Time efficient fabrication of ultra large scale nano dot arrays using electron beam lithography (Englisch)
- Neue Suche nach: Grebing, Jochen
- Neue Suche nach: Faßbender, Jürgen
- Neue Suche nach: Erbe, Artur
- Neue Suche nach: Grebing, Jochen
- Neue Suche nach: Faßbender, Jürgen
- Neue Suche nach: Erbe, Artur
In:
Microelectronic Engineering
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97
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55-58
;
2012
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ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Time efficient fabrication of ultra large scale nano dot arrays using electron beam lithography
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Beteiligte:
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Erschienen in:Microelectronic Engineering ; 97 ; 55-58
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Verlag:
- Neue Suche nach: Elsevier B.V.
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Erscheinungsdatum:01.01.2012
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Format / Umfang:4 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 97
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Flexible microassembly methods for micro/nanofluidic chips with an inverted microscopeXu, Zheng / Wang, Jun-yao / Wang, De-jia / Liu, Chong / Liu, Yun-liang / Liu, Jun-shan / Wang, Li-ding et al. | 2012
- 8
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Ag nanoparticle-based inkjet printed planar transmission lines for RF and microwave applications: Considerations on ink composition, nanoparticle size distribution and sintering timeChiolerio, A. / Cotto, M. / Pandolfi, P. / Martino, P. / Camarchia, V. / Pirola, M. / Ghione, G. et al. | 2012
- 16
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C–V characteristics of epitaxial germanium metal–oxide–semiconductor capacitor on GaAs substrate with ALD Al2O3 dielectricTang, Shih Hsuan / Kuo, Chien I. / Trinh, Hai Dang / Hudait, Mantu / Chang, Edward Yi / Hsu, Ching Yi / Su, Yung Hsuan / Luo, Guang-Li / Nguyen, Hong Quan et al. | 2012
- 20
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Metallization introduced corrosion and parylene protection of surface micromachined polysilicon film with submicron capacitive gapZhang, Yiming / Wang, Yunda / Cai, Ming / Wang, Ying / Hao, Yilong / Chen, Jing et al. | 2012
- 26
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High mobility CMOS transistors on Si/SiGe heterostructure channelsOh, Jungwoo / Jeon, Kanghoon / Lee, Se-Hoon / Huang, Jeff / Hung, P.Y. / Ok, Injo / Sassman, Barry / Ko, Dae-Hong / Kirsch, Paul / Jammy, Raj et al. | 2012
- 29
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Automatic detection of photoresist residual layer in lithography using a neural classification approachGereige, Issam / Robert, Stéphane / Eid, Jessica et al. | 2012
- 33
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Preface| 2012
- 34
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Direct e-beam lithography of PDMSBowen, J. / Cheneler, D. / Robinson, A.P.G. et al. | 2012
- 38
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Fabrication and characterization of sub-500nm channel organic field effect transistor using UV nanoimprint lithography with cheap Si-moldTeng, Lichao / Kirchner, Robert / Plötner, Matthias / Türke, Alexander / Jahn, Andreas / He, Jian / Hagemann, Falk / Fischer, Wolf-Joachim et al. | 2012
- 43
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Immersion nanoimprint lithography using perfluoroalkyl liquidMekaru, Harutaka / Hiroshima, Hiroshi et al. | 2012
- 48
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High resolution and high density ion beam lithography employing HSQ resistBruchhaus, L. / Bauerdick, S. / Peto, L. / Barth, U. / Rudzinski, A. / Mussmann, J. / Klingfus, J. / Gierak, J. / Hövel, H. et al. | 2012
- 51
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Three-dimensional measurements of UV-imprint process by micro-digital holographic-PTVSatake, Shin-ichi / Taniguchi, Jun / Kanai, Takahiro / Unno, Noriyuki et al. | 2012
