A single process for building capacitive pressure sensors and timing references with precise control of released area using lateral etch stop (Englisch)
- Neue Suche nach: Chiang, Chia-Fang
- Neue Suche nach: Graham, Andrew B.
- Neue Suche nach: O'Brien, Gary J.
- Neue Suche nach: Kenny, Thomas W.
- Neue Suche nach: Chiang, Chia-Fang
- Neue Suche nach: Graham, Andrew B.
- Neue Suche nach: O'Brien, Gary J.
- Neue Suche nach: Kenny, Thomas W.
In:
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS)
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519-522
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2012
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ISSN:
- Aufsatz (Konferenz) / Elektronische Ressource
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Titel:A single process for building capacitive pressure sensors and timing references with precise control of released area using lateral etch stop
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Beteiligte:Chiang, Chia-Fang ( Autor:in ) / Graham, Andrew B. ( Autor:in ) / O'Brien, Gary J. ( Autor:in ) / Kenny, Thomas W. ( Autor:in )
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Erschienen in:
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Verlag:
- Neue Suche nach: IEEE
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Erscheinungsdatum:01.01.2012
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Format / Umfang:2161484 byte
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ISBN:
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ISSN:
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DOI:
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Medientyp:Aufsatz (Konferenz)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
- 1
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MEMS 2012 keyword index| 2012
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Acknowledgements| 2012
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Organizing committee| 2012
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Copyright page| 2012
- 1
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Challenges and emerging directions in spintronicsFert, Albert et al. | 2012
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MEMS 2012 program schedule| 2012
- 1
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MEMS 2012 author index| 2012
- 3
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- 15
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- 23
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- 35
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- 39
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- 492
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A 100 kHz vibratory MEMS rate gyroscope with experimental verification of system model's frequency scalingLiewald, J.-T. / Kuhlmann, B. / Balslink, T. / Manoli, Y. et al. | 2012
- 496
-
A 600°C wireless multimorph-based capacitive MEMS temperature sensor for component health monitoringScott, S. / Scuderi, M. / Peroulis, D. et al. | 2012
- 500
-
A flexible underwater pressure sensor array using a conductive elastomer strain gaugeYaul, F. M. / Bulovic, V. / Lang, J. H. et al. | 2012
- 504
-
A multidirectional-sensitive inertial microswitch with electrophoretic polymer-metal composite fixed electrode for flexible contactYang, Z. / Zhu, B. / Ding, G. / Wang, H. / Wang, Y. / Zhao, X. et al. | 2012
- 508
-
A new electronic scheme to compensate MEMS resonators nonlinearitiesLevy, R. / Papin, G. et al. | 2012
- 511
-
A new method for resonant sensing based on noise in nonlinear MEMSBurgner, C. B. / Shaw, L. A. / Turner, K. L. et al. | 2012
- 515
-
A passive hydrogel-based inertial switch integrated with micromachined L-C resonatorKuo, J.-C. / Yang, Y.-J. et al. | 2012
- 519
-
A single process for building capacitive pressure sensors and timing references with precise control of released area using lateral etch stopChiang, Chia-Fang / Graham, Andrew B. / O'Brien, Gary J. / Kenny, Thomas W. et al. | 2012
- 523
-
An automatically mode-matched MEMS gyroscope with 50 Hz bandwidthSonmezoglu, S. / Alper, S. E. / Akin, T. et al. | 2012
- 527
-
An electrostatic field sensor driven by self-excited vibration of sensor/actuator integrated piezoelectric micro cantileverKobayashi, T. / Oyama, S. / Okada, H. / Makimoto, N. / Tanaka, K. / Itoh, T. / Maeda, R. et al. | 2012
- 531
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Application of electro mechanical stiffness modulation in biomimetic hair flow sensorsDroogendijk, H. / Bruinink, C. M. / Sanders, R. G. R / Krijnen, G. J. M. et al. | 2012
- 535
-
Behavioral modeling and testing of a CMOS-MEMS parametric resonator governed by the nonlinear Mathieu equationGuo, Congzhong / Fedder, Gary K. et al. | 2012
- 539
-
Capacitively-driven and piezoresistively-sensed CMOS-MEMS resonatorsLi, Cheng-Syun / Chin, Chi-Hang / Liu, Yu-Chia / Li, Sheng-Shian et al. | 2012
- 543
-
CMOS-based force sensor with overload protection and improved assembly toleranceBaumann, M. / Peter, A. / Moser, D. / Ruther, P. / Paul, O. et al. | 2012
- 547
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Conception and fabrication of piezo-resistive ring-shaped AFM probesXiong, Z. / Walter, B. / Mairiaux, E. / Faucher, M. / Buchaillot, L. / Legrand, B. et al. | 2012
- 551
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Design and fabrication of a vortex inertial sensor consisting of 3-DOF gyroscope and 3-DOF accelerometerXie, Zhongjian / Chang, Honglong / Yang, Yong / Li, Xiaoqing / Zhou, Pingwei / Yuan, Weizheng et al. | 2012
- 555
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DNA origami imaging with 10.9 MHz AFM MEMS probesWalter, B. / Mairiaux, E. / Xiong, Z. / Faucher, M. / Buchaillot, L. / Legrand, B. et al. | 2012
- 559
-
Electrostatic self-calibration of vibratory gyroscopesCasinovi, G. / Sung, W. K. / Dalal, M. / Shirazi, A. N. / Ayazi, F. et al. | 2012
- 563
-
