7MHZ length-extensional soi resonators with T-shaped anchors (Englisch)
- Neue Suche nach: Khine, L.
- Neue Suche nach: Palaniapan, M.
- Neue Suche nach: Khine, L.
- Neue Suche nach: Palaniapan, M.
In:
TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference
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1441-1444
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2009
- Aufsatz (Konferenz) / Elektronische Ressource
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Titel:7MHZ length-extensional soi resonators with T-shaped anchors
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Beteiligte:Khine, L. ( Autor:in ) / Palaniapan, M. ( Autor:in )
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Erschienen in:
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Verlag:
- Neue Suche nach: IEEE
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Erscheinungsdatum:01.06.2009
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Format / Umfang:651702 byte
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ISBN:
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DOI:
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Medientyp:Aufsatz (Konferenz)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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Letter from the chairsNajafi, Khalil / Schmidt, Martin et al. | 2009
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Conference at a glance| 2009
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Copyright| 2009
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Table of contents| 2009
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Author index| 2009
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Conference organizers| 2009
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Keyword| 2009
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Wireless integrated microsystems: Wearable and implantable devices for improved health careWise, Kensall D. et al. | 2009
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Patrons & exhibitors| 2009
- 9
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Wafer level packaging of MEMSEsashi, E. et al. | 2009
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MEMS for spacede Rooij, N.F. / Gautsch, S. / Briand, D. / Marxer, C. / Mileti, G. / Noell, W. / Shea, H. / Staufer, U. / van der Schoot, B. et al. | 2009
- 25
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An optimized Cu-Ni nanocomposite coil for low-power electromagnetic microspeaker fabricationChen, Y. C. / Liu, Wei-Ting / Chao, Tzu-Yuan / Cheng, Y. T. et al. | 2009
- 29
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A latchable paraffin actuated high-pressure microfluidic valveOgden, S. / Boden, R. / Hjort, K. et al. | 2009
- 33
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Bistable switching with a thermoelectrically driven thermopneumatic actuatorRuhhammer, J. / Huesgen, T. / Woias, P. et al. | 2009
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Mass-production-oriented ionic polymer actuator based on engineered material structureNagai, N. / Kawashima, T. / Ohsako, J. et al. | 2009
- 41
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A bistable SMA microactuator with large work outputBarth, J. / Krevet, B. / Kohl, M. et al. | 2009
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Tangential and perpendicular driving micro transmission systems based on ratchet mechanism and electrostatic actuatorDao, Dzung Viet / Pham, Phuc Hong / Senkawa, Satoshi / Sugiyama, Susumu et al. | 2009
- 49
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Metal core piezoelectric toughness fiberSato, Hiroshi et al. | 2009
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Outer shell actuator driving central bending shaft by balloon arrays circumferentially-arranged inside of shellKonishi, S. / Sawano, S. / Fujiwara, N. / Kurumi, Y. / Tani, T. et al. | 2009
- 57
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Rapid detection of bacterial cell from whole blood: Integration of DNA sample preparation into single micro-PCR chipHwang, K. Y. / Jung, S. Y. / Han, J. I. / Kim, Y. R. / Kim, J. H. et al. | 2009
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Open-access cell array using electroosmotic flowTerao, K. / Kitazawa, Y. / Okonogi, A. / Kotera, H. et al. | 2009
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Hermetic thin film encapsulation of mechanical transducers for smart label applicationsReuter, D. / Nowack, M. / Rennau, M. / Bertz, A. / Wiemer, M. / Kriebel, F. / Gessner, T. et al. | 2009
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Dry self-alignment for batch-assembly of chipsKurniawan, I. / Tichem, M. / Staufer, U. et al. | 2009
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Development of highly roughened porous Au electrode with Pt nano-particle for electrochemical sensor applicationsKim, J. D. / Lee, Y. J. / Park, J. Y. / Kim, H. / Kim, Y. et al. | 2009
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Van-der Waals thin-film C60 MEMSTin, S. / Lal, A. et al. | 2009
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Fabrication of flexible 3D microelectrode aray with parylene-based pattern transfer techniqueHuang, Xianju / Wang, Renxin / Wang, Wei / Li, Zhihong et al. | 2009
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Optofluidic packaging of silicon microchips for applications in light emitting devicesChung, S. E. / Lee, S. A. / Kim, J. / Kwon, S. et al. | 2009
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Development and evaluation of AuSi eutectic wafer bondingLin, Y. -C. / Baum, M. / Haubold, M. / Fromel, J. / Wiemer, M. / Gessner, T. / Esashi, M. et al. | 2009
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CMOS-compatible back-end process for in-place actuating ferromagnetic MEMSGlickman, Michael / Tseng, Peter / Harrison, Jere / Goldberg, Ira B. / Johnson, Peter / Smeys, Peter / Niblock, Trevor / Judy, Jack W. et al. | 2009
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An intelligent wind sensor system with auto-zero functionShen, G. P. / Qin, M. / Dong, Z. Q. / Huang, Q. A. et al. | 2009
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A monolithic integrated micromachined piezoresistive flow sensorLi, Dan / Zhao, T. / Qian, L. / Yang, Z. C. / Zhang, Dacheng et al. | 2009
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- 425
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- 513
-
Energy harvesting by MEMS vibrational devices with electretsSato, N. / Ono, K. / Shimamura, T. / Kuwabara1, K. / Ugajin, M. / Mutoh, S. / Morimura, H. / Ishii, H. / Kodate, J. / Sato, Y. et al. | 2009
- 517
-
High performance piezoelectric MEMS energy harvester based on D33 mode of PZT thin film on buffer-layer with PBTIO3 inter-layerPark, J.C. / Lee, D. H. / Park, J. Y. / Chang, Y. S. / Lee, Y. P. et al. | 2009
- 521
-
A hybrid generator for virbration energy harvesting applicationsWischke, M. / Masur, M. / Woias, P. et al. | 2009
- 525
-
Development of a simplified hybrid ambient low frequency, low intensity vibration energy scavenger systemKhbeis, M. / McGee, J. / Ghodssi, R. et al. | 2009
- 529
-
CM-scale air turbine and generator for energy harvesting from low-speed flowsBansal, A. / Howey, D.A. / Holmes, A.S. et al. | 2009
- 533
-
Rapid prototyping of micro-direct methanol fuel cell in PDMS with microchannel-integrated Nafion stripShen, M. / Walter, S. / Gijs, M.A.M. et al. | 2009
- 537
-
Electrodeposited thin-layer electrodes for the use in potentially implantable glucose fuel cellsKloke, A. / Kerzenmacher, S. / Zengerle, R. / von Stetten, F. et al. | 2009
- 541
-
Development of SPDT-structured RF MEMS switchUno, Yutaka / Narise, K. / Masuda, T. / Inoue, K. / Adachi, Y. / Hosoya, K. / Seki, T. / Sato, F. et al. | 2009
- 545
-
Integration of tunable capacitors and bonded-wires for contactless RF switch and tunable filterChen, Shih-Jui / Lee, Chuang-Yuan / Kim, Eun Sok et al. | 2009
- 549
-
Measuring the mechanical resonance frequency and quality factor of MEM resonators with well-defined uncertainties using optical interferometric techniquesStoffels, S. / Boedecker, S. / Puers, R. / De Wolf, I. / Tilmans, H.A.C. / Rembe, C. et al. | 2009
- 553
-
Development of a new miniaturized 300-MHZ frequency band antenna for wireless microsensor nodesTakeda, K. / Masuda, T. / Suga, T. / Itoh, T. et al. | 2009
- 557
-
High Q CMOS-MEMS resonators and its applications as RF tunable band-pass filtersLopez, J. L. / Verd, J. / Giner, J. / Uranga, A. / Murillo, G. / Marigo, E. / Torres, F. / Abadal, G. / Barniol, N. et al. | 2009
- 561
-
