suche nach: Stewart, D. K.
- Neue Suche nach: Morgan, J. A.
- Neue Suche nach: Ward, B.
- Neue Suche nach: Stewart, D. K.
- Neue Suche nach: Morgan, J. A.
- Neue Suche nach: Ward, B.
In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
;
9
, 5
;
2670-2674
;
1991
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Focused ion beam induced deposition of tungsten on vertical sidewalls
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Weitere Titelangaben:FIB induced deposition of tungsten
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Beteiligte:
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Erschienen in:
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Verlag:
- Neue Suche nach: American Vacuum Society
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Erscheinungsdatum:01.09.1991
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Format / Umfang:5 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 9, Ausgabe 5
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Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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