Film and interface layer properties of ultraviolet-ozone oxidized hafnia and zirconia gate dielectrics on silicon substrates (Englisch)
Nationallizenz
- Neue Suche nach: Chi, David
- Neue Suche nach: McIntyre, Paul C.
- Neue Suche nach: Chi, David
- Neue Suche nach: McIntyre, Paul C.
In:
Applied Physics Letters
;
85
, 20
;
4699-4701
;
2004
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Film and interface layer properties of ultraviolet-ozone oxidized hafnia and zirconia gate dielectrics on silicon substrates
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Beteiligte:Chi, David ( Autor:in ) / McIntyre, Paul C. ( Autor:in )
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Erschienen in:Applied Physics Letters ; 85, 20 ; 4699-4701
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Verlag:
- Neue Suche nach: American Institute of Physics
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Erscheinungsdatum:15.11.2004
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis – Band 85, Ausgabe 20
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