Monte Carlo calculations of the properties of sputtered atoms at a substrate surface in a magnetron discharge (Englisch)
- Neue Suche nach: Turner, G. M.
- Neue Suche nach: Falconer, I. S.
- Neue Suche nach: James, B. W.
- Neue Suche nach: McKenzie, D. R.
- Neue Suche nach: Turner, G. M.
- Neue Suche nach: Falconer, I. S.
- Neue Suche nach: James, B. W.
- Neue Suche nach: McKenzie, D. R.
In:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
;
10
, 3
;
455-461
;
1992
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Monte Carlo calculations of the properties of sputtered atoms at a substrate surface in a magnetron discharge
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Weitere Titelangaben:Sputtered atoms at a substrate surface
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Beteiligte:Turner, G. M. ( Autor:in ) / Falconer, I. S. ( Autor:in ) / James, B. W. ( Autor:in ) / McKenzie, D. R. ( Autor:in )
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Erschienen in:Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films ; 10, 3 ; 455-461
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Verlag:
- Neue Suche nach: American Vacuum Society
-
Erscheinungsdatum:01.05.1992
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Format / Umfang:7 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 10, Ausgabe 3
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- 2802
-
Core level x-ray photoelectron spectroscopy of Au~xGa~y alloysJayne, D. T. / Fatemi, N. S. / Weizer, V. G. et al. | 1992
- 2806
-
Improving the interpretation of x-ray photoelectron and Auger electron spectra using numerical methodsStickle, W. F. / Watson, D. G. et al. | 1992
- 2810
-
Structural and geometrical features of copper seed cones observed by high-resolution electron microscopyMori, Y. / Fujimoto, Y. / Okuyama, F. et al. | 1992
- 2816
-
Variable angle spectroscopic ellipsometry studies of oriented phthalocyanine films. II. Copper phthalocyanineDebe, M. K. et al. | 1992
- 2822
-
Auger electron spectroscopy, x-ray photoelectron spectroscopy, and electron energy-loss spectroscopy studies of MoSi~2Rastogi, R. S. / Vankar, V. D. / Chopra, K. L. et al. | 1992
- 2826
-
Nondestructive determination of composition depth profiles on subnanometer scales using angle resolved Auger spectroscopyDerry, G. N. / Vanderlinde, W. E. et al. | 1992
- 2832
-
Ion beam analysis of Li diffused Ge-Li interfacesJen, C. K. C. / Kegel, G. H. R. / Jen, K.-P. et al. | 1992
- 2839
-
L~3M~4~,~5M~4~,~5 Auger transitions and valence hole screening of the 4d metalsKleiman, G. G. / Landers, R. / De Castro, S. G. C. / Nascente, P. A. P. et al. | 1992
- 2843
-
Secondary ion mass spectrometry analysis of Be doped GaAs/AlGaAs heterostructuresHopkins, L. C. / Nagle, J. / Malik, R. J. et al. | 1992
- 2846
-
Take-off angle dependent x-ray photoelectron spectroscopy, secondary ion mass spectrometry, and scanning electron microscopy for determining the thickness and composition of passivation layers on technical aluminum foilsGunter, P. L. J. / Borg, H. J. / Niemantsverdriet, J. W. / Rheiter, H. J. H. et al. | 1992
- 2852
-
Field emission from hafnium carbideMackie, W. A. / Morrissey, J. L. / Hinrichs, C. H. / Davis, P. R. et al. | 1992
- 2857
-
Surface studies of (0001) Al~2O~3 and the growth of thin films of Cu on Al~2O~3Varma, S. / Chottiner, G. S. / Arbab, M. et al. | 1992
- 2863
-
Thermally and optically stimulated exoelectron emission from an electron-beam irradiated glass-ceramic materialCarroll, D. L. / Doering, D. L. / Blais, B. S. et al. | 1992
- 2869
-
New ways of using tests on statistical properties of randomly real rough surfacesVarnier, F. / Rasigni, G. / Llebaria, A. et al. | 1992
- 2875
-
Surface roughness analysis by scanning tunneling microscopy and atomic force microscopyFiles-Sesler, L. A. / Hogan, T. / Taguchi, T. et al. | 1992
- 2880
-
Test structures for secondary ion mass spectrometry analysis of patterned silicon wafersStevie, F. A. / Cochran, G. W. / Kahora, P. M. / Russell, W. A. et al. | 1992
- 2887
-
Secondary ion mass spectrometry test structures for analyses of semiconductor product wafersHarris, W. C. / Smith, H. E. / Pelillo, A. J. / Beagle, J. L. et al. | 1992
- 2892
-
Evidence of Si-OH species at the surface of aged silicaPaparazzo, E. / Fanfoni, M. / Severini, E. / Priori, S. et al. | 1992
- 2897
-
High-resolution depth profiling of semiconductor structures: Preliminary resultsDrummond, I. W. / Dowsett, M. G. / James, D. M. / Street, F. J. et al. | 1992
- 2902
-
Orientation and structure of monolayer ->-> multilayer phthalocyanine thin films on layered semiconductor (MoS~2 and SnS~2) surfacesCollins, G. E. / Nebesny, K. W. / England, C. D. / Chau, L.-K. et al. | 1992
- 2913
-
Moisture-induced interfacial oxidation of chromium on polyimideFurman, B. K. / Childs, K. D. / Clearfield, H. / Davis, R. et al. | 1992
- 2921
-
Angularly resolved x-ray photoelectron spectroscopy investigation of PTFE after prolonged space exposureDalins, I. / Karimi, M. et al. | 1992
- 2926
-
X-ray photoelectron spectroscopy analysis of ion-beam-induced oxidation of GaAs and AlGaAsAlay, J. L. / Vandervorst, W. et al. | 1992
- 2931
-
Monte Carlo simulation of Auger electron spectroscopy and x-ray photoelectron spectroscopy spectraYoshikawa, H. / Shimizu, R. et al. | 1992
- 2938
-
Inelastic peak shape method applied to quantitative surface analysis of inhomogeneous samplesHansen, H. S. / Jansson, C. / Tougaard, S. et al. | 1992
- 2945
-
Evaluation of surface analysis methods for characterization of trace metal surface contaminants found in silicon integrated circuit manufacturingDiebold, A. C. / Maillot, P. / Gordon, M. / Baylis, J. et al. | 1992