Nanotechnology for the future MEMS (Englisch)
- Neue Suche nach: Kawai, T.
- Neue Suche nach: Kawai, T.
In:
The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE
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1-3
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2003
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ISBN:
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ISSN:
- Aufsatz (Konferenz) / Elektronische Ressource
Inhaltsverzeichnis Konferenzband
Die Inhaltsverzeichnisse werden automatisch erzeugt und basieren auf den im Index des TIB-Portals verfügbaren Einzelnachweisen der enthaltenen Beiträge. Die Anzeige der Inhaltsverzeichnisse kann daher unvollständig oder lückenhaft sein.
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Nanotechnology for the future MEMSKawai, T. et al. | 2003
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9:20-10:00 Nanotechnology for the Future MEMSKawai, T. / IEEE et al. | 2003
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10:00-10:20 Micromachined Arrayed Dip Pen Nanolithography Probes for Sub-100nm Direct Chemistry PatterningBullen, D. / Wang, X. / Zou, J. / Hong, S. / Chung, S.-W. / Ryu, K. / Fan, Z. / Mirkin, C. / Liu, C. / IEEE et al. | 2003
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Micromachined arrayed dip pen nanolithography probes for sub-100 nm direct chemistry patterningBullen, D. / Xuefeng Wang, / Jun Zou, / Seunghun Hong, / Sung-Wook Chung, / Kee Ryu, / Zhifang Fan, / Mirkin, C. / Chang Liu, et al. | 2003
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10:20-10:40 Transportation of Micromachined Structures by Biomolecular Linear MotorsYokokawa, R. / Takeuchi, S. / Kon, T. / Ohkura, R. / Edamatsu, M. / Sutoh, K. / Fujita, H. / IEEE et al. | 2003
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Transportation of micromachined structures by biomolecular linear motorsYokokawa, R. / Takeuchi, S. / Kon, T. / Ohkura, R. / Edamatsu, M. / Sutoh, K. / Fujita, H. et al. | 2003
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11:10-11:30 Chemo-Mechanical Actuator Using Self-Oscillating Gel for Artificial CiliaTabata, O. / Kojima, H. / Kasatani, T. / Isono, Y. / Yoshida, R. / IEEE et al. | 2003
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Chemo-mechanical actuator using self-oscillating gel for artificial ciliaTabata, O. / Kojima, H. / Kasatani, T. / Isono, Y. / Yoshida, R. et al. | 2003
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A functional on-chip pressure generator using solid chemical propellant for disposable lab-on-a-chipChien-Chong Hong, / Murugesan, S. / Sanghyo Kim, / Beaucage, G. / Jin-Woo Choi, / Ahn, C.H. et al. | 2003
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11:30-11:50 A Functional On-Chip Pressure Generator Using Solid Chemical Propellant for Disposable Lab-on-a-ChipHong, C.-C. / Murugesan, S. / Kim, S. / Beaucage, G. / Choi, J.-W. / Ahn, C. H. / IEEE et al. | 2003
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Integrated surface-micromachined mass flow controllerJun Xie, / Shih, J. / Yu-Chong Tai, et al. | 2003
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11:50-12:10 Integrated Surface-Micromachined Mass Flow ControllerXie, J. / Shih, J. / Tai, Y.-C. / IEEE et al. | 2003
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MP1 Scanning Diamond Probe and Application to Thermo-Mechanical NanolithographyBae, J. H. / Ono, T. / Konoma, C. / Esashi, M. / IEEE et al. | 2003
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Scanning diamond probe and application to thermo-mechanical nanolithographyJoon Hyung Bae, / Ono, T. / Konoma, C. / Esashi, M. et al. | 2003
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MP2 Micro Cantilevers with Integrated Heaters and Piezoelectric Detectors for Low Power SPM Data Storage ApplicationLee, C. S. / Jin, W.-H. / Nam, H.-J. / Cho, S.-M. / Kim, Y.-S. / Bu, J.-U. / IEEE et al. | 2003
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Micro cantilevers with integrated heaters and piezoelectric detectors for low power SPM data storage applicationLee, C.S. / Jin, W.H. / NAm, H.J. / Cho, S.M. / Kim, Y.S. / Bu, J.U. et al. | 2003
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MP3 Nanomechanics of Ultrathin Silicon Beams and Carbon NanotubesOno, T. / Wang, D. / Sugimoto, S. / Miyashita, H. / Esashi, M. / IEEE et al. | 2003
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Nanomechanics of ultrathin silicon beams and carbon nanotubesOno, T. / Wang, D. / Sugimoto, S. / Miyashita, H. / Esashi, M. et al. | 2003
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Gated field emitter using carbon nanotubes for vacuum microelectronic devicesJang, Y.T. / Choi, C.H. / Ju, B.K. / Ahn, J.H. / Lee, Y.H. et al. | 2003
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MP4 Gated Field Emitter Using Carbon Nanotubes for Vacuum Microelectronic DevicesJang, Y.-T. / Choi, C.-H. / Ju, B.-K. / Ahn, J.-H. / Lee, Y.-H. / IEEE et al. | 2003
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Bulk carbon nanotubes as sensing element for temperature and anemometry micro sensingWong, V.T.S. / Wen J Li, et al. | 2003
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MP5 Bulk Carbon Nanotubes as Sensing Element for Temperature and Anemometry Micro SensingWong, V. T. S. / Li, W. J. / IEEE et al. | 2003
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Nano wires by self assemblySaif, T. / Alaca, E. / Sehitoglu, H. et al. | 2003
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MP6 Nano Wires by Self AssemblySaif, T. / Alaca, E. / Sehitoglu, H. / IEEE et al. | 2003
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Single crystal silicon four-terminal nano-wire shear stress gauge for nano mechanical sensorsToriyama, T. / Sugiyama, S. et al. | 2003
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MP7 Single Crystal Silicon Four-Terminal Nano-Wire Shear Stress Gauge for Nano Mechanical SensorsToriyama, T. / Sugiyama, S. / IEEE et al. | 2003
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Minimization of electrode polarization effect by nanogap electrodes for biosensor applicationsOh, S. / Lee, J.S. / Jeong, K.H. / Lee, L.P. et al. | 2003
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MP8 Minimization of Electrode Polarization Effect by Nanogap Electrodes for Biosensor ApplicationsOh, S. / Lee, J. S. / Jeong, K.-H. / Lee, L. P. / IEEE et al. | 2003
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A novel electrostatic vertical comb actuator fabricated on [111] silicon waferChu, C.C. / Tsai, J.M. / Hsieh, J. / Fang, W. et al. | 2003
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MP9 A Novel Electrostatic Vertical Comb Actuator Fabricated on (111) Silicon WaferChu, C. C. / Tsai, J. M. / Hsieh, J. / Fang, W. / IEEE et al. | 2003
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MP10 High Strength Rare Earth-Iron-Boron Printed Magnets Used in a Long Throw-High Force Electromagnetic Actuator with Microfabricated CoilsVollmers, K. / Anderson, R. / Nelson, B. J. / Pepin, J. / IEEE et al. | 2003
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High strength rare earth-iron-boron printed magnets used in a long throw-high force electromagnetic actuator with microfabricated coilsVollmers, K. / Anderson, R. / Nelson, B.J. / Pepin, J. et al. | 2003
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MP11 A High-Current Electrothermal Bistable MEMS RelayQiu, J. / Lang, J. H. / Slocum, A. H. / Strumpler, R. / IEEE et al. | 2003
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A high-current electrothermal bistable MEMS relayQui, J. / Lang, J.H. / Slocum, A.H. / Strumpler, R. et al. | 2003
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Performance enhancement of polysilicon electrothermal microactuators by localized self-annealingChu, L.L. / Nelson, D. / Oliver, A.D. / Gianchandani, Y.B. et al. | 2003
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MP12 Performance Enhancement of Polysilicon Electrothermal Microactuators by Localized Self-AnnealingChu, L. L. / Nelson, D. / Oliver, A. D. / Gianchandani, Y. B. / IEEE et al. | 2003
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Fabrication of a ZnO piezoelectric cantilever with a high-aspect-ratio nano tipLee, S.H. / Lee, S.S. / Jong Up Jeon, / Kwangchoon Ro, et al. | 2003
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MP13 Fabrication of a ZnO Piezoelectric Cantilever with a High-Aspect-Ratio Nano TipLee, S. H. / Lee, S. S. / Jeon, J. U. / Ro, K. / IEEE et al. | 2003
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Micropropulsion of air and liquid jet by acoustic streamingHongyu Yu, / Eun Sok Kim, et al. | 2003
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MP14 Micropropulsion of Air and Liquid Jet by Acoustic StreamingYu, H. / Kim, E. S. / IEEE et al. | 2003
