Carbon nanotube array vias for interconnect applications (Englisch)
- Neue Suche nach: Ting, Jyh-Hua
- Neue Suche nach: Chiu, Ching-Chieh
- Neue Suche nach: Huang, Fuang-Yuan
- Neue Suche nach: Ting, Jyh-Hua
- Neue Suche nach: Chiu, Ching-Chieh
- Neue Suche nach: Huang, Fuang-Yuan
In:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
;
27
, 3
;
1086-1092
;
2009
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Carbon nanotube array vias for interconnect applications
-
Weitere Titelangaben:Carbon nanotube array vias for interconnect applications
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Beteiligte:
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Erschienen in:
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Verlag:
- Neue Suche nach: American Vacuum Society
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Erscheinungsdatum:01.05.2009
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Format / Umfang:7 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 27, Ausgabe 3
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Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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- 1652
-
Growth of ZnO by cold-wall chemical vapor transportAbe, Koji / Banno, Yuta / Sasayama, Tomonari / Koizumi, Kazuya et al. | 2009
- 1655
-
Microstructural compositional, and optical characterization of GaN grown by metal organic vapor phase epitaxy on ZnO epilayersRogers, D. J. / Hosseini Teherani, F. / Moudakir, T. / Gautier, S. / Jomard, F. / Molinari, M. / Troyon, M. / McGrouther, D. / Chapman, J. N. / Razeghi, M. et al. | 2009
- 1658
-
Fabrication of one-dimensional and two-dimensional periodically polarity inverted ZnO structures using the patterned CrN buffer layersPark, J. S. / Minegishi, T. / Lee, S. H. / Im, I. H. / Park, S. H. / Goto, T. / Cho, M. W. / Yao, T. / Hong, S. K. / Lee, J. W. et al. | 2009
- 1662
-
Metal organic chemical vapor deposition growth and luminescence of ZnO micro- and nanowiresFalyouni, Farid / Benmamas, Lotfi / Thiandoume, Coumba / Barjon, Julien / Lusson, Alain / Galtier, Pierre / Sallet, Vincent et al. | 2009
- 1667
-
ZnO nanowires prepared by hydrothermal growth followed by chemical vapor deposition for gas sensorsKang, Dong-Suk / Han, Seok Kyu / Kim, Jung-Hyun / Yang, Sang Mo / Kim, Jae Goo / Hong, Soon-Ku / Kim, Dojin / Kim, Hyojin / Song, Jung-Hoon et al. | 2009
- 1673
-
Electrochemical growth and characterization of Ag-doped ZnO nanostructuresThomas, M. A. / Cui, J. B. et al. | 2009
- 1678
-
Comparison of ZnO nanostructures grown using pulsed laser deposition, metal organic chemical vapor deposition, and physical vapor transportSandana, V. E. / Rogers, D. J. / Hosseini Teherani, F. / McClintock, R. / Bayram, C. / Razeghi, M. / Drouhin, H.-J. / Clochard, M. C. / Sallet, V. / Garry, G. et al. | 2009
- 1684
-
ZnO nanorod arrays on -type Si(111) substrates for measurementsOgata, Ken-ichi / Koike, Kazuto / Sasa, Shigehiko / Inoue, Masataka / Yano, Mitsuaki et al. | 2009
- 1688
-
Photoluminescence from ZnO nanowiresReshchikov, Michael A. / Behrends, A. / Bakin, A. / Waag, A. et al. | 2009
- 1693
-
Stable -type ZnO:P nanowire/-type ZnO:Ga film junctions, reproducibly grown by two-step pulsed laser depositionLorenz, Michael / Cao, Bingqiang / Zimmermann, Gregor / Biehne, Gisela / Czekalla, Christian / Frenzel, Heiko / Brandt, Matthias / von Wenckstern, Holger / Grundmann, Marius et al. | 2009
- 1698
-
Unique photoluminescence from ZnO grown by eclipse pulsed laser depositionMendelsberg, R. J. / Kennedy, J. V. / Durbin, S. M. / Reeves, R. J. et al. | 2009
- 1705
-