Experimental and modeling analysis on entrainment condition of submicrometer thick Si micro mechanical resonators with nonlinear coupling elementTanno, Keitaro / Kawai, Yusuke / Ono, Takahito et al. | 2012
- 567
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Flexible transparent touch panel mounted on round surfaceAsano, Koji / Shikida, Mitsuhiro / Sato, Kazuo et al. | 2012
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Inkjet printed all-polymer flexural plate wave sensorsBusch, J. R. / Sielmann, C. / Man, G. / Tsan, D. / Walus, K. / Stoeber, B. et al. | 2012
- 575
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MEMS absolute pressure sensor on a flexible substrateAhmed, Moinuddin / Butler, Donald P. / Celik-Butler, Zeynep et al. | 2012
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Off-The-Shelf MEMS for rotary MEMSHanrahan, B. / Feldman, J. / Misra, S. / Waits, C. M. / Mitcheson, P. D. / Ghodssi, R. et al. | 2012
- 583
-
Package-induced temperature dependence of MEMS capacitive strain sensor and system design considerationsYoung, Darrin J. / Suster, Michael A. / Ko, Wen H. et al. | 2012
- 587
-
Piezoelectric micro-scale mechanical computing systemProie, Robert M. / Pulskamp, Jeffrey S. / Polcawich, Ronald G. / Ivanov, Tony et al. | 2012
- 591
-
Pure oxide structure for temperature stabilization and performance enhancement of CMOS-MEMS accelerometerLiu, Yu-Chia / Tsai, Ming-Han / Fang, Weileun et al. | 2012
- 595
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Scalable six-axis force-torque sensor with a large range for biomechanical applicationsBrookhuis, R. A. / Wiegerink, R. J. / Lammerink, T. S. J. / de Boer, M. J. / Ma, K. / Elwenspoek, M. C. et al. | 2012
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Shear force detector using piezo-resistive beams with sidewall-dopingTakahashi, H. / Nakai, A. / Matsumoto, K. / Shimoyama, I. et al. | 2012
- 603
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Shear force sensor using a cantilever with liquid-embedded hingesSato, Ken / Binh-Khiem, Nguyen / Hosono, Minako / Matsumoto, Kiyoshi / Shimoyama, Isao et al. | 2012
- 607
-
Thermally actuated silicon tuning fork resonators for sensing applications in airBeardslee, L. A. / Lehmann, J. / Carron, C. / Su, J.-J. / Josse, F. / Dufour, I. / Brand, O. et al. | 2012
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Graphene has ultra high piezoresistive gauge factorHosseinzadegan, H. / Todd, C. / Lal, A. / Pandey, M. / Levendorf, M. / Park, J. et al. | 2012
- 615
-
Z-axis optomechanical accelerometerHutchison, D. N. / Bhave, S. A. et al. | 2012
- 620
-
A flexible, non-intrusive power sensor tag for the electricity monitoring of two-wire household appliancesChen, Y. C. / Hsu, W. H. / Cheng, S. H. / Cheng, Y. T. et al. | 2012
- 624
-
A microassembly process to realize angular vertical comb electrodes for a gimbal-less two-axis electrostatic scannerJun, Min-Ho / Moon, Seunghwan / Lee, Jong-Hyun et al. | 2012
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-
All-silicon interferometric optical probe for non-contact dimensional measurements in confined environmentsMalak, M. / Marty, F. / Nouira, H. / Salgado, J. / Bourouina, T. et al. | 2012
- 632
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Electrowetting Fresnel lenticularTakai, Y. / Koshiishi, R. / Kirita, S. / Tsuchiya, M. / Watanabe, Y. / Takahashi, K. / Imai, Y. / Shimpuku, Y. et al. | 2012
- 636
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High frequency torsional MEMS scanner for displaysBaran, U. / Brown, D. / Holmstrom, S. / Balma, D. / Davis, W. O. / Mazzalai, A. / Muralt, P. / Urey, H. et al. | 2012
- 640
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Implementation of vertical-integrated dual mode inductive-capacitive proximity sensorLo, Pei-Hsuan / Hong, Chitsung / Tseng, Shih-Hsiung / Yeh, Jen-Hao / Fang, Weileun et al. | 2012
- 644
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Simultaneous self-sustained actuation and parallel readout with MEMS cantilever sensor arrayLulec, S. Z. / Sagiroglu, C. / Mostafazadeh, A. / Ermek, E. / Timurdogan, E. / Leblebici, Y. / Urey, H. et al. | 2012
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Multi-spectral tunable excitation fluorescence microscopy with a nanoimprinted PDMS-on-silicon grating optical filterHuang, N.-T. / Truxal, S. / Tung, Y.-C. / Kurabayashi, K. et al. | 2012
- 652
-
Rapid detecting z-position of moving objects in microchannel utilizing a novel chromatic aberration effect under a dark-field illumination schemeSu, Shin-Yu / Lin, Che-Hsin et al. | 2012
- 656
-
Self-aligned VCSEL-microlens scanner with large scan rangeQuack, N. / Chou, J. B. / Wu, M. C. et al. | 2012
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Si photonic nano-wire tunble micro-ring resonator composed of triply-liked variable couplersIkeda, Taro / Kanamori, Yoshiaki / Hane, Kazuhiro et al. | 2012
- 664
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1.12GHz Opto-Acoustic OscillatorSridaran, Suresh / Bhave, Sunil A. et al. | 2012
- 668
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1 Volt digital logic circuits realized by stress-resilient ALN parallel dual-beam MEMS relaysSinha, Nipun / Guo, Zhijun / Tazzoli, Augusto / DeHon, Andre / Piazza, Gianluca et al. | 2012
- 672
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Acoustic whispering gallery mode resonator with Q > 109,000 at 515MHzRocheleau, Tristan O. / Naing, Thura Lin / Ren, Zeying / Nguyen, Clark T.-C. et al. | 2012
- 676
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An inverted-gap analog tuning RF-MEMS capacitor with 250 milliwatts power handling capabilityBarriere, F. / Passerieux, D. / Mardivirin, D. / Pothier, A. / Blondy, P. et al. | 2012
- 680
-
Capacitance characterization of dielectric charging effect in RF MEMS capacitive switches under different humidity environmentsWang, Li-Feng / Tang, Jie-Ying / Huang, Qing-An et al. | 2012
- 684
-
Compact MEMS reconfigurable ultra-wideband 10–18 GHz directional couplersShah, U. / Sterner, M. / Oberhammer, J. et al. | 2012
