Defect cluster recognition system for fabricated semiconductor wafers (Englisch)
- Neue Suche nach: Ooi, Melanie Po-Leen
- Neue Suche nach: Sok, Hong Kuan
- Neue Suche nach: Kuang, Ye Chow
- Neue Suche nach: Demidenko, Serge
- Neue Suche nach: Chan, Chris
- Neue Suche nach: Ooi, Melanie Po-Leen
- Neue Suche nach: Sok, Hong Kuan
- Neue Suche nach: Kuang, Ye Chow
- Neue Suche nach: Demidenko, Serge
- Neue Suche nach: Chan, Chris
In:
Engineering Applications of Artificial Intelligence
;
26
, 3
;
1029-1043
;
2012
-
ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Defect cluster recognition system for fabricated semiconductor wafers
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Beteiligte:Ooi, Melanie Po-Leen ( Autor:in ) / Sok, Hong Kuan ( Autor:in ) / Kuang, Ye Chow ( Autor:in ) / Demidenko, Serge ( Autor:in ) / Chan, Chris ( Autor:in )
-
Erschienen in:Engineering Applications of Artificial Intelligence ; 26, 3 ; 1029-1043
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Verlag:
- Neue Suche nach: Elsevier Ltd
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Erscheinungsdatum:27.03.2012
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Format / Umfang:15 pages
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ISSN:
-
DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 26, Ausgabe 3
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