- 55
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Time efficient fabrication of ultra large scale nano dot arrays using electron beam lithographyGrebing, Jochen / Faßbender, Jürgen / Erbe, Artur et al. | 2012
- 59
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Nanostructuring of silicon substrates for the site-controlled growth of GaAs/In0.15Ga0.85As/GaAs nanostructuresUsman, Muhammad / Alzoubi, Tariq / Benyoucef, Mohamed / Reithmaier, Johann Peter et al. | 2012
- 64
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Development of an adhesive testing method for two-dimensional fine pattern on silicon substrate using a photoresist columnIshiyama, Chiemi / Miyasaka, Chiaki / Park, Ik-Keun et al. | 2012
- 68
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Optimized marker definition for high overlay accuracy e-beam lithographyMoers, J. / Trellenkamp, St. / Grützmacher, D. / Offenhäusser, A. / Rienks, B. et al. | 2012
- 72
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A technique for transferring metal nano patterns from a plastic replica mold by using a metal oxide release layerUnno, Noriyuki / Tamura, Hironobu / Taniguchi, Jun et al. | 2012
- 77
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Sensitivity analysis for accurate determination of PSF parametersFigueiro, T. / Tortai, J.H. / Schiavone, P. et al. | 2012
- 81
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Selectivity optimisation of biomimetic molecularly imprinted polymer thin filmsBoysen, Reinhard I. / Li, Shuyan / Chowdhury, Jamil / Schwarz, Lachlan J. / Hearn, Milton T.W. et al. | 2012
- 85
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Fabrication of MOSFETs by 3D soft UV-nanoimprintKoo, Namil / Schmidt, Mathias / Mollenhauer, Thomas / Moormann, Christian / Schlachter, Florian / Kurz, Heinrich et al. | 2012
- 89
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Roll-to-roll pilot nanoimprinting process for backlight devicesMäkelä, Tapio / Haatainen, Tomi et al. | 2012
- 92
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Ultra thick epoxy-based dry-film resist for high aspect ratiosWangler, N. / Beck, S. / Ahrens, G. / Voigt, A. / Grützner, G. / Müller, C. / Reinecke, H. et al. | 2012
- 96
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Scanning probe nanolithography on calixareneKaestner, M. / Rangelow, I.W. et al. | 2012
- 100
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Precision assembly of a miniaturized wire deflector for electron-beam lithographyRisse, Stefan / Damm, Christoph / Hornaff, Marcel / Kamm, Andreas / Mohaupt, Matthias / Eberhardt, Ramona / Schmidt, Ingo / Ramm, Roland / Kühmstedt, Peter / Notni, Gunther et al. | 2012
- 105
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Optimization of 3D patterning by Ga implantation and reactive ion etching (RIE) for nanoimprint lithography (NIL) stamp fabricationWaid, Simon / Wanzenboeck, Heinz D. / Muehlberger, Michael / Bertagnolli, Emmerich et al. | 2012
- 109
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Lifetime evaluation of release agent for ultraviolet nanoimprint lithographyYamashita, Daisuke / Taniguchi, Jun / Suzuki, Hokuto et al. | 2012
- 113
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Fabrication of roll mold using electron-beam direct writing and metal lift-off processMaruyama, Hiroki / Unno, Noriyuki / Taniguchi, Jun et al. | 2012
- 117
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Stamp-and-repeat UV-imprinting of spin-coated films: Pre-exposure and imprint defectsKirchner, R. / Nüske, L. / Finn, A. / Lu, B. / Fischer, W.-J. et al. | 2012
- 122
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Flexible resistive switching memory devices composed of solution-processed GeO2:S filmsChung, Isaac / Cho, Kyoungah / Yun, Junggwon / Kim, Sangsig et al. | 2012
- 126
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Filling of nanoscale holes with high aspect ratio by Cu electroplating using suspension of supercritical carbon dioxide in electrolyte with Cu particlesShinoda, Nao / Shimizu, Tetsuya / Chang, Tso-Fu Mark / Shibata, Akinobu / Sone, Masato et al. | 2012
