Measuring and predicting resolution in nanopositioning systems (Englisch)
- Neue Suche nach: Fleming, Andrew J.
- Neue Suche nach: Fleming, Andrew J.
In:
Mechatronics
;
24
, 6
;
605-618
;
2013
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ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Measuring and predicting resolution in nanopositioning systems
-
Beteiligte:Fleming, Andrew J. ( Autor:in )
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Erschienen in:Mechatronics ; 24, 6 ; 605-618
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Verlag:
- Neue Suche nach: Elsevier Ltd
-
Erscheinungsdatum:03.10.2013
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Format / Umfang:14 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 24, Ausgabe 6
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