- 688
-
Cyclic evolution of bouncing for contacts in commercial RF MEMS switchesFruehling, Adam / Yang, Wei / Peroulis, Dimitrios et al. | 2012
- 692
-
Geometry optimization for quality factor enhancement in SiC-based lateral overmoded bulk acoustic resonatorsGong, Songbin / Kuo, Nai-Kuei / Piazza, Gianluca et al. | 2012
- 696
-
High power and low temperature coefficient of frequency oscillator based on a fully anchored and oxide compensated ALN contour-mode MEMS resonatorRinaldi, M. / Tazzoli, A. / Segovia-Fernandez, J. / Felmetsger, V. / Piazza, G. et al. | 2012
- 700
-
High-stiffness-driven micromechanical resonator oscillator with enhanced phase noise performanceHou, Li-Jen / Chen, Wen-Chien / Li, Cheng-Syun / Li, Sheng-Shian et al. | 2012
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Localized thermal oxidation for frequency trimming and temperature compensation of micromechanical resonatorsHajjam, Arash / Rahafrooz, Amir / Gonzales, Jonathan / Abdolvand, Reza / Pourkamali, Siavash et al. | 2012
- 708
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Low loss micromachined lead zirconate titanate, contour mode resonator with 50Ω terminationBedair, S. S. / Pulskamp, J. S. / Polcawich, R. G. / Judy, D. / Gillon, A. / Bhave, S. / Morgan, B. et al. | 2012
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Monolithic SU-8 based hollow waveguide with integrated electro thermally tunable iris filter for W-band applicationsKohlstedt, A. / Dassinger, F. / Schlaak, F. / Fritzsch, C. / Jakoby, R. et al. | 2012
- 717
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Nanogap MEMS micro-relay with 70 ns switching speedVerger, A. / Pothier, A. / Guines, C. / Blondy, P. / Vendier, O. / Courtade, F. et al. | 2012
- 721
-
Stacked-spiral RF inductors with vertical nano-particle-magnetic-mediumYang, C. / Zhan, J. / Wang, X. / Fang, Q. / Shi, Z. / Yang, Y. / Ren, T.-L. / Wang, A. / Cheng, Y. / Li, X. et al. | 2012
- 725
-
Phononic BandGap coupled Bulk Acoustic wave ResonatorsRottenberg, X. / Jansen, R. / Tilmans, H. A. C. et al. | 2012
- 729
-
Si-based unreleased hybrid MEMS-CMOS resonators in 32nm technologyMarathe, Radhika / Wang, Wentao / Weinstein, Dana et al. | 2012
- 733
-
Micromachined aluminum nitride acoustic resonators with an epitaxial silicon carbide layer utilizing high-order Lamb wave modesLin, Chih-Ming / Chen, Yung-Yu / Felmetsger, Valery V. / Vigevani, Gabriele / Senesky, Debbie G. / Pisano, Albert P. et al. | 2012
- 737
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Thermally actuated I-shaped electromechanical VHF resonatorsHall, H. J. / Rahafrooz, A. / Brown, J. J. / Bright, V. M. / Pourkamali, S. et al. | 2012
- 741
-
A 3D parylene scaffold cage for culturing retinal pigment epithelial cellsLu, Bo / Zhu, Danhong / Hinton, David / Humayun, Mark S. / Tai, Yu-Chong et al. | 2012
- 745
-
A continuous-flow microbial microreactor using microbes immobilized into a microporous carrier by dielectrophoresisKano, T. / Inaba, T. / Gu, Y. / Miki, N. et al. | 2012
- 749
-
A low-cost spray process for producing high performance CO sensors ultilzing toluene-based gold nanoparticlesWang, Chun-Yi / Lee, Ho-Cheng / Chou, Chen-Shiun / Lin, Che-Hsin et al. | 2012
- 753
-
A MEMS-based approach to detection of single nucleotide polymorphisms for genetic disorder diagnosisZhu, Jing / Palla, Mirko / Ronca, Stefano / Warpner, Ronald / Ju, Jingyue / Lin, Qiao et al. | 2012
- 757
-
A micro device for measuring single-cell membrane specific capacitance and cytoplasm conductivityTan, Qingyuan / Chen, Jian / Zheng, Yi / Chen, Brandon K. / Sun, Yu et al. | 2012
- 761
-
A micro-PCR chamber suitable for integration into a monolithic silicon lab-on-a-chip platformJones, B. / Fiorini, P. / Peeters, S. / Majeed, B. / de Beeck, M. Op / Yamashita, I. / Van Hoof, C. et al. | 2012
- 765
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A microchip for nucleic acid isolation and enrichmentKim, J. / Hilton, J. P. / Yang, K. A. / Pei, R. / Ennis, K. / Stojanovic, M. / Lin, Q. et al. | 2012
- 769
-
A soft hydrogel contact lens with an encapsulated sensor for tear glucose monitoringYao, H. / Marcheselli, C. / Afanasiev, A. / Lahdesmaki, I. / Parviz, B. A. et al. | 2012
- 773
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A study of cancer cell metastasis using microfluidic transmigration deviceFu, Y. / Vandongen, A. M. J. / Bourouina, T. / Park, W. T. / Je, M. Y. / Tsai, J. M. / Kwong, D. L. / Liu, A. Q. et al. | 2012
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An integrated hybrid microfluidic system for online bioprocesses monitoring: Combining electrical lysis and EWOD sample preparationWu, C. / Brunelle, F. / Harnois, M. / Follet, J. / Senez, V. et al. | 2012
- 781
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Calcium ions detection using miniaturized InN-based sensorKao, K. W. / Su, Y. W. / Lu, Y. S. / Yao, Da-Jeng / Gwo, Shangjr / Yeh, J. Andrew et al. | 2012
- 784
-
Carbon dioxide detection by surface plasmon resonance with ionic liquidIshizu, K. / Kan, T. / Takei, Y. / Takahashi, H. / Matsumoto, K. / Shimoyama, I. et al. | 2012
- 788
-
Cell culture biochemical IC chip with cell-level biocompatibilityInoue, Yoshinori / Ikuta, Koji et al. | 2012
- 792
-
Cell pairing ratio controlled micro-environment with valve-less electrolytic isolationChen, Yu-Chih / Lou, Xia / Ingram, Patrick / Yoon, Euisik et al. | 2012
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-
CNT-FET gas sensor using a functionalized ionic liquid as gateKiga, N. / Takei, Y. / Inaba, A. / Takahashi, H. / Matsumoto, K. / Shimoyama, I. et al. | 2012
- 800
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Combinatory localized cytolysis with micron precision by acoustic transducer array for fast screening of drug induced cytoskeleton alterationWang, Lingtao / Li, Yi-Jia / Lin, Anderson / Choe, Youngki / Gross, Mitchell / Kim, Eun Sok et al. | 2012
- 804
-