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Laterally grown ZnO nanorod arrays on an obliquely deposited seed layer and its UV photocurrent responseKim, Myoung-Soo / Han, Jang-Hwan / Lee, Da-Hyeok / O, Beom-Hoan / Lee, Seung-Gol / Lee, El-Hang / Park, Se-Geun et al. | 2012
- 134
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Design and fabrication of a miniaturized gas ionization chamber for production of high quality ion beamsJun, D.S. / Kutchoukov, V.G. / Heerkens, C.T.H. / Kruit, P. et al. | 2012
- 138
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Experimental study and modeling of double-surrounding-gate and cylindrical silicon-on-nothing MOSFETsChen, Yijian / Kang, Weiling et al. | 2012
- 144
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Effects of ultra-violet laser irradiation on grapheneWakaya, Fujio / Teraoka, Tsuyoshi / Kisa, Toshiya / Manabe, Tomoya / Abo, Satoshi / Takai, Mikio et al. | 2012
- 147
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Ordering and modification of nanopores in porous anodic aluminum membranesLiu, Zhaoqian / Huang, Gaoshan / Li, Menglin / Li, Jinxing / Chen, Yifang / Mei, Yongfeng / Liu, Ran et al. | 2012
- 150
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Conduction mechanisms in tungsten-polyoxometalate self-assembled molecular junctionsVelessiotis, D. / Douvas, A.M. / Dimitrakis, P. / Argitis, P. / Glezos, N. et al. | 2012
- 154
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Extremely thin planarized grating for sub-diffraction (<100nm) far-field optical imaging of living cell membranesCattoni, A. / Talneau, A. / Haghiri-Gosnet, A.M. / Girard, J. / Sentenac, A. et al. | 2012
- 157
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Top down fabricated silicon nanowire networks for thermoelectric applicationsTotaro, M. / Bruschi, P. / Pennelli, G. et al. | 2012
- 162
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Remote plasma enhanced atomic layer deposition of ZnO for thin film electronic applicationsSultan, S.M. / Clark, O.D. / Masaud, T.B. / Fang, Q. / Gunn, R. / Hakim, M.M.A. / Sun, K. / Ashburn, P. / Chong, H.M.H. et al. | 2012
- 166
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In-situ grown horizontal carbon nanotube membraneGuerin, Hoël / Tsamados, Dimitrios / Le Poche, Hélène / Dijon, Jean / Ionescu, Adrian M. et al. | 2012
- 169
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Nanostructured silicon for Ge nanoheteroepitaxyBauer, J. / Yamamoto, Y. / Zaumseil, P. / Fursenko, O. / Schulz, K. / Kozlowski, G. / Schubert, M.A. / Schroeder, T. / Tillack, B. et al. | 2012
- 173
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Fabrication of bottle-shaped nanochannels in fused silica using a self-closing effectGraczyk, Mariusz / Balaz, Martina / Linke, Heiner / Maximov, Ivan et al. | 2012
- 177
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Direct wafer bonding for encapsulation of fused silica optical gratingsKalkowski, G. / Zeitner, U. / Benkenstein, T. / Fuchs, J. / Rothhardt, C. / Eberhardt, R. et al. | 2012
- 181
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A dedicated multilayer technique for the fabrication of three-dimensional metallic nanoparticlesHelgert, C. / Dietrich, K. / Lehr, D. / Käsebier, T. / Pertsch, T. / Kley, E.-B. et al. | 2012
- 185
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Fabrication of Bragg Gratings on LiNbO3 optical waveguidesUlliac, G. / Lecestre, A. / Guichardaz, B. / Dahdah, J. / Baida, F.I. / Bernal, M.-P. / Courjal, N. et al. | 2012
- 189
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Optimization and characterization of Au cuboid nanostructures as a SERS device for sensing applicationsChirumamilla, M. / Das, G. / Toma, A. / Gopalakrishnan, A. / Zaccaria, R. Proietti / Liberale, C. / De Angelis, F. / Di Fabrizio, E. et al. | 2012
- 193