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Normally-closed, leak-tight piezoelectric microvalve under ultra-high upstream pressure for integrated micropropulsionEui-Hyeok Eh, / Choonsup Lee, / Mueller, J. et al. | 2003
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MP15 Normally-Closed, Leak-Tight Piezoelectric Microvalve under Ultra-High Upstream Pressure for Integrated MicropropulsionYang, E.-H. / Lee, C. / Mueller, J. / IEEE et al. | 2003
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MP16 An Environmentally Responsive Microflow Controller with Double Side Tethered Structure for the Entrapment of HydrogelBaldi, A. / Lei, M. / Gu, Y. / Siegel, R. A. / Ziaic, B. / IEEE et al. | 2003
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An environmentally responsive microflow controller with double side tethered structure for the entrapment of hydrogelBaldi, A. / Ming Lei, / Yuandong Gu, / Siegel, R.A. / Ziaie, B. et al. | 2003
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MP17 Electrostatic Driven 3-Way Silicon Microvalve for Pneumatic ApplicationsMessner, S. / Schaible, J. / Vollmer, J. / Sandmaier, H. / Zengerle, R. / IEEE et al. | 2003
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Electrostatic driven 3-way silicon microvalve for pneumatic applicationsMessner, S. / Schaible, J. / Vollmer, J. / Sandmaier, H. / Zengerle, R. et al. | 2003
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MP18 Fabrication of a Microvalve with Piezoelectric ActuationLi, H. Q. / Roberts, D. C. / Steyn, J. L. / Turner, K. T. / Yaglioglu, O. / Hagood, N. W. / Spearing, S. M. / Schmidt, M. A. / IEEE et al. | 2003
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Fabrication of a microvalve with piezoelectric actuationLi, H.Q. / Roberts, D.C. / Steyn, J.L. / Turner, K.T. / Yaglioglu, O. et al. | 2003
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MP19 Development of Robust Microvalves for Large Flow Rate Robust Hydraulic ActuatorsLi, B. / Chen, Q. / Lee, D.-G. / Woolman, J. / Carman, G. P. / IEEE et al. | 2003
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Development of robust microvalves for large flow rate robust hydraulic actuatorsBo Li, / Quanfang Chen, et al. | 2003
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A power-free liquid driven method for micro mixing applicationChien-Fu Chen, / Shih-Chi Kuo, / Chin-Chou Chu, / Fan-Gang Tseng, et al. | 2003
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MP20 A Power-Free Liquid Driven Method for Micro Mixing ApplicationChen, C.-F. / Kuo, S.-C. / Chu, C.-C. / Tseng, F.-G. / IEEE et al. | 2003
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An implementation of a microfluidic mixer and switch using micromachined acoustic transducersJagannathan, H. / Yaralioglu, G.G. / Ergun, A.S. / Khuri-Yakub, B.T. et al. | 2003
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MP21 An Implementation of a Microfluidic Mixer and Switch Using Micromachined Acoustic TransducersJagannathan, H. / Yaralioglu, G. G. / Ergun, A. S. / Khuri-Yakub, B. T. / IEEE et al. | 2003
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Active micro heat transport device using thermal pumping systemYokoyama, Y. / Takeda, M. / Umemoto, T. / Ogushi, T. et al. | 2003
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MP22 Active Micro Heat Transport Device Using Thermal Pumping SystemYokoyama, Y. / Takeda, M. / Umemoto, T. / Ogushi, T. / IEEE et al. | 2003
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The micro ion drag pump using indium-tin-oxide (ITO) electrodesLung-Jieh Yang, / Jiun-Min Wang, / Yu-Lin Huang, et al. | 2003
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MP23 The Micro Ion Drag Pump Using Indium-Tin-Oxide (ITO) ElectrodesYang, L.-J. / Wang, J.-M. / Huang, Y.-L. / IEEE et al. | 2003
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Novel micropump using oxygen as pumping sourceYo Han Choi, / Sanguk Son, / Lee, S.S. et al. | 2003
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MP24 Novel Micropump Using Oxygen as Pumping SourceChoi, Y. H. / Son, S. / Lee, S. S. / IEEE et al. | 2003
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Dynamic wettability switching by surface roughness effectBo He, / Junghoon Lee, et al. | 2003
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MP25 Dynamic Wettability Switching by Surface Roughness EffectHe, B. / Lee, J. / IEEE et al. | 2003
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Power delivery and locomotion of untethered micro-actuatorsDonald, B.R. / Levey, C.G. / McGray, C.D. / Rus, D. / Sinclair, M. et al. | 2003
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MP26 Power Delivery and Locomotion of Untethered Micro-ActuatorsDonald, B. R. / Levey, C. G. / McGray, C. D. / Rus, D. / Sinclair, M. / IEEE et al. | 2003
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Safety active catheter with multi-segments driven by innovative hydro-pressure micro actuatorsIkuta, K. / Ichikawa, H. / Suzuki, K. / Yamamoto, T. et al. | 2003
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MP27 Safety Active Catheter with Multi-Segments Driven by Innovative Hydro-Pressure Micro ActuatorsIkuta, K. / Ichikawa, H. / Suzuki, K. / Yamamoto, T. / IEEE et al. | 2003
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A low loss MEMS transmission line with shielded groundEun-Chul Park, / Yun-Suk Choi, / Byeong-Il Kim, / Jun-Bo Yoon, / Euisik Yoon, et al. | 2003
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MP28 A Low Loss MEMS Transmission Line with Shielded GroundPark, E.-C. / Choi, Y.-S. / Kim, B.-I. / Yoon, J.-B. / Yoon, E. / IEEE et al. | 2003
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A novel grounded coplanar waveguide with cavity structureYoshida, Y. / Nishino, T. / Jiwei Jiao, / Sang-Seok Lee, / Suehiro, Y. / Miyaguchi, K. / Fukami, T. / Kimata, M. / Ishida, O. et al. | 2003
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MP29 A Novel Grounded Coplanar Waveguide with Cavity StructureYoshida, Y. / Nishino, T. / Jiao, J. / Lee, S.-S. / Suehiro, Y. / Miyaguchi, K. / Fukami, T. / Kimata, M. / Ishida, O. / IEEE et al. | 2003
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Integrated five-bit RF MEMS phase shifter for satellite broadcasting/communication systemsKo, Y.J. / Park, J.Y. / Kim, H.T. / Bu, J.U. et al. | 2003
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MP30 Integrated Five-Bit RF MEMS Phase Shifter for Satellite Broadcasting/Communication SystemsKo, Y. J. / Park, J. Y. / Kim, H. T. / Bu, J. U. / IEEE et al. | 2003
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MP31 Voltage-Tunable Piezoelectrically-Transduced Single-Crystal Silicon Resonators on SOI SubstratePiazza, G. / Abdolvand, R. / Ayazi, F. / IEEE et al. | 2003
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Voltage-tunable piezoelectrically-transduced single-crystal silicon resonators on SOI substratePiazza, G. / Abdolvand, R. / Ayazi, F. et al. | 2003
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Microelectromechanical variable-bandwidth if frequency filters with tunable electrostatical coupling springGalayko, D. / Kaiser, A. / Buchaillot, L. / Collard, D. / Combi, C. et al. | 2003
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MP32 Microelectromechanical Variable-Bandwidth IF Frequency Filters with Tunable Electrostatical Coupling SpringGalayko, D. / Kaiser, A. / Buchaillot, L. / Collard, D. / Combi, C. / IEEE et al. | 2003
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MP33 Ultimate Technology for Micromachining of Nanometric Gap HF Micromechanical ResonatorsQuevy, E. / Legrand, B. / Collard, D. / Buchaillot, L. / IEEE et al. | 2003
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Ultimate technology for micromachining of nanometric gap HF micromechnical resonatorsQuevy, E. / Legrand, B. / Collard, D. / Buchaillot, L. et al. | 2003
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MP34 Simulation of Profile Evolution in Etching-Polymerization Alternation in DRIE of Silicon with SF~6/C~4F~8Zhou, R. / Zhang, H. / Hao, Y. / Zhang, D. / Wang, Y. / IEEE et al. | 2003
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Simulation of profile evolution in etching-polymerization alternation in DRIE of silicon with SF/sub 6//C/sub 4/F/sub 8/Rongchun Zhou, / Haixia Zhang, / Yilong Hao, / Dacheng Zhang, / Yangyuan Wang, et al. | 2003
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MP35 Micromachined On-Chip Inductor Performance AnalysisZhu, X. / Groves, R. / Subbanna, S. / Jadus, D. / Mukherjee, T. / Fedder, G. K. / IEEE et al. | 2003
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Micromachined on-chip inductor performance analysisZhu, X. / Groves, R. / Subbanna, S. / Jadus, D. / Mukherjee, T. / Fedder, G.K. et al. | 2003
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Understanding mechanical domain parametric resonance in microcantileversNapoli, M. / Baskaran, R. / Turner, K. / Bamieh, B. et al. | 2003
