Acceleration of e-beam lithography by minimized resist exposure for large scale nanofabrication (Englisch)
- Neue Suche nach: Deng, Jie
- Neue Suche nach: Wong, Ten It
- Neue Suche nach: Sun, Ling Ling
- Neue Suche nach: Quan, Chenggen
- Neue Suche nach: Zhou, Xiaodong
- Neue Suche nach: Deng, Jie
- Neue Suche nach: Wong, Ten It
- Neue Suche nach: Sun, Ling Ling
- Neue Suche nach: Quan, Chenggen
- Neue Suche nach: Zhou, Xiaodong
In:
Microelectronic Engineering
;
166
;
31-38
;
2016
-
ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Acceleration of e-beam lithography by minimized resist exposure for large scale nanofabrication
-
Beteiligte:Deng, Jie ( Autor:in ) / Wong, Ten It ( Autor:in ) / Sun, Ling Ling ( Autor:in ) / Quan, Chenggen ( Autor:in ) / Zhou, Xiaodong ( Autor:in )
-
Erschienen in:Microelectronic Engineering ; 166 ; 31-38
-
Verlag:
-
Erscheinungsdatum:05.09.2016
-
Format / Umfang:8 pages
-
ISSN:
-
DOI:
-
Medientyp:Aufsatz (Zeitschrift)
-
Format:Elektronische Ressource
-
Sprache:Englisch
-
Schlagwörter:
-
Datenquelle:
Inhaltsverzeichnis – Band 166
Zeige alle Jahrgänge und Ausgaben
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
-
Web of carbon fibers coated with 3D snowflake-shaped Ni3S2/Ni produced by electroless Ni plating: A binder-free cathode electrode for lithium batteriesLee, Dong kyu / Ahn, Chi Won / Jeon, Hwan-Jin et al. | 2016
- 5
-
Electrical and optoelectronic properties of [6,6]-phenyl C61-butyric acid methyl ester: Black phosphorus/p-type Si devicesLin, Yow-Jon / Lin, Hong-Zhi / Tang, Zhi-Hui / Chang, Hsing-Cheng et al. | 2016
- 10
-
Electrodes made of multi-wall carbon nanotubes on PVDF-filters have low electrical resistance and are able to record electrocardiograms in humansBernal-Martínez, Juan / Seseña-Rubfiaro, Alberto / Godínez-Fernández, Rafael / Aguilar-Elguezabal, Alfredo et al. | 2016
- 15
-
Influence of ion beam scattering on the electrical resistivity of platinum hot filmsNarasaki, Masahiro / Wang, Haidong / Takata, Yasuyuki / Takahashi, Koji et al. | 2016
- 19
-
Tailoring of the coercive voltage in a ferroelectric polymer capacitorKim, Woo Young / Lee, Hee Chul et al. | 2016
- 26
-
A new method for sampling low-volume AMCs in a front opening unified podKuo, Chi-Wen / Chang, Luh-Maan et al. | 2016
- 31
-
Acceleration of e-beam lithography by minimized resist exposure for large scale nanofabricationDeng, Jie / Wong, Ten It / Sun, Ling Ling / Quan, Chenggen / Zhou, Xiaodong et al. | 2016
- 39
-
Permeation barrier properties of silicon oxide films deposited on polyethylene terephthalate (PET) substrate using roll-to-roll reactive magnetron sputtering systemBang, S.-H. / Hwang, Nong-Moon / Kim, H.-L. et al. | 2016
- 45
-
The electrical resistance of electrodes made of multi walled carbon nanotubes is modulated by nIR-laserBernal-Martínez, Juan / Godínez-Fernández, Rafael / Roman-Aguirre, Manuel / Aguilar-Elguezabal, Alfredo et al. | 2016
- 50
-
Extrinsic Fabry-Perot fiber acoustic pressure sensor based on large-area silver diaphragmLiu, Bin / Lin, Jie / Liu, Huan / Jin, An / Jin, Peng et al. | 2016
- IFC
-
Editorial Board| 2014