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2D photonic gratings from thermal imprinting of ITO-based filmsBrigo, Laura / Mattei, Giovanni / Michieli, Niccolò / Brusatin, Giovanna et al. | 2012
- 197
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Mid-infrared nanoantenna arrays on silicon and CaF2 substrates for sensing applicationsBusinaro, L. / Limaj, O. / Giliberti, V. / Ortolani, M. / Di Gaspare, A. / Grenci, G. / Ciasca, G. / Gerardino, A. / de Ninno, A. / Lupi, S. et al. | 2012
- 201
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Tunable Fano resonance in large scale polymer-dielectric slab photonic crystalsAsadi, Reza / Bagheri, Shahin / Khaje, Mahdi / Malekmohammad, Mohammad / Tavassoly, Mohammad-Taghi et al. | 2012
- 204
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Optimization of surface plasmon polariton generation in a nanocone through linearly polarized laser beamsMalerba, M. / Alabastri, A. / Cojoc, G. / Francardi, M. / Perrone Donnorso, M. / Proietti Zaccaria, R. / De Angelis, F. / Di Fabrizio, E. et al. | 2012
- 208
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PFPE-based materials for the fabrication of micro- and nano-optical componentsGómez, Manuel / Lazzari, Massimo et al. | 2012
- 212
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Fabrication of precise copper micro-coils using electrolytic etchingHoriuchi, Toshiyuki / Ishii, Hidetoshi et al. | 2012
- 216
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Effects of a bottom electrode on feed-through capacitance and electrical transmission of an MEMS resonatorKim, J.-M. / Park, H.-W. / Jeong, H.-G. / Kim, Y.-K. et al. | 2012
- 220
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Piezo-electrically actuated and sensed silicon carbide ring resonatorsMastropaolo, Enrico / Sviličić, Boris / Chen, Tao / Flynn, Brian / Cheung, Rebecca et al. | 2012
- 223
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Thermal properties of nanocapsules measured by scanning force microscopy methodsKaule, Tassilo / Hamberger, Anika / Zhang, Yi / Landfester, Katharina / Butt, Hans-Jürgen / Berger, Rüdiger et al. | 2012
- 227
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Reactive ion etching of polymer materials for an energy harvesting deviceWang, Fei / Bertelsen, Christian / Skands, Gustav / Pedersen, Thomas / Hansen, Ole et al. | 2012
- 231
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S-shaped double-spring structures for high stiffness and spring heightHantschel, T. / Chow, E.M. et al. | 2012
- 235
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Fabrication process development for a high sensitive electrochemical IDA sensorPartel, S. / Mayer, M. / Hudek, P. / Dinçer, C. / Kieninger, J. / Urban, G.A. / Motzek, K. / Matay, L. et al. | 2012
- 241
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Performance evaluation of carbon nanotube-based oscillators and bearings under electron irradiation: Molecular dynamics studyYasuda, Masaaki / Chihara, Yoshinori / Mimura, Ryosuke / Kimoto, Yoshihisa / Kawata, Hiroaki / Hirai, Yoshihiko et al. | 2012
- 247
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Microcantilevers encapsulated in fluid wells for sensing in liquidsVenstra, W.J. / Wien, W.H. / Sarro, P.M. / van Eijk, J. et al. | 2012
- 251
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All-inkjet-printed electrical components and circuit fabrication on a plastic substrateKang, Byung Ju / Lee, Chang Kyu / Oh, Je Hoon et al. | 2012
- 255
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TiN scanning probes for electrical profiling of nanoelectronics device structuresHantschel, T. / Schulze, A. / Celano, U. / Moussa, A. / Arstila, K. / Eyben, P. / Majeed, B. / Tezcan, D.S. / Werner, T. / Vandervorst, W. et al. | 2012
- 259
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Development of novel dual-axis sensing gyroscope using surface acoustic waveOh, Haekwan / Lee, Ki Jung / Yang, Sang Sik / Lee, Keekeun et al. | 2012
- 265
