Self-assembled silicon membrane resonator for high vacuum pressure sensing (Englisch)
- Neue Suche nach: Kim, Taeyeong
- Weitere Informationen zu Kim, Taeyeong:
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https://orcid.org/0000-0001-9335-1894
- Neue Suche nach: Ko, Juhee
- Neue Suche nach: Lee, Jungchul
- Weitere Informationen zu Lee, Jungchul:
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https://orcid.org/0000-0001-7880-8657
- Neue Suche nach: Kim, Taeyeong
- Neue Suche nach: Ko, Juhee
- Neue Suche nach: Lee, Jungchul
In:
Vacuum
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201
;
2022
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ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Self-assembled silicon membrane resonator for high vacuum pressure sensing
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Beteiligte:
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Erschienen in:Vacuum ; 201
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Verlag:
- Neue Suche nach: Elsevier Ltd
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Erscheinungsdatum:09.04.2022
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 201
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