Enhanced transduction methods for electrostatically driven MEMS resonatorsLin, A. T-H. / Lee, J. E-Y. / Yan, J. / Seshia, A. A. et al. | 2009
- 565
-
Modeling and fabrication of piezoelectric Aluminum Nitride resonator and its application in oscillatorsMareschal, O. / Loiseau, S. / Verjus, F. / Valbin, L. / Lissorgues, G. / Bouregba, R. / Poullain, G. / Saez, S. / Dolabdjian, C. et al. | 2009
- 569
-
Silicon carbide MEMS oscilatorPehlivanoglu, I. Engin / Zorman, Christian A. / Young, Darrin J. et al. | 2009
- 573
-
Linearly variable inductor with RF MEMS switches to enlarge a continuous tuning rangeChoi, Dong-Hoon / Lee, Hyung Suk / Yoon, Jun-Bo et al. | 2009
- 577
-
Ultra-thin Super High Frequency two-port ALN contour-mode resonators and filtersRinaldi, M. / Zuniga, C. / Zuo, C. / Piazza, G. et al. | 2009
- 581
-
Individual nanowire chemical sensor system self-powered with energy scavenging technologiesPrades, J.D. / Jimenez-Diaz, R. / Hernandez-Ramirez, F. / Cirera, A. / Romano-Rodriguez, A. / Morante, J.R. et al. | 2009
- 584
-
Ultra-low power metal-oxide gas sensor on plastic foilCourbat, J. / Briand, D. / Yue, L. / Raible, S. / de Rooij, N.F. et al. | 2009
- 588
-
Microreactors for synthetic diesel production to optimize nanostructured cobalt catalystBrown, Joshua / McDonald, John / Wilson, Chester et al. | 2009
- 592
-
Novel dual transient temperature modulation technique for multi-vapour detectionIwaki, T. / Covington, J.A. / Gardner, J.W. / Udrea, F. et al. | 2009
- 596
-
Nanostructured polymer transistors for volatile organic compound detectionLi, Bo / Lambeth, David N. et al. | 2009
- 600
-
A novel method of self-assembling siloxane bi-layer directly on SiO2 surface of micro-cantilever for long-term repeatable sensing to trace explosivesChen, Ying / Xu, Pengcheng / Liu, Yongjing / Yang, Tiantian / Yang, Yongliang / Li, Xinxin et al. | 2009
- 604
-
Unidirectional cellular durotaxis via microfabricated posts of varying anisotropySochol, Ryan D. / Higa, Adrienne T. / Janairo, Randall R.R. / Chou, Annie / Li, Song / Lin, Liwei et al. | 2009
- 608
-
Localized cell lysis by Self Focused Acoustic TransducersZhu, J. / Qiu, X. / Oiler, J. / Yu, C. / Wang, Z. / Lee, C. / Hsiai, T.K. / Kim, E. S. / Yu, H. et al. | 2009
- 612
-
Hydrodynamic single-cell trapping for cellular assaysLin, C.M. / Tseng, C.C. / Chen, C.L. / Wo, Andrew M. et al. | 2009
- 616
-
Leukocyte count and two-part differential in whole blood based on a portable microflow cytometerShi, W. / Zheng, S. / Kasdan, H.L. / Fridge, A. / Tai, Y.C. et al. | 2009
- 620
-
Lateral-driven continuous magnetophoretic microseparator for separating blood cells based on their native magnetic propertiesJung, Jinhee / Han, Ki-Ho et al. | 2009
- 624
-
Microfluidic-driving multi-function manipulation array of micro-scale biological sample via ac electroosmosisChao, Tzu-Yu / Liu, Cheng-Hsien et al. | 2009
- 628
-
Large scale microfluidic systems for sequential trapping, labeling and content extraction of single cellsNoguchi, Masao / Arakawa, Takahiro / Sumitomo, Keiko / Yamaguchi, Yoshinori / Shoji, Shuichi et al. | 2009
- 632
-
Non-resonant bi-stable frequency-increased power scavenger from low-frequency ambient vibrationGalchev, T. / Kim, H. / Najafi, K. et al. | 2009
- 636
-
Effect of nonlinear external circuit on electrostatic damping force of micro electret generatorMiki, Daigo / Suzuki, Yuji / Kasagi, Nobuhide et al. | 2009
- 640
-
Magnetoelectric nanoscale magnetic-field generatorChung, Tien-Kan / Carman, Gregory P. et al. | 2009
- 644
-
A MEMS turbopump for fuel delivery in small-scale power systemsWaits, C. M. / McCarthy, M. / Ghodssi, R. et al. | 2009
- 648
-
An air-breathing silicon-based micro direct methanol fuel cell with a capillary-based water drawn out structureZhou, Y.A. / Wang, X. H. / Lin, X. / Zhang, Q. / Liu, L.T. et al. | 2009
- 652
-
An integrated microfluidic self-regulating and self-circulating hydrogen generator for fuel cellsZhu, L. / Meng, D.D. / Kroodsma, N. / Yeom, J. / Shannon1, M.A. et al. | 2009
- 656
-
Liquid-semiconductor-based micro power source using radioisotope energy conversionWacharasindhu, Tongtawee / Kwon, Jae Wan / Meier, David E. / Robertson, J. David et al. | 2009
- 660
-
Gyroscope architecture with structurally forced anti-phase drive-mode and linearly coupled anti-phase sense-modeTrusov, A.A. / Schofield, A.R. / Shkel, A.M. et al. | 2009
- 664
-
Laterally-driven deformation-robust MEMS gyroscopes with three sets of symmetrically arranged folded-beam suspensionsDegawa1, M. / Jeong, H.W. / Sonobe, H. / Takubo, C. / Yamanaka, K. / Goto, Y. et al. | 2009
- 668
-
Design, fabrication and testing of a micromachined seismometer with NANO-G resolutionPike, W.T. / Standley, I.M. / Karl, W.J. / Kumar, S. / Stemple, T. / Vijendran, S. J. / Hopf, T. et al. | 2009
- 672
-
Design and implementation of high performance CMOS-MEMS capacitive sensorsTsai, Ming-Han / Sun, Chih-Ming / Liu, Yu-Chia / Wang, Chuanwei / Fang, Weileun et al. | 2009
- 676
-
A digital accelerometer using a microscale liquid-metal droplet in photosensitive glass channelYoo, Kwanghyun / Lee, Chan / Kim, Joonwon et al. | 2009
- 680
-
Design and implementation of liquid droplet based motion sensingZeng, H. / Zhao, Y. et al. | 2009
- 684
-
One-dimensional-motion and pressure hybrid sensor fabricated and process-level-packaged with CMOS back-end-of-line processesHanaoka, Y. / Fujimori, T. / Yamanaka, K. / Machida, S. / Takano, H. / Goto, Y. / Fukuda, H. et al. | 2009
- 688
-
Energy loss in MEMS resonators and the impact on inertial and RF devicesWeinberg, Marc / Candler, Rob / Chandorkar, Saurabh / Varsanik, Jonathan / Kenny, Thomas / Duwel1, Amy et al. | 2009
- 696
-
Oscillating behavior of quality factor of a film bulk acoustic resonator in liquidsXu, W. / Abbaspour-Tamijani, A. / Chae, J. et al. | 2009
- 700
-
Q-enhancement through minimization of acoustic energy radiation in micromachined lateral-mode resonatorsHarrington, B.P. / Abdolvand, R. et al. | 2009
- 704
-
Tuning the quality factor of microcantilever using hydrodynamic coupling of micro structuresLee, J.-H. / Lau, Y.-D. / Yao, C.-M. / Fang, W. et al. | 2009
- 708
-
Frequency scaling and transducer efficiency in internal dielectrically transduced silicon bar resonatorsWeinstein, Dana / Bhave, Sunil A. / Morita, Shinya / Mitarai, Shun / Ikeda, Koichi et al. | 2009
- 712
-
Optical detection in microfluidics: From the small to the largedeMello, A.J. / French, P.M.W. / Neil, M.A.A / Edel, J.B. / Benninger, R.K.P. / Bradley, D.D.C / Robinson, T. / Srisa-art, M. / Hofmann, O. / deMello, J.C. et al. | 2009
- 718
-
A novel optofluidic evanescent waveguide sensor system for fluorescence spectroscopy fabricated by micro-stereolithographyRosenauer, M. / Stampfl, J. / Vellekoop, M. J. et al. | 2009
- 722
-
A microcantilever sensor with integrated optical readout for antimicrobial drug discoveryKoev, S. T. / Fernandes, R. / Bentley, W. E. / Ghodssi, R. et al. | 2009
- 726
-
A combined enhanced-fluorescence and label-free imaging instrumentBlock, I.D. / Mathias, P.C. / Ganesh, N. / Cunningham, B.T. et al. | 2009
- 730
-
Enhancing dna microarray detection limits using optical resonances from photonic crystal surfacesMathias, P.C. / Jones, S.I. / Gonzalez, D.O. / Vodkin, L.O. / Cunningham, B.T. et al. | 2009
- 734
-
CMOS-integrated sige MEMS: Application to micro-mirrorsWitvrouw, A. / Beyne, E. / Haspeslagh, L. / De Wolf, I. et al. | 2009
- 740
-
A new highly selective sacrificial layer technology for SiC MEMSBehnel, N. / Fuchs, T. / Seidel, H. et al. | 2009
- 743
-
Selective electrochemical release etching of eutectically bonded microstructuresGradin, H. / Braun, S. / Sterner, M. / Stemme, G. / van der Wijngaart, W. et al. | 2009
- 747
-
Continuous Cellular Automaton for the simulation of the surface morphology on any silicon orientation Si{HKL} in anisotropic etchingXing, Y. / Gosalvez, M. A. / Sato, K. et al. | 2009
- 751
-
Surfactant in TMAH for new shapes of silicon MEMS components; Its orientation dependent adsorption detected by infrared spectroscopyPal, P. / Sato, K. / Hida, H. / Gosalvez, M. A. / Kimura, Y. / Ishibashi, K. / Niwano, M. et al. | 2009
- 755
-
Silicon nanopore membrane technology for an implantable artificial kidneyRoy, Shuvo / Dubnisheva, Anna / Eldridge, Abigail / Fleischman, Aaron J. / Goldman, Kenneth G. / Humes, H. David / Zydney, Andrew L. / Fissell, William H. et al. | 2009
- 761
-
On-chip lobule-mimetic construction of heterogeneous cells and CO-cuture via a logarithmical-concentration varying bioreactorGong, Song-En / Chen, Rong-Jhe / Chin, Chung-Kuang / Chu, Wen-Chen / Ho, Chen-Ta / Chang, Hwan-You / Liu, Cheng-Hsien et al. | 2009
- 765
-