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MP36 Understanding Mechanical Domain Parametric Resonance in MicrocantileversNapoli, M. / Baskaran, R. / Turner, K. / Bamieh, B. / IEEE et al. | 2003
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Changing the behavior of parametric resonance in MEMS oscillators by tuning the effective cubic stiffnessWenhua Zhang, / Baskaran, R. / Turner, K.L. et al. | 2003
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MP37 Changing the Behavior of Parametric Resonance in MEMS Oscillators by Tuning the Effective Cubic StiffnessZhang, W. / Baskaran, R. / Turner, K. L. / IEEE et al. | 2003
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Secondary DOF and their effect on the instability of electrostatic MEMS devicesElata, D. / Bochobza-Degani, O. / Feldman, S. / Nemirovsky, Y. et al. | 2003
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MP38 Secondary DOF and Their Effect on the Instability of Electrostatic MEMS DevicesElata, D. / Bochobza-Degani, O. / Feldman, S. / Nemirovsky, Y. / IEEE et al. | 2003
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MP39 MEMS Based Acoustic FET as Active Components for Integrated Functional Acoustic SystemsTerada, M. / Tanaka, M. / Konishi, S. / IEEE et al. | 2003
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MEMS based acoustic FET as active components for integrated functional acoustic systemsTerada, M. / Tanaka, M. / Konishi, S. et al. | 2003
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MP40 Analysis and Experimental Verification of Micro Fluidic Integrated Circuits Using Analogous Relationship between Pneumatic Microvalve and MOSFETTakao, H. / Ishida, M. / IEEE et al. | 2003
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Analysis and experimental verification of microfluidic integrated circuits using analogous relationship between pneumatic microvalve and MOSFETTakao, H. / Ishida, M. et al. | 2003
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Development of the multiple sample injector using stepwise flow to prevent sample dilutionKanai, M. / Ikeda, S. / Tanaka, J. / Jeung Sang Go, / Nakanishi, H. / Shoji, S. et al. | 2003
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MP41 Development of the Multiple Sample Injector Using Stepwise Flow to Prevent Sample DilutionKanai, M. / Ikeda, S. / Tanaka, J. / Go, J. S. / Nakanishi, H. / Shoji, S. / IEEE et al. | 2003
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MP42 Optimum Design of Micro Thermal Flow Sensor and Its Evaluation in Wall Shear Stress MeasurementYoshino, T. / Suzuki, Y. / Kasagi, N. / Kamiunten, S. / IEEE et al. | 2003
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Optimum design of microthermal flow sensor and its evaluation in wall shear stress measurementYoshino, T. / Suzuki, Y. / Kasagi, N. / Kamiunten, S. et al. | 2003
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MP43 Visualization of Bubbles Generated by Micro Heaters with Various Current Density DistributionsLim, J.-H. / Lee, Y.-S. / Lim, H.-T. / Baek, S.-S. / Kuk, K. / Oh, Y.-S. / IEEE et al. | 2003
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Visualization of bubbles generated by microheaters with various current density distributionsJi-Hyuk Lim, / Yong-Soo Lee, / Hyung-Taek Lim, / Seog-Soon Baek, / Keon Kuk, / Yong-Soo Oh, et al. | 2003
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Modeling of electrowetted surface tension for addressable microfluidic systems: dominant physical effects, material dependences, and limiting phenomenaShapiro, B. / Hyejin Moon, / Garrell, R. / Chang-Jin Kim, et al. | 2003
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MP44 Modeling of Electrowetted Surface Tension for Addressable Microfluidic Systems: Dominant Physical Effects, Material Dependences, and Limiting PhenomenaShapiro, B. / Moon, H. / Garrell, R. / Kim, C.-J. / IEEE et al. | 2003
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MP45 Simulation, Fabrication and Evaluation of Microinductor-Based Artificial Tactile Mechanoreceptor Embedded in PDMSFutai, N. / Matsumoto, K. / Shimoyama, I. / IEEE et al. | 2003
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Simulation, fabrication and evaluation of microinductor-based artificial tactile mechanoreceptor embedded in PDMSFutai, N. / Matsumoto, K. / Shimoyama, I. et al. | 2003
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9:00-9:40 Atom Optics on a ChipAnderson, D. Z. / Bright, V. M. / Czaia, L. / Du, S. / Frader-Thompson, S. / McCarthy, B. / Squires, M. / IEEE et al. | 2003
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Atom optics on a chipAnderson, D.Z. / Bright, V.M. / Czaia, L. / Du, S. / Frader-Thompson, S. / McCarthy, B. / Squires, M. et al. | 2003
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9:40-10:00 A Solder Self-Assembled Torsional Micromirror ArrayMcCarthy, B. / Bright, V. M. / Neff, J. A. / IEEE et al. | 2003
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A solder self-assembled torsional micromirror arrayMcCarthy, B. / Bright, V.M. / Neff, J.A. et al. | 2003
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High throughput separation of microorganisms by pinpoint gelation controlled by local heating for parallel incubation on a chipArai, F. / Ichikawa, A. / Maruyama, H. / Sakami, T. / Fukuda, T. et al. | 2003
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10:00-10:20 High Throughput Separation of Microorganisms by Pinpoint Gelation Controlled by Local Heating for Parallel Incubation on a ChipArai, F. / Ichikawa, A. / Maruyama, H. / Sakami, T. / Fukuda, T. / IEEE et al. | 2003
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A novel fabrication of in-channel 3-D micromesh structure using maskless multi-angle exposure and its microfilter applicationSato, H. / Kakinuma, T. / Jeung Sang Go, / Shoji, S. et al. | 2003
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10:50-11:10 A Novel Fabrication of In-Channel 3-D Micromesh Structure Using Maskless Multi-Angle Exposure and Its Microfilter ApplicationSato, H. / Kakinuma, T. / Go, J. S. / Shoji, S. / IEEE et al. | 2003
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11:10-11:30 Integrated Vertical Screen Microfilter System Using Inclined SU-8 StructuresYoon, Y.-K. / Park, J.-H. / Cros, F. / Allen, M. G. / IEEE et al. | 2003
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Integrated vertical screen microfilter system using inclined SU-8 structuresYong-Kyu Yoon, / Jung-Hwan Park, / Cros, F. / Allen, M.G. et al. | 2003
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Trapping and extraction of target DNA molecules using periodically crossed electrophoresis in the micropillar arraySoyeon Yi, / Kyoung-Sun Seo, / Young-Ho Cho, et al. | 2003
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11:30-11:50 Trapping and Extraction of Target DNA Molecules Using Periodically Crossed Electrophoresis in the Micropillar ArrayYi, S. / Seo, K.-S. / Cho, Y.-H. / IEEE et al. | 2003
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Micro-cavity fluidic dye laserHelbo, B. / Kristensen, A. / Menon, A. et al. | 2003
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TP1 Micro-Cavity Fluidic Dye LaserHelbo, B. / Kristensen, A. / Menon, A. / IEEE et al. | 2003
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Latchable electromagnetic 2/spl times/2 MEMS optical switchJi, C.H. / Yee, Y. / Choi, J. / Oh, H.H. / Bu, J.U. et al. | 2003
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TP2 Latchable Electromagnetic 2x2 MEMS Optical SwitchJi, C.-H. / Yee, Y. / Choi, J. / Oh, H.-H. / Bu, J.-U. / IEEE et al. | 2003
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Latchable electromagnetic 2x2 MEMS optical switchJi, C.H. / Yee, Y. / Choi, J. / Oh, H.H. / Bu, J.U. et al. | 2003
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Optical dynamic gain equalizer using parallel motion type of ELCIAMunechika, M. / Uezawa, H. / Oshima, A. / Konishi, S. / Sano, T. / Katayama, M. et al. | 2003
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TP3 Optical Dynamic Gain Equalizer Using Parallel Motion Type of ECLIAMunechika, M. / Uezawa, H. / Oshima, A. / Konishi, S. / Sano, T. / Katayama, M. / IEEE et al. | 2003
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Novel high resolution optical scanner actuated by aerosol deposited PZT filmsAsai, N. / Matsuda, R. / Watanabe, M. / Takayama, H. / Yamada, S. / Mase, A. / Shikida, M. / Sato, K. / Lebedev, M. / Akedo, J. et al. | 2003
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TP4 A Novel High Resolution Optical Scanner Actuated by Aerosol Deposited PZT FilmsAsai, N. / Matsuda, R. / Watanabe, M. / Takayama, H. / Yamada, S. / Mase, A. / Shikida, M. / Sato, K. / Lebedev, M. / Akedo, J. et al. | 2003
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TP5 2 Axes Optical Switch with Holding MechanismBaba, A. / Okano, H. / Uetsuka, H. / Esashi, M. / IEEE et al. | 2003
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2 axes optical switch with holding mechanismBaba, A. / Okana, H. / Uetsuka, H. / Esashi, M. et al. | 2003
