A 0.35 MM2 System on Chip Level Detector Based on An Annular Pmut-On-Cmos Array (Englisch)
- Neue Suche nach: Ledesma, Eyglis
- Neue Suche nach: Zamora, Ivan
- Neue Suche nach: Torres, Francesc
- Neue Suche nach: Uranga, Arantxa
- Neue Suche nach: Barniol, Nuria
- Neue Suche nach: Ledesma, Eyglis
- Neue Suche nach: Zamora, Ivan
- Neue Suche nach: Torres, Francesc
- Neue Suche nach: Uranga, Arantxa
- Neue Suche nach: Barniol, Nuria
In:
2023 IEEE 36th International Conference on Micro Electro Mechanical Systems (MEMS)
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933-936
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2023
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Elektronische Ressource
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Titel:A 0.35 MM2 System on Chip Level Detector Based on An Annular Pmut-On-Cmos Array
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Beteiligte:Ledesma, Eyglis ( Autor:in ) / Zamora, Ivan ( Autor:in ) / Torres, Francesc ( Autor:in ) / Uranga, Arantxa ( Autor:in ) / Barniol, Nuria ( Autor:in )
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Erschienen in:
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Verlag:
- Neue Suche nach: IEEE
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Erscheinungsdatum:15.01.2023
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Format / Umfang:2255659 byte
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ISBN:
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ISSN:
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DOI:
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Medientyp:Aufsatz (Konferenz)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis Konferenzband
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Fractal Microelectrodes Integrated With the Catheter for Low-Voltage Pulsed Field AblationXu, Mengfei / Qin, Mu / Song, Ziliang / Hong, Wen / Xu, Qingda / Cao, Jiawei / Tu, Kejun / Wang, Longchun / Yang, Bin / Liu, Jingquan et al. | 2023
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Hierarchical Bonding Yield Test Structure for Flexible High Channel-Count Neural Probes Interfacing ASIC ChipsOdenthal, Marie C. / Claar, Victor / Paul, Oliver / Ruther, Patrick et al. | 2023
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Microwave-Induced Thermoacoustic Imaging Using Aluminum Nitride PMUTWang, Yiwei / Zhang, Lejia / Cai, Junxiang / Wang, Baosheng / Gu, Yuandong Alex / Lou, Liang / Wang, Xiong / Wu, Tao et al. | 2023
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Needle-Free Drug Injection Using a Shock Wave Focusing System with the Function of Real-Time Microbubble-Based Distance SensingMa, Yibo / Huang, Wenjing / Ichikawa, Keita / Yamanishi, Yoko et al. | 2023
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New Wafer-Level Fabrication of Ultrathin Silicon Insertion Shuttles for Flexible Neural ImplantsSharma, Kirti / Boehler, Christian / Asplund, Maria / Paul, Oliver / Ruther, Patrick et al. | 2023
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Real-Time Dynamic Lactate Detection in a Pipeline Using a Microsensing Needle for ICU Patient Monitoring ApplicationTang, Yuan-Sin / Yang, Tung-Lin / Cheng, Yu-Ting / Tsai, Hsiao-En / Chen, Yih-Shurng et al. | 2023
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Three-Dimensional Flexible Neural Opto-Electronic Array with Silk-Based Shuttle-Free ImplantationGu, Chi / Yang, Huiran / Zhang, Bohan / Zhou, Zhitao / Sun, Liuyang / Li, Meng / Wei, Xiaoling / Tao, Tiger H. et al. | 2023
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A Microfluidic Biosensor for Rapid Detection of Covid-19Muhsin, Sura A. / He, Ying / Al-Amidie, Muthana / Sergovia, Karen / Abdullah, Amjed / Wang, Yang / Alkorjia, Omar / Hulsey, Robert A. / Hunter, Gary L. / Erdal, Zeynep et al. | 2023
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A Loop-Mediated Isothermal Amplification (Lamp)-Based Point-of-Care System for Rapid on-Site Clinical Detection of Sars-Cov-2 VirusesNguyen, Trieu / Vinayaka, Aaydha Chidambara / Huynh, Van Ngoc / Linh, Quyen Than / Andreasen, Sune Zoega / Golabi, Mohsen / Bang, Dang Duong / Moller, Jens Kjolseth / Wolff, Anders et al. | 2023
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A Solar-Driven Wearable Multiplexed Bio-Sensing System For Noninvasive Healthcare Monitoring In SweatSingh, Jujhar / Ning, Bianca / Lee, Paul / Liu, Lin et al. | 2023
- 444
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High-Throughput Mass Measurement Of Single Bacterial Cells By Silicon Nitride Membrane ResonatorsSanz-Jimenez, Adrian / Malvar, Oscar / Ruz, Jose J. / Garcia-Lopez, Sergio / Kosaka, Priscila M. / Gil-Santos, Eduardo / Cano, Alvaro / Papanastasiou, Dimitris / Kounadis, Diamantis / Panagiotopoulos, Elias et al. | 2023
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Microfabricated Isothermal Eg-Fet Sensor For Lamp Mediated Crispr/Cas12a Detection Of Hepatitis C VirusHo, Hsin-Ying / Kao, Wei-Sin / Deval, Piyush / Yu, Ling-Shan / Lin, Che-Hsin et al. | 2023
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Smart Electrode Array for Cochlear ImplantsItawi, Ahmad / Ghenna, Sofiane / Tourrel, Guillaume / Grondel, Sebastien / Plesse, Cedric / Nguyen, Tran Minh Giao / Vidal, Frederic / Adagolodjo, Yinoussa / Xun, Lingxiao / Zheng, Gang et al. | 2023
- 456
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A Three-Dimensional Artificial Intestinal Tissue With A Crypt-Like Inner SurfaceTanaka, Shuma / Itai, Shun / Onoe, Hiroaki et al. | 2023
- 460
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Tissue-Engineered Pennate Muscles On A ChipIto, Motoki / Morimoto, Yuya / Takeuchi, Shoji et al. | 2023
- 463
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Weight Training Device to Promote Maturation in Skeletal Muscle TissuesMotoi, Kentaro / Jo, Byeongwook / Morimoto, Yuya / Takeuchi, Shoji et al. | 2023
- 467
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Microsystem Vibrating Mesh Atomizer With Integrated Microheater For High Viscosity Liquid Aerosol GenerationSharma, Pallavi / Vazquez, Irma Rocio / Jackson, Nathan et al. | 2023
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Scalable Modular Measurement System For Continuous Blood Monitoring With Piezoelectric Mems ResonatorsSchneider, Michael / Kosl, Bernhard / Alasatri, Suresh / Magnet, Ingrid A.M. / Schmid, Ulrich et al. | 2023