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Micromachined self-actuated piezoresistive cantilever for high speed SPMMichels, Thomas / Guliyev, Elshad / Klukowski, Michal / W. Rangelow, Ivo et al. | 2012
- 269
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Biomimetic soft lithography on curved nanostructured surfacesAuzelyte, V. / Flauraud, V. / Cadarso, V.J. / Kiefer, T. / Brugger, J. et al. | 2012
- 272
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Sub micrometer ceramic structures fabricated by molding a polymer-derived ceramicGrossenbacher, Jonas / Gullo, Maurizio R. / Grandjean, Raphaël / Kiefer, Thomas / Brugger, Jürgen et al. | 2012
- 276
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Fabrication of MEMS actuators from the BEOL of a 0.25μm BiCMOS technology platformKulse, P. / Birkholz, M. / Ehwald, K.-E. / Bauer, J. / Drews, J. / Haak, U. / Höppner, W. / Katzer, J. / Schulz, K. / Wolansky, D. et al. | 2012
- 276
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Fabrication of MEMS actuators from the BEOL of a 0.25mm BiCMOS technology platformKulse, P. / Birkholz, M. / Ehwald, K. E. / Bauer, J. / Drews, J. / Haak, U. / Hoppner, W. / Katzer, J. / Schulz, K. / Wolansky, D. et al. | 2012
- 280
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Ta/TiN midgap full-metal single gate fabrication using combined chlorine-based plasma and highly selective chemical metal etching for decananometer CMOS technologyChen, Zhenkun / Dubois, Emmanuel / Ravaux, Florent / Danneville, Francois et al. | 2012
- 285
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Strain microgauge implementation on cylindrical metal substratesYang, W. / Bonvilain, A. / Gustavo, F. / Basrour, S. et al. | 2012
- 289
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Silver lines electrode patterned by transfer printingGe, Liangjin / Jay Guo, L. / Wang, Xudi / Fu, Shaojun et al. | 2012
- 294
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A rapid and portable sensor based on protein-modified gold nanoparticle probes and lateral flow assay for naked eye detection of mercury ionChao, Cheng-Han / Wu, Chung-Shu / Huang, Chung-Chih / Liang, Jie-Chian / Wang, Hsiao-Ting / Tang, Pin-Ting / Lin, Lih-Yuan / Ko, Fu-Hsiang et al. | 2012
- 297
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Bio-hybrid tactile sensor for the study of the role of mechanoreceptors in human tactile perceptionCheneler, D. / Ward, M.C.L. / Anthony, C.J. et al. | 2012
- 301
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A simple and versatile micro contact printing method for generating carbon nanotubes patterns on various substratesBéduer, A. / Seichepine, F. / Flahaut, E. / Vieu, C. et al. | 2012
- 306
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EWOD-driven stirring in lab-on-a-chips: Dependence on the electrodes’ geometryMalk, R. / Theisen, J. / Fouillet, Y. / Davoust, L. et al. | 2012
- 311
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FIB carving of nanopores into suspended graphene filmsMorin, A. / Lucot, D. / Ouerghi, A. / Patriarche, G. / Bourhis, E. / Madouri, A. / Ulysse, C. / Pelta, J. / Auvray, L. / Jede, R. et al. | 2012
- 317
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Condensation of fluorescent nanoparticles using a DEP chip with a dot-electrode arrayChuang, Cheng-Hsin / Huang, Yao-Wei et al. | 2012
- 324
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Effect of mechanical stimuli on live cells in a pneumatically driven cell trapKim, Tae Kyung / Jeong, Ok Chan et al. | 2012
- 329
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Effect of shear stress magnitude on intracellular calcium expression in bone cellsJeon, Jong Heon / Jeong, Ok Chan et al. | 2012
- 333
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Gallium arsenide passivation method for the employment of High Electron Mobility Transistors in liquid environmentSileo, Leonardo / Martiradonna, Luigi / Brunetti, Virgilio / Tasco, Vittorianna / De Vittorio, Massimo et al. | 2012
- 337