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TP6 Monolithic High Aspect Ratio Two-Axis Optical Scanner in SOIMilanovic, V. / Matus, G. A. / Cheng, T. / Cagdaser, B. / IEEE et al. | 2003
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Monolithic high aspect ratio two-axis optical scanners in SOIMilanovic, V. / Matus, G.A. / Cheng, T. / Cagdaser, B. et al. | 2003
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A high fill-factor micro-mirror stacked on a crossbar torsion spring for electrostatically-actuated two-axis operation in large-scale optical switchKim, J.H. / Lee, H.K. / Kim, B.I. / Jeon, J.W. / Yoon, J.W. / Yoon, E. et al. | 2003
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TP7 A High Fill-Factor Micro-Mirror Stacked on a Crossbar Torsion Spring for Electrostatically-Actuated Two-Axis Operation in Large-Scale Optical SwitchKim, J.-H. / Lee, H.-K. / Kim, B.-I. / Jeon, J.-W. / Yoon, J.-B. / Yoon, E. / IEEE et al. | 2003
- 263
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TP8 Piezoelectrically Pushed Rotational Micromirrors for Wide-Angle Optical Switch ApplicationsKim, S.-J. / Cho, Y.-H. / Nam, H.-J. / Bu, J. U. / IEEE et al. | 2003
- 263
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Piezoelectrically pushed rotational micromirrors for wide-angle optical switch applicationsKim, S.J. / Cho, Y.H. / Nam, H.J. / BU, J.U. et al. | 2003
- 267
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TP9 Electrostatic Micromirror Arrays Fabricated with Bulk and Surface Micromachining TechniquesKudrle, T. D. / Wang, C. C. / Bancu, M. G. / Hsiao, J. C. / Pareek, A. / Waelti, M. / Kirkos, G. A. / Shone, T. / Fung, C. D. / Mastrangelo, C. H. et al. | 2003
- 267
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Electrostatic micromirror arrays fabricated with bulk and surface micromachining techniquesKudrle, T.D. / Wang, C.C. / Bancu, M.G. / Hsiao, J.C. / Pareek, A. / Waelti, M. / Kirkos, G.A. / Shone, T. / Fung, C.D. / Mastrangelo, C.H. et al. | 2003
- 271
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Arrays of monocrystalline silicon micromirrors fabricated using CMOS compatible transfer bondingHaasl, S. / Niklaus, F. / Stemme, G. et al. | 2003
- 271
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TP10 Arrays of Monocrystalline Silicon Micromirrors Fabricated Using CMOS Compatible Transfer BondingHaasl, S. / Niklaus, F. / Stemme, G. / IEEE et al. | 2003
- 275
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TP11 Two Axis-of-Rotation Mirror Array Using Electromagnetic MEMSBernstein, J. / Taylor, W. P. / Brazzle, J. / Kirkos, G. / Odhner, J. / Pareek, A. / Zai, M. / IEEE et al. | 2003
- 275
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Two axis-of-rotation mirror array using electromagnetic MEMSBernstein, J. / Taylor, W.P. / Brazzle, J. / Kirkos, G. / Odhner, J. / Pareek, A. / Zai, M. et al. | 2003
- 279
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A novel addressable switching micro corner cube array for free-space optical applicationsChang, C.-S. / Chu, T.-S. / Huang, L.-S. / Chang, C.-Y. / Zeng, S.-Y. / Wen, M.-H. / Yen, Y.-K. et al. | 2003
- 279
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TP12 A Novel Addressable Switching Micro Corner Cube Array for Free-Space Optical ApplicationsChang, C.-S. / Chu, T.-S. / Huang, L.-S. / Chang, C.-Y. / Zeng, S.-Y. / Wen, M.-H. / Yen, Y.-K. / IEEE et al. | 2003
- 283
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TP13 A Diffraction-Limited-Resolution Full-Color Display with a 10-mum-square Visual FieldHoshino, K. / Yamada, K. / Matsumoto, K. / Shimoyama, I. / IEEE et al. | 2003
- 283
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A diffraction-limited-resolution full-color display with a 10-/spl mu/m-square visual fieldHoshino, K. / Yamada, K. / Matsumoto, K. / Shimoyama, I. et al. | 2003
- 287
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Pressure distributions and TMAC measurements in near unity aspect ratio, anodically bonded microchannelsJaesung Jang, / Yabin Zhao, / Wereley, S.T. et al. | 2003
- 287
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TP14 Pressure Distributions and TMAC Measurements in Near Unity Aspect Ratio, Anodically Bonded MicrochannelsJang, J. / Zhao, Y. / Wereley, S. T. / IEEE et al. | 2003
- 291
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TP15 Parallel and Series Multiple Microchannel SystemsCheng, K. B. / Wong, M. / Zohar, Y. / IEEE et al. | 2003
- 291
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Parallel and series multiple microchannel systemsKan Bun Cheng, / Man Wong, / Yitshak Zohar, et al. | 2003
- 295
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A silicon-micromachined pin for contact droplet printingGin Fai Tsai, J. / Zugen Chen, / Nelson, S. / Chang-Jin Kim, et al. | 2003
- 295
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TP16 A Silicon-Micromachined Pin for Contact Droplet PrintingTsai, J. G. F. / Chen, Z. / Nelson, S. / Kim, C.-J. / IEEE et al. | 2003
- 299
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A novel protein micro stamper with back-filling reservoir for simultaneous immobilization of large protein arraysShih-Chang Lin, / Cheng-En Ho, / Fan-Gang Tseng, / Yi-Chin Tsai, / Haimei Huang, / Ching-Chang Chieng, et al. | 2003
- 299
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TP17 A Novel Protein Micro Stamper with Back-Filling Reservoir for Simultaneous Immobilization of Large Protein ArraysLin, S.-C. / Ho, C.-E. / Tseng, F.-G. / Tsai, Y.-C. / Huang, H. / Chieng, C.-C. / IEEE et al. | 2003
- 303
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TP18 Monolithic Metal-Oxide Microsensor System in Industrial CMOS TechnologyGraf, M. / Barrettino, D. / Taschini, S. / Hagleitner, C. / Hierlemann, A. / Baltes, H. / IEEE et al. | 2003
- 303
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Monolithic metal-oxide microsensor system in industrial CMOS technologyGraf, M. / Barrettino, D. / Taschini, S. / Hagleitner, C. / Hierlemann, A. / Baltes, H. et al. | 2003
- 307
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TP19 In-Channel Micromechanical Drag Flow Sensor with Electronic ReadoutRadhakrishnan, S. / Lal, A. / IEEE et al. | 2003
- 307
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In-channel micromechanical drag flow sensor with electronic readoutRadhakrishnan, S. / Lal, A. et al. | 2003
- 311
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Fabrication of micro cell counter with boron diffused resistorSanguk Son, / Yo Han Choi, / Lee, S.S. et al. | 2003
- 311
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TP20 Fabrication of Micro Cell Counter with Boron Diffused ResistorSon, S. / Choi, Y. H. / Lee, S. S. / IEEE et al. | 2003
- 315
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TP21 Thin-Film Waveguide with Lens Effect Terminal for Optical Sensing DeviceKan, T. / Matsumoto, K. / Shimoyama, I. / IEEE et al. | 2003
- 315
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Thin-film waveguide with lens effect terminal for optical sensing deviceKan, T. / Matsumoto, K. / Shimoyama, I. et al. | 2003
- 319
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CO/sub 2//H/sub 2/O gas sensor using a tunable Fabry-Perot filter with wide wavelength rangeNoro, M. / Suzuki, K. / Kishi, N. / Hara, H. / Watanabe, T. / Iwaoka, H. et al. | 2003
- 319
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TP22 CO~2/H~2O Gas Sensor Using a Tunable Fabry-Perot Filter with Wide Wavelength RangeNoro, M. / Suzuki, K. / Kishi, N. / Hara, H. / Watanabe, T. / Iwaoka, H. / IEEE et al. | 2003
- 323
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TP23 Hybrid Integration of CdS Filters with GaN LEDs for Biophotonic ChipsChediak, J. A. / Luo, Z. / Seo, J. / Cheung, N. / Lee, L. P. / Sands, T. D. / IEEE et al. | 2003
- 323
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Hybrid integration of CdS filters with GaN LEDs for biophotonic chipsChediak, J.A. / Luo, Z. / Seo, J. / Cheung, N. / Lee, L.P. / Sands, T.D. et al. | 2003
- 327
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A digital microfluidic biosensor for multianalyte detectionSrinivasan, V. / Pamula, V. / Pollack, M. / Fair, R. et al. | 2003
- 327
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TP24 A Digital Microfluidic Biosensor for Multianalyte DetectionSrinivasan, V. / Pamula, V. / Pollack, M. / Fair, R. / IEEE et al. | 2003
- 331
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TP25 Rapid Preparation of Monodispersed Droplets with Confluent Laminar FlowsNisisako, T. / Torii, T. / Higuchi, T. / IEEE et al. | 2003
- 331
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Rapid preparation of monodispersed droplets with confluent laminar flowsNisisako, T. / Torii, T. / Higuchi, T. et al. | 2003
- 335