Design and fabriction of micro-viscometer using the propagation of acoustic waves in micro-channelChoi, Sungjoon / Jang, Hongseok / Lee, Hongseok / Park, Jongkyu / Cha, Youngtaek / Shin, Daeyoung / Lee, Kangwon et al. | 2012
- 808
-
Double-layer hepatocyte tumor co-culture using hydrogel for drug effectivity and specificity analysisChin, L. K. / Luo, K. Q. / Park, W. / Je, M. / Tsai, J. / Kwong, D. L. / Liu, A. Q. et al. | 2012
- 812
-
Dynamic bidirectional conductance modulation during DNA translocation in a nanofluidic channelSen, Yi-Heng / Karnik, Rohit et al. | 2012
- 815
-
Emulated circulatory system integrated with lobule-mimetic liver to enhance the liver functionSivashankar, Shilpa / Puttaswamy, Srinivasu Valagerahally / Dai, Tz-Shuian / Lin, Ciou-Wun / Yang, Shih-Mo / Chang, Hwan-You / Liu, Cheng Hsien et al. | 2012
- 819
-
Fast localized single cell membrane poration by bubble-induced jetting flowLi, Z. G. / Ohl, C. D. / Zhang, J. B. / Tsai, J. / Liu, A. Q. et al. | 2012
- 823
-
First reconfigurable MEMS separation columns for micro gas chromatographyShakeel, H. / Rice, G. / Agah, M. et al. | 2012
- 827
-
From bench-to-bedside: Realizing on-chip electrophoretic immunoassays for protein biomarkers in serum using a standard 9V batteryDuncombe, T. A. / Tentori, A. M. / Hou, C. / Herr, A. E. et al. | 2012
- 831
-
Functionalized micro bead with liquid-core Parylene-shell structureAoki, H. / Binh-Khiem, N. / Kan, T. / Matsumoto, K. / Shimoyama, I. et al. | 2012
- 835
-
High-throughput white blood cells (leukocytes) separation and enrichment from whole blood by hydrodynamic and inertial forceTseng, Horas-Cendana / Wu, Ren-Guei / Chang, Hwan-You / Tseng, Fan-Gang et al. | 2012
- 839
-
Highly sensitive protein detection using quenching effects from aptamer-functionalized photonic crystalsChoi, Yuri / Choi, Eunpyo / Park, Jungyul et al. | 2012
- 842
-
Integrated fluorescent analysis system with monolithic GaN light emitting diode on Si platformNakazato, H. / Kawaguchi, H. / Iwabuchi, A. / Hane, K. et al. | 2012
- 846
-
Integrated VOC vapor sensing on FBAR-CMOS arrayJohnston, Matthew L. / Edrees, Hassan / Kymissis, Ioannis / Shepard, Kenneth L. et al. | 2012
- 850
-
Micro-fluidic resonatorPigot, Ch. / Hibara, A. et al. | 2012
- 854
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Uniaxial cell stretcher enables high resolution live cell imagingSim, J. Y. / Borghi, N. / Ribeiro, A. / Sorokina, M. / Shcherbakova, O. / Ramallo, D. / Dunn, A. / Nelson, W. J. / Pruitt, B. L. et al. | 2012
- 858
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Micromechanical aptasensor-based protein detection using a compact-disc format microfluidics systemBosco, F. G. / Yang, J. / Chen, C. H. / Hwu, E.-T. / Keller, S. S. / Bache, M. / Lin, Q. / Boisen, A. et al. | 2012
- 862
-
Mimicking insect signaling: Artificial gland for biosynthesis and release of semiochemicals for communicationBula, W. P. / Dimov, N. G. / Munoz, L. / Carot-Sans, G. / Guerrero, A. / Gardeniers, J. G. E. et al. | 2012
- 866
-
Muscle fibers actuated by neural signalsMorimoto, Y. / Kato-Negishi, M. / Onoe, H. / Takeuchi, S. et al. | 2012
- 870
-
On-chip formation and perfusion culture of 3D tumor spheroids using gravity-driven cell aggregation and pumpless balanced droplet dispensingKim, T. / Cho, Y.-H. et al. | 2012
- 874
-
Rapid measurement of AFP using AFP-specific aptamer on a microfluidic chipHuang, Chao-Jyun / Lin, Hsin-I / Shiesh, Shu-Chu / Lee, Gwo-Bin et al. | 2012
- 878
-
Scalable suspended carbon nanowire meshes as ultrasensitive electrochemical sensing platformsHeo, Jeong-Il. / Lim, Yeongjin / Madou, Marc / Shin, Heungjoo et al. | 2012
- 882
-
Solution exchange of droplet contacting lipid bilayer systemTsuji, Yutaro / Kawano, Ryuji / Osaki, Toshihisa / Sasaki, Hirotaka / Kamiya, Koki / Miki, Norihisa / Takeuchi, Shoji et al. | 2012
- 886
-
Streaming current measurements in micro and nanofluidic channels for label-free multiplexed genomics diagnosticsMartins, D. C. / Chu, V. / Prazeres, D. M. F. / Conde, J. P. et al. | 2012
- 890
-
Towards a fully integrated laser-induced fluorescence detection device for point-of-care bioanalysisKamei, T. / Ito, S. / Kobayashi, T. / Maeda, R. et al. | 2012
- 894
-
Ultrasensitive detection of avian influenza virus by using CMOS impedimetric sensor arraysLai, Wei-An / Lin, Chih-Heng / Yang, Yuh-Shyong / Lu, Michael S.-C. et al. | 2012
- 898
-
Virtual microwells for three-dimensional cell culture on a digital microfluidic platformEydelnant, Irwin A. / Li, Betty B. / Wheeler, Aaron R. et al. | 2012
- 902
-
A compact circumferential scanned endoscopic imaging probe using a MEMS-driven pyramidal polygon reflectorMu, X. J. / Zhou, G. / Yu, H. B. / Du, Y. / Feng, H. H. / Tsai, J. M. L. / Chau, F. S. et al. | 2012
- 906
-
A golden micro-trap for anesthetic depth monitoring using human breath samplesAkbar, Muhammad / Agah, Masoud et al. | 2012
- 910
-
A MEMS differential dielectric sensor for continuous glucose monitoringHuang, X. / LeDuc, C. / Ravussin, Y. / Li, S. / Song, B. / Wang, Q. / Accili, D. / Leibel, R. / Lin, Q. et al. | 2012
- 914
-
A self-curling monolithically-backed active high-density cochlear electrode arrayJohnson, Angelique C. / Wise, Kensall D. et al. | 2012
- 918
-
An integrated microfluidic platform for chromosomal analysisTai, Chien-Hsuan / Chen, Ya-Lan / Ho, Chung-Liang / Lee, Gwo-Bin et al. | 2012
- 922
-
An ocular tack for minimally invasive continuous wireless monitoring of intraocular pressureChitnis, G. D. / Maleki, T. / Samuels, B. / Cantor, L. B. / Ziaie, B. et al. | 2012
- 926
-
Biomimetic accommodating intraocular lens (IOL)DeBoer, Charles / Do, Hyung Wan / Lee, Jonathan / Humayun, Mark / Tai, Yu-Chong et al. | 2012
- 930
-
Body temperature powered device for dermal wound drug deliveryBell, Alexander / Pharas, Kunal / Ehringer, William D. / McNamara, Shamus et al. | 2012
- 933
-
Cell pattern formation controlled by microscale interfacesChen, T.-H. / Wong, M. / Tintut, Y. / Demer, L. L. / Ho, C.-M. et al. | 2012
- 937
-
