Magnetron sputter deposition: Linking discharge voltage with target properties (Englisch)
- Neue Suche nach: Depla, D.
- Neue Suche nach: Mahieu, S.
- Neue Suche nach: De Gryse, R.
- Neue Suche nach: Depla, D.
- Neue Suche nach: Mahieu, S.
- Neue Suche nach: De Gryse, R.
In:
Thin Solid Films
;
517
, 9
;
2825-2839
;
2009
-
ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Magnetron sputter deposition: Linking discharge voltage with target properties
-
Beteiligte:
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Erschienen in:Thin Solid Films ; 517, 9 ; 2825-2839
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Verlag:
- Neue Suche nach: Elsevier B.V.
-
Erscheinungsdatum:01.01.2009
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Format / Umfang:15 pages
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ISSN:
-
DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 517, Ausgabe 9
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