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TP26 Electrostatic Micromanipulation of Bubbles for Microreactor ApplicationsIto, T. / Torii, T. / Higuchi, T. / IEEE et al. | 2003
- 335
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Electrostatic micromanipulation of bubbles for microreactor applicationsIto, T. / Torii, T. / Higuchi, T. et al. | 2003
- 339
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Barrier embedded chaotic micromixerDong Sung Kim, / Seok Woo Lee, / Tai Hun Kwon, / Lee, S.S. et al. | 2003
- 339
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TP27 Barrier Embedded Chaotic MicromixerKim, D. S. / Lee, S. W. / Kwon, T. H. / Lee, S. S. / IEEE et al. | 2003
- 343
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TP28 Biochemical IC Chip for Pretreatment in Biochemical ExperimentsIkuta, K. / Sasaki, Y. / Maegawa, H. / Maruo, S. / IEEE et al. | 2003
- 343
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Biochemical IC chip for pretreatment in biochemical experimentsIkuta, K. / Sasaki, Y. / Maegawa, L. / Maruo, S. et al. | 2003
- 347
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TP29 Microfluidic Chamber Array for Generating Concentration GradientsYamada, M. / Seki, M. / IEEE et al. | 2003
- 347
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Microfluidic chamber array for generating concentration gradientsYamada, M. / Seki, M. et al. | 2003
- 351
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A high flow rate electro-osmotic pump with small channels in parallelChujo, H. / Matsumoto, K. / Shimoyama, I. et al. | 2003
- 351
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TP30 A High Flow Rate Electro-Osmotic Pump with Small Channels in ParallelChujo, H. / Matsumoto, K. / Shimoyama, I. / IEEE et al. | 2003
- 355
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Light actuated microfluidic devicesPei Yu Chiou, / Zehao Chang, / Wu, M.C. et al. | 2003
- 355
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TP31 Light Actuated Microfluidic DevicesChiou, P. Y. / Chang, Z. / Wu, M. C. / IEEE et al. | 2003
- 359
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TP32 Fabrication of Microsurgical Tools for Single-Cell Intracytoplasmic InjectionWong, P. K. / Ulmanella, U. / Ho, C.-M. / IEEE et al. | 2003
- 359
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Fabrication of microsurgical tools for single-cell intracytoplasmic injectionPak Kin Wong, / Ulmanella, U. / Chih-Ming Ho, et al. | 2003
- 363
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Characterization of surface micromachined hollow metallic microneedlesChandrasekaran, S. / Frazier, A.B. et al. | 2003
- 363
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TP33 Characterization of Surface Micromachined Hollow Metallic MicroneedlesChandrasekaran, S. / Frazier, A. B. / IEEE et al. | 2003
- 367
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TP34 3D Flexible Multichannel Probe ArrayTakeuchi, S. / Suzuki, T. / Mabuchi, K. / Fujita, H. / IEEE et al. | 2003
- 367
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3D flexible multichannel probe arrayTakeuchi, S. / Suzuki, T. / Mabuchi, K. / Fujita, H. et al. | 2003
- 371
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Micromachined biodegradable microstructuresJung-Hwan Park, / Davis, S. / Yong-Kyu Yoon, / Prausnitz, M.R. / Allen, M.G. et al. | 2003
- 371
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TP35 Micromachined Biodegradable MicrostructuresPark, J.-H. / Davis, S. / Yoon, Y.-K. / Prausnitz, M. R. / Allen, M. G. / IEEE et al. | 2003
- 375
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A miniature direct methanol fuel cell using platinum sputtered microcolumn electrodes with limited amount of fuelYoung Ho Seo, / Young-Ho Cho, et al. | 2003
- 375
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TP36 A Miniature Direct Methanol Fuel Cell Using Platinum Sputtered Microcolumn Electrodes with Limited Amount of FuelSeo, Y. H. / Cho, Y.-H. / IEEE et al. | 2003
- 379
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Silicon-based micro-polymer electrolyte fuel cellsKyong-Bok Min, / Tanaka, S. / Esashi, M. et al. | 2003
- 379
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TP37 Silicon-Based Micro-Polymer Electrolyte Fuel CellsMin, K.-B. / Tanaka, S. / Esashi, M. / IEEE et al. | 2003
- 383
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Micromachined microbial fuel cellsMu Chiao, / Lam, K.B. / Liwei Lin, et al. | 2003
- 383
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TP38 Micromachined Microbial Fuel CellsChiao, M. / Lam, K. B. / Lin, L. / IEEE et al. | 2003
- 387
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Water activated disposable and long shelf life microbatteriesKi Bang Lee, / Sammoura, F. / Liwei Lin, et al. | 2003
- 387
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TP39 Water Activated Disposable and Long Shelf Life MicrobatteriesLee, K. B. / Sammoura, F. / Lin, L. / IEEE et al. | 2003
- 391
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A micro photosynthetic electrochemical cellLam, K.B. / Mu Chiao, / Liwei Lin, et al. | 2003
- 391
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TP40 A Micro Photosynthetic Electrochemical CellLam, K. B. / Chiao, M. / Lin, L. / IEEE et al. | 2003
- 395
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TP41 A High-Performance Microfabricated Gas Chromatography ColumnPotkay, J. A. / Driscoll, J. A. / Agah, M. / Sacks, R. D. / Wise, K. D. / IEEE et al. | 2003
- 395
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A high-performance microfabricated gas chromatography columnPotkay, J.A. / Driscoll, J.A. / Agah, M. / Sacks, R.D. / Wise, K.D. et al. | 2003
- 399
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TP42 Application of a Membrane Reactor and an Ultra-Short Packed GAS Chromatographic Column to Optimize the Gas Selectivity of a Resistive Thin Film Gas SensorSturmann, J. / Junge, S. / Benecke, W. / Zampolli, S. / Nicoletti, S. / IEEE et al. | 2003
- 399
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Application of a membrane reactor and an ultra-short packed gas chromatographic column to optimize the gas selectivity of a resistive thin film gas sensorSturmann, J. / Junge, S. / Benecke, W. / Zampolli, S. / Nicoletti, S. et al. | 2003
- 403
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TP43 A Novel Microfluidic Cell-Chip for Single Cell Analysis and ManipulationHuang, Y. / Chen, N. / Borninski, J. / Rubinsky, B. / IEEE et al. | 2003
- 403
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A novel microfluidic cell-chip for single cell analysis and manipulationYong Huang, / Ning Chen, / Borninski, J. / Rubinsky, B. et al. | 2003
- 407
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Development of micro channel array with detecting electrodes for electrophysiological biomedical sensorTanabe, M. / Makinodan, J. / Suzuki, K. / Hosokawa, Y. / Konishi, S. / Ozaki, N. / Oka, H. et al. | 2003
- 407
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TP44 Development of Micro Channel Array with Detecting Electrodes for Electrophysiological Biomedical SensorTanabe, M. / Makinodan, J. / Suzuki, K. / Hosokawa, Y. / Konishi, S. / Ozaki, N. / Oka, H. / IEEE et al. | 2003
- 411
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Microfabricated addressable particles for multianalyte immunoassayZheng-Liang Zhi, / Morita, Y. / Tamiya, E. et al. | 2003
- 411
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TP45 Microfabricated Addressable Particles for Multianalyte ImmunoassayZhi, Z.-L. / Morita, Y. / Tamiya, E. / IEEE et al. | 2003
- 415
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TP46 A Multi-Layer PDMS Microfluidic Device for Tissue Engineering ApplicationsLeclerc, E. / Sakai, Y. / Fujii, T. / IEEE et al. | 2003
- 415
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A multi-layer PDMS microfluidic device for tissue engineering applicationsLeclerc, E. / Sakai, Y. / Fujii, T. et al. | 2003
- 419
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TP47 A Power-Free Surface-Tension-Driven Fluidic Network System for Large-Array Enzyme Immobilization and Glucose SensingTseng, F.-G. / Lin, K.-H. / Hsu, H.-T. / Chang, Y.-H. / Chieng, C.-C. / IEEE et al. | 2003
- 419
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A power-free surface-tension-driven fluidic network system for large-array enzyme immobilization and glucose sensingFan-Gang Tseng, / Kuang-Hua Lin, / Hui-Ting Hsu, / Yu-Hsiang Chang, / Ching-Chang Chieng, et al. | 2003
- 423
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TP48 Microfluidic Chips for DNA Amplification, Electrophoresis Separation and On-Line Optical DetectionLee, G.-B. / Lin, C.-H. / Huang, F.-C. / Liao, C.-S. / Lee, C.-Y. / Chen, S.-H. / IEEE et al. | 2003
- 423
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Microfluidic chips for DNA amplification, electrophoresis separation and on-line optical detectionGwo-Bin Lee, / Che-Hsin Lin, / Fu-Chun Huang, / Chia-Sheng Liao, / Chia-Yen Lee, / Shu-Hui Chen, et al. | 2003