A neuron-benign microfluidic gradient generator for studying the growth of mammalian neurons towards axon guidance factorsBhattacharjee, N. / Li, N. / Folch, A. et al. | 2009
- 769
-
Autonomous beating and fluid pumping gel by cardiomycytes drug stimulationImagawa, Kentaro / Horiguchi, Hiroshi / Ikeda, Kazumasa / Akiyama, Yoshitake / Hoshino, Takayuki / Maruo, Shoji / Morishima, Keisuke et al. | 2009
- 773
-
Electrical recording of lipid membrane in a microfluidic deviceWatanabe, Yoshihiko / Osaki, Toshihisa / Takeuchi, Shoji et al. | 2009
- 777
-
An RFMEMS based reflection type C-Ku band tunable band pass filterLee, S.-S. / Nishino, T. / Kitsukawa, Y. / Konno, N. / Miyazaki, M. et al. | 2009
- 781
-
Digitally-specified micromechanical displacement amplifiersLin, Yang / Li, Wei-Chang / Gurin, Ilya / Li, Sheng-Shian / Lin, Yu-Wei / Ren, Zeying / Kim, Bongsang / Nguyen, Clark T.-C. et al. | 2009
- 785
-
On-chip soft-ferrite-integrated inductors for RF ICYang, C. / Ren, T.-L. / Liu, L.-T. / Zhan, J. / Wang, X. / Wang, A. / Wu, Z. / Li, X. et al. | 2009
- 789
-
A comprehensive study for dielectric charging process in silicon nitride films for RF MEMS switches using Kelvin Probe MicroscopyZaghloul, U. / Belarni, A. / Coccetti, F. / Papaioannou, G.J. / Bouscayrol, L. / Pons, P. / Plana, R. et al. | 2009
- 794
-
Investigation of anti-stiction coating using π-conjugated hydrophobic self-assembled monolayer for ohmic contact MEMS switchYamashita, T. / Itoh, T. / Suga, T. et al. | 2009
- 798
-
Oscillator far-from-carrier phase noise reduction via nano-scale gap tuning of micromechanical resonatorsAkgul, Mehmet / Kim, Bongsang / Hung, Li-Wen / Lin, Yang / Li, Wei-Chang / Huang, Wen-Lung / Gurin, Ilya / Borna, Ashkan / Nguyen, Clark T.-C. et al. | 2009
- 802
-
100 picoliter droplet handling using 256 (28) microvalve array with 18 multiplexed control linesKawai, Kentaro / Shibata, Yoko / Shoji, Shuichi et al. | 2009
- 806
-
High throughput DNA methylation analysis on a droplet-in-oil polymerase chain reaction arrayZhang, Yi / Bailey, Vasudev / Puleo, Christopher M. / Easwaran, Hariharan / Griffiths, Elizabeth / Herman, James G. / Baylin, Stephen B. / Wang, Tza-Huei et al. | 2009
- 809
-
On-demand double emulsification utilizing pneumatically actuated multilayer PDMS microstructuresLin, H.-H / Chang, S.-C. / Tseng, Y.-M. / Hsu, T.-H. / Su, Y.-C. et al. | 2009
- 813
-
Droplet formation and fusion for enzyme activity measurement by liquid dielectrophoresisKumemura, M. / Yoshizawa, S. / Collard, D. / Fujita, H. et al. | 2009
- 817
-
Micro-pillar barriers for guiding, mixing and sorting dropletsCui, Hai-hang / Lim, Kian-Meng et al. | 2009
- 821
-
Capturing, carrying, and releasing of micro-objects by AC-electroweting-actuated oscillating bubblesChung, Sang Kug / Cho, Sung Kwon et al. | 2009
- 825
-
A low voltage capillary microgripper using electrowettingVasudev, A. / Zhe, J. et al. | 2009
- 829
-
Programmable batch assembly of microparts with 100% yieldHoo, J. / Baskaran, R. / Bohringer, K. F. et al. | 2009
- 833
-
Room-temperature wafer-level hermetic sealing for liquid reservoirs by gold ring embossingLapisa, M. A. / Niklaus, F. / Stemme, G. et al. | 2009
- 837
-
Highly reliable and manufacturable in-line wafer-level hermetic packages for RF MEMS variable capacitorKojima, Akihiro / Shimooka, Yoshiaki / Sugizaki, Yoshiaki / Endo, Mitsuyoshi / Yamazaki, Hiroaki / Ogawa, Etsuji / Ikehashi, Tamio / Ohguro, Tatsuya / Obata, Susumu / Miyagi, Takeshi et al. | 2009
- 841
-
A detailed study of yield and reliability for vacuum packages fabricated in a wafer-level Au-Si eutectic bonding processMitchell, J.S. / Najafi, K. et al. | 2009
- 845
-
Full wafer integration of shape memory alloy microactuators using adhesive bondingSandstrom, N. / Braun, S. / Stemme, G. / van der Wijngaart, W. et al. | 2009
- 849
-
Wafer level fabrication of high performance MEMS using bonded and thinned bulk piezoelectric substratesAktakka, E.E. / Kim, H. / Najafi, K. et al. | 2009
- 853
-
Fabrication of Einzel lens array with one-mask RIE process for electron micro-opticsTomono, Eiichi / Miyashita, Hidetoshi / Ono, Takahito / Esashi, Masayoshi et al. | 2009
- 857
-
Unobstructing magnetic microactuators for implantable cathetersLee, Hyowon / Lee, Selene A. / Bergsneider, Marvin / Judy, Jack W. et al. | 2009
- 861
-
A new magnetically actuated switch for precise position detectionCoutier, C. / Chiesi, L. / Garnier, A. / Fourrier, J.C. / Lapiere, C. / Trouillon, M. / Grappe, B. / Vincent, M. / Samperio, A. / Borel, S. et al. | 2009
- 865
-
Laser-printed magnetic-polymer microstructuresKlejwa, N. / Misra, R. / Provine, J. / Klejwa, S.J. / Zhang, M. / Wang, S.X. / Howe, R.T. et al. | 2009
- 869
-
Superparamagnetic photosensitive polymer nanocomposite for microactuatorsSuter, M. / Graf, S. / Ergeneman, O. / Schmid, S. / Camenzind, A. / Nelson, B. J. / Hierold, C. et al. | 2009
- 873
-
The double-side electroplating and slender ferromagnetic patterns torque-enhancement design for magnetostatic actuatorTang, Tsung-Lin / Hsu, Chia-Pao / Chen, Wen-Chien / Fang, Weileun et al. | 2009
- 877
-
2D CMOS integrated magnetometer based on the miniaturized circular vertical Hall deviceBanjevic, M. / Furrer, B. / Popovic, R. S. et al. | 2009
- 881
-
The magnetic calibration of arbitrarily shaped Hall sensors in the absence of magnetic fieldsCornils, M. / Paul, O. et al. | 2009
- 885
-
An electromagnetically actuated microspeaker with fully-integrated wax-bonded Nd-Fe-B micromagnets for hearing aid applicationsJe, Sang-Soo / Wang, Naigang / Brown, Henry C. / Arnold, David P. / Chae, Junseok et al. | 2009
- 889
-
Large stroke high force pneumatic actuators fabricated by SU-8 micromachiningCeyssens, F. / De Volder, M. / Reynaerts, D. / Puers, R. et al. | 2009
- 893
-
Robustness of electrostatic MEMS actuators against electrical overstressDe Coster, J. / Rottenberg, X. / Sangameswaran, S. / Ekkels, P. / Tilmans, H. A. C. / De Wolf, I. et al. | 2009
- 897
-
Conceptual design of mniniature tunable stiffness display using MR fluidsYang, Tae-Heon / Kwon, Hyuk-Jun / Lee, Seung S. / An, Jinung / Koo, Jeong-Hoi / Kim, Sang-Youn / Kwon, Dong-Soo et al. | 2009
- 900
-
Polycrystalline silicon carbide NEMS for high-temperature logicLee, T. -H. / Speer, K. M. / Fu, X. A. / Bhunia, S. / Mehregany, M. et al. | 2009
- 904
-
Magnetic torque driving 2D micro scanner with a non-resonant large scan angleMakishi, W. / Kawai, Y. / Esashi, M. et al. | 2009
- 908
-
Self-aligned electrostatic angular vertical comb actuators assembled on-chip using in-plane electrothermal actuatorsEun, Y. / Na, H. / Choi, J. / Kim, J. et al. | 2009
- 912
-
Functional 1.6 GHZ MEMS switch using aligned composite CNT membrane by dielectrophoretic self-assemblyJang, M.W. / Lu, M. / Cui, T. / Campbell, S. A. et al. | 2009
- 916
-
2-dimensional potassium ion image sensor aiming for Label-free dynamic imaging of living-cell activityAtsumi, K. / Masaki, Y. / Noda, T. / Hattori, T. / Takao, H. / Ishida, M. / Sawada, K. et al. | 2009
- 920
-
A power-free blood plasma extraction device based on planar crossflow filter microstructureKim, Yu Chang / Kim, Seung-Hoon / Heo, Pil Woo / Park, Je-Kyun et al. | 2009
- 924
-
Applications of a novel cell micropatterning process for long-term neuron and cell cultureChang, W.C. / Sretavan, D.W. et al. | 2009
- 928
-
Microsystems for determining the heterogeniety of head and neck cancer cell populations by para-magnetophoresisJung, Y. / Wang, D. / Chen, G. / Shin, D. / Han, K. H. / Frazier, A. B. et al. | 2009
- 932
-
TISSUE-MIMICKING IN VITRO ANALYSIS SYSTEM to exclusively stimulate single cell and detect its physiological reactionOkonogi, Atsuhito / Terao, Kyohei / Okitsu, Teru / Suzuki, Takaaki / Kotera, Hidetoshi et al. | 2009
- 936
-
Wireless-compatible CMOS-based celluar sensorAnwar, M. / Matsudaira, P. et al. | 2009
- 939
-
Microfluidic protein synthesis array for toxin detectionFan, Z. Hugh / Mei, Q. / Khnouf, R. / Jin, S. et al. | 2009
- 943
-
A regenerative biosensing surface using electrochemical desorption of self-assembled monolayer in microfluidicsChoi, Seokheun / Chae, Junseok et al. | 2009
- 947
-
Early diagnosis of cancer by electrical detection of nucleic acid biomarkersJavanmard, M. / Talasaz, A.H. / Nemat-Gorgani, M. / Ronaghi, M. / Pease, F. / Davis, R.W. et al. | 2009
- 951
-
Automatic on-chip sequential processing for bio-microsystemsOhnishi, N. / Satoh, W. / Morimoto, K. / Fukuda, J. / Suzuki, H. et al. | 2009
- 955
-
Coulometric detection of an analyte in a liquid plug formed in a microflow channelSassa, F. / Laghzali, H. / Fukuda, J. / Suzuki, H. et al. | 2009
- 959
-
Microcantilever sensor using photonic crystal nanocavity resonatorXiang, Wenfeng / Hsiao, Fu-Li / Lee, Chengkuo et al. | 2009