- 475
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Silicon Compatible Process To Integrate Impedance Cytometry With Mechanical CharacterizationRezard, Quentin / Shaik, Faruk Azam / Gerbedoen, Jean Claude / Cleri, Fabrizio / Collard, Dominique / Lagadec, Chann / Tarhan, Mehmet C. et al. | 2023
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Sorting Of Extracellular Vesicles By Using Optically-Induced Dielectrophoresis On An Integrated Microfluidic ChipSoong, Wei-Jen / Wang, Chih-Hung / Chen, Yi-Sin / Chen, Chihchen / Lee, Gwo-Bin et al. | 2023
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A Reprogrammable Mem Switch Utilizing Controlled Contact WeldingEsatu, Tsegereda K. / Kam, Hei / Tatum, Lars P. / Hu, Xiaoer / Sikder, Urmita / Almeida, Sergio / Wu, Junqiao / Liu, Tsu-Jae King et al. | 2023
- 487
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Micromechanical RSSI Based on Force Interaction Derived Tapping Bandwidth Variation in VIBRO-IMPACT ResonatorsHuang, Yi-Hsuan / Zheng, Hong-Sen / Tsai, Chun-Pu / Li, Wei-Chang et al. | 2023
- 491
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Wake-Up IoT Wireless Sensing Node Based on a Low-G Threshold mems Inertial Switch with Reliable ContactsGhosh, Sagnik / Goh, Duan Jian / Koh, Yul / Sharma, Jaibir / Da Toh, Wei / Chen, Weiguo / Zhang, Yao / Ng, Eldwin / Lal, Amit / Lee, Joshua E.-Y. et al. | 2023
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Artificial Intelligence (AI)-Enhanced E-Skin with Artificial Synapse Sensory Output for Humanoid Robotic Finger of Multimodal PerceptionGuo, Xinge / Lee, Chengkuo et al. | 2023
- 499
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Multi-Mems Differential Pressure Sensor Elements-Based Airflow Sensor with Neural Network ModelHaneda, Kotaro / Matsudaira, Kenei / Takahashi, Hidetoshi et al. | 2023
- 503
-
Trial-and-Error Learning for MEMS Structural Design Enabled by Deep Reinforcement LearningSui, Fanping / Yue, Wei / Zhang, Ziqi / Guo, Ruiqi / Lin, Liwei et al. | 2023
- 507
-
Fully Microelectromechanical Non-Volatile Memory CellWorsey, Elliott / Kulsreshath, Mukesh K. / Tang, Qi / Pamunuwa, Dinesh et al. | 2023
- 511
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Nonvolatile State Configuration of Nano-Watt Parametric ISING Spins Through Ferroelectric Hafnium Zirconium Oxide MEMS VaractorsCasilli, Nicolas / Kaya, Onurcan / Kaisar, Tahmid / Davaji, Benyamin / Feng, Philip X.-L. / Cassella, Cristian et al. | 2023
- 515
-
Physical Reservoir Computing Using Nonlinear MEMS Resonator Having High Memory Capacity at "Edge of Chaos"Takemura, Hiroki / Mizumoto, Takahiro / Banerjee, Amit / Hirotani, Jun / Tsuchiya, Toshiyuki et al. | 2023
- 519
-
Programmable Ferroelectric HZO NEMS Mechanical Multiplier for in-Memory ComputingJadhav, Shubham / Gund, Ved / Lal, Amit et al. | 2023
- 522
-
Storing MEMS Interfaces Without Electrical Auxiliary Energy for Long-Time MonitoringHoffmann, Martin / Schmitt, Philip / Wittemeier, Steffen / Schaller, Falk / Shaporin, Alexey / Stockel, Chris / Geneis, Volker / Forke, Roman / Hedayat, Christian / Hilleringmann, Ulrich et al. | 2023
- 526
-
A New Finding on Nonlinear Damping and Stiffness of Flexural Mode Capacitive MEMS ResonatorsChen, Hung-Yu / Li, Ming-Huang / Li, Sheng-Shian et al. | 2023
- 530
-
Exploiting Parametric Instability in Bistable MEMS ActuatorsPlatz, Daniel / Fabian, Johannes / Samm, Elisabeth / Mortada, Mahdi / Schneider, Michael / Schmid, Ulrich et al. | 2023
- 534
-
First Prototype of Polymer Micromachined Flapping Wing Nano Air VehicleRashmikant / Suetsugu, Ryotaro / Onishi, Minato / Ishihara, Daisuke et al. | 2023
- 538
-
Iterative Learning Control for Quasi-Static MEMS Mirror with Switching OperationMacho, Matthias / Yoo, Han Woong / Schroedter, Richard / Schitter, Georg et al. | 2023
- 542
-
Mz Atomic Magnetometer Using A 3D Mems Glass Alkali Vapor Cell With Vertical SidewallsZhang, Jin / Zhang, Jianfeng / Li, Wenqi / Wang, Ziji / Shang, Jintang et al. | 2023
- 546
-
On-Chip Heating Noise Suppression of 3d Chip-Scale Atomic Magnetometer Using Single-Layer Shifted HeaterWang, Ziji / Wu, Junming / Zhang, Jin / Shang, Jintang et al. | 2023
- 550
-
Labor-Saving Platform for Characterization of Membrane Proteins by Automated Monitoring and Data ReportingOgishi, Kazuto / Osaki, Toshihisa / Morimoto, Yuya / Takeuchi, Shoji et al. | 2023
- 554
-
Modelling Impact of Viscoelastic Properties of Die-Attach Material on the Bias Response of Resonant Inertial SensorsMiani, Theo / Gurung, Lokesh / Sobreviela-Falces, Guillermo / Young, Douglas / Baker, Colin / Seshia, Ashwin A. et al. | 2023
- 558
-
CMOS-Embedded 3D Micro/Nanofluidics Employing Top-Down Beol Single-Step Wet-Etching TechniqueWeng, Wei-Yang / Hou, Hung-Yu / Chao, Yueh-Jung / Liaw, Shwu-Jen / Chien, Jun-Chau et al. | 2023
- 562
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Implementation of a Monolithic SoC Environmental Sensing Hub Using CMOS-MEMS TechniqueLee, Ya-Chu / Chien, Tung-Lin / Fang, Chi-Te / Huang, Yuanyuan / Sung, Wei-Lun / Chu, Yen-Chang / Chen, Rongshun / Fang, Weileun et al. | 2023
- 566
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Monolithically and Vertically Integrated Environmental Sensing Hub with Novel Air-Based Humidity Sensor DesignChien, Tung-Lin / Huang, Yuanyuan / Shih, Fuchi / Fang, Weileun et al. | 2023
- 570
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A Self-Corrected, Self-Cleaned MEMS and Suitable for Advanced Foundry Multi-Project Wafer (MPW)Kumar, Sushil / Arya, Dhairya Singh / Garg, Manu / Singh, Pushpapraj et al. | 2023
- 574
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Monolithic Integration of Humidity/Flow/Temperature Sensors As Environment Sensing Hub for Apparent-Temperature DetectionLi, Yu-Hsuan / Chien, Tung-Lin / Shih, Fuchi / Huang, Yuanyuan / Fang, Weileun et al. | 2023
- 578
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Piezoresistive Pressure Sensor with Monolithically Integrated Amplifier Based on Metal-Oxide TransistorsShi, Runxiao / Lin, Dequan / Chau, Kevin / Wong, Man et al. | 2023
- 582
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A Performance Enhancement Method for Thermopile Sensors Using a Chip Probe Test SystemShi, Meng / Li, Mao / Ni, Yue / Zhang, Chenchen / Zhou, Na / Mao, Haiyang / Huang, Chengjun et al. | 2023
- 586