- 427
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TP49 ChipCE™: A Silicon Microsystem for Migration, Separation and Detection of DNAShastry, A. / Lal, R. / IEEE et al. | 2003
- 427
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ChipCE/spl trade/: A silicon microsystem for migration, separation and detection of DNAShastry, A. / Lal, R. et al. | 2003
- 431
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Channel flow network at low electric field with high flow resistance compensation patternYongwon Jeong, / Yongsuk Han, / Songyi Kim, / Haehyung Lee, / Jun Keun Chang, / Dongil Dan Cho, / Doo Soo Chung, / Kukjin Chun, et al. | 2003
- 431
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TP50 Channel Flow Network at Low Electric Field with High Flow Resistance Compensation PatternJeong, Y. / Han, Y. / Kim, S. / Lee, H. / Chang, J. K. / Cho, D. D. / Chung, D. S. / Chun, K. / IEEE et al. | 2003
- 435
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TP51 Comb Interdigitated Arrays (IDA) Electrodes for More Rapid and Sensitive Bead-Based ImmunoassayKim, S. K. / Thomas, J. H. / Hesketh, P. J. / Li, C. / Halsall, B. H. / Heineman, W. R. / IEEE et al. | 2003
- 435
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Comb interdigitated arrays (IDA) electrodes for more rapid and sensitive bead-based immunoassaySang Kyung Kim, / Thomas, J.H. / Hesketh, P.J. / Changming Li, / Halsall, B.H. / Heineman, W.R. et al. | 2003
- 439
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TP52 A Novel Micro Flow Cytometer with 3-Dimensional Focusing Utilizing Dielectrophoretic and Hydrodynamic ForcesLin, C.-H. / Lee, G.-B. / Hwei, B.-H. / IEEE et al. | 2003
- 439
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A novel micro flow cytometer with 3-dimensional focusing utilizing dielectrophoretic and hydrodynamic forcesChe-Hsin Lin, / Gwo-Bin Lee, / Bao-Herng Hwei, et al. | 2003
- 443
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TP53 Electrolysis-Based On-Chip Dispensing System for ESI-MSXie, J. / He, Q. / Tai, Y.-C. / Liu, J. / Lee, T. / IEEE et al. | 2003
- 443
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Electrolysis-based on-chip dispensing system for ESI-MSJun Xie, / Qing He, / Yu-Chong Tai, / Jun Liu, / Lee, T. et al. | 2003
- 447
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A disposable plastic biochip cartridge with on-chip power sources for blood analysisJin-Woo Choi, / Puntambekar, A. / Chien-Chong Hong, / Chuan Gao, / Xiaoshan Zhu, / Trichur, R. / Jungyoup Han, / Chilukuru, S. / Dutta, M. / Murugesan, S. et al. | 2003
- 447
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TP54 A Disposable Plastic Biochip Cartridge with On-Chip Power Sources for Blood AnalysisChoi, J.-W. / Puntambekar, A. / Hong, C.-C. / Gao, C. / Zhu, X. / Trichur, R. / Han, J. / Chilukuru, S. / Dutta, M. / Murugesan, S. et al. | 2003
- 451
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Fully integrated micro biochemical laboratory using Biochemical IC chipsIkuta, K. / Takahashi, A. / Ikeda, K. / Maruo, S. et al. | 2003
- 451
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TP55 Fully Integrated Micro Biochemical Laboratory Using Biochemical IC ChipsIkuta, K. / Takahashi, A. / Ikeda, K. / Maruo, S. / IEEE et al. | 2003
- 455
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Business models for the successful commercialisation of silicon based MEMSNeylon, S. et al. | 2003
- 455
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9:00-9:40 Business Models for the Successful Commercialization of Silicon Based MEMSNeylon, S. / IEEE et al. | 2003
- 456
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9:40-10:00 High Resolution Long Array Thermal Ink Jet Printhead Fabricated by Anisotropic Wet Etching and Deep Si RIENayve, R. / Fujii, M. / Fukugawa, A. / Murata, M. / IEEE et al. | 2003
- 456
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High resolution long array thermal ink jet printhead fabricated by anisotropic wet etching and deep Si RIENayve, R. / Fujii, M. / Fukugawa, A. / Murata, M. et al. | 2003
- 462
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Coronary artery stents microfabricated from planar metal foil: design, fabrication, and mechanical testingTakahata, K. / Gianchandani, Y.B. et al. | 2003
- 462
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10:00-10:20 Coronary Artery Stents Microfabricated from Planar Metal Foil: Design, Fabrication, and Mechanical TestingTakahata, K. / Gianchandani, Y. B. / IEEE et al. | 2003
- 466
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10:50-11:10 An In-Plane High-Sensitivity, Low-Noise Micro-G Silicon AccelerometerChae, J. / Kulah, H. / Najafi, K. / IEEE et al. | 2003
- 466
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An in-plane high-sensitivity, low-noise micro-g silicon accelerometerJunseok Chae, / Kulah, H. / Najafi, K. et al. | 2003
- 470
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Vapor and liquid mass sensing by micromachined acoustic resonatorHao Zhang, / Eun Sok Kim, et al. | 2003
- 470
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11:10-11:30 Vapor and Liquid Mass Sensing by Micromachined Acoustic ResonatorZhang, H. / Kim, E. S. / IEEE et al. | 2003
- 474
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Acoustic heating and thermometry in microfluidic channelsJagannathan, H. / Yaralioglu, G.G. / Ergun, A.S. / Khuri-Yakub, B.T. et al. | 2003
- 474
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11:30-11:50 Acoustic Heating and Thermometry in Microfluidic ChannelsJagannathan, H. / Yaralioglu, G. G. / Ergun, A. S. / Khuri-Yakub, B. T. / IEEE et al. | 2003
- 478
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A three-axis accelerometer for high temperatures with low temperature dependence using a constant temperature control of SOI piezoresistorsKyung Il Lee, / Takao, H. / Sawada, K. / Ishida, M. et al. | 2003
- 478
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WP1 A Three-Axis Accelerometer for High Temperatures with Low Temperature Dependence Using a Constant Temperature Control of SOI PiezoresistorsLee, K. I. / Takao, H. / Sawada, K. / Ishida, M. / IEEE et al. | 2003
- 482
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Performance comparison of integrated z-axis frame microgyroscopesPalaniapan, M. / Howe, R.T. / Yasaitis, J. et al. | 2003
- 482
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WP2 Performance Comparison of Integrated Z-Axis Frame MicrogyroscopesPalaniapan, M. / Howe, R. T. / Yasaitis, J. / IEEE et al. | 2003
- 486
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Micromachined high-aspect-ratio parylene beam and its application to low-frequency seismometerSuzuki, Y. / Yu-Chong Tai, et al. | 2003
- 486
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WP3 Micromachined High-Aspect-Ratio Parylene Beam and Its Application to Low-Frequency SeismometerSuzuki, Y. / Tai, Y.-C. / IEEE et al. | 2003
- 490
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A novel stress sensor based on the transverse pseudo-Hall effect of MOSFETsDoelle, M. / Ruther, P. / Paul, O. et al. | 2003
- 490
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WP4 A Novel Stress Sensor Based on the Transverse Pseudo-Hall Effect of MOSFETsDoelle, M. / Ruther, P. / Paul, O. / IEEE et al. | 2003
- 494
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Sub-micron thick high sensitive piezoresistive cantilevers by boron etch stop and argon implantationGel, M. / Shimoyama, I. et al. | 2003
- 494
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WP5 Sub-Micron Thick High Sensitive Piezoresistive Cantilevers by Boron Etch Stop and Argon ImplantationGel, M. / Shimoyama, I. / IEEE et al. | 2003
- 498
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A new higher-pressure sensor measured by heat transfer with two heatersOhji, H. / Yutani, N. / Taruya, M. / Koshimizu, A. / Tsutsumi, K. / Fukami, T. et al. | 2003
- 498
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WP6 A New Higher-Pressure Sensor Measured by Heat Transfer with Two HeatersOhji, H. / Yutani, N. / Taruya, M. / Koshimizu, A. / Tsutsumi, K. / Fukami, T. / IEEE et al. | 2003
- 502
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Fabrication of a CMOS compatible pressure sensor for harsh environmentsPakula, L.S. / Yang, H. / Pham, H.T.M. / French, P.J. / Sarro, P.M. et al. | 2003
- 502
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WP7 Fabrication of a CMOS Compatible Pressure Sensor for Harsh EnvironmentsPakula, L. S. / Yang, H. / Pham, H. T. M. / French, P. J. / Sarro, P. M. / IEEE et al. | 2003
- 506
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A doubly anchored surface micromachined Pirani gauge for vacuum package characterizationStark, B.H. / Yuhai Mei, / Chunbo Zhang, / Najafi, K. et al. | 2003
- 506
