Influence of bias voltage on the microstructure and physical properties of magnetron sputtered Zr–Si–N nanocomposite thin films (Englisch)
- Neue Suche nach: Sandu, C.S.
- Neue Suche nach: Cusnir, N.
- Neue Suche nach: Oezer, D.
- Neue Suche nach: Sanjinés, R.
- Neue Suche nach: Patscheider, J.
- Neue Suche nach: Sandu, C.S.
- Neue Suche nach: Cusnir, N.
- Neue Suche nach: Oezer, D.
- Neue Suche nach: Sanjinés, R.
- Neue Suche nach: Patscheider, J.
In:
Surface and Coatings Technology
;
204
, 6-7
;
969-972
;
2009
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ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Influence of bias voltage on the microstructure and physical properties of magnetron sputtered Zr–Si–N nanocomposite thin films
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Beteiligte:Sandu, C.S. ( Autor:in ) / Cusnir, N. ( Autor:in ) / Oezer, D. ( Autor:in ) / Sanjinés, R. ( Autor:in ) / Patscheider, J. ( Autor:in )
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Erschienen in:Surface and Coatings Technology ; 204, 6-7 ; 969-972
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Verlag:
- Neue Suche nach: Elsevier B.V.
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Erscheinungsdatum:01.01.2009
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Format / Umfang:4 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 204, Ausgabe 6-7
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