Tomography experiment of an integrated circuit specimen using 3 MeV electrons in the transmission electron microscope (Englisch)
Nationallizenz
- Neue Suche nach: Zhang, Hai-Bo
- Neue Suche nach: Zhang, Xiang-Liang
- Neue Suche nach: Wang, Yong
- Neue Suche nach: Takaoka, Akio
- Neue Suche nach: Zhang, Hai-Bo
- Neue Suche nach: Zhang, Xiang-Liang
- Neue Suche nach: Wang, Yong
- Neue Suche nach: Takaoka, Akio
In:
Review of Scientific Instruments
;
78
, 1
;
013701-
;
2007
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Tomography experiment of an integrated circuit specimen using 3 MeV electrons in the transmission electron microscope
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Beteiligte:Zhang, Hai-Bo ( Autor:in ) / Zhang, Xiang-Liang ( Autor:in ) / Wang, Yong ( Autor:in ) / Takaoka, Akio ( Autor:in )
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Erschienen in:Review of Scientific Instruments ; 78, 1 ; 013701-
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Verlag:
- Neue Suche nach: American Institute of Physics
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Erscheinungsdatum:01.01.2007
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Format / Umfang:4 pages
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ISSN:
-
DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis – Band 78, Ausgabe 1
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