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WP8 A Doubly Anchored Surface Micromachined Pirani Gauge for Vacuum Package CharacterizationStark, B. H. / Mei, Y. / Zhang, C. / Najafi, K. / IEEE et al. | 2003
- 510
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Non-linear temperature compensation for a micromachined bi-directional thermal flow sensorChavan, A.V. / Prawdzik, D. / Manlove, G. / Long, S. / Dubois, P. / Dewes, B. et al. | 2003
- 510
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WP9 Non-Linear Temperature Compensation for a Micromachined Bi-Directional Thermal Flow SensorChavan, A. V. / Prawdzik, D. / Manlove, G. / Long, S. / Dubois, P. / Dewes, B. / IEEE et al. | 2003
- 514
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A sub- mu W micromachined magnetic compassLeichle, T.C. / Ye, Wenjing / Allen, M.G. et al. | 2003
- 514
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A sub-/spl mu/W micromachined magnetic compassLeichle, T.C. / Wenjing Ye, / Allen, M.G. et al. | 2003
- 514
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WP10 A Sub-muW Micromachined Magnetic CompassLeichle, T. C. / Ye, W. / Allen, M. G. / IEEE et al. | 2003
- 518
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WP11 Energy Dissipation in Small-Diameter Quartz Crystal Microbalance Experimentally Studied for Ultra-High Sensitive GravimetryAbe, T. / Li, L. / Hung, V. N. / Esashi, M. / IEEE et al. | 2003
- 518
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Energy dissipation in small-diameter Quartz Crystal Microbalance experimentally studied for ultra-high sensitive gravimetryAbe, T. / Li Li, / Vu Ngoc Hung, / Esashi, M. et al. | 2003
- 522
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New fabrication process for Capacitive Micromachined Ultrasonic TransducersHuang, Y. / Ergun, A.S. / Haeggstrom, E. / Khuri-Yakub, B.T. et al. | 2003
- 522
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WP12 New Fabrication Process for Capacitive Micromachined Ultrasonic TransducersHuang, Y. / Ergun, A. S. / Haeggstrom, E. / Khuri-Yakub, B. T. / IEEE et al. | 2003
- 526
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WP13 Tunable Resonators with Electrostatic Self Test Functionality for Frequency Selective Vibration MeasurementsScheibner, D. / Mehner, J. / Reuter, D. / Gessner, T. / Dotzel, W. / IEEE et al. | 2003
- 526
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Tunable resonators with electrostatic self test functionality for frequency selective vibration measurementsScheibner, D. / Mehner, J. / Reuter, D. / Gessner, T. / Dotzel, W. et al. | 2003
- 530
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A functional magnetic bead/biocell sorter using fully integrated magnetic micro/nano tipsRong Rong, / Jin-Woo Choi, / Ahn, C.H. et al. | 2003
- 530
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WP14 A Functional Magnetic Bead/Biocell Sorter Using Fully Integrated Magnetic Micro/Nano TipsRong, R. / Choi, J.-W. / Ahn, C. H. / IEEE et al. | 2003
- 534
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A distributed gas breather for micro direct methanol fuel cell ( mu -DMFC)Men, De-Sheng / Kim, Joonwon / Kim, Chang-Jin et al. | 2003
- 534
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WP15 A Distributed Gas Breather for Micro Direct Methanol Fuel Cell (mu-DMFC)Meng, D.-S. / Kim, J. / Kim, C.-J. / IEEE et al. | 2003
- 534
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A distributed gas breather for micro direct methanol fuel cell (/spl mu/-DMFC)De-Sheng Men, / Joonwon Kim, / Chang-Jin Kim, et al. | 2003
- 538
-
WP16 Micro Electret Power GeneratorBoland, J. / Chao, Y.-H. / Suzuki, Y. / Tai, Y. C. / IEEE et al. | 2003
- 538
-
Micro electret power generatorBoland, J. / Yuan-Heng Chao, / Suzuki, Y. / Tai, Y.C. et al. | 2003
- 542
-
WP17 Manufacturing of 3D Microstructures Using Novel UPSAMS Process (Ultra Precision Manufacturing of Self-Assembled Micro Systems)Sharon, A. / Bilsing, A. / Lewis, G. / Zhang, X. / IEEE et al. | 2003
- 542
-
Manufacturing of 3D microstructures using novel UPSAMS process (ultra precision manufacturing of self-assembled micro systems)Sharon, A. / Bilsing, A. / Lewis, G. / Xin Zhang, et al. | 2003
- 546
-
30 /spl mu/m-pitch stripes of OLED patterned by stamping lift-off methodHasegawa, T. / Matsumoto, K. / Shimoyama, I. et al. | 2003
- 546
-
WP18 30mum-pitch Stripes of OLED Patterned by Stamping Lift-Off MethodHasegawa, T. / Matsumoto, K. / Shimoyama, I. / IEEE et al. | 2003
- 550
-
Microfabrication of gallium arsenide cantilever for atomic force microscope applicationIwata, N. / Wakayama, T. / Kobayashi, T. / Yamada, S. et al. | 2003
- 550
-
WP19 Microfabrication of Gallium Arsenide Cantilever for Atomic Force Microscope ApplicationIwata, N. / Wakayama, T. / Kobayashi, T. / Yamada, S. / IEEE et al. | 2003
- 554
-
Fabrication of 3D microstructures with inclined/rotated UV lithographyHan, M. / Woonseob Lee, / Sung-Keun Lee, / Lee, S.S. et al. | 2003
- 554
-
WP20 Fabrication of 3D Microstructures with Inclined/Rotated UV LithographyHan, M. / Lee, W. / Lee, S.-K. / Lee, S. S. / IEEE et al. | 2003
- 558
-
3D fabrication using deep X-ray mask with integrated micro-actuatorKwang-Cheol Lee, / Lee, S.S. et al. | 2003
- 558
-
WP21 3D Fabrication Using Deep X-Ray Mask with Integrated Micro-ActuatorLee, K.-C. / Lee, S. S. / IEEE et al. | 2003
- 562
-
WP22 Non-Photolithographic Pattern Transfer for Fabricating Arrayed 3-D Microstructures by Chemical Anisotropic EtchingShikida, M. / Odagaki, M. / Todoroki, N. / Ando, M. / Ishihara, Y. / Ando, T. / Sato, K. / IEEE et al. | 2003
- 562
-
Non-photolithographic pattern transfer for fabricating arrayed 3D microstructures by chemical anisotropic etchingShikida, M. / Odagaki, M. / Todoroki, N. / Ando, M. / Ishihara, Y. / Ando, T. / Sato, K. et al. | 2003
- 566
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WP23 A Practical Galvanic Etch-Stop in KOH Using Sodium HypochloriteConnolly, E. J. / Sakarya, S. / French, P. J. / Xia, X. H. / Kelly, J. J. / IEEE et al. | 2003
- 566
-
A practical galvanic etch-stop in KOH using sodium hypochloriteConnolly, E.J. / Sakarya, S. / French, P.J. / Xia, X.H. / Kelly, J.J. et al. | 2003
- 570
-
WP24 Silicon Sacrificial Layer Dry Etching (SSLDE) for Free-Standing RF MEMS ArchitecturesFrederico, S. / Hibert, C. / Fritschi, R. / Fluckiger, P. / Renaud, P. / Ionescu, A. M. / IEEE et al. | 2003
- 570
-
Silicon sacrificial layer dry etching (SSLDE) for free-standing RF MEMS architecturesFrederico, S. / Hibert, C. / Fritschi, R. / Fluckiger, P. / Renaud, P. / Ionescu, A.M. et al. | 2003
- 574
-
WP25 High-Selectivity Reactive Ion Etching with CO/NH~3/Xe Gas for Micro/Nanostructuring of 20% Fe-Ni, Au, Pt, and CuAbe, T. / Hong, Y. G. / Esashi, M. / IEEE et al. | 2003
- 574
-
High-selectivity reactive ion etching with CO/NH/sub 3//Xe gas for micro/nanostructuring of 20% Fe-Ni, Au, Pt, and CuAbe, T. / Youn Gi Hong, / Esashi, M. et al. | 2003
- 578
-
WP26 Surface Micromachined Glass and Polysilicon Microchannels Using MUMPsLee, K. B. / Lin, L. / IEEE et al. | 2003
- 578
-
Surface micromachined glass and polysilicon microchannels using MUMPsKi Bang Lee, / Liwei Lin, et al. | 2003
- 582
-
WP27 Surface-Micromachined Flexible Polysilicon Sensor ArrayHwang, E.-S. / Kim, Y.-J. / Ju, B.-K. / IEEE et al. | 2003
- 582
-
Surface-micromachined flexible polysilicon sensor arrayEun-Soo Hwang, / Yong-Jun Kim, / Byeong-Kwon Ju, et al. | 2003
- 586
-
WP28 Hybrid MEMS Inductor for Miniaturized Autonomous Power ConverterSaidani, M. / Meyer, A. / Gijs, M. A. M. / IEEE et al. | 2003
- 586
-
Hybrid MEMS inductor for miniaturized autonomous power converterSaidani, M. / Meyer, A. / Gijs, M.A.M. et al. | 2003
- 590
-
CMOS-based sealed membranes for medical tactile sensor arraysSalo, T. / Vancura, T. / Brand, O. / Baltes, H. et al. | 2003
- 590
-
WP29 CMOS-Based Sealed Membranes for Medical Tactile Sensor ArraysSalo, T. / Vancura, T. / Brand, O. / Baltes, H. / IEEE et al. | 2003
- 594
-
Universal concept for fabricating micron to millimeter sized 3-D parylene structures on rigid and flexible substratesGuo-Hua Feng, / Eun Sok Kim, et al. | 2003
- 594
-
WP30 Universal Concept for Fabricating Micron to Millimeter Sized 3-D Parylene Structures on Rigid and Flexible SubstratesFeng, G.-H. / Kim, E. S. / IEEE et al. | 2003
- 598
-
WP31 An In-Situ End-Point Detector for Parylene CVD DepositionSutomo, W. / Wang, X. / Bullen, D. / Braden, S. K. / Liu, C. / IEEE et al. | 2003
- 598
-
An in-situ end-point detector for parylene CVD depositionWongso Sutomo, / Xuefeng Wang, / Bullen, D. / Braden, S.K. / Chang Liu, et al. | 2003
- 602
-
WP32 Robust Parylene-to-Silicon Mechanical AnchoringLiger, M. / Rodger, D. C. / Tai, Y.-C. / IEEE et al. | 2003
- 602
-
Robust parylene-to-silicon mechanical anchoringLiger, M. / Rodger, D.C. / Yu-Chong Tai, et al. | 2003
- 606
-
WP33 3D Micro Self-Assembly Using a Hydrophobic Interaction Controlled by SAMsOnoe, H. / Matsumoto, K. / Shimoyama, I. / IEEE et al. | 2003
- 606
-