Cyborg eyes: Microfabricated neural interfaces implanted during the development of insect sensory organs produce stable neurorecordings in the adultJadhav, Amol D. / Aimo, Ivan / Cohen, Daniel / Ledochowitsch, Peter / Maharbiz, Michel M. et al. | 2012
- 941
-
Development of minimally invasive microdialysis needle for continuous monitoring of biological substancesTsuruoka, N. / Ishii, K. / Matsunaga, T. / Nagatomi, R. / Haga, Y. et al. | 2012
- 945
-
Electric knife for cell surgery: Local ablation by micro-plasma dischargeYamanishi, Y. / Kuriki, H. / Sakuma, S. / Onda, K. / Kawahara, T. / Arai, F. et al. | 2012
- 949
-
Finger-powered bead-in-droplet microfluidic system for point-of-care diagnosticsIwai, K. / Sochol, R. D. / Lee, L. P. / Lin, L. et al. | 2012
- 953
-
Fluidic preparation of patterned hydrogel fibers using micronozzle-array devices for neural cell guidanceNaganuma, Yoji / Yamada, Masumi / Sugaya, Sari / Seki, Minoru et al. | 2012
- 957
-
Integrated microfluidic oxygenator bundles for blood gas exchange in premature infantsRochow, Niels / Wu, Wen-I / Chan, Emily / Nagpal, Dipen / Fusch, Gerhard / Selvaganapathy, P. Ravi / Monkman, Shelley / Fusch, Christoph et al. | 2012
- 961
-
Integrated microfluidic system for HIV detectionWang, Jung-Hao / Wang, Chih-Hung / Ling, Wei-Shuo / Jheng, Lie / Wang, Shainn-Wei / Lee, Gwo-Bin et al. | 2012
- 965
-
Liquid capped encoded microshell and partipetting for untraplex liquid assaySong, Younghoon / Kwon, Taehong / Lee, Daewon / Kwon, Sunghoon et al. | 2012
- 969
-
Measurement of breathing characteristic in mouse during inhaling drugShikano, Takaaki / Shikida, Mitsuhiro / Matsushima, Miyoko / Kawabe, Tsutomu / Sato, Kazuo et al. | 2012
- 973
-
Nano-patterned hydrogel reduced inflammatory effects in subcutaneous tissueTakahashi, M. / Heo, Y. J. / Shibata, H. / Satou, H. / Kawanishi, T. / Okitsu, T. / Takeuchi, S. et al. | 2012
- 977
-
“Neural bypass” with hydrogel microfiber encapsulating neuronsKato-Negishi, Midori / Onoe, Hiroaki / Takeuchi, Shoji et al. | 2012
- 981
-
Packaging for a wireless intraocular pressure sensor with a solder-filled microchannel antennaVarel, Cagdas / Shih, Yi-Chun / Otis, Brian P. / Shen, Tueng S. / Bohringer, Karl F. et al. | 2012
- 985
-
Enzyme digestion-based microfluidic system for DNA methylation assayWang, Chih-Hung / Hsu, Keng-Fu / Chou, Cheng-Yang / Lee, Gwo-Bin et al. | 2012
- 989
-
A centrifugo-pneumatic cascade for fully integrated and multiplexed biological analysisGodino, Neus / Gorkin, Robert / Linares, Ana V. / Burger, Robert / Ducree, Jens et al. | 2012
- 993
-
A flow-through electroporation chip integrated with viable cell sorting based on dielectrophoresisLi, Xueming / Wei, Zewen / Zhao, Deyao / Yan, Hao / Liang, Zicai / Li, Zhihong et al. | 2012
- 997
-
A nanochannel fabrication technique by two-photon direct laser writingHeo, Y. J. / Iwanaga, S. / Takeuchi, S. et al. | 2012
- 1001
-
A scalable, modular, multi-stage, peristaltic, electrostatic gas micro-pumpBesharatian, Ali / Kumar, Karthik / Peterson, Rebecca L. / Bernal, Luis P. / Najafi, Khalil et al. | 2012
- 1005
-
A super-lyophobic PDMS micro-tunnel as a novel microfluidic platform for oxidized Galinstan®Kim, Daeyoung / Lee, Dong-Weon / Choi, Wonjae et al. | 2012
- 1009
-
An integration cell communication ration platform by PEGDA-base V-shaped barrier for rapid liver screeningKe, Ling-Yi / Chen, Yu-Shih / Liu, Cheng-Hsien et al. | 2012
- 1013
-
Bubble-induced streaming for micro-object manipulationLee, Jeong Hyun / Lee, Kyung Ho / Chae, Jeong Byung / Rhee, Kyehan / Chung, Sang Kug et al. | 2012
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Centrifugally enhanced paper microfluidicsGodino, Neus / Comaskey, Eamon / Gorkin, Robert / Ducree, Jens et al. | 2012
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Cerebral blood flow sensor with in situ temperature and thermal conductivity compensationLi, Chunyan / Wu, Pei-Ming / Hartings, Jed A. / Wu, Zhizhen / Ahn, Chong H. / Narayan, Raj K. et al. | 2012
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Continuous size-selective separation using three dimensional flow realized by multilayer PDMS structureYoon, D. H. / Sekiguchi, T. / Go, J. S. / Shoji, S. et al. | 2012
- 1029
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Dierectrophoresis-based tweezers for cell-sized liposome manipulationKodama, Taiga / Osaki, Toshihisa / Kawano, Ryuji / Sasaki, Hirotaka / Kamiya, Koki / Miki, Norihisa / Takeuchi, Shoji et al. | 2012
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Dynamic and static impedance spectroscopy for single particle characterization in microfluidic chipsBurgel, S. C. / Zhu, Z. / Haandbak, N. / Frey, O. / Hierlemann, A. et al. | 2012
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Electrowetting on flexible, transparent and conducting single-layer grapheneTan, X. B. / Yang, J. / Zeng, P. / Kim, E. G. R. / Huard, C. / Cheng, M. M. C. et al. | 2012
- 1041
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High throughput and parallel flow cytometer with solid immersion microball lens arrayFan, Y. J. / Sheen, H. J. / Chiou, P. Y. et al. | 2012
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Integration of EWOD pumping device in deep microfluidic channels using a three-dimensional shadowmaskMorishita, S. / Kubota, M. / Mita, Y. et al. | 2012
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Lipid bilayer on a droplet: Formation of lipid bilayers on a droplet arrayTonooka, T. / Takeuchi, S. et al. | 2012
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Micro-particle transport manipulation by guided-wave optical interferenceChen, Te-Chang / Yang, Yao-Tsu / Wang, Shao-Yu / Chiu, Wei-Chao / Hsu, Li-Chung / Huang, Chieh-Yang / Shen, Da-Wei / Lee, Ming-Chang M. et al. | 2012
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Microfabricated all-around-electrode AC electroosmotic pump with simple design and increased velocity generationRibetto, L. / Homsy, A. / de Rooij, N. F. et al. | 2012
- 1061
-
Microfluidic control of internal morphology of hydrogel fiberKiriya, D. / Takeuchi, S. et al. | 2012