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Characterizing Inductively-Coupled-Plasma Etching of Single Crystalline Lithium Tantalate for Micro-Acoustic ApplicationsMajd, Yasaman / Castro, Jorge Manrique / Mansoorzare, Hakhamanesh / Abdolvand, Reza et al. | 2023
- 590
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Robust Polycrystalline 3C-Sic-on-Si Heterostructures with Low CTE Mismatch up to 900 °C for MEMSMoll, Philipp / Pfusterschmied, Georg / Schmid, Ulrich et al. | 2023
- 594
-
A 3D-Printed Functional MEMS AccelerometerPagliano, Simone / Marschner, David E. / Maillard, Damien / Ehrmann, Nils / Stemme, Goran / Braun, Stefan / Villanueva, Luis Guillermo / Niklaus, Frank et al. | 2023
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A Full 3D Printing Method for Monolithic Integration of an Accelerometer and a Force SensorLiu, Guandong / Wang, Changhai / Wang, Kexin / Jia, Zhili / Luo, Ruiqi / Ma, Wei et al. | 2023
- 602
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Characterization of Vapor HF Sacrificial Etching Through Submicron Relase Holes for Wafer-Level Vacuum Packaging Based on Silicon Migration SealGong, Tianjiao / Suzuki, Yukio / Khan, Muhammad J. / Hiller, Karla / Tanaka, Shuji et al. | 2023
- 606
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Damage Profile Modeling and Experiment of Silicon Carbide Substrates in Micro-Nano Structure Fabricated By Helium Focused ION BeamGao, Shupeng / Chen, Xi / Chen, Qianhuang / Li, Qi / Xing, Yan et al. | 2023
- 610
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Liquid-Immersion Inclined-Rotated UV Lithography for Micro Suction Cup ArrayKagawa, Gakuto / Takahashi, Hidetoshi et al. | 2023
- 613
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Parametric Amplification and Phononic Frequency Comb Generation in MoS2 Nanoelectromechanical ResonatorsYousuf, S M Enamul Hoque / Wang, Yunong / Lee, Jaesung / Shaw, Steven W. / Feng, Philip X.-L. et al. | 2023
- 617
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Parylene-N as a high Temperature thin Film Piezoelectric MaterialJackson, Nathan / Kunwar, Deepak et al. | 2023
- 621
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Silicon Carbide-on-Insulator Thermal-Piezoresistive Resonator for Harsh Environment ApplicationSun, Baoyun / Mo, Jiarui / Zhang, Hemin / van Zeijl, Henk W. / van Driel, Willem D. / Zhang, Guoqi et al. | 2023
- 625
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Spin Coating of Highly Aligned Agcn Microwires Epitaxially Grown on 2d MaterialsHam, Jimin / Lim, Jaemook / Lim, Joowon / Jang, Gunyoung / Lee, Sueng Yoon / Lim, Dohyun / Hong, Sukjoon / Lee, Won Chul et al. | 2023
- 627
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Suspended Two-Dimensional Material Membranes For Sensor Applications Fabricated With A High-Yield Transfer ProcessLukas, Sebastian / Kraiem, Ines / Prechtl, Maximilian / Hartwig, Oliver / Grundmann, Annika / Kalisch, Holger / Kataria, Satender / Heuken, Michael / Vescan, Andrei / Duesberg, Georg S. et al. | 2023
- 631
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TCF-Improved SH0 Mode Acoustic Resonators Based on 30°YX-LINBO3/SIO2 MembraneWu, Shuxian / Wu, Zonglin / Qian, Hangyu / Bao, Feihong / Tang, Gongbin / Xu, Feng / Zou, Jie et al. | 2023
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Wafer Scale Multilayer Graphene Based Brain Probes by Spin-Spraying Methods for Magnetic Resonance ImagingTu, Kejun / Guo, Zhejun / Xu, Mengfei / Yang, Bin / Liu, Jingquan et al. | 2023
- 639
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3d Self-Aligned Fabrication of Suspended Nanowires by Crystallographic NanolithographyBerenschot, Erwin J.W. / Pordeli, Yasser / Kooijman, Lucas J. / Janssens, Yves L. / Tiggelaar, Roald M. / Tas, Niels R. et al. | 2023
- 643
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A Simple Process for the Fabrication of Parallel-Plate Electrostatic MEMS Resonators by Gold Thermocompression BondingJuarez, Dolores Manrique / Mathieu, Fabrice / Libaude, Guillaume / Bourrier, David / Charlot, Samuel / Mazenq, Laurent / Conedera, Veronique / Salvagnac, Ludovic / Dufour, Isabelle / Nicu, Liviu et al. | 2023
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Electromechanically Stable Interconnection between LIG and Thick Dam-Shaped Metallic Electrode via Stored AG Microparticle SolutionPark, Saeyoung / Shin, Yoo-Kyum / Seo, Min-Ho et al. | 2023
- 651
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Free-Standing Membranes with Self-Assembled Nanopore Arrays for Tem Observation of Liquid SamplesLim, Joowon / Ham, Jimin / Jeon, Sungho / Bae, Yuna / Kang, Minho / Lee, Sueng Yoon / Park, Jungwon / Lee, Won Chul et al. | 2023
- 653
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Nonplanar Nanofabrication Via Interface EngineeringSpector, Sarah O. / Satterthwaite, Peter F. / Niroui, Farnaz et al. | 2023
- 657
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Wafer-Level Fabrication of Conformal Sub 10-NM NanogapsTope, Sayali / Noh, Seungbeom / Kim, Hanseup et al. | 2023
- 661
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Mems Resonator Vacuum-Sealed by Silicon Migration and Hydrogen OutdiffusionKhan, Muhammad Jehanzeb / Suzuki, Yukio / Gong, Tianjiao / Tsukamoto, Takashiro / Tanaka, Shuji et al. | 2023
- 665
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MEMS Thin-Film Vacuum Package Utilizing Glow Discharge GetterMaharshi, Vikram / Kumar, Manjeet / Agarwal, Ajay / Mitra, Bhaskar et al. | 2023
- 669
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LNOI Thin-Film Dual-Axis Resonant Micro-Mirror with E16 Torsional ActuationLu, Yaoqing / Liu, Kangfu / Wang, Yuxi / Nie, Ran / Wu, Tao et al. | 2023
- 673
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A Piezoelectric MEMS Speaker with Stretchable Film SealingXu, Linbing / Sun, Mingchao / Zhang, Menglun / Liu, Chengze / Yang, Xiaopeng / Pang, Wei et al. | 2023
- 677
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Broadband MEMS Speaker by Single-Way Multi-Resonance Array with Acoustic Damping Tuning: A Proof of ConceptSun, Mingchao / Zhang, Menglun / Liu, Chengze / Pang, Wei et al. | 2023
- 681
-
Ionic Liquid Electrospray Thruster with Two-Stage Electrodes On Glass SubstrateNishimura, Akane / Tsuchiya, Toshiyuki / Takao, Yoshinori et al. | 2023
- 685