3D micro self-assembly using a hydrophobic interaction controlled by SAMsOnoe, H. / Matsumoto, K. / Shimoyama, I. et al. | 2003
- 610
-
WP34 Fabrication and Packaging of Inertia Micro-Switch Using Metal-Electroplating TechnologyMa, W. / Li, G. / Zohar, Y. / Wong, M. / IEEE et al. | 2003
- 610
-
Fabrication and packaging of inertia micro-switch using metal-electroplating technologyWei Ma, / Gang Li, / Zohar, Y. / Man Wong, et al. | 2003
- 614
-
WP35 Fabrication and Characterization of a Low-Temperature Hermetic MEMS Package Bonded by a Closed Loop AuSn Solder-LineKim, S.-A. / Seo, Y. H. / Cho, Y.-H. / Kim, G. H. / Bu, J. U. / IEEE et al. | 2003
- 614
-
Fabrication and characterization of a low-temperature hermetic MEMS package bonded by a closed loop AuSn solder-lineSeong-A Kim, / Young Ho Seo, / Young-Ho Cho, / Geun Ho Kim, / Jong Uk Bu, et al. | 2003
- 618
-
WP36 A Novel Thin Chip Scale Packaging of the RF-MEMS Devices Using Ultra Thin SiliconPark, Y.-K. / Kim, Y.-K. / Kim, H. / Lee, D.-J. / Kim, C.-J. / Ju, B.-K. / Park, J.-O. / IEEE et al. | 2003
- 618
-
A novel thin chip scale packaging of the RF-MEMS devices using ultra thin siliconYun-Kwon Park, / Yong-kook Kim, / Hoon Kim, / Duck-Jung Lee, / Chul-Ju Kim, / Byeong-Kwon Ju, / Jong-Oh Park, et al. | 2003
- 622
-
WP37 A Novel Micro-Scale Recombining Technique Using Lateral Joining for a Large-Area Molding with Small FeaturesWu, C.-W. / Huang, L.-S. / Chang, J.-H. / Yang, S.-Y. / Lee, C.-K. / IEEE et al. | 2003
- 622
-
A novel micro-scale recombining technique using lateral joining for a large-area molding with small featuresChih-Wei Wu, / Long-Sun Huang, / Jer-Haur Chang, / Sen-Yeu Yang, / Chih-Kung Lee, et al. | 2003
- 626
-
WP38 Sodium Contamination in Integrated MEMS Packaged by Anodic BondingSchjolberg-Henriksen, K. / Jensen, G. U. / Hanneborg, A. / Jakobsen, H. / IEEE et al. | 2003
- 626
-
Sodium contamination in integrated MEMS packaged by anodic bondingSchjolberg- Henriksen, K. / Jensen, G.U. / Hanneborg, A. / Jakobsen, H. et al. | 2003
- 630
-
WP39 Field-Assisted Bonding of Glass to Si-Au Eutectic Solder for Packaging ApplicationsHarpster, T. J. / Najafi, K. / IEEE et al. | 2003
- 630
-
Field-assisted bonding of glass to Si-Au eutectic solder for packaging applicationsHarpster, T.J. / Najafi, K. et al. | 2003
- 634
-
High aspect ratio through-wafer interconnections for 3D-microsystemsWang, L. / Nichelatti, A. / Schellevis, H. / de Boer, C. / Visser, C. / Nguyen, T.N. / Sarro, P.M. et al. | 2003
- 634
-
WP40 High Aspect Ratio through-Wafer Interconnections for 3D-MicrosystemsWang, L. / Nichelatti, A. / Schellevis, H. / de Boer, C. / Visser, C. / Nguyen, T. N. / Sarro, P. M. / IEEE et al. | 2003
- 638
-
Endpoint detectable plating through femto-laser drilled glass wafers for three-dimensional electric interconnectionsXinghua Li, / Abe, T. / Esashi, M. et al. | 2003
- 638
-
WP41 Endpoint Detectable Plating through Femto-Laser Drilled Glass Wafers for Three-Dimensional Electric InterconnectionsLi, X. / Abe, T. / Esashi, M. / IEEE et al. | 2003
- 642
-
Si through-hole interconnections filled with Au-Sn solder by molten metal suction methodYamamoto, S. / Itoi, K. / Suemasu, T. / Takizawa, T. et al. | 2003
- 642
-
WP42 Si Through-Hole Interconnections Filled with Au-Sn Solder by Molten Metal Suction MethodYamamoto, S. / Itoi, K. / Suemasu, T. / Takizawa, T. / IEEE et al. | 2003
- 646
-
A fabrication process with high thermal isolation and vacuum sealed lead transfer for gas reactors and sampling microsystemsMcNamara, S. / Gianchandani, Y.B. et al. | 2003
- 646
-
WP43 A Fabrication Process with High Thermal Isolation and Vacuum Sealed Lead Transfer for Gas Reactors and Sampling MicrosystemsMcNamara, S. / Gianchandani, Y. B. / IEEE et al. | 2003
- 650
-
Frozen water for MEMS fabrication and packaging applicationsSha Li, / Li-Wei Pan, / Liwei Lin, et al. | 2003
- 650
-
WP44 Frozen Water for MEMS Fabrication and Packaging ApplicationsLi, S. / Pan, L.-W. / Lin, L. / IEEE et al. | 2003
- 654
-
A new integration of device-scale micropackaging with bi-directional tunable capacitorsChia-Hua Chu, / Long-Sun Huang, / Jen-Yi Chen, / I-Lien Lee, / Peizen Chang, et al. | 2003
- 654
-
WP45 A New Integration of Device-Scale Micropackaging with Bi-Directional Tunable CapacitorsChu, C.-H. / Huang, L.-S. / Chen, J.-Y. / Lee, I.-L. / Chang, P. / IEEE et al. | 2003
- 658
-
All diamond packaging for wireless integrated micro-systems using ultra-fast diamond growthXiangwei Zhu, / Guillaudeu, S. / Aslam, D.M. / Kim, U. / Stark, B. / Najafi, K. et al. | 2003
- 658
-
WP46 All Diamond Packaging for Wireless Integrated Micro-Systems Using Ultra-Fast Diamond GrowthZhu, X. / Guillaudeu, S. / Aslam, D. M. / Kim, U. / Stark, B. / Najafi, K. / IEEE et al. | 2003
- 662
-
WP47 High-Cycle Fatigue Test of Nanoscale Si and SiO~2 Wires Based on AFM TechniqueNamazu, T. / Isono, Y. / IEEE et al. | 2003
- 662
-
High-cycle fatigue test of nanoscale Si and SiO2 wires based on AFM techniqueNamazu, T. / Isono, Y. et al. | 2003
- 662
-
High-cycle fatigue test of nanoscale Si and SiO/sub 2/ wires based on AFM techniqueNamazu, T. / Isono, Y. et al. | 2003
- 666
-
WP48 Cross Comparison of Thin Film Tensile-Testing Methods Examined with Single-Crystal Silicon, Polysilicon, Nickel, and Titanium FilmsTsuchiya, T. / Hirata, M. / Chiba, N. / Udo, R. / Yoshitomi, Y. / Ando, T. / Sato, K. / Takashima, K. / Higo, Y. / Saotome, Y. et al. | 2003
- 666
-
Cross comparison of thin film tensile-testing methods examined with single-crystal silicon, polysilicon, nickel, and titanium filmsTsuchiya, T. / Hirata, M. / Chiba, N. / Udo, R. / Yoshitom, Y. / Ando, T. / Sato, K. / Takashima, K. / Higo, Y. / Saotome, Y. et al. | 2003
- 670
-
Design and in-situ mechanical testing system for probe card/UV-LIGA-Ni microspringSaotome, Y. / Yokote, S. / Okamoto, T. / Kinuta, S. et al. | 2003
- 670
-
WP49 Design and In-Situ Mechanical Testing System for Probe Card/UV-LIGA-Ni MicrospringSaotome, Y. / Yokote, S. / Okamoto, T. / Kinuta, S. / IEEE et al. | 2003
- 674
-
WP50 Focused Ion Beam (FIB) Nano-Machining and FIB Moire Technique for Strain Analysis in MEMS/NEMS Structures and DevicesLi, B. / Tang, X. / Xie, H. / Zhang, X. / IEEE et al. | 2003
- 674
-
Focused ion beam (FIB) nano-machining and FIB Moire technique for strain analysis in MEMS/NEMS structures and devicesBiao Li, / Xiaosong Tang, / Huimin Xie, / Xin Zhang, et al. | 2003
- 678
-
WP51 Mechanical Properties of Compressively Prestressed Thin Films Extracted from Pressure Dependent Ripple Profiles of Long MembranesKramer, T. / Paul, O. / IEEE et al. | 2003
- 678
-
Mechanical properties of compressively prestressed thin films extracted from pressure dependent ripple profiles of long membranesKramer, T. / Paul, O. et al. | 2003
- 682
-
Microneedle arrays fabricated using suspended etch mask technology combined with fluidic through wafer viasTrautmann, A. / Ruther, P. / Paul, O. et al. | 2003
- 682
-
9:00-9:20 Microneedle Arrays Fabricated Using Suspended Etch Mask Technology Combined with Fluidic through Wafer ViasTrautmann, A. / Ruther, P. / Paul, O. / IEEE et al. | 2003
- 686
-
Particle separation and concentration control for digital microfluidic systemsSung Kwon Cho, / Chang-Jin Kim, et al. | 2003
- 686
-
9:20-9:40 Particle Separation and Concentration Control for Digital Microfluidic SystemsCho, S. K. / Kim, C.-J. / IEEE et al. | 2003
- 690
-
9:40-10:00 Droplet Volume Adjustable Microinjectors Using a Microheater ArrayKang, T. G. / Cho, Y.-H. / IEEE et al. | 2003
- 690
-
Droplet volume adjustable microinjectors using a microheater arrayTae Goo Kang, / Young-Ho Cho, et al. | 2003
- 694
-
Manipulation of multiple droplets on N/spl times/M grid by cross-reference EWOD driving scheme and pressure-contact packagingShih-Kang Fan, / Hashi, C. / Chang-Jin Kim, et al. | 2003
- 694
-
10:00-10:20 Manipulation of Multiple Droplets on NxM Grid by Cross-Reference EWOD Driving Scheme and Pressure-Contact PackagingFan, S.-K. / Hashi, C. / Kim, C.-J. / IEEE et al. | 2003
- 698
-
Stemless wine-glass-mode disk micromechanical resonatorsAbdelmoneum, M.A. / Demirci, M.U. / Nguyen, C.T.-C. et al. | 2003
- 698
-
10:50-11:10 Stemless Wine-Glass-Mode Disk Micromechanical ResonatorsAbdelmoneum, M. A. / Demirci, M. U. / Nguyen, C. T.-C. / IEEE et al. | 2003
- 702
-
A 600 kHz electrically-coupled MEMS bandpass filterPourkamali, S. / Abdolvand, R. / Ayazi, F. et al. | 2003
- 702
-
11:10-11:30 A 600kHz Electrically-Coupled MEMS Bandpass FilterPourkamali, S. / Abdolvand, R. / Ayazi, F. / IEEE et al. | 2003
- 706
-
Solar powered 10 mg silicon robotHollar, S. / Flynn, A. / Bellew, C. / Pister, K.S.J. et al. | 2003
- 706
-
11:30-11:50 Solar Powered 10mg Silicon RobotHollar, S. / Flynn, A. / Bellew, C. / Pister, K. S. J. / IEEE et al. | 2003
- xxv
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Author index| 2003
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Proceedings IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems (Cat. No.03CH37426)| 2003