- 963
-
MWCNTS array incorporated nanochannel with charge-selectivity for high efficient biomolecule preconcentrationWu, Ren-Guei / Wu, Yi-Shiuan / Yang, Chung-Shi / Tseng, Fan-gang et al. | 2009
- 967
-
Hydrophilic modification of multi-walled carbon nanotubes based neural microelectrode arrayChen, C.H. / Su, H.C. / Chuang, S.C. / Yen, S.J. / Chen, Y.C. / Lee, Y.T. / Yew, T.R. / Chen, H. / Yeh, S.R. / Chang, Y.C. et al. | 2009
- 971
-
Carbon nanotube labeled immunosensor for lateral flow diagnosticsAbera, Adeyabeba / Choi, Jin-Woo et al. | 2009
- 975
-
Two-dimensional label-free acetylcholine image sensor for imaging neuronal communicationTakenaga, Shoko / Lee, Seung-Ro / Rahman, M. M. / Takao, Hidekuni / Ishida, Makoto / Sawada, Kazuaki et al. | 2009
- 979
-
Continuous monitoring of insulin attachment kinetics on photothermally actuated microcantilever biosensorPark, J.W. / Ducloux, O. / Nishida, S. / Fujita, H. et al. | 2009
- 983
-
A micro gas preconcentrator with improved performances for environmental monitoringCamara, E.H. M. / Breuil, P. / Briand, D. / Guillot, L. / Pijolat, C. / de Rooij, N. F. et al. | 2009
- 987
-
Hyper-branched sensing polymers self-assembled on resonant micro-cantilever sensors for ultra-low concentration DMMP vapor detectionLiu, Yongjing / Yu, Haitao / Gao, Shi / Gan, Xiaohua / Liu, Min / Zuo, Guomin / Cheng, Zhenxing / Li, Xinxin et al. | 2009
- 991
-
An accelerator based neutron gun micro-fabricated with ceramic/metal packagingWhitney, Chad / Wilson, Chester G. et al. | 2009
- 995
-
Simultaneous and wireless measurement of CO2 and NO2 using a saw reflective delay lineLim, Chunbae / Yang, Sangsik / Lee, Keekeun et al. | 2009
- 999
-
A slab waveguide sensor for a fully integrated IR-absorption sensor system - theoretical and experimental verificationKasberger, J. / Rauter, P. / Fromherz, T. / Jakoby, B. et al. | 2009
- 1003
-
Optimising a Nitric oxide sensing technique for hypoxic tumor cell culturesAravindalochanan, K. / Kieninger, J. / Sandvik, J.A. / Pettersen, E.O. / Urban, G.A. et al. | 2009
- 1007
-
A chemical sensing microsystem utilizing an adaptive feedback circuitFan, X. Z. / Siwak, N. P. / Kanakaraju, S. / Richardson, C. / Ghodssi, R. et al. | 2009
- 1011
-
High-performance humidity sensor with polyimide nano-grassLee, Hyemin / Jung, Seungwon / Kim, Hyungchul / Lee, Junghoon et al. | 2009
- 1015
-
Array type dissolved oxygen sensor and measurement system for simultaneous measurement of cellular respiration levelPark, J. / Chang, J.-H. / Ahn, S. / Pak, Y. K. / Han, S. / Pak, J. J. et al. | 2009
- 1019
-
MEMS resonators actuated by TbCo/FeCo nanostructed magnetostrictive multilayers in liquid environmentDucloux, O. / Park, J. W. / Tiercelin, N. / Pernod, P. / Preobrazhensky, V. / Hamon, M. / Sakai, Y. / Fujita, H. et al. | 2009
- 1023
-
Multiparametric light-assisted silicon device transduction of molecular recognition eventsDi Natale, Corrado / D'Amico, Arnaldo / Paolesse, Roberto / Dini, Francesca / Martinelli, Eugenio / Filippini, Daniel / Lloyd-Spetz, Anita / Lundstrom, Ingemar et al. | 2009
- 1027
-
Parylene to silicon adhesion enhancementHuang, R. / Tai, Y.C. et al. | 2009
- 1031
-
Simultaneous wafer-scale vacuum encapsulation and microstructure cladding with LPCVD polycrystalline 3C-SiCRoper, C. S. / Candler, R. / Yoneoka, S. / Kenny, T. / Howe, R. T. / Maboudian, R. et al. | 2009
- 1035
-
Bi2Te3 as an active material for MEMS based devices fabricated at room temperatureSedky, Sherif / Kamal, Ahmed / Yomn, Mohannad / Bakr, Hasan / Ghannam, Rami / Leonov, Vladimir / Fiorini, Paolo et al. | 2009
- 1039
-
Studies on low-temperature bonding mechanism of VUV and plasma pretreated cyclo-olefin polymerShinohara, H. / Suzuki, T. / Mizuno, J. / Shoji, S. et al. | 2009
- 1043
-
Encapsulation of microparticles and biomolecules based on layer-by-layer nanoassembly techniques with microfluidic droplet devicesGong, Zhongcheng / Penmetsa, Siva / Zheng, Zhiguo / Lvov, Yuri / Que, Long et al. | 2009
- 1047
-
Exploratory corrugated infrared hot-electron transistor arraysFu, R.X. / Choi, K.K. / Olver, K. / Sun, J. et al. | 2009
- 1051
-
Thin film diffusion barrier formation in PDMS microcavitiesRiaz, Asif / Gandhiraman, Ram P. / Dimov, Ivan K. / Basabe-Desmonts, Lourdes / Ricco, Antonio J. / Ducree, Jens / Daniels, Stephen / Lee, Luke P. et al. | 2009
- 1055
-
Planar sacrificial surface micromachining by nickel silicideKhosraviani, K. / Leung, A. M. et al. | 2009
- 1059
-
Three-dimensional microstructures fabricated by multi-step electrochemical etching of aluminum sheetKim, Y. / Youn, S. / Han, W. / Cho, Y.-H. / Park, H. / Chang, B. / Oh, Y. et al. | 2009
- 1063
-
Novel scanning immersion lithography (SIL) for 3D microfabricationSheu, H.C. / Shew, B.Y. / Liu, C.W. / Peng, C.T. / Tseng, S.C. et al. | 2009
- 1067
-
Prediction of strength and fatigue lifetime of MEMS structures with arbitrary shapesKawai, T. / Gaspar, J. / Paul, O. / Kamiya, S. et al. | 2009
- 1071
-
Alignment insensitive anisotropic etching of silicon cavities with smooth 49° sidewallsShen, C. / Pham, H.T.M. / Sarro, P.M. et al. | 2009
- 1075
-
Fabrication of dense flow sensor arrays on flexible membranesIzadi, N. / de Boer, M. J. / Berenschot, J. W. / Wiegerink, R. J. / Lammerink, T. S. J. / Jansen, H. V. / Mogdans, J. / Krijnen, G. J. M. et al. | 2009
- 1079
-
Selective vapor-liquid-solid growth of needle arrays by hotwire chemical vapor deposition with low substrate temperatureGovindarajan, A.V. / Paluri, S. / Sharma, A. / Ramgopal Rao, V. / Bohringer, K.F. et al. | 2009
- 1083
-
Ohmic contacts on n-type polycrystalline silicon carbide with Ti/TaSi2/PtJin, S. / Fu, X.A. / Mehregany, M. et al. | 2009
- 1087
-
Stress and strain gradient control of polycrystalline SiC filmsFu, X.A. / Dunning, J. / Zorman, C.A. / Mehregany, M. et al. | 2009
- 1091
-
Suspended microstructures made using silicon migrationKant, R. / Ziaei-Moayyed, M. / Howe, R.T. et al. | 2009
- 1095
-
Wafer reconstitution with precision dry front-to-front registrationChen, J.-W. P. / Howe, R. T. et al. | 2009
- 1099
-
Creating microstructures in electrospun nanofibers using a micropatterned collector chipZeng, H. / Zhao, Y. et al. | 2009
- 1103
-
Characterizations and optimization of electrical contact between nanocomposite elastomer and metalHu, Huan / Liu, Chang et al. | 2009
- 1106
-
3D high aspect ratio, MEMS integrated micro-solenoids and Helmholtz micro-coilsBadilita, V. / Kratt, K. / Burger, T. / Korvink, J.G. / Wallrabe, U. et al. | 2009
- 1110
-
Stepped-etching for preserving critical dimensions in through-wafer deep reactive ion etching of thick siliconAlper, S. E. / Aydemir, A. / Akin, T. et al. | 2009
- 1114
-
Design, fabrication, and assembly of a hollow-core fiber-based micro cryogenic coolerLin, M.-H. / Bradley, P.E. / Wu, H.-J. / Booth, J.C. / Radebaugh, R. / Lee, Y.C. et al. | 2009
- 1118
-
A novel monolithically integrated pressure, accelerometer and temperature composite sensorQuan Wang, / Li, Xinxin / Tie Li, / Bao, Minhang / Zhang, Kun / Xiaohong Ge, / Wei Zhou, / Haifei Bao, et al. | 2009
- 1122
-
A Multi-Terminal Pressure Sensor with enhanced sensitivityCoraucci, G. O. / Finardi, M. R. / Fruett, F. et al. | 2009
- 1126
-
Simulation and fabrication of a 2D-flow sensor for thermal characterization of fluids and for flow speed measurementsCubukcu, A.S. / Urban, G.A. et al. | 2009
- 1130
-
Pressure stable thermoelectric flow sensors by means of membrane perforationKropp, M. / Kutzner, C. / Hartgenbusch, N. / Gu, S. / Sosna, C. / Buchner, R. / Hauptmann, P. / Lang, W. et al. | 2009
- 1134
-
Single element 3-terminal pressure sensors: A new approach to pressure sensing and its comparison to the half bridge sensorsGowrishetty, Usha / Walsh, Kevin / McNamara, Shamus / Roussel, Thomas / Aebersold, Julia et al. | 2009
- 1138
-
Using encapsulated MEMS resonators to measure evolution in thin film stressQu, Y.Q. / Melamud, R. / Kenny, T.W. et al. | 2009
- 1142
-
Fiber-optical acoustic sensor based on a photonic-crystal diaphragmKilic, O. / Digonnet, M. J. F. / Kino, G. S. / Solgaard, O. et al. | 2009
- 1146
-
Transparent and flexible tactile sensor for multi touch screen application with force sensingKim, Hong-Ki / Lee, Seung-Gun / Han, Ji-Eun / Kim, Tae-Rim / Hwang, Sung-Up / Ahn, Seong Deok / You, In-Kyu / Cho, Kyoung-Ik / Song, Tai-Kyong / Yun, Kwang-Seok et al. | 2009
- 1150
-
High sensitivity ultrasonic transducer array for 2-D hydropohone application, using an epitaxial PZT thin film grown on γ-Al2O3/SiKanja, Ikuo / Otonari, Mikito / Yogi, Takahiro / Akai, Daisuke / Sawada, Kazuaki / Ishida, Makoto / Okada, Nagaya / Higuchi, Kazuki et al. | 2009
- 1154
-