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Monolithic Integration of PZT Actuation Units of Various Activated Resonances for Full-Range Mems Speaker ArrayCheng, Hsu-Hsiang / Lo, Sung-Cheng / Chen, Yu-Chen / Cheng, Ming-Ching / Wei, Ting-Chou / Wu, Mingching / Fang, Weileun et al. | 2023
- 689
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Pull-in Voltage Reduction in Electrostatic Airgap Actuator Using 12 NM-Ultrathin Internal Dielectric TransductionVerma, Satish K. / Mitra, Bhaskar et al. | 2023
- 693
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A Reverse Electrowetting-On-Dielectric (Rewod) Energy Harvester Using Nonwetting Gallium Coated Electrode And Ultrathin Gallium Oxide Shell As Dielectric LayerJeong, Jinwon / Suh, Bokyung / Lee, Jeong Bong JB et al. | 2023
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Asymmetric Quad Leg Orthoplanar Spring for Wideband Piezoelectric Micro Energy HarvestingMohammadi, Ali / Sadrafshari, Shamin / Shokrani, Alborz / Bowen, Chris R. et al. | 2023
- 701
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Evaluation of Thermoelectric Properties of Monolithically-Integrated Core-Shell Si Nanowire BridgesUesugi, Akio / Nishiyori, Shusuke / Sugano, Koji / Isono, Yoshitada et al. | 2023
- 705
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Glaze Tile-Inspired Liquid-Solid Power Generator for Continuous Water Flow Energy HarvestingNie, Dezhi / Lyu, Boming / Hu, Yongbo / Zhang, Jian / Fu, Yongqing / Chang, Honglong / Tao, Kai et al. | 2023
- 709
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MEMS Cantilevered Energy Harvester with Tapered Thickness for Stress ControlYokota, Takahito / Kanda, Kensuke / Fujita, Takayuki / Maenaka, Kazusuke et al. | 2023
- 712
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Tapered Helmholtz Resonator Wind Energy Harvester Driven by AeroacousticsHua, Chen / Zhen, Liyun / Liu, Jingquan / Yang, Bin et al. | 2023
- 716
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Andromeda: A Flexible MEMS Technology Platform for a Variety of Piezoelectrically Actuacted MicromirrorsMartini, Irene / Alessandri, Anna / Carminati, Marta / Carminati, Roberto / Ferrarini, Paolo / Gatti, Daniela A. L. / Gianola, Riccardo / Lazarova, Borka / Lazzari, Carla M. / Nomellini, Andrea et al. | 2023
- 720
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Design of Butterfly Plate Piezoelectric Actuator with Dual Driving Electrodes for MEMS Micro-MirrorChen, Si-Han / Liu, Shih-Chi / Cheng, Hao-Chien / Lin, Hung-Yu / Liang, Kai-Chih / Wu, Mingching / Fang, Weileun et al. | 2023
- 724
-
Fully-Flexible Micro-Scale Actuator Array with the Liquid-Gas Phase Change MaterialsSim, Sangjun / Bae, Kyubin / Kim, Jongbaeg et al. | 2023
- 728
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A Novel Comb Design for Enhanced Power and Bandwidth in Electrostatic Mems Energy ConvertersLi, Jinglun / Ouro-Koura, Habilou / Arnow, Hannah / Nowbahari, Arian / Galarza, Matthew / Obispo, Meg / Tong, Xing / Azadmehr, Mehdi / Hella, Mona M. / Tichy, John A. et al. | 2023
- 732
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A Hybrid Nanogenerator-Driven Self-Powered Wearable Perspiration Monitoring SystemZahed, Md Abu / Rana, S M Sohel / Sharifuzzaman, Md / Jeong, Seonghoon / Pradhan, Gagan Bahadur / Song, Hye Su / Park, Jae Yeong et al. | 2023
- 736
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A Monolithic Integrated and Transparent Microsystem Constructed by Using Amorphous InGaZnO FilmJia, Bin / Zhang, Chao / Huang, Xiaodong et al. | 2023
- 740
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Flowing Water Enables Steerable Charge Distribution on Electret SurfaceLyu, Boming / Zhang, Jian / Li, Yunjia / Fu, Yongqing / Chang, Honglong / Yuan, Weizheng / Tao, Kai et al. | 2023
- 744
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Self-Powered Flexible Piezoelectret Array for Wearable ApplicationsYang, Hao / Pinto, Rui M. R. / Gonzalez, Pedro / Ainla, Alar / Faraji, Mohammadmahdi / Vinayakumar, K. B. et al. | 2023
- 748
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A Bulk-Type Pressure Sensor with Full-Bridge Implementation Enabled by Stress-Modifying TrenchesLin, Dequan / Wong, Man / Chau, Kevin et al. | 2023
- 752
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A CMOS Compatible Micro Pirani Gauge with Structure Optimization for Performance EnhancementJiao, Rui / Yang, Gai / Wang, Ruoqin / Tang, Yue / Liu, Zhongyi / Xie, Huikai / Yu, Hongyu / Wang, Xiaoyi et al. | 2023
- 756
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A Thermal Airflow Sensor Based on Mn-Co-Ni-O Thin FilmWang, Jie / Liu, Yunfei / Zhu, Zhezheng / Gao, Chengchen / Yang, Zhenchuan / Hao, Yilong et al. | 2023
- 760
-
Highly Sensitive Wave Height Sensor with MEMS Piezoresistive Cantilever and Waterproof MembraneHirayama, Takuto / Takahashi, Hidetoshi et al. | 2023
- 763
-
MEMS Capacitance Diaphragm Gauge With Two Sealed Reference CavitiesHan, Xiaodong / Li, Jingzhen / Li, Gang / Feng, Yongjian et al. | 2023
- 767
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Towards a Gas Independent Thermal Flow MeterKenari, Shirin Azadi / Wiegerink, Remco J. / Sanders, Remco G.P. / Lotters, Joost C. et al. | 2023
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An Integrated Mems Device for in-Situ Four-Probe Electro-Mechanical Characterization of PT NanobeamHuang, Yuheng / Nie, Meng / Li, Binghui / Yin, Kuibo / Sun, Litao et al. | 2023
- 775
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Fingerlike Tactile Texture Integrated Sensor with Cold and Warm Sensations of Sub-MM Spatial ResolutionMise, Nachi / Kozasa, Mitsuki / Terao, Kyohei / Shimokawa, Fusao / Takao, Hidekuni et al. | 2023
- 779
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Modified Beam Structures for Improved Resonant SensingGhaderi, Erfan / Bahreyni, Behraad et al. | 2023
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Occlusal Paper-Based Flexible Pressure Sensor for in Situ Measuring Oral Occlusal ForceWang, Wenduo / Zhang, Xin / Zhao, Ning / Liu, Jingquan / Yang, Bin et al. | 2023
- 787
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Suction Cup Array Working Also as Tactile Sensor to Detect Cups Deformation Using KCF and CNNShiratori, Toshihiro / Sakamoto, Jinya / Kumokita, Yuki / Suzuki, Masato / Takahashi, Tomokazu / Aoyagi, Seiji et al. | 2023