Electrical and optical studies of metal organic chemical vapor deposition grown N-doped ZnO filmsMarzouki, A. / Mimila, J. / Oueslati, M. / Laroche, J. M. / Jomard, F. / Lusson, A. / Galtier, P. / Sallet, V. et al. | 2009
- 1710
-
Polarity-related asymetry at ZnO surfaces and metal interfacesDong, Yufeng / Fang, Z.-Q. / Look, D. C. / Doutt, D. R. / Hetzer, M. J. / Brillson, L. J. et al. | 2009
- 1717
-
Bond lengths, phase stability, and band gaps in alloysBoonchun, Adisak / Lambrecht, Walter R. L. et al. | 2009
- 1722
-
UV light-induced changes to the surface conduction in hydrothermal ZnOClaflin, B. / Look, D. C. et al. | 2009
- 1726
-
Strong exciton-photon coupling in ZnO based resonatorsSturm, C. / Hilmer, H. / Schmidt-Grund, R. / Czekalla, C. / Sellmann, J. / Lenzner, J. / Lorenz, M. / Grundmann, M. et al. | 2009
- 1731
-
Photoconductivity of the two polar surfaces of ZnOYamaguchi, Hiroyuki / Komiyama, Takao / Chonan, Yasunori / Aoyama, Takashi et al. | 2009
- 1735
-
Electronic coupling in double quantum wellsZippel, Jan / Lenzner, J. / Benndorf, G. / Lange, M. / Hochmuth, H. / Lorenz, M. / Grundmann, M. et al. | 2009
- 1741
-
Temperature dependence of localization effects of excitons in double heterostructuresLange, M. / Zippel, J. / Benndorf, G. / Czekalla, C. / Hochmuth, H. / Lorenz, M. / Grundmann, M. et al. | 2009
- 1746
-
Optical and electrical properties of amorphous InGaZnOYamaguchi, Norihiko / Taniguchi, Satoshi / Miyajima, Takao / Ikeda, Masao et al. | 2009
- 1749
-
About the Cu-related green luminescence band in ZnOReshchikov, Michael A. / Avrutin, V. / Izyumskaya, N. / Shimada, R. / Morkoç, H. / Novak, S. W. et al. | 2009
- 1755
-
Optical study of quantum wells grown by metal organic vapor phase epitaxy on ZnO substratesLusson, A. / Hanèche, N. / Thiandoume, C. / Sallet, V. / Galtier, P. et al. | 2009
- 1760
-
Electron transport properties of modulation-doped heterostructuresMasuko, K. / Ashida, A. / Yoshimura, T. / Fujimura, N. et al. | 2009
- 1765
-
Ultraviolet photodetector fabricated from atomic-layer-deposited ZnO filmsShan, C. X. / Zhang, J. Y. / Yao, B. / Shen, D. Z. / Fan, X. W. / Choy, K. L. et al. | 2009
- 1769
-
Properties of reactively sputtered Ag, Au, Pd, and Pt Schottky contacts on -type ZnOLajn, A. / Wenckstern, H. v. / Zhang, Z. / Czekalla, C. / Biehne, G. / Lenzner, J. / Hochmuth, H. / Lorenz, M. / Grundmann, M. / Wickert, S. et al. | 2009
- 1774
-
Metal contacts on bulk ZnO crystal treated with remote oxygen plasmaFang, Z.-Q. / Claflin, B. / Look, D. C. / Dong, Y.-F. / Brillson, L. et al. | 2009
- 1780
-
Optical characterization of zinc oxide microlasers and microwire core-shell heterostructuresCzekalla, Christian / Sturm, Chris / Schmidt-Grund, Rüdiger / Cao, Bingqiang / Pérez, Jesús Zúñiga / Lorenz, Michael / Grundmann, Marius et al. | 2009
- 1784
-
Fabrication and characterization of novel hybrid green light emitting diodes based on substituting -type ZnO for -type GaN in an inverted junctionBayram, C. / Razeghi, M. / Rogers, D. J. / Teherani, F. Hosseini et al. | 2009
- 1789
-
Ferroelectric thin film field-effect transistors based on heterostructuresBrandt, Matthias / Frenzel, Heiko / Hochmuth, Holger / Lorenz, Michael / Grundmann, Marius / Schubert, Jürgen et al. | 2009
- L5
-
Nickel-germanium soft x-ray zone platesLindblom, Magnus / Reinspach, Julia / von Hofsten, Olov / Bertilson, Michael / Hertz, Hans M. / Holmberg, Anders et al. | 2009
- L8
-
Pd-catalyzed hydrogen sensing with InN nanobeltsWright, J. S. / Lim, Wantae / Gila, B. P. / Pearton, S. J. / Ren, F. / Lai, Wei-Ta / Chen, Li-Chyong / Hu, Ming-Shien / Chen, Kuei-Hsien et al. | 2009