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Microfluidic handling of hydrogel microfibersOnoe, H. / Gojo, R. / Kuribayashi-Shigetomi, K. / Takeuchi, S. et al. | 2012
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Microfluidic organic light emitting diode (OLED) using liquid organic semiconductorsKasahara, T. / Mizuno, J. / Hirata, S. / Edura, T. / Matsunami, S. / Adachi, C. / Shoji, S. et al. | 2012
- 1073
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Noncontact nanometric positioning of probe tip for measurement of mechanical parameters of cellSakuam, S. / Arai, F. et al. | 2012
- 1077
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NUSAS: Negative pressure driving HEPG2/3T3 cells mixing/gradient co-culture inside U trapper array on rapid multicellular Spheroid Assembling SystemYang, S. M. / Fu, C. Y. / Tseng, S. Y. / Srinivasu, V. P. / Shilpa, S. / Chang, H. Y. / Hsu, L. / Liu, C. H. et al. | 2012
- 1081
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On-chip noncontact actuation of a micro-pipette driven by permanent magnetsIchikawa, A. / Arai, F. et al. | 2012
- 1085
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Optimum temperature control of micro devices under high-speed thermal disturbancesKim, M.-S. / Morimoto, K. / Ito, S. / Suzuki, Y. et al. | 2012
- 1089
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Preparation of a micro glass microfluidic device by a Chemical Foaming Process for applications of a focus ultrasonic transducerLuo, X. H. / Qin, S. J. / Shang, J. T. / Yu, H. / Wang, T. T / Tang, J. Y / Huang, Q. A. et al. | 2012
- 1093
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Programmable protein crystallization in metered encapsulated dropletsHsu, Y.-W. / Chen, C.-H. / Fan, S.-K. et al. | 2012
- 1097
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Pulsed laser triggered high speed microfluidic fluorescence activated cell sorterWu, T.-H. / Chen, Y. / Park, S.-Y. / Hong, J. / Teslaa, T. / Zhong, J. F. / Di Carlo, D. / Teitell, M. A. / Chiou, P.-Y. et al. | 2012
- 1101
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Pumps, NO-valves, NC-valves on paper analysis chipOkabe, S. / Sakamoto, K. / Murakami, Y. / Ishikawa, T. / Miyake, R. et al. | 2012
- 1105
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Size-oriented passive droplet sorting by using surface free energy with micro guide grooveHarada, Yu / Yoon, Dong Hyun / Sekiguchi, Tetsushi / Shoji, Shuichi et al. | 2012
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Three dimensional microfluidic design with spincoated micrometer-thin elastomer multilayerBinh-Khiem, N. / Thanh-Vinh, N. / Matsumoto, K. / Shimoyama, I. et al. | 2012
- 1113
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Trapping and collection of uniform size droplets using a well array inside a microchannelDoh, Il / Erdem, E. Yegan / Pisano, Albert P. et al. | 2012
- 1117
-
3D remote controllable nano actuation system for cell handling and micro surgeryYasui, Masato / Ikeuchi, Masashi / Ikuta, Koji et al. | 2012
- 1121
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Ferrofluid-based variable inductorAssadsangabi, B. / Ali, M. S. Mohamed / Takahata, K. et al. | 2012
- 1125
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A nano-actuator via cavity-enhanced optical dipole forceTao, J. F. / Wu, J. / Cai, H. / Zhang, Q. X. / Kun, X. / Tsai, J. M. / Kwong, D. L. / Liu, A. Q. et al. | 2012
- 1129
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Artificial tactile feeling displayed by large displacement MEMS actuator arraysWatanabe, J. / Ishikawa, H. / Arouette, X. / Matsumoto, Y. / Miki, N. et al. | 2012
- 1133
-
Autonomous decentralized operations of a stack-integrated sensor/actuator array for 2D planar micro manipulatorAtaka, M. / Mita, M. / Fujita, H. et al. | 2012
- 1137
-
Bistability under tension and its use in a threshold force sensorRabanim, S. / Amir, E. / Schreiber, D. / Krylov, S. et al. | 2012
- 1141
-
Cantilever actuated by piezoelectric Parylene-CKim, Justin Young-Hyun / Nandra, Mandheerej / Tai, Yu-Chong et al. | 2012
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Design and fabrication of a rotary comb-actuated microgripper with high driving efficiencyChang, Honglong / Zhao, Haitao / Xie, Jianbing / Hao, Yongcun / Zhang, Feng / Yuan, Weizheng et al. | 2012
- 1149
-
Flexible latching-type tactile display system actuated by combination of electromagnetic and pneumatic forcesNa, Kyounghwan / Han, Ji-Seok / Roh, Duk-Moon / Chae, Byung-Ki / Yoon, Eui-Sung / Kang, Ji Yoon / Cho, Il-Joo et al. | 2012
- 1153
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Low-voltage PZT-actuated MEMS switch monolithically integrated with CMOS circuitKousuke, Matsuo / Moriyama, Masaaki / Esashi, Masayoshi / Tanaka, Shuji et al. | 2012
- 1157
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Magnetostatic micro-actuator based on ultrasoft elastomeric membrane and copper — Permalloy electrodeposited structuresStreque, J. / Talbi, A. / Bonnerot, C. / Pernod, P. / Preobrazhensky, V. et al. | 2012
- 1161
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Mechanical displacement multiplier: 250 μM stable travel range MEMS actuator using frictionless simple compliant structuresNada, Y. / Medhat, M. / Nagi, M. / Marty, F. / Saadany, B. / Bourouina, T. et al. | 2012
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MEMS micro robot using MOSFET based pulse-type hardware neural networks for motion controlOkazaki, K. / Ogiwara, T. / Takato, M. / Iiduka, A. / Takahama, S. / Fujiwara, M. / Saito, K. / Uchikoba, F. et al. | 2012
- 1169
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Quasi-shear mode piezoelectric microactuator for head-based servo control in hard disk drivesWernow, Josiah / Horowitz, Roberto et al. | 2012
- 1173
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RGB color changing micropixels using magnetic nanocomposite microactuatorsKim, J. / Lee, H. / Kwon, S. et al. | 2012
