Atomistic simulation of influence of laser nano-structured diamond abrasive on the polishing behavior of silicon (Englisch)
- Neue Suche nach: Dai, Houfu
- Neue Suche nach: Zhou, Yuqi
- Neue Suche nach: Zhang, Fa
- Neue Suche nach: Dai, Houfu
- Neue Suche nach: Zhou, Yuqi
- Neue Suche nach: Zhang, Fa
In:
Materials Science in Semiconductor Processing
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105
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2019
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ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Atomistic simulation of influence of laser nano-structured diamond abrasive on the polishing behavior of silicon
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Beteiligte:
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Erschienen in:
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Verlag:
- Neue Suche nach: Elsevier Ltd
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Erscheinungsdatum:29.08.2019
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 105
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Editorial Board| 2020