Effect of low temperature oxidation on dielectric properties of mercury sensitized photo-deposited silicon nitride films (Englisch)
- Neue Suche nach: Sahu, B.S.
- Neue Suche nach: Srivastava, P.
- Neue Suche nach: Agnihotri, O.P.
- Neue Suche nach: Shivaprasad, S.M.
- Neue Suche nach: Sahu, B.S.
- Neue Suche nach: Srivastava, P.
- Neue Suche nach: Agnihotri, O.P.
- Neue Suche nach: Shivaprasad, S.M.
In:
Journal of Non-Crystalline Solids
;
351
, 8-9
;
771-776
;
2003
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ISSN:
- Aufsatz (Zeitschrift) / Elektronische Ressource
-
Titel:Effect of low temperature oxidation on dielectric properties of mercury sensitized photo-deposited silicon nitride films
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Beteiligte:Sahu, B.S. ( Autor:in ) / Srivastava, P. ( Autor:in ) / Agnihotri, O.P. ( Autor:in ) / Shivaprasad, S.M. ( Autor:in )
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Erschienen in:Journal of Non-Crystalline Solids ; 351, 8-9 ; 771-776
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Verlag:
- Neue Suche nach: Elsevier B.V.
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Erscheinungsdatum:19.09.2003
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Format / Umfang:6 pages
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Schlagwörter:
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Datenquelle:
Inhaltsverzeichnis – Band 351, Ausgabe 8-9
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