Return of target material ions leads to a reduced hysteresis in reactive high power impulse magnetron sputtering: Model (Englisch)
- Neue Suche nach: Kadlec, Stanislav
- Neue Suche nach: Čapek, Jiří
- Neue Suche nach: Kadlec, Stanislav
- Neue Suche nach: Čapek, Jiří
In:
Journal of Applied Physics
;
121
, 17
;
18
;
2017
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Return of target material ions leads to a reduced hysteresis in reactive high power impulse magnetron sputtering: Model
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Beteiligte:Kadlec, Stanislav ( Autor:in ) / Čapek, Jiří ( Autor:in )
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Erschienen in:Journal of Applied Physics ; 121, 17 ; 18
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Verlag:
- Neue Suche nach: AIP Publishing LLC
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Erscheinungsdatum:07.05.2017
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Format / Umfang:18 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 121, Ausgabe 17
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