Development and irradiation performance of stencil masks for heavy-ion patterned implantation (Englisch)
- Neue Suche nach: Zheng, B.
- Neue Suche nach: Iketa, N.
- Neue Suche nach: Sato, K.
- Neue Suche nach: Sato, R.
- Neue Suche nach: Song, M.
- Neue Suche nach: Takeda, Y.
- Neue Suche nach: Amekura, H.
- Neue Suche nach: Oyoshi, K.
- Neue Suche nach: Kono, K.
- Neue Suche nach: Ila, D.
- Neue Suche nach: Kishimoto, N.
- Neue Suche nach: Zheng, B.
- Neue Suche nach: Iketa, N.
- Neue Suche nach: Sato, K.
- Neue Suche nach: Sato, R.
- Neue Suche nach: Song, M.
- Neue Suche nach: Takeda, Y.
- Neue Suche nach: Amekura, H.
- Neue Suche nach: Oyoshi, K.
- Neue Suche nach: Kono, K.
- Neue Suche nach: Ila, D.
- Neue Suche nach: Kishimoto, N.
In:
Surface and Coatings Technology
;
206
, 5
;
806-811
;
2011
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ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:Development and irradiation performance of stencil masks for heavy-ion patterned implantation
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Beteiligte:Zheng, B. ( Autor:in ) / Iketa, N. ( Autor:in ) / Sato, K. ( Autor:in ) / Sato, R. ( Autor:in ) / Song, M. ( Autor:in ) / Takeda, Y. ( Autor:in ) / Amekura, H. ( Autor:in ) / Oyoshi, K. ( Autor:in ) / Kono, K. ( Autor:in ) / Ila, D. ( Autor:in )
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Erschienen in:Surface and Coatings Technology ; 206, 5 ; 806-811
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Verlag:
- Neue Suche nach: Elsevier B.V.
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Erscheinungsdatum:01.01.2011
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Format / Umfang:6 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 206, Ausgabe 5
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- IFC
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Editorial Board| 2011