Analysis of IBAD silicon oxynitride film for anti-reflection coating application (Englisch)
- Neue Suche nach: Wang, Yongjin
- Neue Suche nach: Cheng, Xinli
- Neue Suche nach: Lin, Zhilang
- Neue Suche nach: Zhang, Changsheng
- Neue Suche nach: Xiao, Haibo
- Neue Suche nach: Zhang, Feng
- Neue Suche nach: Zou, Shichang
- Neue Suche nach: Wang, Yongjin
- Neue Suche nach: Cheng, Xinli
- Neue Suche nach: Lin, Zhilang
- Neue Suche nach: Zhang, Changsheng
- Neue Suche nach: Xiao, Haibo
- Neue Suche nach: Zhang, Feng
- Neue Suche nach: Zou, Shichang
In:
Journal of Non-Crystalline Solids
;
333
, 3
;
296-300
;
2003
-
ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Analysis of IBAD silicon oxynitride film for anti-reflection coating application
-
Beteiligte:Wang, Yongjin ( Autor:in ) / Cheng, Xinli ( Autor:in ) / Lin, Zhilang ( Autor:in ) / Zhang, Changsheng ( Autor:in ) / Xiao, Haibo ( Autor:in ) / Zhang, Feng ( Autor:in ) / Zou, Shichang ( Autor:in )
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Erschienen in:Journal of Non-Crystalline Solids ; 333, 3 ; 296-300
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Verlag:
- Neue Suche nach: Elsevier B.V.
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Erscheinungsdatum:02.07.2003
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Format / Umfang:5 pages
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ISSN:
-
DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 333, Ausgabe 3
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Author index| 2004
- 338
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Subject index| 2004