Effect of growth temperature and coating cycles on structural, electrical, optical properties and stability of ITO films deposited by magnetron sputtering (Englisch)
- Neue Suche nach: Xu, Jiwen
- Neue Suche nach: Yang, Zupei
- Neue Suche nach: Wang, Hua
- Neue Suche nach: Xu, Huarui
- Neue Suche nach: Zhang, Xiaowen
- Neue Suche nach: Xu, Jiwen
- Neue Suche nach: Yang, Zupei
- Neue Suche nach: Wang, Hua
- Neue Suche nach: Xu, Huarui
- Neue Suche nach: Zhang, Xiaowen
In:
Materials Science in Semiconductor Processing
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21
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104-110
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2014
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ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Effect of growth temperature and coating cycles on structural, electrical, optical properties and stability of ITO films deposited by magnetron sputtering
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Beteiligte:Xu, Jiwen ( Autor:in ) / Yang, Zupei ( Autor:in ) / Wang, Hua ( Autor:in ) / Xu, Huarui ( Autor:in ) / Zhang, Xiaowen ( Autor:in )
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Erschienen in:Materials Science in Semiconductor Processing ; 21 ; 104-110
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Verlag:
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Erscheinungsdatum:01.01.2014
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Format / Umfang:7 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 21
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