PZT MIM capacitor with oxygen-doped Ru-electrodes for embedded FeRAM devices (Englisch)
- Neue Suche nach: Inoue, N.
- Neue Suche nach: Furutake, N.
- Neue Suche nach: Toda, A.
- Neue Suche nach: Tada, M.
- Neue Suche nach: Hayashi, Y.
- Neue Suche nach: Inoue, N.
- Neue Suche nach: Furutake, N.
- Neue Suche nach: Toda, A.
- Neue Suche nach: Tada, M.
- Neue Suche nach: Hayashi, Y.
In:
IEEE Transactions on Electron Devices
;
52
, 10
;
2227-2235
;
2005
- Aufsatz (Zeitschrift) / Elektronische Ressource
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Titel:PZT MIM capacitor with oxygen-doped Ru-electrodes for embedded FeRAM devices
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Beteiligte:Inoue, N. ( Autor:in ) / Furutake, N. ( Autor:in ) / Toda, A. ( Autor:in ) / Tada, M. ( Autor:in ) / Hayashi, Y. ( Autor:in )
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Erschienen in:IEEE Transactions on Electron Devices ; 52, 10 ; 2227-2235
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Verlag:
- Neue Suche nach: IEEE
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Erscheinungsdatum:01.10.2005
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Format / Umfang:1386176 byte
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ISSN:
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DOI:
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Medientyp:Aufsatz (Zeitschrift)
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Format:Elektronische Ressource
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Sprache:Englisch
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Datenquelle:
Inhaltsverzeichnis – Band 52, Ausgabe 10
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IEEE Transactions on Electron Devices information for authors| 2005