A novel soi Z-axis accelerometer with gap closing differential sensing electrodesHsu, Chia-Pao / Yip, Ming-Chuen / Fang, Weileun et al. | 2009
- 1158
-
A new z-axis capacitive accelerometer with high impact durabilityHirata, Y. / Konno, N. / Tokunaga, T. / Tsugai, M. / Fukumoto, H. et al. | 2009
- 1162
-
The development of novel surface acoustic wave MEMS-IDT gyroscope based on standing wave modeOh, Haekwan / Lee, Keekeun / Yang, Sangsik et al. | 2009
- 1166
-
A digital output piezoelectric accelerometer using CMOS-compatible AlN thin filmKobayashi, T. / Okada, H. / Akiyama, M. / Maeda, R. / Itoh, T. et al. | 2009
- 1170
-
Design and fabrication of convective inertial sensor consisting of 3DOF gyroscope and 2DOF accelerometerDau, V. T. / Otake, T. / Dinh, T. X. / Sugiyama, S. et al. | 2009
- 1174
-
Micro accelerometer using screen printed BaTiO3 film on ceramic substrateSuzuki, M. / Kobayashi, Y. / Aoyagi, S. / Tajiri, H. / Nagahata, T. et al. | 2009
- 1178
-
A micromachined suspended plate viscosity sensor featuring in-plane vibrations and integrated piezoresistive readoutRiesch, C. / Reichel, E. K. / Jachimowicz, A. / Schalko, J. / Jakoby, B. / Keplinger, F. et al. | 2009
- 1182
-
Single pulse proximal distance sensor with thermoacoustic transmitterHashimoto, Y. / Nakai, A. / Matsumoto, K. / Shimoyama, I. et al. | 2009
- 1186
-
New polysilicon sensor and actuator technology for the development of a thermal platformMarty, B. / Camps, T. / Tasselli, J. / Marty, A. / Lagrange, D. et al. | 2009
- 1190
-
Micro- and nanostructured magnetic field sensor for space applicationsPersson, A. / Nguyen, H. / Riddar, F. / Thornell, G. et al. | 2009
- 1194
-
Parametrically amplified MEMS magnetometerThompson, Matthew J. / Horsley, David A. et al. | 2009
- 1198
-
Flash type MEMS-based Analog-to-Digital Converter of field emissionLee, P. / Lee, S.H. / Kwon, S.W. / Hong, Y.T. / Lee, S.S. et al. | 2009
- 1202
-
Implantable polycrystalline diamond neural probe for in vivo and in vitro physiological recordingChan, H. -Y. / Varney, M. / Hatch, S. / Aslam, D. M. et al. | 2009
- 1206
-
Fabrication of 3-dimensional silicon microelectrode arrays using micro electro discharge machining for neural applicationsTathireddy, P. / Rakwal, D. / Bamberg, E. / Solzbacher, F. et al. | 2009
- 1210
-
Wafer-scale processed, low impedance, neural arrays with varying length microelectrodesBhandari, R. / Negi, S. / Rieth, L. / Solzbacher, F. et al. | 2009
- 1214
-
An endoscope utilizing tunable-focus microlenses actuated through infrared lightZeng, X. / Jiang, H. et al. | 2009
- 1218
-
Biosensor for calcium based on a hydrogel optical waveguide with integrated sensor proteinsForster, Thilo / Strohhofer, Christof / Bock, Karlheinz / Kasak, Peter / Danko, Martin / Kronekova, Zuzana / Nedelcev, Tomas / Krupa, Igor / Lacik, Igor et al. | 2009
- 1222
-
CMUT-in-CMOS ultrasonic transducer arrays with on-chip electronicsCheng, X. / Lemmerhirt, D. F. / Kripfgans, O. D. / Zhang, M. / Yang, C. / Rich, C. A. / Fowlkes, J. B. et al. | 2009
- 1226
-
A quadrupolar magnetic actuation system for superparamagnetic particlesMoser, Y. / Lehnert, T. / Gijs, M.A.M. et al. | 2009
- 1230
-
Vacuum supported liquid waste handling for dna extraction on centrifugally operated Lab-on-a-Chip systemsMark, D. / Haeberle, S. / Lutz, S. / Zengerle, R. / von Stetten, F. et al. | 2009
- 1234
-
High-performance magnetic active-valve micropumpShen, M. / Gijs, M.A.M. et al. | 2009
- 1238
-
Magnetic particle dosing, release and separation in a microfluidic chip with magnetic actuationAfshar, R. / Lehnert, T. / Moser, Y. / Gijs, M.A.M. et al. | 2009
- 1242
-
Microfabricated out-of-plane arrays of integrated capillary nano-electrospray emittersKrpoun, R. / Shea, H.R. et al. | 2009
- 1246
-
A new platform for manipulation and separation of oil-in-water emulsion droplets using optically induced dielectrophoresisHung, Shih-Hsun / Lin, Yen-Heng / Lee, Gwo-Bin et al. | 2009
- 1250
-
On-chip droplet enhanced fluorescence emission for low concentration protein measurementYu, Y. F. / Bourouina, T. / Liu, A. Q. et al. | 2009
- 1253
-
Improvement of detection sensitivity using electrodes with micropillar structuresGinoza, T. / Okamura, K. / Fukuda, J. / Suzuki, H. et al. | 2009
- 1257
-
Local stimulation to single cell on tissue-mimicking microfluidic deviceTerao, K. / Okonogi, A. / Okitsu, T. / Suzuki, T. / Washizu, M. / Kotera, H. et al. | 2009
- 1261
-
Precise dosage system for controlled liquid delivery based on fast MEMS based flow sensorGoetz, M. / Messner, S. / Ashauer, M. / Zengerle, R. et al. | 2009
- 1265
-
Liquid recirculation in microfluidic channels by the interplay of capillary and centrifugal forcesGarcia-Cordero, J.L. / Basabe-Desmonts, L. / Ducree, J. / Lee, L.P. / Ricco, A. J. et al. | 2009
- 1269
-
A digital dilution chip using the selective control of inter-well valvesLee, Dong Woo / Cho, Young-Ho et al. | 2009
- 1273
-
A bonding-free process for fabricating integrated microfluidic devices with embedded electrodes utilizing low-cost UV curable resinsKuo, Shu-Ming / Yang, Chao-Chi / Hsieh, Jien-Tai / Lin, Che-Hsin et al. | 2009
- 1277
-
An air-bubble-actuated micropump for on-chip blood transportationChiu, Sheng-Hung / Liu, Cheng-Hsien et al. | 2009
- 1281
-
Hybrid integrated platform of PDMS microfluidics and Silica Capillary for effective CE and ESI-MS couplingDimov, Ivan K. / Riaz, Asif / Ducree, Jens / Lee, Luke P. et al. | 2009
- 1285
-
Simulation and optimization of transport in a Linear Brownian motorTrzynadlowski, B.C. / Volz, S. / Dunham, S.T. / Altintas, E. / Fujita, H. / Bohringer, K.F. et al. | 2009
- 1289
-
A thermally actuated microfluidic relay valveBazargan, V. / Stoeber, B. et al. | 2009
- 1293
-
Propulsion and steering of a floating mini-robot based on Marangoni flow actuationVisvanathan, Karthik / Shariff, Farah / Yee, Seow Yuen / Basu, Amar S. et al. | 2009
- 1297
-
Differential impedance spectrometer and vision system for analysis of single cellsLanz, T. / Hafizovic, S. / Rothe, J. / Streichan, R. / Goedecke, N. / Heer, F. / Hierlemann, A. et al. | 2009
- 1301
-
A fully addressable micro-array chip integrated with cascade multiplexors for selective cell loading and retrievalLou, Xia / Chung, Jaehoon / Kim, Young-Ji / Cho, Il-Joo / Yoon, Euisik et al. | 2009
- 1305
-
Fabrication and process characterization of atom transistor chipsChuang, H.C. / Salim, E.A. / Vuletic, V. / Anderson, D.Z. / Bright, V.M. et al. | 2009
- 1309
-
Development of 100-nm-thick self-sensing nanocantilevers and characterization of the temperature dependence of the piezoresistivity and conductivityJiang, Yonggang / Ono, Takahito / Esashi, Masayoshi et al. | 2009
- 1313
-
A H2 microsensor based on nanocolumnar tungsten oxide grown by template-assisted anodizationCalavia, R. / Mozalev, A. / Kahtko, V. / Gorokh, G. / Vilanova, X. / Correig, X. / Gracia, I. / Cane, C. / Llobet, E. et al. | 2009
- 1317
-
Stress-assistant selective etching mechanism for lithography-independent nanofabricationDing, F. / Ni, C. / Yu, W.X. / Li, C. / Wu, W.G. / Xu, J. et al. | 2009
- 1321
-
Young's modulus measurement method for nano-scale film materials by using MEMS resonator arrayGoto, D. / Namazu, T. / Inoue, S. / Takeuchi, T. / Murakami, K. / Komatsu, E. / Kawashimo, Y. / Takano, T. et al. | 2009
- 1325
-
Organic emitting layer formation with microfluidic channel for multi-colored OLED arrayTakaya, S. / Misawa, N. / Takeuchi, S. et al. | 2009
- 1329
-
Patterning high density SWNT networks on flexible Parylene-C substrateChen, C.-L. / Yang, C.-F. / Xiong, X. / Busnaina, A. / Dokmeci, M. R. et al. | 2009
- 1333
-
Sensitivity enhancement of piezoresistive micro acceleration sensors with Nanometer Stress Concentration Regions on sensing elementsAmarasinghe, R. / Dao, D.V. / Dau, V.T. / Tung, B.T. / Sugiyama, S. et al. | 2009
- 1337
-
Fabrication and characterization of multiple nanowires using microtubule structuresWada, K. / Tarhan, M. C. / Bottier, C. / Collard, D. / Fujita, H. / Yokokawa, R. et al. | 2009
- 1341
-
Design of a novel microreactor for microfluidic synthesis of silica nanoparticlesChung, C. K. / Shih, T. R. / Wu, B.H. et al. | 2009
- 1345
-
Pitch-variable MEMS grating with 4-level blazed surfaceWang, Y. / Kanamori, Y. / Hane, K. et al. | 2009
- 1349
-
GaN-LED grown on Si substrate by MBE/MOCVD and monolithic fabrication of a light distribution variable deviceWakui, M. / Ito, R. / Sameshima, H. / Hu, F.-R. / Hane, K. et al. | 2009
- 1353
-
Characteristics of micromachined injection locking lasersCai, H. / Liu, B. / Tamil, J. / Zhu, W. M. / Tao, J. F. / Zhang, W. / Zhang, Q. X. / Liu, A. Q. et al. | 2009
- 1357
-
