Measurement of non‐Maxwellian electron energy distributions in an inductively coupled plasma (Englisch)
Nationallizenz
- Neue Suche nach: Hori, T.
- Neue Suche nach: Bowden, M. D.
- Neue Suche nach: Uchino, K.
- Neue Suche nach: Muraoka, K.
- Neue Suche nach: Hori, T.
- Neue Suche nach: Bowden, M. D.
- Neue Suche nach: Uchino, K.
- Neue Suche nach: Muraoka, K.
In:
Applied Physics Letters
;
69
, 24
;
3683-3685
;
1996
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Measurement of non‐Maxwellian electron energy distributions in an inductively coupled plasma
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Beteiligte:Hori, T. ( Autor:in ) / Bowden, M. D. ( Autor:in ) / Uchino, K. ( Autor:in ) / Muraoka, K. ( Autor:in )
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Erschienen in:Applied Physics Letters ; 69, 24 ; 3683-3685
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Verlag:
- Neue Suche nach: American Institute of Physics
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Erscheinungsdatum:09.12.1996
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis – Band 69, Ausgabe 24
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CUMULATIVE AUTHOR INDEX| 1996
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Information for contributors| 1996