Recombination probability of oxygen atoms on dynamic stainless steel surfaces in inductively coupled plasmas (Englisch)
- Neue Suche nach: Stafford, Luc
- Neue Suche nach: Guha, Joydeep
- Neue Suche nach: Donnelly, Vincent M.
- Neue Suche nach: Stafford, Luc
- Neue Suche nach: Guha, Joydeep
- Neue Suche nach: Donnelly, Vincent M.
In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
;
26
, 3
;
455-461
;
2008
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Recombination probability of oxygen atoms on dynamic stainless steel surfaces in inductively coupled plasmas
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Weitere Titelangaben:Recombination probability of oxygen atoms
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Beteiligte:
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Erschienen in:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films ; 26, 3 ; 455-461
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Verlag:
- Neue Suche nach: American Vacuum Society
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Erscheinungsdatum:01.05.2008
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Format / Umfang:7 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 26, Ausgabe 3
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