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Robotic-Investigators for microorganisms in a microfluidic chipSugita, Masakuni / Kawahara, Tomohiro / Hagiwara, Masaya / Yamanishi, Yoko / Arai, Fumihito et al. | 2012
- 1181
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Self-aligned fabrication process for active membrane made of photosensitive nanocompositeNakahara, Tasuku / Hosokawa, Yuuki / Terao, Kyohei / Takao, Hidekuni / Shimokawa, Fusao / Oohira, Fumikazu / Namazu, Takahiro / Kotera, Hidetoshi / Suzuki, Takaaki et al. | 2012
- 1185
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The Capillary Force Actuator: Design, fabrication and characterizationWang, Huihui / Gaskins, John T. / Knospe, Carl R. / Reed, Michael L. et al. | 2012
- 1189
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Trench-filled cellular parylene structure for piezoelectric polymer electretFeng, Y. / Hagiwara, K. / Iguchi, Y. / Suzuki, Y. et al. | 2012
- 1193
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Ultrasonic electrostatic actuators on a flexible substrateKim, Sangpyeong / Zhang, Xu / Daugherty, Robin / Lee, Ed / Kunnen, George / Allee, David R. / Forsythe, Eric / Chae, Junseok et al. | 2012
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A novel betavoltaic microbattery based on SWNTs thin film-silicon heterojunctionChen, C. C. / Chang, Y. Y. / Zhang, J. W. et al. | 2012
- 1201
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A piezoelectric vibration harvester based on clamped-guided beamsWang, Z. / Matova, S. / Elfrink, R. / Jambunathan, M. / de Nooijer, C. / van Schaijk, R. / Vullers, R. J. M. et al. | 2012
- 1205
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A scalable piezoelectric impulse-excited generator for random low frequency excitationPillatsch, P. / Yeatman, E. M. / Holmes, A. S. et al. | 2012
- 1209
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An integrated electromagnetic micro-turbo-generator supported on encapsulated microball bearingsBeyaz, M. I. / Hanrahan, B. / Feldman, J. / Ghodssi, R. et al. | 2012
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Are nonlinear resonators suitable for energy harvesting? — Equivalent circuit analysis of nonlinear response of MEMS resonatorKitamura, A. / Hirai, Y. / Sugano, K. / Tabata, O. / Tsuchiya, T. et al. | 2012
- 1217
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Cooling performance of micromachined self-oscillating reed actuators in heat transfer channels with integrated diagnosticsHerrault, F. / Hidalgo, P. A. / Ji, C.-H. / Glezer, A. / Allen, M. G. et al. | 2012
- 1221
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Electromagnetic energy harvester by using buried NdFeBMiki, S. / Fujita, T. / Kotoge, T. / Jiang, Y. G. / Uehara, M. / Kanda, K. / Higuchi, K. / Maenaka, K. et al. | 2012
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Experimental estimation of cooling power of a solid state micro magnetic refrigerator using La(FexSi1−x)13HyTsukamoto, T. / Esashi, M. / Tanaka, S. et al. | 2012
- 1229
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Fabrication of narrow comb-shaped electret by removing charge using excimer laser beam from charge-implanted CYTOP film for avoiding electrostatic repulsion problemSuzuki, M. / Wada, T. / Takahashi, T. / Matsushita, T. / Onishi, J. / Nishida, T. / Yoshikawa, Y. / Aoyagi, S. et al. | 2012
- 1233
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Flexible energy storage devices based on lift-off of CNT filmsKozinda, A. / Jiang, Y. / Lin, L. et al. | 2012
- 1237
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Fully integrated micro electromagnetic vibration energy harvesters with micro-patterning of bonded magnetsTao, K. / Ding, G. / Wang, P. / Yang, Z. / Wang, Y. et al. | 2012
- 1241
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High-power density pyroelectric energy harvesters incorporating switchable liquid-based thermal interfacesCha, Gilhwan / Jia, Yanbing / Ju, Y. Sungtaek et al. | 2012
- 1245
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Initiation of nanoporous energetic silicon by optically-triggered, residual stress powered microactuatorsMorris, Christopher J. / Laflin, Kate E. / Churaman, Wayne A. / Becker, Collin R. / Currano, Luke J. / Gracias, David H. et al. | 2012
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Insect-mountable biofuel cell with self-circulation systemShoji, K. / Akiyama, Y. / Suzuki, M. / Hoshino, T. / Nakamura, N. / Ohno, H. / Morishima, K. et al. | 2012
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Integration of piezoelectric energy scavengers with FBAR resonators for the miniaturization of autonomous wireless sensors nodesMurillo, G. / Campanella, H. / Agusti, J. / Esteve, J. / Abadal, G. et al. | 2012
- 1257
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Micro-rotational electromagnetic generator for high speed applicationsCordero, R. / Rivera, A. / Neuman, M. / Warrington, R. / Romero, E. et al. | 2012
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Microfabricated silicon carbide thermionic energy converter for solar electricity generationLee, Jae Hyung / Bargatin, Igor / Gwinn, Thomas O. / Vincent, Maxime / Littau, Karl A. / Maboudian, Roya / Shen, Z.-X. / Melosh, Nicholas A. / Howe, Roger T. et al. | 2012
- 1265
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Milliwatt order vertical vibratory energy harvesting using electret and ferroelectric — Discharge does not occur with small gap and only one wiring is requiredTakahashi, T. / Suzuki, M. / Nishida, T. / Yoshikawa, Y. / Aoyagi, S. et al. | 2012
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Multi-axis AlN-on-Silicon vibration energy harvester with integrated frequency-upconverting transducersFu, J. L. / Nakano, Y. / Sorenson, L. D. / Ayazi, F. et al. | 2012
- 1273
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Non-contact frequency-up-conversion energy harvester for durable & broad-band automotive TPMS applicationTang, Q. C. / Xia, X. Y. / Li, X. X. et al. | 2012