MEMS tunable Fabry-Perot Filters with thick, two sided optical coatingsStupar, P. A. / Borwick, R. L. / DeNatale, J. F. / Kobrin, P. H. / Gunning, W. J. et al. | 2009
- 1361
-
Thermo-optic infrared focal plane arrayYan, X. / Feng, F. / Wang, Y.L. et al. | 2009
- 1365
-
Ellipsoidal micro lens fabricated by depositing parylene directly on liquidMiyamoto, R. / Binh-Khiem, N. / Iwase, E. / Matsumoto, K. / Shimoyama, I. et al. | 2009
- 1369
-
CMOS-MEMS knife-edge optical spot profiling systemChiu, Y. / Chang, T.L. / Pan, C.H. et al. | 2009
- 1373
-
Self-powered optical sensor systemsWu, H. / Emadi, A. / de Graaf, G. / Leijtens, J. / Wolffenbuttel, R.F. et al. | 2009
- 1377
-
Hyperspectral imaging using a micromachined in-plane vibratory grating scannerZhou, Guangya / Cheo, Kelvin K. L. / Du, Yu / Chau, Fook Siong et al. | 2009
- 1381
-
An electrostatic energy harvester with electret biasHalvorsen, E. / Westby, E. R. / Husa, S. / Vogl, A. / Ostbo, N. P. / Leonov, V. / Sterken, T. / Kvisteroy, T. et al. | 2009
- 1385
-
Temperature threshold tuning of a thermal harvesting switchCarlioz, L. / Delamare, J. / Basrour, S. et al. | 2009
- 1389
-
Harvesting energy from vehicle wheelsManla, G. / White, N. M. / Tudor, J. et al. | 2009
- 1393
-
Microstructured polymer for shoe power generationHan, Ding / Kaajakari, Ville et al. | 2009
- 1397
-
Electromagnetic micro generator array consisting of 3D micro coils opposing a magnetic PDMS membraneMack, B. / Kratt, K. / Stuermer, M. / Wallrabe, U. et al. | 2009
- 1401
-
Symmetric silicon micro fuel cell with porous electrodesScotti, Gianmario / Kanninen, Petri / Kallio, Tanja / Franssila, Sami et al. | 2009
- 1405
-
MEMS frequency detector at X-band based on MMIC technologyHua, Di / Liao, Xiaoping / Zhang, Jun / Jiao, Yongchang et al. | 2009
- 1409
-
High temperature stable RF MEMS switch based on tungsten-titaniumKlein, S. / Thilmont, S. / Ziegler, V. / Prechtel, U. / Schmid, U. / Seidel, H. et al. | 2009
- 1413
-
Piezoresistive ring-shaped MEMS resonatorPhan, K. L. / van Beek, J. T. M / Koops, G. E. J. et al. | 2009
- 1417
-
Model for predicting spurious modes caused by fringing fields in lateral electrostatic actuators for MEM resonatorsStoffels, S. / Rottenberg, X. / Boedecker, S. / Puers, R. / Rembe, C. / Tilmans, H. A. C. et al. | 2009
- 1421
-
Encapsulated out-of-plane differential square-plate resonator with integrated actuation electrodesChen, Kuan-Lin / Wang, Shasha / Salvia, James / Howe, Roger T. / Kenny, Thomas W. et al. | 2009
- 1425
-
Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regimeMol, L. / Rocha, L. A. / Cretu, E. / Wolffenbuttel, R. F. et al. | 2009
- 1429
-
Contactless electromagnetic interrogation of a MEMS-based microresonator used as passive sensing elementAndo, B. / Baglio, S. / Bau, M. / Ferrari, V. / Sardini, E. / Savalli, N. / Serpelloni, M. / Trigona, C. et al. | 2009
- 1433
-
56 MHZ piezoresistive micromechanical oscillatorBontemps, J. J. M. / Murroni, A. / van Beek, J. T. M. / van den Homberg, J. A. T. M. / Koning, J. J. / Koops, G. E. J. / Verheijden, G. J. A. M. / van Wingerden, J. / Phan, K. L. / Vermeeren, P. et al. | 2009
- 1437
-
High-Q, gallium nitride nanowire-ALD composite mechanical resonatorsMontague, J. R. / Seghete, D. / Bertness, K. A. / Sanford, N. A. / George, S. A. / Bright, V. M. / Rogers, C. T. et al. | 2009
- 1441
-
7MHZ length-extensional soi resonators with T-shaped anchorsKhine, L. / Palaniapan, M. et al. | 2009
- 1445
-
Quality factor enhancement in micromechanical resonators at cryogenic temperaturesLi, Wei-Chang / Lin, Yang / Kim, Bongsang / Ren, Zeying / Nguyen, Clark T.-C. et al. | 2009
- 1449
-
A novel lab-on-a-tube for multimodal monitoring of patients with traumatic brain injuryLi, Chunyan / Wu, Pei-Ming / Jung, Wooseok / Ahn, Chong H. / Shutter, Lori A. / Narayan, Raj K. et al. | 2009
- 1453
-
Implantable fluorescent hydrogel for continous blood glucose monitoringShibata, H. / Tsuda, Y. / Kawanishi, T. / Yamamoto, N. / Okitsu, T. / Takeuchi, S. et al. | 2009
- 1457
-
A capacitively based MEMS affinity glucose sensorHuang, Xian / Li, Siqi / Schultz, Jerome / Wang, Qian / Lin, Qiao et al. | 2009
- 1461
-
A parylene bellows electrochemical actuator for intraocular drug deliveryLi, P.-Y. / Sheybani, R. / Kuo, J. T. W. / Meng, E. et al. | 2009
- 1465
-
pH-responsive drug-delivery devices for implantable applicationsChen, Jian / Chu, Michael / Koulajian, Khajag / Wu, Xiao Yu / Giacca, Adria / Sun, Yu et al. | 2009
- 1469
-
Implantable multi sensor system for in vivo monitoring of cardiovascular parametersBingger, P. / Fiala, J. / Seifert, A. / Weber, N. / Moser, A. / Goldschmidtboeing, F. / Foerster, K. / Heilmann, C. / Beyersdorf, F. / Woias, P. et al. | 2009
- 1473
-
A wireless batteryless in vivo EKG and body temperature sensing microsystem with adaptive RF powering for genetically engineered mice monitoringChaimanonart, Nattapon / Young, Darrin J. et al. | 2009
- 1477
-
SS-DNA-decorated Single-Walled Carbon Nanotubes integrated on CMOS circuitry for high sensitivity gas sensingChen, C.-L. / Yang, C.-F. / Agarwal, V. / Sonkusale, S. / Busnaina, A. / Chen, M. / Dokmeci, M. R. et al. | 2009
- 1481
-
Nano-pillar structure for sensitivity enhancement of SPR sensorKan, Tetsuo / Matsumoto, Kiyoshi / Shimoyama, Isao et al. | 2009
- 1485
-
A direct-write piezoelectric PVDF nanogeneratorChang, Chieh / Fuh, Yiin-Kuen / Lin, Liwei et al. | 2009
- 1489
-
Low contact resistance micro thermal switch with carbon-nanotube-enhanced contactorTsukamoto, T. / Esashi, M. / Tanaka, S. et al. | 2009
- 1493
-
A high sensitivity single-walled carbon-nanotube-array-based strain sensor for weighingYang, X. / Zhou, Z. Y. / Zheng, F. Z. / Zhang, M. / Zhang, J. / Yao, Y. G. et al. | 2009
- 1497
-
A gold nanoparticles dispersion waveguide for label-free detectionXiong, S. / Yang, Y. / Huang, H.J. / Tsai, D. P. / Liu, A. Q. et al. | 2009
- 1501
-
Direct formation of parallel single-walled carbon nanotube bridges on micromachined wide trenches for high-performance infrared sensorsRao, F.B. / Li, T. / Zhou, Y.X. / Liu, X. / Zhou, P. / Wang, Y.L. et al. | 2009
- 1505
-
Single mask 3-phase electrostatic rotary stepper micromotorSarajlic, E. / Yamahata, C. / Cordero, M. / Jalabert, L. / Iizuka, T. / Fujita, H. et al. | 2009
- 1509
-
A CMOS-MEMS rotary microactuator suitable for hard disk drive applicationsMessner, W.C. / Bain, J.A. / Koenders, M. / Groenesteijn, J. / Marsman, G.H. / Gilgunn, P.J. / Fedder, G.K. et al. | 2009
- 1513
-
A photovoltaic PN-junction vertical comb-drive micro-actuatorHuang, Hsin-Yu / Hsu, Hsiu-Ting / Lin, Hung-Yi / Chiu, Yi / Chiou, Jin-Chern / Fang, Weileun et al. | 2009
- 1517
-
Sphincter-like micro actuators based on electroactive polymerHerrlich, S. / Zengerle, R. / Haeberle, S. et al. | 2009
- 1521
-
2-axis MEMS deflecting cantilever microinstrument for in-situ reliability studiesLiu, F. / Laboriante, I. / Bush, B. / Roper, C. S. / Carraro, C. / Maboudian, R. et al. | 2009
- 1525
-
Frequency-selectable wireless actuation of hydrogel using micromachined resonant heaters toward implantable drug delivery applicationsSarraf, E.H. / Wong, G.K. / Takahata, K. et al. | 2009
- 1529
-
“Artificial flagellates” selective attachment of flagella as a bioactuator of micro-objectMori, N. / Kuribayashi, K. / Takeuchi, S. et al. | 2009
- 1533
-
A piezo-actuated closed loop MEMS system for active delay of transitionHaller, D. / Hempel, J. / Paetzold, A. / Losse, N. / Peltzer, I. / Nitsche, W. / King, R. / Woias, P. et al. | 2009
- 1537
-
A metal-on-silicon differential capacitive shear stress sensorChandrasekharan, V. / Sells, J. / Meloy, J. / Arnold, D.P. / Sheplak, M. et al. | 2009
- 1541
-
Highly-sensitive, biomimetic hair sensor arrays for sensing low-frequency air flowsJaganatharaja, R.K. / Bruinink, C.M. / Hagedoorn, B.M. / Kolster, M.L. / Lammerink, T.S.J. / Wiegerink, R.J. / Krijnen, G.J.M. et al. | 2009
- 1545
-
Exploitation of aeroelastic effects for drift reduction in an all-polymer air flow sensorSong, C. / Aiyar, A. R. / Kim, S.-H. / Allen, M. G. et al. | 2009
- 1549
-
Material discrimination by heat flow sensingKatoh, K. / Ichikawa, Y. / Iwase, E. / Matsumoto, K. / Shimoyama, I. et al. | 2009
- 1553
-
Micromachined piezoelectric microphone with high signal to noise ratioWang, Z.H. / Miao, J.M. / Xu, T. / Barbastathis, G. / Triantafyllou, M. et al. | 2009
- 1557
-
Sensitivity enhancement by micro Helmholtz resonator for ultrasonic distance sensorSuzuki, A. / Takahashi, H. / Iwase, E. / Matsumoto, K. / Shimoyama, I. et al. | 2009
- 1561
-
Nanofluidics: Fundamentals and applicationsEijkel, J.C.T. / Sparreboom, W. / Shui, L. / Salieb-Beugelaar, G.B. / van den Berg, A. et al. | 2009
- 1566
-
