Structural inheritance from polycrystalline underlayers in the growth of double‐layered aluminum films (Englisch)
- Neue Suche nach: Tsukada, Mitsuo
- Neue Suche nach: Ohfuji, Shin‐ichi
- Neue Suche nach: Tsukada, Mitsuo
- Neue Suche nach: Ohfuji, Shin‐ichi
In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
;
11
, 2
;
326-332
;
1993
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Structural inheritance from polycrystalline underlayers in the growth of double‐layered aluminum films
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Weitere Titelangaben:Structural inheritance from polycrystalline underlayers
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Beteiligte:Tsukada, Mitsuo ( Autor:in ) / Ohfuji, Shin‐ichi ( Autor:in )
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Erschienen in:
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Verlag:
- Neue Suche nach: American Vacuum Society
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Erscheinungsdatum:01.03.1993
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Format / Umfang:7 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 11, Ausgabe 2
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