- 791
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Vertical Integration of Force Transmission Structure on Capacitive Cmos-Mems Tactile Force Sensor for Sensitivity ImprovementHuang, Yuanyuan / Chen, Yen-Lin / Lin, Shihwei / Shih, Fuchi / Hu, Zihsong / Fang, Weileun et al. | 2023
- 795
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1-octadecanethiol Sam on CMOS-MEMS Gold-Plated Resonator via Dip-Cast for VOCS SensingPerello-Roig, Rafel / Verd, Jaume / Bota, Sebastia / Soberats, Bartomeu / Costa, Antonio / Segura, Jaume et al. | 2023
- 799
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Application of Deep Learning Network for Humidity Compensation of Semiconductor Metal Oxide Gas SensorsKang, Mingu / Cho, Incheol / Park, Nkyu et al. | 2023
- 803
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Development of Monolithic Micro-Led Gas Sensor Based E-Nose System for Real-Time, Selective Gas PredictionLee, Kichul / Kang, Mingu / Park, Inkyu et al. | 2023
- 807
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Electronic-Nose: An Array of 16 MOS-Gas Sensors Integrated With Temperature and Moisture Sensing CapabilitiesYue, Xiawei / Wei, Shuai / Zhang, Pingping / Zhou, Zhitao / Tao, Tiger H. / Qin, Nan et al. | 2023
- 811
-
Enhancement of Sensitivity in Photonic Crystal Based Chemical Sensor Using Chemo-Mechanical Bilayer EffectLee, Seyeon / Banavathi, Naik T. / Kang, Dongwon / Kang, Sookyung / Cho, Kyungsuk / Kim, Jungwook / Park, Jungyul et al. | 2023
- 814
-
Metal Ion Recognition Sensor Based on Resistive Switching EffectKang, Tian / Chen, Yusa / Lin, Guanzhou / Jin, Shengxiao / Li, Liye / Sun, Hongshun / Hu, Senyong / Wu, Wengang et al. | 2023
- 818
-
Multi-Hotspot MID-IR Nanoantennas with Matched Loss and High-Intensity Near-Field for Sub-ppm-Level Gas DetectionZhou, Hong / Ren, Zhihao / Xu, Cheng / Xu, Liangge / Guo, Xinge / Lee, Chengkuo et al. | 2023
- 822
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Palladium Based Mems Hydrogen SensorsHoffmann, Max / Wienecke, Marion / Lengert, Maren / Weidner, Michael H. / Heeg, Jan et al. | 2023
- 826
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Selective Discrimination of Ppb-level Vocs Using Mos Gas Sensor in Pulse-Heating Mode with the Modified Hill's ModelNiu, Gaoqiang / Zhuang, Yi / Hu, Yushen / Liu, Zong / Wang, Fei et al. | 2023
- 830
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Thermal Conductivity Detector (TCD)-Type Gas Sensor Based on the Suspended 1D Nanoheater for IoT ApplicationsCho, Wootaek / Kwak, Jong-Hyun / Kim, Taejung / Shin, Heungjoo et al. | 2023
- 833
-
120 ppm Quality Factor Thermal Stability from -40 ℃ to +60℃ of a Dual-Axis MEMS Gyroscope Based on Joule Effect Dynamic ControlCui, Jian / Zhao, Qiancheng et al. | 2023
- 837
-
A Force-Balance Capacitive MEMS Gravimeter with Superior Response Time, Self-Noise and DriftGao, Le / Li, Fangzheng / Zhang, Jian / Cai, Bingyang / Wu, Wenjie / Tu, Liangcheng et al. | 2023
- 841
-
A MEMS-Based Gravimeter for Simultaneous Vertical and Horizontal Earth Tides MeasurementsYang, Lujia / Xu, Xiaochao / Wang, Qian / Tian, Ji'Ao / Fang, Yanyan / Zhao, Chun / Wu, Wenjie / Hu, Fangjing / Tu, Liangcheng et al. | 2023
- 845
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A Novel Multiple-Folded Beam Disk Resonator for Maximizing the Thermoelastic Quality FactorSun, Xiaopeng / Zhou, Xin / Yu, Lei / He, Kaixuan / Wu, Xuezhong / Xiao, Dingbang et al. | 2023
- 849
-
A Time-Series Configuration Method of Mode Reversal in MEMS Gyroscopes Under Different Temperature-Varying ConditionsChen, Liangqian / Miao, Tongqiao / Li, Qingsong / Wang, Peng / Li, Junjian / Wu, Xuezhong / Xiao, Dingbang / Xi, Xiang et al. | 2023
- 853
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Acoustically Isolated MEMS Baw GyroscopesSerrano, Diego Emilio / Rahafrooz, Amir / Younkin, Duane / Nunan, Kieran / Dalal, Mitul / Pal, Sagnik / Jafri, Ijaz / Hiraoka, S. et al. | 2023
- 857
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Active Quality Factor Stabilization of MEMS Resonator Utilizing Electrical Dissipation RegulationZhao, Yang / Shi, Qin / Xia, Guoming / Qiu, Anping et al. | 2023
- 861
-
Demonstration of Gyro-Less North Finding Using a T-Shaped MEMS Differential Resonant AccelerometerMasunishi, Kei / Ogawa, Etsuji / Ono, Daiki / Miyazaki, Fumito / Hiraga, Hiroki / Uchida, Kengo / Ogawa, Jumpei / Murase, Hideaki / Tomizawa, Yasushi et al. | 2023
- 865
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Enhanced Stiffness Sensitivity in a Mode Localized Sensor Using Internal Resonance ActuationChen, Jianlin / Zhang, Hemin / Tsukamoto, Takashiro / Kraft, Michael / Tanaka, Shuji et al. | 2023
- 869
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Modeling Stress Effects on Frequencies of a Mems Ring GyroscopeHosseini-Pishrobat, Mehran / Uzunoglu, Baha Erim / Tatar, Erdinc et al. | 2023
- 873
-
Rate Integrating Gyroscope Tuned by Focus Ion Beam Trimming and Independent CW/CCW Modes ControlChen, Jianlin / Tsukamoto, Takashiro / Langfelder, Giacomo / Tanaka, Shuji et al. | 2023
- 877
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Temperature Dependence of Quality Factors at High Frequencies in MEMS GyroscopesSchiwietz, Daniel / Weig, Eva M. / Degenfeld-Schonburg, Peter et al. | 2023
- 881
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0.5MM×0.5MM 150KPA-Measure-Range High-Temperature Pressure Sensor with High-Performance and Low Fabrication-CostLi, Peng / Li, Wei / Chen, Changnan / Sun, Ke / Liu, Min / Wu, Sheng / Pan, Pichao / Wang, Jiachou / Li, Xinxin et al. | 2023
- 885
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Automatic Pico Laser Trimming System for Silicon MEMS Resonant Devices Based on Image RecognitionLiu, Yuxian / Zhao, Qiancheng / Zhang, Dacheng / Cui, Jian et al. | 2023
- 889
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Micromachining Fused Silica Micro Shell Resonator with Quartz Glass Mold by Thermal ReflowSu, Zhaoxi / Luo, Bin / Tang, Qiankai / Zhu, Linqian / Shang, Jintang et al. | 2023
- 893
-
Wafer-Level Patterning of Tin Oxide Nanosheets for MEMS Gas SensorsLi, Mingjie / Luo, Wenxin / Liu, Xiaojiang / Niu, Gaoqiang / Wang, Fei et al. | 2023
- 897
-
Air Damping Effects on Different Modes of AlN-on-Si Microelectromechanical ResonatorsLiu, Yuncong / Enamul Hoque Yousuf, S M / Qamar, Afzaal / Rais-Zadeh, Mina / Feng, Philip X.-L. et al. | 2023