A new technique to construct the micro and nano fluidic system using a single wall carbon nanotubeOh, Jonghyun / Kim, Gyuman / Noh, Hongseok et al. | 2009
- 1570
-
Microfabricated multi-turn gradient coils for microscale flow imagingSahebjavaher, R. / Stoeber, B. / Walus, K. et al. | 2009
- 1574
-
Multiplexed analysis of inflammation biomarkers using spectrally-encoded on-chip electrophoresisHou, Chenlu / Herr, Amy E. et al. | 2009
- 1578
-
Microfluidic two-dimensional IEF-CZE for proteomicsYang, S. / DeVoe, D.L. et al. | 2009
- 1582
-
Optoelectronic tweezers — a new parallel optical manipulation toolWu, M.C. / Jamshidi, A. / Neale, S.L. / Tien, M.-C. / Ohta, A.T. / Yu, K. et al. | 2009
- 1586
-
Surface plasmon tweezers-induced nanoparticle patterning in microfluidicsShi, J. / Zheng, Y. B. / Xi, X. / Lin, S. S. / Du, J. / Tittmann, B. R. / Huang, T. J. et al. | 2009
- 1590
-
A new platform for manipulating a single DNA molecule by using opticallay-induced dielectrophoresisLin, Yen-Heng / Chang, Chen-Min / Lee, Gwo-Bin et al. | 2009
- 1594
-
Microfluidic integrated optoelectronic tweezersHuang, K. W. / Wu, T.- H. / Zhong, J. F. / Chiou, P. Y. et al. | 2009
- 1598
-
Sorting of differentiated neurons using Phototransistor-based optoelectronic tweezers for cell replacement therapy of neurodegenerative diseasesHsu, H. Y. / Lee, H. / Pautot, S. / Yu, K. / Neale, S. / Ohta, A. T. / Jamshidi, A. / Valley, J. / Isocaff, E. / Wu, M. C. et al. | 2009
- 1602
-
Materials and mechanics for stretchable electronics - from electronic eye cameras to conformal brain monitorsRogers, J.A. et al. | 2009
- 1604
-
High aspect ratio microelectromechanical systems: A versatile approach using carbon nanotubes as a frameworkHutchison, D.N. / Aten, Q. / Turner, B. / Morrill, N. / Howell, L.L. / Jensen, B.D. / Davis, R.C. / Vanfleet, R.R. et al. | 2009
- 1608
-
A three-dimensional silicon shadowmask for patterning on trenches with vertical wallsMorishita, S. / Kim, J. H. / Marty, F. / Li, Y. / Walton, A. J. / Mita, Y. et al. | 2009
- 1612
-
Minimized blurring in stencil lithography using a compliant membraneSidler, K. / Villanueva, G. / Vazquez-Mena, O. / Brugger, J. et al. | 2009
- 1616
-
Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresistHirai, Y. / Sugano, K. / Tsuchiya, T. / Tabata, O. et al. | 2009
- 1620
-
Cantilever sensors equipped with nano sensing effects for ultra-sensitive detection of bio/chemical moleculesLi, Xinxin et al. | 2009
- 1626
-
An array of monolithic FBAR-CMOS oscillators for mass-sensing applictionsJohnston, M.L. / Kymissis, I. / Shepard, K.L. et al. | 2009
- 1630
-
High Q factor plate resonators for ultrasensitive mass sensing applicationsAgache, V. / Cochet, M. / Blanc, R. / Baleras, F. / Caillat, P. et al. | 2009
- 1634
-
Interferometric force sensing AFM probes for nanomechanical mapping of material propertiesSarioglu, A.F. / Liu, M. / Solgaard, O. et al. | 2009
- 1638
-
Tip-matter interaction measurements using mems ring resonatorsAlgre, E. / Legrand, B. / Faucher, M. / Walter, B. / Buchaillot1, L. et al. | 2009
- 1642
-
Microfluidic high-resolution NMR chip for biological fluidsGardeniers, J.G.E. / Bart, J. / Kolkman, A.J. / de Vries, A.-J. / Janssen, J.W.G. / van Bentum, P.J.M. / Ampt, K.A.M. / Wijmenga, S.S. / Kentgens, A.P.M. et al. | 2009
- 1646
-
CNT-based gas ionizers with integrated MEMS gate for portable mass spectrometry applicationsVelasquez-Garcia, L.F. / Gassend, B. / Akinwande, A.I. et al. | 2009
- 1650
-
Selective detection of chemical species in liquids and gases using radio-frequency identification (RFID) sensorsPotyrailo, R. A. / Surman, C. / Morris, W. G. / Go, S. et al. | 2009
- 1654
-
A micro gas chromatograph for high-speed determinations of explosive vaporsSerrano, G. / Chang, H. / Zellers, E.T. et al. | 2009
- 1658
-
Low leak rate mems valves for micro-gas-analyzer flow controlGalambos, P. / Lantz, J.W. / James, C.D. / McClain, J.L. / Baker, M. / Anderson, R. / Simonson1, R.J. et al. | 2009
- 1662
-
Selective preconcentration by temperature manipulation of cascaded micro preconcentratorsAlfeeli, B. / Agah, M. et al. | 2009
- 1666
-
High-speed two-dimensional gas chromatography using microfabricated GC columns combined with nanoelectromechanical mass sensorsWhiting, Joshua J. / Fix, Cory S. / Anderson, John M. / Staton, Alan W. / Manginell, Ronald P. / Wheeler, David R. / Myers, Edward B. / Roukes, Michael L. / Simonson, R.J. et al. | 2009
- 1670
-
CMOS based sensors for biochemical analysisFrey, A. / Schienle, M. / Seidel, H. et al. | 2009
- 1674
-
Subcellular-resolution recording of electrical activity using a CMOS-microelectroode systemFrey, U. / Egert, U. / Heer, F. / Hafizovic, S. / Hierlemann, A. et al. | 2009
- 1678
-
The role of surface charge and binding properties in silicon-based field effect nanowire biosensorsLiu, Yang / Dutton, Robert W. et al. | 2009
- 1682
-
Multisite field potential recording from retina via vapor-liquid-solid grown silicon probe arrayHarimoto, T. / Ishihara, A. / Kawano, T. / Takei, K. / Kaneko, H. / Ishida, M. / Usui, S. et al. | 2009
- 1686
-
Miniaturized reference electrode with a negative feedback function for potential stabilizationAdachi, T. / Fukuda, J. / Suzuki, H. et al. | 2009
- 1690
-
A magnetic-bead based microfludic system for rapid detection of immunoglobulinsLee, Yu- Fang / Lien, Kang-Yi / Lei, Huan-Yao / Lee, Gwo-Bin et al. | 2009
- 1694
-
In-situ formation of an ion-doped porous structure for high sensitive humidity sensing utilizing low-cost UV sensitive glueChen, Ching-Hsiu / Hung, Chia-Wei / Lin, Che-Hsin et al. | 2009
- 1698
-
Silver nanoparticle structures realized by digital surface micromachiningLam, E.W. / Li, H. / Schmidt, M.A. et al. | 2009
- 1702
-
New electrical connection technology for microsystems using inktelligent printing® and functional nanoscaled INKSSturm, H. / Sosna, C. / Buchner, R. / Werner, C. / Godlinski, D. / Zollmer, V. / Busse, M. / Lang, W. et al. | 2009
- 1706
-
Mechanical characterization of CMOS metal layersGaspar, J. / Smorodin, T. / Schmidt, M. E. / Bohm, C. / Stecher, M. / Paul, O. et al. | 2009
- 1710
-
Implementation of a novel zero-insertion-force (ZIF) mems-connectorJang, Ben-Hwa / Huang, Hsin-Yu / Fang, Weileun et al. | 2009
- 1714
-
Mechanical degrandation mechanism of aluminum-alloy structural films evaluated by environment-controlled tensile testingKaibara, Y. / Fujii, H. / Namazu, T. / Tomizawa, Y. / Masunishi, K. / Inoue, S. et al. | 2009
- 1718
-
Microfabricated, ultra-dense, three-dimensional metal coilsHerrault, F. / Yorish, S. / Crittenden, T. / Allen, M.G. et al. | 2009
- 1722
-
Wafer counter-bonding for integrating cte-mismatched substrates and its application to MEMS tuneable metamaterialsSterner, M. / Stemme, G. / Oberhammer, J. et al. | 2009
- 1726
-
Torque measurements of an automotive halfshaft utilizing a MEMS resonant strain gaugeMyers, D.R. / Pisano, A.P. et al. | 2009
- 1730
-
Implementation of a monolithic TPMS using CMOS-MEMS techniqueSun, Chih-Ming / Tsai, Ming-Han / Wang, Chuanwei / Liu, Yu-Chia / Fang, Weileun et al. | 2009
- 1734
-
Novel extension methods of the sensing pressure range of the Pirani vacuum sensorTakashima, N. / Kimura1, M. et al. | 2009
- 1738
-
Out-of-plane microwire force sensor arrays with embedded p-n diodes by selective vapor-liquid-solid growthIked, A. / Kawano, T. / Ishida, M. et al. | 2009
- 1742
-
New electromagnetic transduction micro-sensor concept for passive wireless pressure monitoring applicationJatlaoui, M.M. / Chebila, F. / Gmati, I. / Pons, P. / Aubert, H. et al. | 2009
- 1746
-
Development of fabric force sensor for detecting normal and lateral force by applying umbonal fiberKita, G. / Suzuki, Y. / Shikida, M. / Sato, K. et al. | 2009
- 1750
-
Quantitative volume determination of dispensed nanoliter droplets on the flyErnst, A. / Streule, W. / Zengerle, R. / Koltay, P. et al. | 2009
- 1754
-
Scalable cascaded snap-in actuators for large-stroke displacementsGolay, N. / Masse, A. / Petremand, Y. / Noell, W. / Manceau, J.-F. / de Rooij, N.F. et al. | 2009
- 1758
-
3DOF equivalent circuit model of a comb-drive actuatorNishimori, Y. / Fujiwara, N. / Ooiso, H. / Tuchiya, T. / Mochizuoki, S. / Hashiguchi, G. et al. | 2009
- 1762
-
Improved performance of large stroke comb-drive actuators by using a stepped finger shapeEngelen, J.B.C. / Lantz, M.A. / Rothuizen, H.E. / Abelmann, L. / Elwenspoek, M.C. et al. | 2009
- 1766
-
Off-chip actuation for angular position control of MEMS mirrorsArdanuc, S. M. / Lal, A. et al. | 2009
- 1770
-
Heating and actuation characteristics of shape memory thin film actuator for blood vessel holdingOzaki, Masatoshi / Kida, Nozomi / Mineta, Takashi / Makino, Eiji / Toh, Satoshi / Kawashima, Takahiro / Shibata, Takayuki et al. | 2009