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SERS analysis on exosomes using super-hydrophobic surfacesTirinato, L. / Gentile, F. / Di Mascolo, D. / Coluccio, M.L. / Das, G. / Liberale, C. / Pullano, S.A. / Perozziello, G. / Francardi, M. / Accardo, A. et al. | 2012
- 341
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Flame aerosol deposition of TiO2 nanoparticle films on polymers and polymeric microfluidic devices for on-chip phosphopeptide enrichmentRudin, Thomas / Tsougeni, Katerina / Gogolides, Evangelos / Pratsinis, Sotiris E. et al. | 2012
- 345
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Vertically stacked Si nanostructures for biosensing applicationsBuitrago, Elizabeth / Fernández-Bolaños, M. / Ionescu, A.M. et al. | 2012
- 349
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Tailored Ag nanoparticles/nanoporous superhydrophobic surfaces hybrid devices for the detection of single moleculeGentile, F. / Coluccio, M.L. / Accardo, A. / Marinaro, G. / Rondanina, E. / Santoriello, S. / Marras, S. / Das, G. / Tirinato, L. / Perozziello, G. et al. | 2012
- 353
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Fabrication of a glucose sensor with oscillator circuit using CMOS-MEMS techniqueYang, Ming-Zhi / Dai, Ching-Liang / Hung, Cheng-Bei et al. | 2012
- 357
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Preparation of nanoscale thermal time of flight sensors by e-beam lithographyKallis, K.T. / Vendt, V.V. / Küchenmeister, C. / Fiedler, H.L. et al. | 2012
- 361
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An anisotropic dry etch process with fluorine chemistry to create well-defined titanium surfaces for biomedical studiesLöffler, R. / Fleischer, M. / Kern, D.P. et al. | 2012
- 365
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Beam induced deposition of 3D electrodes to improve coupling to cellsMartiradonna, Luigi / Quarta, Luca / Sileo, Leonardo / Schertel, Andreas / Maccione, Alessandro / Simi, Alessandro / Dante, Silvia / Scarpellini, Alice / Berdondini, Luca / De Vittorio, Massimo et al. | 2012
- 369
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The quadrupole microelectrode design on a multilayer biochip for dielectrophoretic trapping of single cellsIbrahim, S. Noorjannah / Murray, Lynn / Nock, Volker / Evans, John J. / Alkaisi, Maan M. et al. | 2012
- 375
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A novel volumetric silicon micropump with integrated sensorsFuchs, Olivier / Fouillet, Yves / Maubert, Sandrine / Cochet, Martine / Chabrol, Claude / David, Nadine / Médal, Xavier / Campagnolo, Raymond et al. | 2012
- 379
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Microfluidic system for cell mechanics analysis through dielectrophoresisGuido, Isabella / Xiong, Chunyang / Jaeger, Magnus S. / Duschl, Claus et al. | 2012
- 383
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Surface enhanced Raman scattering substrate based on gold-coated anodic porous alumina templateDas, G. / Patra, N. / Gopalakrishanan, A. / Proietti Zaccaria, R. / Toma, A. / Thorat, S. / Di Fabrizio, E. / Diaspro, A. / Salerno, M. et al. | 2012
- 387
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Development of a conductivity microsensor considering electric double layer capacityJanouš, Jiří / Beránek, Pavel / Přibyl, Michal / Šnita, Dalimil et al. | 2012
- 391
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Fast detection of triazine herbicides on a microfluidic chip using capillary electrophoresis pulse amperometric detectionIslam, Kamrul / Jha, Sandeep Kumar / Chand, Rohit / Han, Dawoon / Kim, Yong-Sang et al. | 2012
- 396
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Fluctuations of the mass adsorbed on microcantilever sensor surface in liquid-phase chemical and biochemical detectionJokić, Ivana / Djurić, Zoran / Frantlović, Miloš / Radulović, Katarina / Krstajić, Predrag et al. | 2012
- 400
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Author Index| 2012
- IFC
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Inside Front Cover - Editorial Board| 2012
- v
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Table of Contents| 2012