- 901
-
A Novel Piezoresistive Pressure Sensor Based on Cr-doped V2O3 Thin FilmGidts, Michiel / Hsu, Wei-Fan / Payo, Maria Recaman / Kushwaha, Shashwat / Wang, Chen / Ceyssens, Frederik / Reynaerts, Dominiek / Locquet, Jean-Pierre / Kraft, Michael et al. | 2023
- 905
-
A Novel Feedthrough Cancellation Technique for Piezoelectric MEMS Resonant Sensors in Ionic Liquid MediumWu, Cheng-Yen / Lin, Zhong-Wei / Li, Sheng-Shian et al. | 2023
- 909
-
Characterization of Packaging Stress with a Capacitive Stress Sensor ArrayVeske, Tolga / Erkan, Derin / Tatar, Erdinc et al. | 2023
- 913
-
Millisecond-Level Pulse-Heating Sensing System for MEMS-based Gas SensorsZhuang, Yi / Niu, Gaoqiang / Wu, Lang / Wang, Fei et al. | 2023
- 917
-
Multiple Parameter Decoupling Using a Single Resonant MEMS Sensor via Blue Sideband ExcitationXi, Jingqian / Xu, Lei / Wang, Yuan / Hu, Fangjing / Li, Chengxin / Wang, Linlin / Liu, Huafeng / Wang, Chen / Kraft, Michael / Zhao, Chun et al. | 2023
- 921
-
Diamond Nanowires Array Prepared by Annealing Nano-Crystalline Diamond in Air and Its Application in Field EmissionWang, Yang / Lin, Chen / Zhang, Jinwen et al. | 2023
- 925
-
Quantified Stress Relaxation in Carbon Nanotube ResonatorsVollmann, Morten / Roman, Cosmin / Haluska, Miroslav / Hierold, Christofer et al. | 2023
- 929
-
Self-Referenced Temperature Sensors Based on Cascaded Silicon Ring ResonatorZhu, Xiantao / You, Minmin / Lin, Zude / Yang, Bin / Liu, Jingquan et al. | 2023
- 933
-
A 0.35 MM2 System on Chip Level Detector Based on An Annular Pmut-On-Cmos ArrayLedesma, Eyglis / Zamora, Ivan / Torres, Francesc / Uranga, Arantxa / Barniol, Nuria et al. | 2023
- 937
-
An ALSCN PMUT-on-CMOS Sensor for Monitoring Fluids’ Density, Viscosity, Sound Velocity, and CompressibilityLedesma, Eyglis / Zamora, Ivan / Yanez, Jesus / Uranga, Arantxa / Barniol, Nuria et al. | 2023
- 941
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Auto-Positioning and Haptic Stimulations via A 35 mm Square Pmut ArrayYue, Wei / Peng, Yande / Liu, Hanxiao / Xia, Fan / Sui, Fanping / Umezawa, Seiji / Ikeuchi, Shinsuke / Aida, Yasuhiro / Lin, Liwei et al. | 2023
- 945
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Body Force Based Droplet Ejection by GHz Acoustic Micro-TransducerZhang, Haitao / Zhou, Yangchao / Zhang, Menglun / Guo, Wenlan / Sun, Chen / Duan, Xuexin / Pang, Wei et al. | 2023
- 949
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Bone Conduction Pickup Based on Piezoelectric Micromachined Ultrasonic TransducersLiu, Chongbin / Wang, Xiangyang / Xie, Yong / Wu, Guoqiang et al. | 2023
- 953
-
Breaking the Dead Zone Limitation of Pmuts Based on a Phase Shift of Driving Waveform with Window FunctionLiu, Chun-You / Chang, Chin-Yu / Li, Sheng-Shian et al. | 2023
- 957
-
Drone-Mounted Low-Frequency pMUTS for > 6-Meter Rangefinder in AirLiu, Hanxiao / Peng, Yande / Yue, Wei / Umezawa, Seiji / Ikeuchi, Shinsuke / Aida, Yasuhiro / Chen, Chunming / Tsao, Peggy / Lin, Liwei et al. | 2023
- 961
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Mass Produced Micromachined Ultrasonic Time-Of-Flight Sensors Operating in Different Frequency BandsPrzybyla, Richard J. / Shelton, Stefon E. / Lee, Cathy / Eovino, Benjamin E. / Chau, Quy / Kline, Mitchell H. / Izyumin, Oleg I. / Horsley, David A. et al. | 2023
- 965
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MEMS First-Order Bessel Beam Acoustic Transducer for Particle Trapping And Controllable RotatingLi, Jiaqi / Sun, Zhenhuan / Jia, Yuyu / Li, Teng / Lu, Haojian / Zhao, Lurui / Liu, Hai / Liu, Song et al. | 2023
- 969
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Non-Invasive Carotid Artery Monitoring by Using Aluminum Nitride Pmut Close-Packed ArraysWu, Sheng / Liu, Kangfu / Shao, Shuai / Li, Wei / Chen, Ying / Wu, Tao / Li, Xinxin et al. | 2023
- 973
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Non-Linear Behavioral Modeling of Capacitive MEMS MicrophonesAnzinger, Sebastian / Wasisto, Hutomo Suryo / Basavanna, Abhiraj / Fueldner, Marc / Dehe, Alfons et al. | 2023
- 977
-
Vortex-Beam Acoustic Transducer for Underwater PropulsionLee, Jaehoon / Esfahani, Kianoush Sadeghian / Kim, Eun S. et al. | 2023
- 981
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Wideband and Highly Sensitive Micromachined PZT Film-Based Ultrasonic Microphone with Parylene Film and Flexible Helmholtz Resonator EnhancementHuang, Chung-Hao / Feng, Guo-Hua et al. | 2023
- 985
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Halbach-Array Magnetic Coil Arrangement on CMOS Chip for Sensitivity Enhancement of Inductive Tactile SensorChou, Tien / Hu, Zih-Song / Fang, Weileun et al. | 2023
- 989
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ON-MEMS-CHIP Compact Temperature Sensor for Large-Volume, Low-Cost Sensor CalibrationFrigerio, Paolo / Fagnani, Andrea / Zega, Valentina / Gattere, Gabriele / Frangi, Attilio / Langfelder, Giacomo et al. | 2023
- 993
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Particulate Matter Sensor Based on Two-Stage Cascade Virtual Impactors and Thermophoretic MicroheatersChoi, Kwang-Wook / Kim, Ilhwan / Chung, Seokwhan / Sung, Gi-Bong / Yook, Se-Jin et al. | 2023
- 997
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A Microfluidic Oxygen Gradient Generator for the Study of Aerotropism in Hyphae of OomycetesTayagui, Ayelen / Sun, Yiling / Garrill, Ashley / Nock, Volker et al. | 2023
- 1001
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A Paper-Based Dual Aptamer Assay on an Integrated Microfluidic System for Detection of HNP 1 as a Biomarker for Periprosthetic Joint InfectionsGandotra, Rishabh / Kuo, Feng-Chih / Lee, Mel S. / Lee, Gwo-Bin et al. | 2023
- 1005
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An Integrated Microfluidic Platform for Tumor Cell Separation and Fluorescence in Situ Hybridization at Single Cell LevelQiu, Shihui / Li, Na / Wu, Zhenhua / Zhao, Jianlong / Mao, Hongju et al. | 2023
- 1009
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Characterization of Oocyte Hardening Using a Microfluidic Aspiration-Assisted Electrical Impedance Spectroscopy SystemCao, Yuan / Floehr, Julia / Schnakenberg, Uwe et al. | 2023
- 1013
-
Double Pulse Irradiation of FS Laser for Enhancing the Performance of Precise Laser Sorting MethodKiya, Ryota / Rintaro, Yoshinaga / Tanaka, Yo / Yalikun, Yaxiaer / Hsokawa, Yoichiroh et al. | 2023