- 1774
-
An ESD preotection device using normally-on MEMS switchIkehashi, Tamio / Saito, Tomohiro et al. | 2009
- 1778
-
Electroactive surfaces based on conducting polymers for controlling cell adhesion, signaling, and proliferationJager, Edwin W. H. / Bolin, Maria H. / Svennersten, Karl / Wang, Xiangjun / Richter-Dahlfors, Agneta / Berggren, Magnus et al. | 2009
- 1782
-
Improvement of cell capture efficiency using a reversible DEP fieldChu, S.C. / Shew, B. Y. / Chen, C.K. / Su, Y. C. / Liu, S. J. / Leng, C. H. et al. | 2009
- 1786
-
A monolithically integrated platform for high throughput cell characterization and drug screeningJi, Xu / Yang, Lin / Wei, Zewen / Wang, Lu / Xi, Jianzhong / Li, Zhihong et al. | 2009
- 1790
-
An organic electronic ion pump to regulate intracellular signaling at high spatiotemporal resolutionSimon, Daniel T. / Jager, Edwin W. H. / Tybrandt, Klas / Larsson, Karin C. / Kurup, Sindhulakshmi / Richter-Dahlfors, Agneta / Berggren, Magnus et al. | 2009
- 1794
-
Repeatedly usable bio-molecule cantilever sensors with a coordination-bond breaking and re-linking techniqueYu, Haitao / Li, Jungang / Gan, Xiaohua / Liu, Min / Xu, Pengcheng / Li, Xinxin et al. | 2009
- 1798
-
Nanoparticle size effect on the amplification efficiency of Nano-PCRLin, Y.C. / Su, C.C. / Wu, H.L. et al. | 2009
- 1802
-
A bead-based electrochemical biosensor with integrated magnetic manipulation for controllable sample preconcentrationPeng, Z-C. / Sulchek, T. / Heineman, W. R. / Hesketh, P. J. et al. | 2009
- 1806
-
Flexible enzyme free glucose micro-sensor for continuous monitoring applicationsLee, Y.J. / Kim, J.D. / Park, J.Y. et al. | 2009
- 1810
-
A curvature controlled flexible silicon micro electrode array to wrap neurons for signal analysisKim, Jun-Hyoung / Kubota, Masanori / Higo, Akio / Abe, Hideki / Oka, Yoshitaka / Mita, Yoshio et al. | 2009
- 1814
-
Label-free electronic detection of growth factor induced cellular chatter on chemoreceptive neuron MOS (CvMOS) transistorsJayant, Krishna / Porri, Teresa / Erickson, Jon. W. / Kan, Edwin C. et al. | 2009
- 1818
-
An induced charge-selective nanochannel of multiwall carbon nanotubes (MWCNTS) array for biomolecular preconcentration in microchipWu, Ren-Guei / Wu, Yi-Shiuan / Yang, Chung-Shi / Tseng, Fan-gang et al. | 2009
- 1822
-
A microfludic aptasensor with integrated sample preconcentration, isocratic elution and mass spectrometric detectionNguyen, T. H. / Pei, R. / Stojanovic, M. / Landry, D. / Lin, Q. et al. | 2009
- 1826
-
Monolithic MEMS vacuum valves for miniature chemical preconcentratorsBaker, C. / Schwab, M-A. / Moseley, R. / Syms, R. R. A. / Yeatman, E. M. et al. | 2009
- 1830
-
Planar micro flame ionization detector with minimized leak currentKuipers, W. J. / Mueller, J. et al. | 2009
- 1834
-
Sensitive chlorine gas detection at the sub-ppm level using nanophase-separated amphiphilic co-networks as highly convenient matricesMeskath, S. / Heinze, J. / Urban, G. et al. | 2009
- 1838
-
Exploring the resolution of different disk-type chemical sensorsTruax, S. / Demirci, K. S / Hierlemann, A. / Brand, O. et al. | 2009
- 1842
-
Phase-mode LAPS and its application to chemical imagingMiyamoto, K. / Wagner, T. / Yoshinobu, T. / Kanoh, S. / Schoning, M. J. et al. | 2009
- 1846
-
Lab-on-a-chip sensor for point-of-care measurement of manganese exposureJothimuthu, Preetha / Haynes, Erin N. / Papautsky, Ian et al. | 2009
- 1849
-
Needle-type in-situ plant water content sensors with polyethersulfone membraneIwashita, T. / Miki, N. et al. | 2009
- 1853
-
Locally passive hybrid sensing tags based on flexible substrates and surface acoustic wave devicesHo, H. / Chu, E. / Forman, M. A. / Skinner, J. L. et al. | 2009
- 1857
-
Intelligent machine parts with surface embedded sensors under wear resistant coatingsSchonberg, T. / Almtoft, K.P. / Hansen, M.K. / Christensen, B.H. / Svensson, M. / Ostbo, N.P. / Ronkainen, H. / Nielsen, L.P. et al. | 2009
- 1861
-
Thermoelectric characteristics of n-type polycrystalline silicon carbide and comparison with conventional thermopilesLee, J. / Lei, M. I. / Rajgopal, S. / Mehregany, M. et al. | 2009
- 1865
-
Selective removal of micro-corrugation by anisotropic wet etchingInagaki, N. / Sasaki, H. / Shikida, M. / Sato, K. et al. | 2009
- 1869
-
A template-based fabrication technique for spatially-designed polymer micro/nanofiber compositesNaik, Nisarga / Caves, Jeff / Kumar, Vivek / Chaikof, Elliot / Allen, Mark G. et al. | 2009
- 1873
-
Low-temperature bonding of photodiodes on glass substrate using Au stud bumps and its application to microsensors with three-dimensional structureHigurashi, E. / Chino, D. / Suga, T. / Sawada, R. et al. | 2009
- 1877
-
TSV (through silicon via) interconnection on wafer-on-a-wafer (WOW) with MEMS technologyFujimoto, Koji / Maeda, Nobuhide / Kitada, Hideki / Suzuki, Kosuke / Nakamura, Tomoji / Ohba, Takayuki et al. | 2009
- 1881
-
Design and fabrication of posfet devices for tactile sensingDahiya, R.S. / Valle, M. / Metta, G. / Lorenzelli, L. / Adami, A. et al. | 2009
- 1885
-
The influence of packaging technologies on the performance of inertial MEMS sensorsMehner, J. / Kolchuzhin, V. / Schmadlak, I. / Hauck, T. / Li, G. / Lin, D. / Miller, T.F. et al. | 2009
- 1889
-
Low-cost maskless grayscale lithography using a new photo-definable polyimide for polymer MEMS applicationsLake, Joseph H. / Walsh, Kevin M. / McNamara, Shamus et al. | 2009
- 1892
-
Characterization of water vapor permeation through thin film Parylene CMenon, P. R. / Li, W. / Tooker, A. / Tai, Y.C. et al. | 2009
- 1896
-
A high d33 CMOS compatible process for aluminum nitride on titaniumDoll, J.C. / Petzold, B.C. / Ninan, B. / Mullapudi, R. / Pruitt, B.L. et al. | 2009
- 1900
-
Assembly-free 3-D microfabrication process using single-mask multidirectional photolithographySuzuki, T. / Yamamoto, H. / Kanno, I. / Washizu, M. / Kotera, H. et al. | 2009
- 1904
-
Pyrolyzed polymer and its composite for 18F− concentration electrode toward PET applicationOkamoto, K. / Syunori, A. / Iwata, R. / Saiki, H. / Nakanishi, H. / Konishi, S. et al. | 2009
- 1908
-
Micro projection lithography inside deep trenches using microlens on a maskJi, Chang-Hyeon / Herrault, Florian / Allen, Mark G. et al. | 2009
- 1912
-
Robust comb design for inductive displacement sensor with large travel and high sensitivitySchonhardt, S. / Korvink, J.G. / Wallrabe, U. et al. | 2009
- 1916
-
Aero-acoustic microphone with layer-transferred single-crystal silicon piezoresistorsZhou, Z.J. / Rufer, L. / Wong, M. et al. | 2009
- 1920
-
Novel 3D force sensor using ultra-thin silicon strain gauge bonded on metal membraneKim, Y. D. / Lee, C. S. / Kwon, S. J. et al. | 2009
- 1924
-
Tiny (0.72 mm2) pressure sensor integrating MEMS and CMOS LSI with back-end-of-line MEMS platformFujimori, T. / Takano, H. / Machida, S. / Goto, Y. et al. | 2009
- 1928
-
High frequency force sensing with piezoresistive cantileversDoll, J.C. / Petzold, B.C. / Ghale, P. / Goodman, M.B. / Pruitt, B.L. et al. | 2009
- 1932
-
Novel theoretical design and fabrication test of biomimicry directional microphoneAndo, Shigeru / Kurihara, Toru / Watanabe, Kentaro / Yamanishi, Yoshiki / Ooasa, Takahiko et al. | 2009
- 1936
-
Fabrication of a piezoresistive pressure sensor for enhancing sensitivity using silicon nanowireKim, J. H. / Park, K. T. / Kim, H. C. / Chun, K. et al. | 2009
- 1940
-
Development of a shock acceleration microswitch with enhanced-contact and low off-axis sensitivityYang, Z.Q. / Ding, G.F. / Cai, H.G. / Wang, H. / Chen, W.Q. / Zhao, X.L. et al. | 2009
- 1944
-
A novel differential capacitive-sensing dual-axis accelerometer design using pendulum-proofmass, gimbal-springs, and harm vertical-combsChan, Chun-Kai / Hsu, Chia-Pao / Wu, Mingching / Hocheng, Hong / Chen, Rongshun / Fang, Weileun et al. | 2009
- 1948
-
MEMS accelerometer with mechanical amplification mechanism for enhanced sensitivityYaakobovitz, A. / Krylov, S. et al. | 2009
- 1952
-
Design trade-offs of micromachined gyroscope concept allowing interchangeable operation in both robust and precision modesSchofield, A.R. / Trusov, A.A. / Shkel, A.M. et al. | 2009
- 1956
-
MEMS-based resonant sensor with uniform mass sensitivityPark, K. / Bashir, R. et al. | 2009
- 1959
-
Bulk acoustic wave resonators for infrared detection applicationsPisani, M.B. / Kao, P. / Tadigadapa, S. et al. | 2009
- 1963
-
Feedback enhanced thermo-electric topography sensingSebastian, A. / Wiesmann, D. / Baechtold, P. / Rothuizen, H. / Despont, M. / Drechsler, U. et al. | 2009
- 1967
-
Flexible x-ray detector based on the Seebeck effectRocha, J. G. / Goncalves, L. M. / Lanceros-Mendez, S. et al. | 2009