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Sandwich structured electrostatic/electrets parallel-plate power generator for low acceleration and low frequency vibration energy harvestingLiu, S. W. / Lye, S. W. / Miao, J. M. et al. | 2012
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SiO2 electret induced by potassium ions on a comb-drive actuatorSugiyama, Tatsuhiko / Aoyama, Mitsuru / Shibata, Yasushi / Suzuki, Masato / Konno, Takashi / Ataka, Manabu / Fujita, Hiroyuki / Hashiguchi, Gen et al. | 2012
- 1285
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Thermoelectric energy scavenging with temperature gradient amplificationMousoulis, C. / Yoon, C. K. / Chitnis, G. / Ziaie, B. et al. | 2012
- 1289
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Vibration energy harvesters on plastic foil by lamination of PZT thick sheetsQuintero, A. Vasquez / Briand, D. / Janphuang, P. / Ruan, J. J. / Lockhart, R. / de Rooij, N. F. et al. | 2012
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Wafer-level integrated electrospray emitters for a pumpless microthruster system operating in high efficiency ion-modeAtaman, Caglar / Dandavino, Simon / Shea, Herbert et al. | 2012
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A nano-optical switch driven by optical force using a laterally coupled double-ring resonatorCai, H. / Xu, K. J. / Tao, J. F. / Ding, L. / Tsai, J. M. / Lo, G. Q. / Kwong, D. L. et al. | 2012
- 1301
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Acoustic emission transducer based on PZT nanofibersChen, X. / Guo, S. / Shi, Y. et al. | 2012
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Dielectrophoretic concentrator for enhanced performance of poly-silicon nanowire field effect transistor for biosensing applicationPuttaswamy, Srinivasu Valagerahally / Su, Yi-Jr / Sivashankar, Shilpa / Yang, Shih-Mo / Yang, Yuh-Shyong / Liu, Cheng-Hsien et al. | 2012
- 1309
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Direct-write single-walled carbon nanotube serpentines using micro chemical vapor depositionZhou, Qin / Huang, Jiming / Lin, Liwei et al. | 2012
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In-situ self-assembled colloidal crystals within microchannels using one step stamping for direct seawater desalination by ion concentration polarizationChoi, Eunpyo / Kwon, Kilsung / Lee, Seung Jun / Kim, Daejoong / Park, Jungyul et al. | 2012
- 1316
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Integrated carbon nanotube arrays for reliable contact in electromechanical memory deviceChoi, Jungwook / Eun, Youngkee / Kim, Jongbaeg et al. | 2012
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Large range MEMS motion detection using integrated piezo-resistive silicon nanowireAllain, P. E. / Bosseboeuf, A. / Parrain, F. / Maaroufi, S. / Coste, P. / Walther, A. et al. | 2012
- 1324
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Length controlled in-plane synthesis of aligned carbon nanotube array by micromechanical springChoi, Jungwook / Pyo, Soonjae / Lee, Jae-Ik / Kim, Jongbaeg et al. | 2012
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Minimum detectable strain improvement in junctionless nanowire FET sensorsSingh, Pushpapraj / Miao, Jianmin / Park, Woo-Tae / Kwong, Dim-Lee et al. | 2012
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Nanoscale dynamic viscoelasticity analyzer by using optically driven nanobeams for study of biomoleculesShimada, N. / Kadoguchi, K. / Ikeuchil, M. / Ikuta, K. et al. | 2012
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Piezoelectricity of sub-20-nm nanoimprinted PVDF-TrFE nanograssHong, Chien-Chong / Huang, Sheng-Uan / Shieh, Jiann / Chen, Szu-Hung / Chen, Alan et al. | 2012
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Radial bulk-mode vibrations in a gate-all-around silicon nanowire transistorZiaei-Moayyed, M. / Resnick, P. / Draper, B. / Okandan, M. et al. | 2012
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Silicon nanowire FET arrays for real time detection of chemical activation of cellsMoh, T. S. Y. / Srivastava, S. K. / Milosavljevic, S. / Roelse, M. / Pandraud, G. / Zandbergen, H. W. / de Smet, L. C. P. M / van Rijn, C. J. M / Sudholter, E. J. R. / Jongsma, M. A. et al. | 2012
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Single-step, high-throughput biofunctionalization of nanoelectromechanical systems by means of nanocontact printing methodGuillon, S. / Salomon, S. / Seichepine, F. / Dezest, D. / Mathieu, F. / Bouchier, A. / Mazenq, L. / Thibault, C. / Vieu, C. / Leichle, T. et al. | 2012
- 1352
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Transfer of carbon nanotubes onto microactuators for hysteresis-free transistors at low thermal budgetMuoth, M. / Hierold, C. et al. | 2012
- 1356
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Multiple tip nano probe actuators with integrated JFETsAmponsah, Kwame / Lal, Amit et al. | 2012
- 1360
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Tunable shrink induced graphene composites for chemical sensors and microfluidicsZhang, B. / Cui, T. et al. | 2012
- 1364
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Ultra-high responsivity, silicon nanowire photodetectors for retinal prosthesisLee, S. / Jung, S. W. / Park, S. / Ahn, J. / Hong, S. J. / Yoo, H. J. / Lee, M. H. / Cho, D.-I. et al. | 2012
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Ultra-scaled high-frequency single-crystal Si NEMS resonators and their front-end co-integration with CMOS for high sensitivity applicationsOllier, E. / Dupre, C. / Arndt, G. / Arcamone, J. / Vizioz, C. / Duraffourg, L. / Sage, E. / Koumela, A. / Hentz, S. / Cibrario, G. et al. | 2012
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Ultra-sensitive, low-power and flexible H2S sensors based on palladium nanoparticle-coated metal oxide nanowiresKim, D. / Lim, M. A. / Yang, D. / Li, Z. / Park, C. O. / Park, I. et al. | 2012