- 1017
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Droplet Based High Throughput Single-Sperm Cryopreservation PlatformLi, Na / Qiu, Shihui / Wu, Zhenhua / Mao, Hongju et al. | 2023
- 1021
-
Dual Ion-Selective Membrane Deposited Ion-Sensitive Field-Effect Transistor (DISM-ISFET) Integrating Whole Blood Processing Microchamber for In Situ Blood Ion TestingChen, Xiao-Wen / Huang, Syuan-Rong / Huang, Nien-Tsu et al. | 2023
- 1025
-
Strong Microstreaming from a Pinned Oscillating Membrane and Application to Gas ExchangeMercader, Anthony L. / Kwon Cho, Sung et al. | 2023
- 1029
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Tunable Nanopore-Integrated Micro-/Nanofluidic Platform for Ion Transport Control in the Presence of Concentration and Temperature GradientsSeo, Dongwoo / Kim, Dongjun / Lee, Jongwan / Wang, Cong / Park, Jungyul / Kim, Taesung et al. | 2023
- 1033
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Quantitative Assessment of Captured Magnetic Nanoparticles Using Self-Powered Magnetoelectric Platform for Biological ApplicationsPathak, Pankaj / Yadav, Vinit K. / Das, Samaresh / Mallick, Dhiman et al. | 2023
- 1037
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Real-Time Operation of Microcantilever-Based in-Plane Resonators Partially Immersed in a Microfluidic SamplerXu, Jiushuai / Cao, Entian / Fahrbach, Michael / Agluschewitsch, Vladislav / Waag, Andreas / Peiner, Erwin et al. | 2023
- 1041
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Suspended Nanochannel Resonators Made by Nanoimprint and Gas Phase DepositionMuller, Manuel / Teuber, Jeremy / Nasri, Rukan / Canals, Francesc Torres / Barniol, Nuria / Sixto, Jordi Llobet / Borrise, Xavier / Perez-Murano, Francesc / Fernandez-Cuesta, Irene et al. | 2023
- 1045
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Developing an Extremely High Flow Rate Pneumatic Peristaltic Micropump for Blood Plasma Separation with Inertial Particle Focusing Technique from Fingertip Blood with LancetsVo, Tuan N.A. / Chen, Pin-Chuan / Chen, Pai-Shan et al. | 2023
- 1049
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Direct Patterning on Porous Surface Using Drop Impact PrintingReddy, Bheema Sankar / Dey Modak, Chandantaru / Lathia, Rutvik / Agarwal, Bhawana / R, Ebinesh Abraham / Sen, Prosenjit et al. | 2023
- 1052
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Manufacturing 3d-Printed Paper Microfluidics Integrated With Ionization Mass-Spectrometry for Illicit Drugs Analysis and On-Chip ChromatographyZaki, Muhammad Faizul / Chen, Pin-Chuan / Wu, Yi-Xin / Chen, Pai-Shan et al. | 2023
- 1056
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Detection Limits in Nanomechanical Mass Flow Sensing for Nanofluidics With Nanowire Open ChannelsEscobar, Javier E. / Molina, Juan / Gil-Santos, Eduardo / Ruz, Jose J. / Malvar, Oscar / Kosaka, Priscila M. / Tamayo, Javier / Paulo, Alvaro San / Calleja, Montserrat et al. | 2023
- 1060
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Controlling Particle Aggregation and Separation in Liquid on Membrane ResonatorsZhang, Haoran / Jia, Hao / Li, Xinxin et al. | 2023
- 1064
-
Development of Boat Model Powered by Electro-Hydrodynamic Propulsion SystemMai, Luan Ngoc / Nguyen, Tuan-Khoa / Vu, Trung Hieu / Xuan Dinh, Thien / Tran, Canh-Dung / Phan, Hoang-Phuong / Dinh, Toan / Nguyen, Thanh / Nguyen, Nam-Trung / Dao, Dzung Viet et al. | 2023
- 1068
-
Hemodynamic Analysis of Cardiomems: Adverse Hemodynamic EffectsLiu, Zhenhao / Han, Jiangli / Chen, Xing et al. | 2023
- 1072
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Modal Quality Factor Inversion of Non-Slender Mems Resonators Between Gases and LiquidsGesing, Andre L. / Tran, Thomas / Platz, Daniel / Schmid, Ulrich et al. | 2023
- 1076
-
Classifying Cell Cycle By Electrical Properties Using Machine LearningWei, Jian / Xing, Xiaoxing et al. | 2023
- 1080
-
High-Throughput Spherical Supraparticle Self-Assembly by Enhanced Evaporation of Colloidal Water Droplets Through Thin Film of Water-Soluble OilLee, Wonhyung / Rhee, Joowon / Kim, Joonwon et al. | 2023
- 1084
-
In-Ice Polymerization for Functional Hydrogel Microbead with Flash Freezing Centrifugal Microfluidic DeviceMurayama, Tomomi / Yoshida, Koki / Kurashina, Yuta / Onoe, Hiroaki et al. | 2023
- 1088
-
Temperature-Responsive Microcapsules Manufactured by Promoting Controlled Cloaking with the Help of Micro/NanoparticlesLathia, Rutvik / Reddy, Bheema Sankar / Dey Modak, Chandantaru / Nagpal, Satchit / Sen, Prosenjit et al. | 2023
- 1091
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Water Vitrification in a Microchannel at Low Cooling RateSato, Ayane / Hayashi, Tomohiro / Ishida, Tadashi et al. | 2023
- 1095
-
A Highly Sensitive 3-Axis Micro Search-Coil Magnetometer enabled by High-Density Through-Silicon-Via ProcessTavakkoli, Hadi / Duan, Mingzheng / Qi, Longheng / Izhar / Zhao, Xu / Lee, Yi-Kuen et al. | 2023
- 1099
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Fully Integrated Back-Biased 3d Hall Sensor with Wafer-Level Integrated Permanent MicromagnetsGojdka, Bjorn / Cichon, Daniel / Stahl-Offergeld, Markus / Schroder, Dominik / Clausen, Niels / Hedayat, Christian / Hohe, Hans-Peter / Lisec, Thomas et al. | 2023
- 1103
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A Large-Stroke Tip-Tilt-Piston Micromirror with Electromagnetic Actuators Based on Metallic GlassOu, Chuan-Hui / Toan, Nguyen V. / Ono, Takahito et al. | 2023
- 1107
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Arbitrary Shaped Backside Reinforcement for Two Dimensional Resonant MicromirrorsSasaki, Takashi / Piot, Adrien / Lagosh, Anton / Fleury, Clement / Bainschab, Markus / Zhai, Yanfen / Baumgart, Marcus / Guerreiro, Sara / Holzmann, Dominik / Travnik, Ales et al. | 2023
- 1111
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High Transmittance Metasurface Holograms Using Silicon NitrideYamaguchi, Masakazu / Saito, Hiroki / Ikezawa, Satoshi / Iwami, Kentaro et al. | 2023
- 1115
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Multifunctional Optical Metasurface for Anomalous Reflection, Structural Color, and Surface Lattice ResonanceLi, Liye / Sun, Hongshun / Ouyang, Yifan / Jin, Shengxiao / Kang, Tian / Qi, Zhimei / Wu, Wengang et al. | 2023
- 1119
