TiNxOy as a barrier between Cr-Si-(O) and aluminium thin films (Englisch)
Nationallizenz
- Neue Suche nach: Bäther, K.-H.
- Neue Suche nach: Schreiber, H.
- Neue Suche nach: Bäther, K.-H.
- Neue Suche nach: Schreiber, H.
In:
Thin Solid Films
;
200
, 1
;
93-116
;
1990
-
ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:TiNxOy as a barrier between Cr-Si-(O) and aluminium thin films
-
Beteiligte:Bäther, K.-H. ( Autor:in ) / Schreiber, H. ( Autor:in )
-
Erschienen in:Thin Solid Films ; 200, 1 ; 93-116
-
Verlag:
-
Erscheinungsdatum:27.11.1990
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Format / Umfang:24 pages
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ISSN:
-
DOI:
-
Medientyp:Aufsatz (Zeitschrift)
-
Format:Elektronische Ressource
-
Sprache:Englisch
-
Datenquelle:
Inhaltsverzeichnis – Band 200, Ausgabe 1
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