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Novel Wavefront-Splitting Interferometer for Ultra-Compact Broadband FT-IR Spectroscopy Extending to Visible RangeMortada, Bassem / Sabry, Yasser M. / Saadany, Bassam / Bourouina, Tarik / Khalil, Diaa et al. | 2023
- 1123
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Piezoelectrically Actuated Micromirror with Dynamic Deformation Compensation MechanismSasaki, Takashi / Piot, Adrien / Pribosek, Jaka / Lagosh, Anton / Fleury, Clement / Bainschab, Markus / Zhai, Yanfen / Baumgart, Marcus / Guerreiro, Sara / Holzmann, Dominik et al. | 2023
- 1127
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Resonant d33 Mode PZT Mems Mirror Excited with Directional Interdigitated ElectrodesThakkar, Pooja / Lagosh, Anton / Sasaki, Takashi / Bainschab, Markus / Pribosek, Jaka et al. | 2023
- 1131
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Resonant Piezoelectric Varifocal Mirror with on-Chip Integrated Diffractive Optics for Increased Frequency ResponsePribosek, Jaka / Lagosh, Anton / Thakkar, Pooja / Sasaki, Takashi / Bainschab, Markus et al. | 2023
- 1135
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Unique Dispersion Relation for Plasmonic Photodetectors with Submicron GratingKaneda, Yuki / Oshita, Masaaki / Yamaoka, Utana / Saito, Shiro / Kan, Tetsuo et al. | 2023
- 1139
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Integration of a High Temperature Transition Metal Oxide NTC Thin Film in a Microbolometer for LWIR DetectionRisquez, Sarah / Redolfi, Sebastian / Fleury, Clement / Wulf, Matthias / Roshanghias, Ali / Piot, Adrien / Streque, Jeremy / Schmoltner, Kerstin / Dao, Thang Duy / Puff, Markus et al. | 2023
- 1143
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Periodic Cavities on the IR-Absorber for Responsivity Enhancement of CMOS-MEMS Thermoelectric IR SensorLi, Yung-Chen / Chou, Tien / Lin, Pen-Sheng / Huang, Yu -Cheng / Shih, Fuchi / Lin, You -An / Yen, Da-Jen / Lai, Mei-Feng / Fang, Weileun et al. | 2023
- 1147
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Ultra-Large Pixel Array Photothermal Transducer and its Thermal Performance Prediction StrategyLi, Defang / Zhang, Jinying / Xu, Jiushuai / Peiner, Erwin / Li, Zhuo / Wang, Xin / Yang, Suhui / Gao, Yanze et al. | 2023
- 1151
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A CMOS-MEMS Beam Resonator with Q > 10,000Chen, Ting-Yi / Li, Wei-Chang et al. | 2023
- 1155
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Generic Temperature Compensation Scheme for CMOS-MEMS Resonators Based on ARC-Beam Derived Electrical Stiffness Frequency PullingHsieh, I-Chieh / Zheng, Hong-Sen / Tsai, Chun-Pu / Chen, Ting-Yi / Li, Wei-Chang et al. | 2023
- 1159
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High-Q and Low-Motional Impedance Piezoelectric mems Resonator through Mechanical Mode CouplingHuang, Linhai / Feng, Zhihong / Xiao, Yuhao / Sun, Fengpei / Xu, Jinghui et al. | 2023
- 1163
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Crosstalk-Free Large Aperture 2D Gimbal MicromirrorGhazinouri, Behrad / He, Siyuan et al. | 2023
- 1167
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Inverse Interference Effect-Enhanced Ultrasensitive Sensing Via Mid-IR NanoantennasZhou, Hong / Li, Dongxiao / Guo, Xinge / Ren, Zhihao / Lee, Chengkuo et al. | 2023
- 1171
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Twisted and Contacted Au Micro-Rods 3d Chiral Metamaterials with Circular Dichroism Via an Absorptive Route in Long-Wavelength InfraredFurusawa, Gaku / Kanda, Natsuki / Matsunaga, Ryusuke / Kan, Tetsuo et al. | 2023
- 1175
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3D Hybrid Acoustic Resonator with Coupled Frequency Responses of Surface Acoustic Wave and Bulk Acoustic WaveZhang, Liping / Zhang, Shibin / Wu, Jinbo / Zheng, Pengcheng / Yao, Hulin / Chen, Yang / Huang, Kai / Zhao, Xiaomeng / Zhou, Min / Ou, Xin et al. | 2023
- 1179
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A C/Ku Dual-Band Reconfigurable Baw Filter Using Polarization Tuning in Layered ScalnMo, Dicheng / Dabas, Shaurya / Rassay, Sushant / Tabrizian, Roozbeh et al. | 2023
- 1183
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Acoustoelectric-Driven Frequency Mixing in Micromachined Lithium Niobate on Silicon WaveguidesMansoorzare, Hakhamanesh / Abdolvand, Reza et al. | 2023
- 1186
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Effect of Scandium Composition on the Phonon Scattering Lifetime of Aluminum Scandium Nitride Acoustic Wave ResonatorsZheng, Yue / Park, Mingyo / Yuan, Chao / Ansari, Azadeh et al. | 2023
- 1190
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Lithium Niobate Thin Film Based A1 Mode Resonators with Frequency up to 16 Ghz and Electromechanical Coupling Factor Near 35%Su, Rongxuan / Yu, Zhenyi / Fu, Sulei / Xu, Huiping / Zhang, Shuai / Liu, Peisen / Guo, Yu / Song, Cheng / Zeng, Fei / Pan, Feng et al. | 2023
- 1194
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Sub-3 DB Insertion Loss Broadband Acoustic Delay Lines and High Fom Resonators in LiNbO3/SiO2/Si Functional SubstrateYeh, Chun-Chen / Tsai, Chia-Hsien / Wu, Guan-Lin / Hsu, Tzu-Hsuan / Li, Ming-Huang et al. | 2023
- 1198
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Suppression of Spurious Modes in Aluminum Nitride S1 Lamb Wave Resonators Using A Mechanical Soft-Contact SchemeTung, Shao-Siang / Hsu, Tzu-Hsuan / Ho, Yens / Chen, Yung-Hsiang / Pradeep, Yelehanka R. / Chand, Rakesh / Li, Ming-Huang et al. | 2023
- 1202
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Terahertz Reflective Metalens For Arbitrary Off-Axis Focusing With Large Depth of FocusMiao, Jiahao / Liu, Yi / Lin, Cong / Zhou, Zhanxuan / Yu, Xiaomei et al. | 2023
- 1206
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Towards a Better CMOS-MEMS Resoswitch Using Electroless Plating for Contact EngineeringLiou, Ting-Jui / Tsai, Chun-Pu / Chen, Ting-Yi / Li, Wei-Chang et al. | 2023
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Copyright Page| 2023
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Welcome| 2023
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Author Index| 2023
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Benefactors| 2023
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Conference Officials| 2023
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Table of Contents| 2023